Advances in Low Temperature Rf Plasmas

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Publisher : Elsevier Publishing Company
ISBN 13 : 9780444510952
Total Pages : 0 pages
Book Rating : 4.5/5 (19 download)

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Book Synopsis Advances in Low Temperature Rf Plasmas by : Toshiaki Makabe

Download or read book Advances in Low Temperature Rf Plasmas written by Toshiaki Makabe and published by Elsevier Publishing Company. This book was released on 2002 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low temperature plasmas have had a very broad range of applications ever since their discovery. However, recent developments in the dextrous handling of dry etching non-equilibrium plasma have attracted a great common interest that has driving force behind the major developments in diagnostic, theoretical and numerical techniques since the 1980s. A greater fundamental understanding of the kinetics of radio-frequency (rf) plasmas and their interaction with surfaces in regard to the process of large scale integrated circuits has been achieved through the cooperation between academia and industry. At the same time, new applications have become possible, and the basic understanding of low temperature rf plasmas has diffused to other areas of plasma physics. in the special issue of Applied Surface Science, which is published in memory of the International Workshop on Basis for Low Temperature Plasma Applications at Hakone in Japan on July 24 - 25 of 2001. The basic goal in the selection of topics was to cover the range of issues that represent the building blocks of the complex, vertically integrated plasma simulation schemes including surface processes. The text also shows examples of integrated codes and how they are implemented in the development of new strategies of plasma processing. Such codes may be used both in modern experiments and in the computer aided design and control of the plasma devices of the next generation. These are based on the transport theory of electrons, ions and neutrals, as well as on numerical modellings and on the available collision and transport data describing gas and surface phases. density plasmas. All the chapters present a relatively complete review of the developments in these fields since the 1980s as well as a review of their status of development in 2002, and there is a blend of research reviews from both academia and industry.

Low Temperature Plasma Technology

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Publisher : CRC Press
ISBN 13 : 1466509902
Total Pages : 497 pages
Book Rating : 4.4/5 (665 download)

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Book Synopsis Low Temperature Plasma Technology by : Paul K. Chu

Download or read book Low Temperature Plasma Technology written by Paul K. Chu and published by CRC Press. This book was released on 2013-07-15 with total page 497 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by a team of pioneering scientists from around the world, Low Temperature Plasma Technology: Methods and Applications brings together recent technological advances and research in the rapidly growing field of low temperature plasmas. The book provides a comprehensive overview of related phenomena such as plasma bullets, plasma penetration into biofilms, discharge-mode transition of atmospheric pressure plasmas, and self-organization of microdischarges. It describes relevant technology and diagnostics, including nanosecond pulsed discharge, cavity ringdown spectroscopy, and laser-induced fluorescence measurement, and explores the increasing research on atmospheric pressure nonequilibrium plasma jets. The authors also discuss how low temperature plasmas are used in the synthesis of nanomaterials, environmental applications, the treatment of biomaterials, and plasma medicine. This book provides a balanced and thorough treatment of the core principles, novel technology and diagnostics, and state-of-the-art applications of low temperature plasmas. It is accessible to scientists and graduate students in low-pressure plasma physics, nanotechnology, plasma medicine, and materials science. The book is also suitable as an advanced reference for senior undergraduate students.

Advances in Low-Temperature Plasma Chemistry

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Publisher : CRC Press
ISBN 13 :
Total Pages : 300 pages
Book Rating : 4.:/5 (39 download)

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Book Synopsis Advances in Low-Temperature Plasma Chemistry by : Herman V. Boenig

Download or read book Advances in Low-Temperature Plasma Chemistry written by Herman V. Boenig and published by CRC Press. This book was released on 1988 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Advances in Low-temperature Plasma Chemistry, Technology, Applications

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Publisher :
ISBN 13 :
Total Pages : 300 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Advances in Low-temperature Plasma Chemistry, Technology, Applications by : Herman V. Boenig

Download or read book Advances in Low-temperature Plasma Chemistry, Technology, Applications written by Herman V. Boenig and published by . This book was released on 1988 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Plasma Medicine

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Publisher : Cambridge University Press
ISBN 13 : 1107006430
Total Pages : 363 pages
Book Rating : 4.1/5 (7 download)

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Book Synopsis Plasma Medicine by : M. Laroussi

Download or read book Plasma Medicine written by M. Laroussi and published by Cambridge University Press. This book was released on 2012-05-24 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first book dedicated exclusively to plasma medicine for graduate students and researchers in physics, engineering, biology, medicine and biochemistry.

Theory of Low-Temperature Plasma Physics

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Publisher : Springer
ISBN 13 : 3319437216
Total Pages : 508 pages
Book Rating : 4.3/5 (194 download)

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Book Synopsis Theory of Low-Temperature Plasma Physics by : Shi Nguyen-Kuok

Download or read book Theory of Low-Temperature Plasma Physics written by Shi Nguyen-Kuok and published by Springer. This book was released on 2016-11-11 with total page 508 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers the reader an overview of the basic approaches to the theoretical description of low-temperature plasmas, covering numerical methods, mathematical models and modeling techniques. The main methods of calculating the cross sections of plasma particle interaction and the solution of the kinetic Boltzmann equation for determining the transport coefficients of the plasma are also presented. The results of calculations of thermodynamic properties, transport coefficients, the equilibrium particle-interaction cross sections and two-temperature plasmas are also discussed. Later chapters consider applications, and the results of simulation and calculation of plasma parameters in induction and arc plasma torches are presented. The complex physical processes in high-frequency plasmas and arc plasmas, the internal and external parameters of plasma torches, near-electrode processes, heat transfer, the flow of solid particles in plasmas and other phenomena are considered. The book is intended for professionals involved in the theoretical study of low-temperature plasmas and the design of plasma torches, and will be useful for advanced students in related areas.

Plasma Science

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Publisher :
ISBN 13 : 9780309677608
Total Pages : 291 pages
Book Rating : 4.6/5 (776 download)

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Book Synopsis Plasma Science by : National Academies of Sciences Engineering and Medicine

Download or read book Plasma Science written by National Academies of Sciences Engineering and Medicine and published by . This book was released on 2021-02-28 with total page 291 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Science and Engineering transforms fundamental scientific research into powerful societal applications, from materials processing and healthcare to forecasting space weather. Plasma Science: Enabling Technology, Sustainability, Security and Exploration discusses the importance of plasma research, identifies important grand challenges for the next decade, and makes recommendations on funding and workforce. This publication will help federal agencies, policymakers, and academic leadership understand the importance of plasma research and make informed decisions about plasma science funding, workforce, and research directions.

Plasma Chemistry and Catalysis in Gases and Liquids

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Publisher : John Wiley & Sons
ISBN 13 : 3527330062
Total Pages : 423 pages
Book Rating : 4.5/5 (273 download)

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Book Synopsis Plasma Chemistry and Catalysis in Gases and Liquids by : Vasile I. Parvulescu

Download or read book Plasma Chemistry and Catalysis in Gases and Liquids written by Vasile I. Parvulescu and published by John Wiley & Sons. This book was released on 2012-07-10 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: Filling the gap for a book that covers not only plasma in gases but also in liquids, this is all set to become the standard reference for this topic. It provides a broad-based overview of plasma-chemical and plasmacatalytic processes generated by electrical discharges in gases, liquids and gas/liquid environments in both fundamental and applied aspects by focusing on their environmental and green applications and also taking into account their practical and economic viability. With the topics addressed by an international group of major experts, this is a must-have for scientists, engineers, students and postdoctoral researchers specializing in this field.

Plasma Catalysis

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Publisher : MDPI
ISBN 13 : 3038977500
Total Pages : 248 pages
Book Rating : 4.0/5 (389 download)

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Book Synopsis Plasma Catalysis by : Annemie Bogaerts

Download or read book Plasma Catalysis written by Annemie Bogaerts and published by MDPI. This book was released on 2019-04-02 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma catalysis is gaining increasing interest for various gas conversion applications, such as CO2 conversion into value-added chemicals and fuels, N2 fixation for the synthesis of NH3 or NOx, methane conversion into higher hydrocarbons or oxygenates. It is also widely used for air pollution control (e.g., VOC remediation). Plasma catalysis allows thermodynamically difficult reactions to proceed at ambient pressure and temperature, due to activation of the gas molecules by energetic electrons created in the plasma. However, plasma is very reactive but not selective, and thus a catalyst is needed to improve the selectivity. In spite of the growing interest in plasma catalysis, the underlying mechanisms of the (possible) synergy between plasma and catalyst are not yet fully understood. Indeed, plasma catalysis is quite complicated, as the plasma will affect the catalyst and vice versa. Moreover, due to the reactive plasma environment, the most suitable catalysts will probably be different from thermal catalysts. More research is needed to better understand the plasma–catalyst interactions, in order to further improve the applications.

Plasma Chemistry

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Publisher : Cambridge University Press
ISBN 13 : 1139471732
Total Pages : pages
Book Rating : 4.1/5 (394 download)

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Book Synopsis Plasma Chemistry by : Alexander Fridman

Download or read book Plasma Chemistry written by Alexander Fridman and published by Cambridge University Press. This book was released on 2008-05-05 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Providing a fundamental introduction to all aspects of modern plasma chemistry, this book describes mechanisms and kinetics of chemical processes in plasma, plasma statistics, thermodynamics, fluid mechanics and electrodynamics, as well as all major electric discharges applied in plasma chemistry. Fridman considers most of the major applications of plasma chemistry, from electronics to thermal coatings, from treatment of polymers to fuel conversion and hydrogen production and from plasma metallurgy to plasma medicine. It is helpful to engineers, scientists and students interested in plasma physics, plasma chemistry, plasma engineering and combustion, as well as chemical physics, lasers, energy systems and environmental control. The book contains an extensive database on plasma kinetics and thermodynamics and numerical formulas for practical calculations related to specific plasma-chemical processes and applications. Problems and concept questions are provided, helpful in courses related to plasma, lasers, combustion, chemical kinetics, statistics and thermodynamics, and high-temperature and high-energy fluid mechanics.

Plasma Chemistry and Gas Conversion

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Publisher : BoD – Books on Demand
ISBN 13 : 1789848407
Total Pages : 88 pages
Book Rating : 4.7/5 (898 download)

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Book Synopsis Plasma Chemistry and Gas Conversion by : Nikolay Britun

Download or read book Plasma Chemistry and Gas Conversion written by Nikolay Britun and published by BoD – Books on Demand. This book was released on 2018-12-19 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low-temperature non-equilibrium gaseous discharges represent nearly ideal media for boosting plasma-based chemical reactions. In these discharges the energy of plasma electrons, after being received from the electromagnetic field, is transferred to the other degrees of freedom differently, ideally with only a small part going to the translational motion of heavy gas particles. This unique property enables the important application of non-equilibrium plasmas for greenhouse gas conversion. While the degree of discharge non-equilibrium often defines the energetic efficiency of conversion, other factors are also of a great importance, such as type of discharge, presence of plasma catalysis, etc. This book is focused on the recent achievements in optimization and understanding of non-equilibrium plasma for gas conversion via plasma modeling and experimental work.

Low Temperature Plasmas

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Publisher : Wiley-VCH
ISBN 13 : 9783527406739
Total Pages : 0 pages
Book Rating : 4.4/5 (67 download)

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Book Synopsis Low Temperature Plasmas by : Rainer Hippler

Download or read book Low Temperature Plasmas written by Rainer Hippler and published by Wiley-VCH. This book was released on 2008-03-03 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: With its strong focus on the links between theory and experiment or technological process, this book presents the latest advances in our understanding of how plasmas behave. New contributions to this second edition cover dusty plasmas, cross-correlation spectroscopy, atmospheric pressure glow discharges, as well as applications in lightening, microelectronics, polymer surface modification, sterilization, biology and medicine. Straddling the boundaries between physics, chemistry and materials science, this is of interest to a wide community. From reviews of the first edition: "... it makes a highly valuable contribution to the subject area and will be accessible to scientists and engineers working in the field." ChemPhysChem

Handbook of Advanced Plasma Processing Techniques

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Publisher : Springer Science & Business Media
ISBN 13 : 3642569897
Total Pages : 664 pages
Book Rating : 4.6/5 (425 download)

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Book Synopsis Handbook of Advanced Plasma Processing Techniques by : R.J. Shul

Download or read book Handbook of Advanced Plasma Processing Techniques written by R.J. Shul and published by Springer Science & Business Media. This book was released on 2011-06-28 with total page 664 pages. Available in PDF, EPUB and Kindle. Book excerpt: Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.

The British Chess Magazine; Volume 16

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Publisher : Legare Street Press
ISBN 13 : 9781016407649
Total Pages : 0 pages
Book Rating : 4.4/5 (76 download)

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Book Synopsis The British Chess Magazine; Volume 16 by : Anonymous

Download or read book The British Chess Magazine; Volume 16 written by Anonymous and published by Legare Street Press. This book was released on 2022-10-27 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work has been selected by scholars as being culturally important, and is part of the knowledge base of civilization as we know it. This work is in the "public domain in the United States of America, and possibly other nations. Within the United States, you may freely copy and distribute this work, as no entity (individual or corporate) has a copyright on the body of the work. Scholars believe, and we concur, that this work is important enough to be preserved, reproduced, and made generally available to the public. We appreciate your support of the preservation process, and thank you for being an important part of keeping this knowledge alive and relevant.

Emerging Developments and Applications of Low Temperature Plasma

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Publisher : IGI Global
ISBN 13 : 1799884007
Total Pages : 239 pages
Book Rating : 4.7/5 (998 download)

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Book Synopsis Emerging Developments and Applications of Low Temperature Plasma by : Shahzad, Aamir

Download or read book Emerging Developments and Applications of Low Temperature Plasma written by Shahzad, Aamir and published by IGI Global. This book was released on 2021-12-17 with total page 239 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low temperature plasma in medicine is a new field that rose from the research in the application of cold plasmas in bioengineering. Plasma medicine is an innovative and promising multidisciplinary novel field of research covering plasma physics, life sciences, and clinical medicine to apply physical plasma for therapeutic applications. Emerging Developments and Applications of Low Temperature Plasma explores all areas of experimental, computational, and theoretical study of low temperature and atmospheric plasmas and provides a collection of exciting new research on the fundamental aspects of low temperature and pressure plasmas and their applications. Covering topics such as carbon nanotubes, foodborne pathogens, and plasma formation, this book is an essential resource for research groups, plasma-based industries, plasma aerodynamics industries, metal and cutlery industries, medical institutions, researchers, and academicians.

Fundamental Aspects of Plasma Chemical Physics

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Publisher : Springer Science & Business Media
ISBN 13 : 1441981853
Total Pages : 330 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Fundamental Aspects of Plasma Chemical Physics by : Mario Capitelli

Download or read book Fundamental Aspects of Plasma Chemical Physics written by Mario Capitelli and published by Springer Science & Business Media. This book was released on 2015-11-26 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt: Describing non-equilibrium "cold" plasmas through a chemical physics approach, this book uses the state-to-state plasma kinetics, which considers each internal state as a new species with its own cross sections. Extended atomic and molecular master equations are coupled with Boltzmann and Monte Carlo methods to solve the electron energy distribution function. Selected examples in different applied fields, such as microelectronics, fusion, and aerospace, are presented and discussed including the self-consistent kinetics in RF parallel plate reactors, the optimization of negative ion sources and the expansion of high enthalpy flows through nozzles of different geometries. The book will cover the main aspects of the state-to-state kinetic approach for the description of nonequilibrium cold plasmas, illustrating the more recent achievements in the development of kinetic models including the self-consistent coupling of master equations and Boltzmann equation for electron dynamics. To give a complete portrayal, the book will assess fundamental concepts and theoretical formulations, based on a unified methodological approach, and explore the insight in related scientific problems still opened for the research community.

NIST Serial Holdings

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Publisher :
ISBN 13 :
Total Pages : 268 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis NIST Serial Holdings by : National Institute of Standards and Technology (U.S.)

Download or read book NIST Serial Holdings written by National Institute of Standards and Technology (U.S.) and published by . This book was released on 2002 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt: