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Download or read book Optical Microlithography XXV written by and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Will Conley
Publisher :
ISBN 13 : 9780819489821
Total Pages : 946 pages
Book Rating : 4.4/5 (898 download)
Download or read book Optical Microlithography XXV written by Will Conley and published by . This book was released on 2012-02-21 with total page 946 pages. Available in PDF, EPUB and Kindle. Book excerpt: Includes Proceedings Vol. 7821
Author : Luc Van den Hove
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 1114 pages
Book Rating : 4.E/5 ( download)
Download or read book Optical Microlithography XI written by Luc Van den Hove and published by SPIE-International Society for Optical Engineering. This book was released on 1998 with total page 1114 pages. Available in PDF, EPUB and Kindle. Book excerpt: A study of optical microlithography. It contains papers on subjects such as phase-shifting masks, CD control scanners, process optimization, and advanced masks.
Author : Kafai Lai
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (88 download)
Download or read book Optical Microlithography XXVII written by Kafai Lai and published by . This book was released on 2014 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 848 pages
Book Rating : 4.3/5 (91 download)
Download or read book Optical Microlithography written by and published by . This book was released on 2000 with total page 848 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Optical Microlithography XXIII written by and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Bruce W. Smith
Publisher : CRC Press
ISBN 13 : 1351643444
Total Pages : 770 pages
Book Rating : 4.3/5 (516 download)
Download or read book Microlithography written by Bruce W. Smith and published by CRC Press. This book was released on 2020-05-01 with total page 770 pages. Available in PDF, EPUB and Kindle. Book excerpt: The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithography. The book is divided into chapters covering all important aspects related to the imaging, materials, and processes that have been necessary to drive semiconductor lithography toward nanometer-scale generations. Renowned experts from the world’s leading academic and industrial organizations have provided in-depth coverage of the technologies involved in optical, deep-ultraviolet (DUV), immersion, multiple patterning, extreme ultraviolet (EUV), maskless, nanoimprint, and directed self-assembly lithography, together with comprehensive descriptions of the advanced materials and processes involved. New in the Third Edition In addition to the full revision of existing chapters, this new Third Edition features coverage of the technologies that have emerged over the past several years, including multiple patterning lithography, design for manufacturing, design process technology co-optimization, maskless lithography, and directed self-assembly. New advances in lithography modeling are covered as well as fully updated information detailing the new technologies, systems, materials, and processes for optical UV, DUV, immersion, and EUV lithography. The Third Edition of Microlithography: Science and Technology authoritatively covers the science and engineering involved in the latest generations of microlithography and looks ahead to the future systems and technologies that will bring the next generations to fruition. Loaded with illustrations, equations, tables, and time-saving references to the most current technology, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to better understand the complex world of microlithography science and technology.
Author : Kafai Lai
Publisher :
ISBN 13 : 9780819499752
Total Pages : pages
Book Rating : 4.4/5 (997 download)
Download or read book Optical Microlithography XXVII written by Kafai Lai and published by . This book was released on 2014 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Mircea V. Dusa
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 : 9780819480545
Total Pages : 1218 pages
Book Rating : 4.4/5 (85 download)
Download or read book Optical Microlithography XXIII written by Mircea V. Dusa and published by SPIE-International Society for Optical Engineering. This book was released on 2010 with total page 1218 pages. Available in PDF, EPUB and Kindle. Book excerpt: Includes Proceedings Vol. 7821
Author : Alfred Kwok-Kit Wong
Publisher : SPIE Press
ISBN 13 : 9780819458292
Total Pages : 280 pages
Book Rating : 4.4/5 (582 download)
Download or read book Optical Imaging in Projection Microlithography written by Alfred Kwok-Kit Wong and published by SPIE Press. This book was released on 2005 with total page 280 pages. Available in PDF, EPUB and Kindle. Book excerpt: Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system-level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.
Download or read book Optical Microlithography XXIX written by and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Society of Photo-optical Instrumentation Engineers
Publisher :
ISBN 13 :
Total Pages : 304 pages
Book Rating : 4.:/5 (318 download)
Download or read book Optical Microlithography VI written by Society of Photo-optical Instrumentation Engineers and published by . This book was released on 1987 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Harry L. Stover
Publisher :
ISBN 13 :
Total Pages : 708 pages
Book Rating : 4.:/5 (318 download)
Download or read book Selected Papers on Optical Microlithography written by Harry L. Stover and published by . This book was released on 1992 with total page 708 pages. Available in PDF, EPUB and Kindle. Book excerpt: SPIE Milestones are collections of seminal papers from the world literature covering important discoveries and developments in optics and photonics.
Author :
Publisher :
ISBN 13 : 9781510634220
Total Pages : pages
Book Rating : 4.6/5 (342 download)
Download or read book Optical Microlithography XXXIII. written by and published by . This book was released on 2020 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 840 pages
Book Rating : 4.0/5 ( download)
Download or read book Optical Microlithography XV written by and published by . This book was released on 2002 with total page 840 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Laszlo Monostori
Publisher : Springer
ISBN 13 : 3030181804
Total Pages : 259 pages
Book Rating : 4.0/5 (31 download)
Download or read book Proceedings of the 4th International Conference on the Industry 4.0 Model for Advanced Manufacturing written by Laszlo Monostori and published by Springer. This book was released on 2019-04-30 with total page 259 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gathers the proceedings of the 4th International Conference on the Industry 4.0 Model for Advanced Manufacturing (AMP 2019), held in Belgrade, Serbia, on 3–6 June 2019. The event marks the latest in a series of high-level conferences that bring together experts from academia and industry to exchange knowledge, ideas, experiences, research findings, and information in the field of manufacturing. The book addresses a wide range of topics, including: design of smart and intelligent products, developments in CAD/CAM technologies, rapid prototyping and reverse engineering, multistage manufacturing processes, manufacturing automation in the Industry 4.0 model, cloud-based products, and cyber-physical and reconfigurable manufacturing systems. By providing updates on key issues and highlighting recent advances in manufacturing engineering and technologies, the book supports the transfer of vital knowledge to the next generation of academics and practitioners. Further, it will appeal to anyone working or conducting research in this rapidly evolving field.
Author : Chris Mack
Publisher : John Wiley & Sons
ISBN 13 : 1119965071
Total Pages : 503 pages
Book Rating : 4.1/5 (199 download)
Download or read book Fundamental Principles of Optical Lithography written by Chris Mack and published by John Wiley & Sons. This book was released on 2011-08-10 with total page 503 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
