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Author : Cor L. Claeys
Publisher : The Electrochemical Society
ISBN 13 : 9781566772419
Total Pages : 408 pages
Book Rating : 4.7/5 (724 download)
Download or read book ULSI Process Integration written by Cor L. Claeys and published by The Electrochemical Society. This book was released on 1999 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Cor L. Claeys
Publisher : The Electrochemical Society
ISBN 13 : 9781566773089
Total Pages : 636 pages
Book Rating : 4.7/5 (73 download)
Download or read book ULSI Process Integration II written by Cor L. Claeys and published by The Electrochemical Society. This book was released on 2001 with total page 636 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : C. Claeys
Publisher : The Electrochemical Society
ISBN 13 : 1566777445
Total Pages : 547 pages
Book Rating : 4.5/5 (667 download)
Download or read book ULSI Process Integration 6 written by C. Claeys and published by The Electrochemical Society. This book was released on 2009-09 with total page 547 pages. Available in PDF, EPUB and Kindle. Book excerpt: ULSI Process Integration 6 covers all aspects of process integration. Sections are devoted to 1) Device Technologies, 2) Front-end-of-line integration (gate stacks, shallow junctions, dry etching, etc.), 3) Back-end-of-line integration (CMP, low-k, Cu interconnect, air-gaps, 3D packaging, etc.), 4) Alternative channel technologies (Ge, III-V, hybrid integration), and 5) Emerging technologies (CNT, graphene, polymer electronics, nanotubes).
Author : Cor L. Claeys
Publisher : The Electrochemical Society
ISBN 13 : 1566775728
Total Pages : 509 pages
Book Rating : 4.5/5 (667 download)
Download or read book ULSI Process Integration 5 written by Cor L. Claeys and published by The Electrochemical Society. This book was released on 2007 with total page 509 pages. Available in PDF, EPUB and Kindle. Book excerpt: The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond on DRAM, SRAM, flash memory, high density logic-low power, RF, mixed analog-digital, process integration yield, CMP chemistries, low-k processes, gate stacks, metal gates, rapid thermal processing, silicides, copper interconnects, carbon nanotubes, novel materials, high mobility substrates (SOI, sSi, SiGe, GeOI), strain engineering, and hybrid integration.
Author : Electrochemical Society. Meeting
Publisher : The Electrochemical Society
ISBN 13 : 9781566773768
Total Pages : 620 pages
Book Rating : 4.7/5 (737 download)
Download or read book ULSI Process Integration III written by Electrochemical Society. Meeting and published by The Electrochemical Society. This book was released on 2003 with total page 620 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : C. Claeys
Publisher : The Electrochemical Society
ISBN 13 : 1607682613
Total Pages : 429 pages
Book Rating : 4.6/5 (76 download)
Download or read book ULSI Process Integration 7 written by C. Claeys and published by The Electrochemical Society. This book was released on 2011 with total page 429 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : C. Claeys
Publisher : The Electrochemical Society
ISBN 13 : 1607686759
Total Pages : 335 pages
Book Rating : 4.6/5 (76 download)
Download or read book ULSI Process Integration 9 written by C. Claeys and published by The Electrochemical Society. This book was released on 2015 with total page 335 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Chih-Hang Tung
Publisher : John Wiley & Sons
ISBN 13 : 9780471457725
Total Pages : 688 pages
Book Rating : 4.4/5 (577 download)
Download or read book ULSI Semiconductor Technology Atlas written by Chih-Hang Tung and published by John Wiley & Sons. This book was released on 2003-10-06 with total page 688 pages. Available in PDF, EPUB and Kindle. Book excerpt: More than 1,100 TEM images illustrate the science of ULSI The natural outgrowth of VLSI (Very Large Scale Integration), Ultra Large Scale Integration (ULSI) refers to semiconductor chips with more than 10 million devices per chip. Written by three renowned pioneers in their field, ULSI Semiconductor Technology Atlas uses examples and TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and their associated problems. The first book available on the subject to be illustrated using TEM images, ULSI Semiconductor Technology Atlas is logically divided into four parts: * Part I includes basic introductions to the ULSI process, device construction analysis, and TEM sample preparation * Part II focuses on key ULSI modules--ion implantation and defects, dielectrics and isolation structures, silicides/salicides, and metallization * Part III examines integrated devices, including complete planar DRAM, stacked cell DRAM, and trench cell DRAM, as well as SRAM as examples for process integration and development * Part IV emphasizes special applications, including TEM in advanced failure analysis, TEM in advanced packaging development and UBM (Under Bump Metallization) studies, and high-resolution TEM in microelectronics This innovative guide also provides engineers and managers in the microelectronics industry, as well as graduate students, with: * More than 1,100 TEM images to illustrate the science of ULSI * A historical introduction to the technology as well as coverage of the evolution of basic ULSI process problems and issues * Discussion of TEM in other advanced microelectronics devices and materials, such as flash memories, SOI, SiGe devices, MEMS, and CD-ROMs
Author : Electrochemical Society
Publisher :
ISBN 13 : 9781623321000
Total Pages : 319 pages
Book Rating : 4.3/5 (21 download)
Download or read book ULSI Process Integration 8 written by Electrochemical Society and published by . This book was released on 2013 with total page 319 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Mikhail Baklanov
Publisher : John Wiley & Sons
ISBN 13 : 1119966868
Total Pages : 616 pages
Book Rating : 4.1/5 (199 download)
Download or read book Advanced Interconnects for ULSI Technology written by Mikhail Baklanov and published by John Wiley & Sons. This book was released on 2012-02-17 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: Finding new materials for copper/low-k interconnects is critical to the continuing development of computer chips. While copper/low-k interconnects have served well, allowing for the creation of Ultra Large Scale Integration (ULSI) devices which combine over a billion transistors onto a single chip, the increased resistance and RC-delay at the smaller scale has become a significant factor affecting chip performance. Advanced Interconnects for ULSI Technology is dedicated to the materials and methods which might be suitable replacements. It covers a broad range of topics, from physical principles to design, fabrication, characterization, and application of new materials for nano-interconnects, and discusses: Interconnect functions, characterisations, electrical properties and wiring requirements Low-k materials: fundamentals, advances and mechanical properties Conductive layers and barriers Integration and reliability including mechanical reliability, electromigration and electrical breakdown New approaches including 3D, optical, wireless interchip, and carbon-based interconnects Intended for postgraduate students and researchers, in academia and industry, this book provides a critical overview of the enabling technology at the heart of the future development of computer chips.
Author : C. M. Osburn
Publisher :
ISBN 13 :
Total Pages : 804 pages
Book Rating : 4.E/5 ( download)
Download or read book ULSI Science and Technology, 1989 written by C. M. Osburn and published by . This book was released on 1989 with total page 804 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : J. Murota
Publisher : The Electrochemical Society
ISBN 13 : 1607688212
Total Pages : 325 pages
Book Rating : 4.6/5 (76 download)
Download or read book Semiconductor Process Integration 10 written by J. Murota and published by The Electrochemical Society. This book was released on with total page 325 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : C. L. Claeys
Publisher :
ISBN 13 : 9781607680949
Total Pages : 533 pages
Book Rating : 4.6/5 (89 download)
Download or read book ULSI Process Integration 6 written by C. L. Claeys and published by . This book was released on 2009 with total page 533 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Androula G. Nassiopoulou
Publisher : World Scientific
ISBN 13 : 9810247699
Total Pages : 409 pages
Book Rating : 4.8/5 (12 download)
Download or read book Microelectronics, Microsystems and Nanotechnology written by Androula G. Nassiopoulou and published by World Scientific. This book was released on 2001 with total page 409 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains papers on the following: CMOS devices and devices based on compound semiconductors; processing; silicon integrated technology and integrated circuit design; quantum physics; nanotechnology; nanodevices, sensors and microsystems. The latest news and future challenges in these fields are presented in invited papers.
Author : Androula G Nassiopoulou
Publisher : World Scientific
ISBN 13 : 9814489999
Total Pages : 409 pages
Book Rating : 4.8/5 (144 download)
Download or read book Microelectronics, Microsystems And Nanotechnology: Papers Presented Of At Mmn 2000 written by Androula G Nassiopoulou and published by World Scientific. This book was released on 2001-10-19 with total page 409 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains papers on the following: CMOS devices and devices based on compound semiconductors; processing; silicon integrated technology and integrated circuit design; quantum physics; nanotechnology; nanodevices, sensors and microsystems. The latest news and future challenges in these fields are presented in invited papers.
Author : Electrochemical Society. Electronics Division
Publisher : The Electrochemical Society
ISBN 13 : 9781566773287
Total Pages : 506 pages
Book Rating : 4.7/5 (732 download)
Download or read book Microelectronics Technology and Devices, SBMICRO 2002 written by Electrochemical Society. Electronics Division and published by The Electrochemical Society. This book was released on 2002 with total page 506 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Kiat Seng Yeo
Publisher : Prentice Hall
ISBN 13 :
Total Pages : 634 pages
Book Rating : 4.3/5 (91 download)
Download or read book CMOS/BiCMOS ULSI written by Kiat Seng Yeo and published by Prentice Hall. This book was released on 2002 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: For upper level and graduate level Electrical and Computer Engineering courses in Integrated Circuit Design as well as professional circuit designers, engineers and researchers working in portable wireless communications hardware. This book presents the fundamentals of Complementary Metal Oxide Semiconductor (CMOS) and Bipolar compatible Complementary Metal Oxide Semiconductor (BiCMOS) technology, as well as the latest technological advances in the field. It discusses the concepts and techniques of new integrated circuit design for building high performance and low power circuits and systems for current and future very-large-scale-integration (VLSI) and giga-scale-integration (GSI) applications. CMOS/BiCMOS ULSI: Low-Voltage Low-Power is an essential resource for every professional moving toward lower voltage, lower power, and higher performance VLSI circuits and subsystems design.
