Optical Imaging in Projection Microlithography

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Publisher : SPIE Press
ISBN 13 : 9780819458292
Total Pages : 280 pages
Book Rating : 4.4/5 (582 download)

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Book Synopsis Optical Imaging in Projection Microlithography by : Alfred Kwok-Kit Wong

Download or read book Optical Imaging in Projection Microlithography written by Alfred Kwok-Kit Wong and published by SPIE Press. This book was released on 2005 with total page 280 pages. Available in PDF, EPUB and Kindle. Book excerpt: Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system-level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.

Handbook of Algorithms for Physical Design Automation

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Publisher : CRC Press
ISBN 13 : 1000654192
Total Pages : 1044 pages
Book Rating : 4.0/5 (6 download)

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Book Synopsis Handbook of Algorithms for Physical Design Automation by : Charles J. Alpert

Download or read book Handbook of Algorithms for Physical Design Automation written by Charles J. Alpert and published by CRC Press. This book was released on 2008-11-12 with total page 1044 pages. Available in PDF, EPUB and Kindle. Book excerpt: The physical design flow of any project depends upon the size of the design, the technology, the number of designers, the clock frequency, and the time to do the design. As technology advances and design-styles change, physical design flows are constantly reinvented as traditional phases are removed and new ones are added to accommodate changes in

Applied Digital Optics

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Publisher : John Wiley & Sons
ISBN 13 : 9780470022641
Total Pages : 638 pages
Book Rating : 4.0/5 (226 download)

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Book Synopsis Applied Digital Optics by : Bernard C. Kress

Download or read book Applied Digital Optics written by Bernard C. Kress and published by John Wiley & Sons. This book was released on 2009-11-04 with total page 638 pages. Available in PDF, EPUB and Kindle. Book excerpt: Miniaturization and mass replications have begun to lead the optical industry in the transition from traditional analog to novel digital optics. As digital optics enter the realm of mainstream technology through the worldwide sale of consumer electronic devices, this timely book aims to present the topic of digital optics in a unified way. Ranging from micro-optics to nanophotonics, and design to fabrication through to integration in final products, it reviews the various physical implementations of digital optics in either micro-refractives, waveguide (planar lightwave chips), diffractive and hybrid optics or sub-wavelength structures (resonant gratings, surface plasmons, photonic crystals and metamaterials). Finally, it presents a comprehensive list of industrial and commercial applications that are taking advantage of the unique properties of digital optics. Applied Digital Optics is aimed primarily at optical engineers and product development and technical marketing managers; it is also of interest to graduate-level photonics students and micro-optic foundries. Helps optical engineers review and choose the appropriate software tools to design, model and generate fabrication files. Gives product managers access to an exhaustive list of applications available in today’s market for integrating such digital optics, as well as where the next potential application of digital optics might be. Provides a broad view for technical marketing managers in all aspects of digital optics, and how such optics can be classified. Explains the numerical implementation of optical design and modelling techniques. Enables micro-optics foundries to integrate the latest fabrication and replication techniques, and accordingly fine tune their own fabrication processes.

Computational Lithography

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Publisher : John Wiley & Sons
ISBN 13 : 111804357X
Total Pages : 225 pages
Book Rating : 4.1/5 (18 download)

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Book Synopsis Computational Lithography by : Xu Ma

Download or read book Computational Lithography written by Xu Ma and published by John Wiley & Sons. This book was released on 2011-01-06 with total page 225 pages. Available in PDF, EPUB and Kindle. Book excerpt: A Unified Summary of the Models and Optimization Methods Used in Computational Lithography Optical lithography is one of the most challenging areas of current integrated circuit manufacturing technology. The semiconductor industry is relying more on resolution enhancement techniques (RETs), since their implementation does not require significant changes in fabrication infrastructure. Computational Lithography is the first book to address the computational optimization of RETs in optical lithography, providing an in-depth discussion of optimal optical proximity correction (OPC), phase shifting mask (PSM), and off-axis illumination (OAI) RET tools that use model-based mathematical optimization approaches. The book starts with an introduction to optical lithography systems, electric magnetic field principles, and the fundamentals of optimization from a mathematical point of view. It goes on to describe in detail different types of optimization algorithms to implement RETs. Most of the algorithms developed are based on the application of the OPC, PSM, and OAI approaches and their combinations. Algorithms for coherent illumination as well as partially coherent illumination systems are described, and numerous simulations are offered to illustrate the effectiveness of the algorithms. In addition, mathematical derivations of all optimization frameworks are presented. The accompanying MATLAB® software files for all the RET methods described in the book make it easy for readers to run and investigate the codes in order to understand and apply the optimization algorithms, as well as to design a set of optimal lithography masks. The codes may also be used by readers for their research and development activities in their academic or industrial organizations. An accompanying MATLAB® software guide is also included. An accompanying MATLAB® software guide is included, and readers can download the software to use with the guide at ftp://ftp.wiley.com/public/sci_tech_med/computational_lithography. Tailored for both entry-level and experienced readers, Computational Lithography is meant for faculty, graduate students, and researchers, as well as scientists and engineers in industrial organizations whose research or career field is semiconductor IC fabrication, optical lithography, and RETs. Computational lithography draws from the rich theory of inverse problems, optics, optimization, and computational imaging; as such, the book is also directed to researchers and practitioners in these fields.

Fundamental Principles of Optical Lithography

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Publisher : John Wiley & Sons
ISBN 13 : 1119965071
Total Pages : 503 pages
Book Rating : 4.1/5 (199 download)

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Book Synopsis Fundamental Principles of Optical Lithography by : Chris Mack

Download or read book Fundamental Principles of Optical Lithography written by Chris Mack and published by John Wiley & Sons. This book was released on 2011-08-10 with total page 503 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.

Advanced Optical Imaging Theory

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Publisher : Springer Science & Business Media
ISBN 13 : 9783540662624
Total Pages : 236 pages
Book Rating : 4.6/5 (626 download)

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Book Synopsis Advanced Optical Imaging Theory by : Min Gu

Download or read book Advanced Optical Imaging Theory written by Min Gu and published by Springer Science & Business Media. This book was released on 2000 with total page 236 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical microscopy and associated technologies have advanced rapidly along with laser technology. These techniques have stimulated further development of the optical imaging theory, including 3-dimensional microscopy imaging theory, the theory of imaging with ultrashort pulsed beam illumination and the aberration theory for high numerical-aperture objectives. This book introduces these new theories in modern optical microscopy, providing comparisons with classical imaging as appropriate.

Matrix Methods for Optical Layout

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Publisher : SPIE Press
ISBN 13 : 9780819467805
Total Pages : 144 pages
Book Rating : 4.4/5 (678 download)

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Book Synopsis Matrix Methods for Optical Layout by : Gerhard Kloos

Download or read book Matrix Methods for Optical Layout written by Gerhard Kloos and published by SPIE Press. This book was released on 2007 with total page 144 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is intended to familiarize the reader with the method of Gaussian matrices and some related tools of optical design. The matrix method provides a means to study an optical system in the paraxial approximation. This text contains new results such as theorems on the design of variable optics, on integrating rods, on the optical layout of prism devices, etc. The results are derived in a step-by-step way so that the reader might apply the methods presented here to resolve design problems with ease.

Infrared Optics and Zoom Lenses

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Publisher : SPIE Press
ISBN 13 : 0819476676
Total Pages : 184 pages
Book Rating : 4.8/5 (194 download)

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Book Synopsis Infrared Optics and Zoom Lenses by : Allen Mann

Download or read book Infrared Optics and Zoom Lenses written by Allen Mann and published by SPIE Press. This book was released on 2009 with total page 184 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ten years after the publication of Infrared Optics and Zoom Lenses, this text is still the only current publication devoted exclusively to infrared zoom lenses. This updated second edition includes 18 new refractive and reflective infrared zoom systems, bringing the total number of infrared zoom optical systems to 41 systems. Other additions include a section on focal plane arrays and a new closing chapter specifically devoted to applications of infrared zoom lenses. Coverage of wavelength region has been expanded to include the near infrared. Additional topics include an examination of the importance of principal planes, methods for athermalization by means of computer glass substitution, and global optimization techniques for zoom lens design.

Logic-based Nonlinear Image Processing

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Publisher : SPIE Press
ISBN 13 : 9780819463432
Total Pages : 168 pages
Book Rating : 4.4/5 (634 download)

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Book Synopsis Logic-based Nonlinear Image Processing by : Stephen Marshall

Download or read book Logic-based Nonlinear Image Processing written by Stephen Marshall and published by SPIE Press. This book was released on 2007 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text provides insight into the design of optimal image processing operators for implementation directly into digital hardware. Starting with simple restoration examples and using the minimum of statistics, the book provides a design strategy for a wide range of image processing applications. The text is aimed principally at electronics engineers and computer scientists, but will also be of interest to anyone working with digital images.

Introduction to Image Stabilization

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Publisher : SPIE Press
ISBN 13 : 9780819464347
Total Pages : 116 pages
Book Rating : 4.4/5 (643 download)

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Book Synopsis Introduction to Image Stabilization by : Scott W. Teare

Download or read book Introduction to Image Stabilization written by Scott W. Teare and published by SPIE Press. This book was released on 2006 with total page 116 pages. Available in PDF, EPUB and Kindle. Book excerpt: The use of image stabilization has grown to the point that it is now a common component of modern optical systems for imaging, communications, and remote-sensing applications. The benefits of image stabilization to astronomical research alone are so rich that it is common for astronomical telescopes, built over the last century, to be retrofitted with fast steering mirrors and tip-tilt sensors to extend their useful lifetimes. This text provides the basics of image stabilization starting with a consideration of the cause of image blurring and an introduction to the components commonly used in constructing a stabilized imaging system. With this foundation, an example image stabilized system is described and used to introduce some of the important parameters in evaluating the performance of image stabilization systems. As image stabilization systems are key components of adaptive optics systems, the more sophisticated sensing and correction devices used in this area are briefly addressed. Rather than being a mathematical, rigorous treatment of image stabilization, it provides the basic ideas in an easy-to-read format.

Practical Applications of Infrared Thermal Sensing and Imaging Equipment

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Publisher : SPIE Press
ISBN 13 : 9780819467232
Total Pages : 196 pages
Book Rating : 4.4/5 (672 download)

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Book Synopsis Practical Applications of Infrared Thermal Sensing and Imaging Equipment by : Herbert Kaplan

Download or read book Practical Applications of Infrared Thermal Sensing and Imaging Equipment written by Herbert Kaplan and published by SPIE Press. This book was released on 2007 with total page 196 pages. Available in PDF, EPUB and Kindle. Book excerpt: \- Preface - List of Figures - List of Tables - List of Acronyms and Abbreviations - Preface - Introduction - Basics of Noncontact Thermal Measurement - Matching the Instrument to the Application - Instruments Overview - Using IR Sensing and Imaging Instruments - Introduction to Applications - Plant Condition Monitoring and Predictive Maintenance - Buildings and Infrastructure - Materials Testing - Product and Process Monitoring Control - Night Vision, Security, and Surveillance - Life Sciences Thermography - Appendix A: Commercial Instrument Performance Characteristics - Appendix B: Manufacturers of IR Sensing and Imaging Instruments - Appendix C: Table of Generic Normal Emissivities of Materials - Appendix D: A Glossary of Terms for the Infrared Thermographer

Istc/cstic 2009 (cistc)

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Publisher : The Electrochemical Society
ISBN 13 : 1566777038
Total Pages : 1124 pages
Book Rating : 4.5/5 (667 download)

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Book Synopsis Istc/cstic 2009 (cistc) by : David Huang

Download or read book Istc/cstic 2009 (cistc) written by David Huang and published by The Electrochemical Society. This book was released on 2009-03 with total page 1124 pages. Available in PDF, EPUB and Kindle. Book excerpt: ISTC/CSTIC is an annual semiconductor technology conference covering all the aspects of semiconductor technology and manufacturing, including devices, design, lithography, integration, materials, processes, manufacturing as well as emerging semiconductor technologies and silicon material applications. ISTC/CSTIC 2009 was merged by ISTC (International Semiconductor Technology Conference) and CSTIC (China Semiconductor Technology International Conference), the two industry leading technical conferences in China, and consisted of one plenary session and nine technical symposia. This issue of ECS Transactions contains 159 papers from the conference.

Introduction to Confocal Fluorescence Microscopy

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Publisher : SPIE Press
ISBN 13 : 9780819460431
Total Pages : 142 pages
Book Rating : 4.4/5 (64 download)

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Book Synopsis Introduction to Confocal Fluorescence Microscopy by : Michiel Muller

Download or read book Introduction to Confocal Fluorescence Microscopy written by Michiel Muller and published by SPIE Press. This book was released on 2006 with total page 142 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive account of the theory of image formation in a confocal fluorescence microscope as well as a practical guideline to the operation of the instrument, its limitations, and the interpretation of confocal microscopy data. The appendices provide a quick reference to optical theory, microscopy-related formulas and definitions, and Fourier theory.

Radiation Thermometry

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Publisher : SPIE Press
ISBN 13 : 0819467839
Total Pages : 177 pages
Book Rating : 4.8/5 (194 download)

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Book Synopsis Radiation Thermometry by : Peter Saunders

Download or read book Radiation Thermometry written by Peter Saunders and published by SPIE Press. This book was released on 2007 with total page 177 pages. Available in PDF, EPUB and Kindle. Book excerpt: Offers an introduction to the subject of radiation thermometry, focusing on sources of measurement error and giving advice on methods for minimizing or eliminating these errors. This title cover such topics as: blackbody radiation, emissivity, reflection errors, and atmospheric absorption and emission; and common radiation thermometers.

The Physics and Engineering of Solid State Lasers

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Publisher : SPIE Press
ISBN 13 : 9780819460943
Total Pages : 226 pages
Book Rating : 4.4/5 (69 download)

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Book Synopsis The Physics and Engineering of Solid State Lasers by : Yehoshua Y. Kalisky

Download or read book The Physics and Engineering of Solid State Lasers written by Yehoshua Y. Kalisky and published by SPIE Press. This book was released on 2006 with total page 226 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explains the mutual influences between the physical and dynamic processes in solids and their lasing properties. This book provides insight into the physics and engineering of solid state lasers by integrating information from several disciplines, including solid state physics, materials science, photophysics, and dynamic processes in solids.

Fundamentals of Polarimetric Remote Sensing

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Publisher : SPIE Press
ISBN 13 :
Total Pages : 270 pages
Book Rating : 4./5 ( download)

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Book Synopsis Fundamentals of Polarimetric Remote Sensing by : John Robert Schott

Download or read book Fundamentals of Polarimetric Remote Sensing written by John Robert Schott and published by SPIE Press. This book was released on 2009 with total page 270 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text is for those who need an introduction to polarimetric signals to begin working in the field of polarimetric remote sensing, particularly where the contrast between manmade objects and natural backgrounds are the subjects of interest. The book takes a systems approach to the physical processes involved with formation, collection, and analysis of polarimetric remote sensing data in the visible through longwave infrared. (pBRDF) is then introduced as a way to characterize the reflective and emissive polarimetric behavior of materials. With Dr. Schott's text, you will gain an introduction to polarimetric remote sensing, an appreciation of its issues, and the tools to begin to work in the field.

Advances in FDTD Computational Electrodynamics

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Publisher : Artech House
ISBN 13 : 1608071707
Total Pages : 640 pages
Book Rating : 4.6/5 (8 download)

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Book Synopsis Advances in FDTD Computational Electrodynamics by : Allen Taflove

Download or read book Advances in FDTD Computational Electrodynamics written by Allen Taflove and published by Artech House. This book was released on 2013 with total page 640 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in photonics and nanotechnology have the potential to revolutionize humanitys ability to communicate and compute. To pursue these advances, it is mandatory to understand and properly model interactions of light with materials such as silicon and gold at the nanoscale, i.e., the span of a few tens of atoms laid side by side. These interactions are governed by the fundamental Maxwells equations of classical electrodynamics, supplemented by quantum electrodynamics. This book presents the current state-of-the-art in formulating and implementing computational models of these interactions. Maxwells equations are solved using the finite-difference time-domain (FDTD) technique, pioneered by the senior editor, whose prior Artech House books in this area are among the top ten most-cited in the history of engineering. This cutting-edge resource helps readers understand the latest developments in computational modeling of nanoscale optical microscopy and microchip lithography, as well as nanoscale plasmonics and biophotonics.