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The Design And Construction Of A High Density Plasma Source
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Book Synopsis High Density Plasma Sources by : Oleg A. Popov
Download or read book High Density Plasma Sources written by Oleg A. Popov and published by Elsevier. This book was released on 1996-12-31 with total page 467 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.
Book Synopsis Scientific and Technical Aerospace Reports by :
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1972 with total page 1056 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book STAR written by and published by . This book was released on 1973 with total page 890 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Nuclear Science Abstracts written by and published by . This book was released on 1976 with total page 1118 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Atomic and Molecular Beams by : Cyril Bernard Lucas
Download or read book Atomic and Molecular Beams written by Cyril Bernard Lucas and published by CRC Press. This book was released on 2013-12-13 with total page 396 pages. Available in PDF, EPUB and Kindle. Book excerpt: Atomic and molecular beams are employed in physics and chemistry experiments and, to a lesser extent, in the biological sciences. These beams enable atoms to be studied under collision-free conditions and allow the study of their interaction with other atoms, charged particles, radiation, and surfaces. Atomic and Molecular Beams: Production and Collimation explores the latest techniques for producing a beam from any substance as well as from the dissociation of hydrogen, oxygen, nitrogen, and the halogens. The book not only provides the basic expressions essential to beam design but also offers in-depth coverage of: Design of ovens and furnaces for atomic beam production Creation of atomic beams that require higher evaporation temperatures Theory of beam formation including the Clausing equation and the transmission probability Construction of collimating arrays in metals, plastics, glass, and other materials Optimization of the design of atomic beam collimators While many review articles and books discuss the application of atomic beams, few give technical details of their production. Focusing on practical application in the laboratory, the author critically reviews over 800 references to compare the atomic and molecular beam formation theories with actual experiments. Atomic and Molecular Beams: Production and Collimation is a comprehensive source of material for experimentalists facing the design of any atomic or molecular beam and theoreticians wishing to extend the theory.
Download or read book NSC Review written by and published by . This book was released on 2000 with total page 646 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Low Pressure Plasmas and Microstructuring Technology by : Gerhard Franz
Download or read book Low Pressure Plasmas and Microstructuring Technology written by Gerhard Franz and published by Springer Science & Business Media. This book was released on 2009-04-09 with total page 743 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over the last forty years, plasma supported processes have attracted ever - creasing interest, and now, all modern semiconductor devices undergo at least one plasma-involved processing step, starting from surface cleaning via coating to etching. In total, the range of the treated substrates covers some orders of magnitude: Trenches and linewidths of commercially available devices have - ready passed the boundary of 100 nm, decorative surface treatment will happen 2 in the mm range, and the upper limit is reached with surface protecting layers of windows which are coated with ?/4 layers against IR radiation. The rapid development of the semiconductor industry is inconceivable wi- outthegiantprogressintheplasmatechnology.Moore’slawisnotcarvedinto 1 stone, and not only the ITRS map is subject to change every ?ve years but also new branches develop and others mingle together. Moreover, the quality of conventional materials can be improved by plasma treatment:Cottonbecomesmorecrease-resistant,leathermoredurable,andthe shrinking of wool ?bers during the washing process can be signi?cantly reduced. To cut a long story short: More than 150 years after the discovery of the sputtering e?ect by Grove, plasma-based processes are about to spread out into new ?elds of research and application [1]—no wonder that the market for etching machines kept growing by an annual rate of 17 % up to the burst of the internet bubble, and it took only some years of recovery to continue the voyage [2].
Download or read book Fusion Energy Update written by and published by . This book was released on 1978 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Energy Research Abstracts written by and published by . This book was released on 1994 with total page 806 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiannual, with semiannual and annual indexes. References to all scientific and technical literature coming from DOE, its laboratories, energy centers, and contractors. Includes all works deriving from DOE, other related government-sponsored information, and foreign nonnuclear information. Arranged under 39 categories, e.g., Biomedical sciences, basic studies; Biomedical sciences, applied studies; Health and safety; and Fusion energy. Entry gives bibliographical information and abstract. Corporate, author, subject, report number indexes.
Author :United States. Energy Research and Development Administration. Technical Information Center Publisher : ISBN 13 : Total Pages :588 pages Book Rating :4.3/5 (129 download)
Book Synopsis ERDA Energy Research Abstracts by : United States. Energy Research and Development Administration. Technical Information Center
Download or read book ERDA Energy Research Abstracts written by United States. Energy Research and Development Administration. Technical Information Center and published by . This book was released on 1976 with total page 588 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Technology for Large Space Systems by :
Download or read book Technology for Large Space Systems written by and published by . This book was released on 1990 with total page 280 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Masters Theses in the Pure and Applied Sciences by : Wade H. Shafer
Download or read book Masters Theses in the Pure and Applied Sciences written by Wade H. Shafer and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt: Masters Theses in the Pure and Applied Sciences was first conceived, published, and dis seminated by the Center for Information and Numerical Data Analysis and Synthesis (CINDAS) * at Purdue University in 1957, starting its coverage of theses with the academic year 1955. Beginning with Volume 13, the printing and dissemination phases of the ac tivity were transferred to University Microfilms/Xerox of Ann Arbor, Michigan, with the thought that such an arrangement would be more beneficial to the academic and general scientific and technical community. After five years of this joint undertaking we had concluded that it was in the interest of all concerned if the printing and distribution of the volume were handled by an international publishing house to assure improved service and broader dissemination. Hence, starting with Volume 18, Masters Theses in the Pure and Applied Sciences has been disseminated on a worldwide basis by Plenum Publishing Corporation of New York, and in the same year the coverage was broadened to include Canadian universities. All back issues can also be ordered from Plenum. We have reported in Volume 23 (thesis year 1978) a total of 10,148 theses titles from 27 Canadian and 220 United States universities. We are sure that this broader base for theses titles reported will greatly enhance the value of this important annual reference work. While Volume 23 reports these submitted in 1978, on occasion, certain universities do report theses submitted in previous years but not reported at the time.
Book Synopsis Electron Cyclotron Heating of Plasmas by : Gareth Guest
Download or read book Electron Cyclotron Heating of Plasmas written by Gareth Guest and published by John Wiley & Sons. This book was released on 2009-11-23 with total page 270 pages. Available in PDF, EPUB and Kindle. Book excerpt: Authored by a highly regarded plasma scientist, this book fills the gap for a topical reference and source with a professional audience in mind. While the use of this critical method at the international fusion reactor, ITER, is covered in detail, the monograph also includes planetary magnetospheres and plasma sources for commercial applications. With exercises and solutions for additional use as course reading.
Book Synopsis 30th Plasmadynamics and Lasers Conference by :
Download or read book 30th Plasmadynamics and Lasers Conference written by and published by . This book was released on 1999 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Special Energy Research and Development Appropriation Bill for 1975 by : United States. Congress. House. Committee on Appropriations
Download or read book Special Energy Research and Development Appropriation Bill for 1975 written by United States. Congress. House. Committee on Appropriations and published by . This book was released on 1974 with total page 1834 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :United States. Congress. House. Committee on Appropriations. Subcommittee on Public Works Publisher : ISBN 13 : Total Pages :1092 pages Book Rating :4.3/5 (91 download)
Book Synopsis Public Works for Water and Power Development and Atomic Energy Commission Appropriation Bill, 1975 by : United States. Congress. House. Committee on Appropriations. Subcommittee on Public Works
Download or read book Public Works for Water and Power Development and Atomic Energy Commission Appropriation Bill, 1975 written by United States. Congress. House. Committee on Appropriations. Subcommittee on Public Works and published by . This book was released on 1974 with total page 1092 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Public Works for Water and Power Development and Atomic Energy Commission Appropriations for Fiscal Year 1975 by : United States. Congress. Senate. Committee on Appropriations
Download or read book Public Works for Water and Power Development and Atomic Energy Commission Appropriations for Fiscal Year 1975 written by United States. Congress. Senate. Committee on Appropriations and published by . This book was released on 1974 with total page 1032 pages. Available in PDF, EPUB and Kindle. Book excerpt:
