Mechanical Microsensors

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Mechanical Microsensors

Author : M. Elwenspoek
Publisher : Springer Science & Business Media
ISBN 13 : 3662043211
Total Pages : 306 pages
Book Rating : 4.6/5 (62 download)

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Book Synopsis Mechanical Microsensors by : M. Elwenspoek

Download or read book Mechanical Microsensors written by M. Elwenspoek and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).

MEMS Mechanical Sensors

Author : Stephen Beeby
Publisher : Artech House
ISBN 13 : 1580535364
Total Pages : 269 pages
Book Rating : 4.5/5 (85 download)

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Book Synopsis MEMS Mechanical Sensors by : Stephen Beeby

Download or read book MEMS Mechanical Sensors written by Stephen Beeby and published by Artech House. This book was released on 2004 with total page 269 pages. Available in PDF, EPUB and Kindle. Book excerpt: Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.

Mechanical Microsensors

Author : Miko Elwenspoek
Publisher : Springer
ISBN 13 : 9783662043226
Total Pages : 295 pages
Book Rating : 4.0/5 (432 download)

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Book Synopsis Mechanical Microsensors by : Miko Elwenspoek

Download or read book Mechanical Microsensors written by Miko Elwenspoek and published by Springer. This book was released on 2012-11-28 with total page 295 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).

Micro Mechanical Transducers

Author : Min-hang Bao
Publisher : Elsevier
ISBN 13 : 0080524036
Total Pages : 393 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Micro Mechanical Transducers by : Min-hang Bao

Download or read book Micro Mechanical Transducers written by Min-hang Bao and published by Elsevier. This book was released on 2000-10-16 with total page 393 pages. Available in PDF, EPUB and Kindle. Book excerpt: Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can be found in every new car and has saved already numerous lives. Pressure sensors are also used in modern electronic blood pressure equipment. Many other mechanical sensors, mostly invisible to the public, perform useful functions in countless industrial and consumer products. The underlying physics and technology of silicon-based mechanical sensors is rather complex and is treated in numerous publications scattered throughout the literature. Therefore, a clear need existed for a handbook that thoroughly and systematically reviews the present basic knowledge on these devices. After a short introduction, Professor Bao discusses the main issues relevant to silicon-based mechanical sensors. First a thorough treatment of stress and strain in diaphragms and beams is presented. Next, vibration of mechanical structures is illuminated, followed by a chapter on air damping. These basic chapters are then succeeded by chapters in which capacitive and piezoresistive sensing techniques are amply discussed. The book concludes with chapters on commercially available pressure sensors, accelerometers and resonant sensors in which the above principles are applied. Everybody, involved in designing silicon-based mechanical sensors, will find a wealth of useful information in the book, assisting the designer in obtaining highly optimized devices.

MEMS Mechanical Sensors

Author : Stephen Beeby
Publisher : Artech House
ISBN 13 : 9781580538732
Total Pages : 282 pages
Book Rating : 4.5/5 (387 download)

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Book Synopsis MEMS Mechanical Sensors by : Stephen Beeby

Download or read book MEMS Mechanical Sensors written by Stephen Beeby and published by Artech House. This book was released on 2004 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt: Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.

Sensors, Mechanical Sensors

Author : Wolfgang Göpel
Publisher : John Wiley & Sons
ISBN 13 : 3527620729
Total Pages : 692 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Sensors, Mechanical Sensors by : Wolfgang Göpel

Download or read book Sensors, Mechanical Sensors written by Wolfgang Göpel and published by John Wiley & Sons. This book was released on 2008-11-20 with total page 692 pages. Available in PDF, EPUB and Kindle. Book excerpt: 'Sensors' is the first self-contained series to deal with the wholearea of sensors. It describes general aspects, technical andphysical fundamentals, construction, function, applications anddevelopments of the various types of sensors. This volume contains the physical and technical fundamentals ofmechanical sensors, and contains and assesses the various types ofsensors for particular applications. Of interest to engineers,physicists, chemists and others involved in sensor technology.

Micro Mechanical Systems

Author : T. Fukuda
Publisher : Elsevier
ISBN 13 : 0080536549
Total Pages : 278 pages
Book Rating : 4.0/5 (85 download)

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Book Synopsis Micro Mechanical Systems by : T. Fukuda

Download or read book Micro Mechanical Systems written by T. Fukuda and published by Elsevier. This book was released on 1998-07-24 with total page 278 pages. Available in PDF, EPUB and Kindle. Book excerpt: In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.

Nonlinear Differential Equations in Micro/nano Mechanics

Author : Ali Koochi
Publisher : Elsevier
ISBN 13 : 0128192364
Total Pages : 272 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Nonlinear Differential Equations in Micro/nano Mechanics by : Ali Koochi

Download or read book Nonlinear Differential Equations in Micro/nano Mechanics written by Ali Koochi and published by Elsevier. This book was released on 2020-05-01 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nonlinear Differential Equations in Micro/nano Mechanics: Application in Micro/Nano Structures in Electromechanical Systems presents a variety of various efficient methods, including Homotropy methods, Adomian methods, reduced order methods and numerical methods for solving the nonlinear governing equation of micro/nanostructures. Various structures, including beam type micro/nano-electromechanical systems (MEMS/NEMS), carbon nanotube and graphene actuators, nano-tweezers, nano-bridges, plate-type microsystems and rotational micromirrors are modeled. Nonlinearity due to physical phenomena such as dispersion forces, damping, surface energies, microstructure-dependency, non-classic boundary conditions and geometry, and more is included. Establishes the theoretical foundation required for the modeling, simulation and theoretical analysis of micro/nanostructures and MEMS/NEMS (continuum-based solid mechanics) Covers various solution methods for investigating the behavior of nanostructures (applied mathematics) Provides the simulation of different physical phenomena of covered nanostructures

Microsensors, MEMS, and Smart Devices

Author : Julian W. Gardner
Publisher : John Wiley & Sons
ISBN 13 :
Total Pages : 536 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Microsensors, MEMS, and Smart Devices by : Julian W. Gardner

Download or read book Microsensors, MEMS, and Smart Devices written by Julian W. Gardner and published by John Wiley & Sons. This book was released on 2001 with total page 536 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle. Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices. Features include: * Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods. * Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines. * Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin. * An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology. * Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field. Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.

Sensors and Measurement Systems

Author : Walter Lang
Publisher : CRC Press
ISBN 13 : 1000792986
Total Pages : 244 pages
Book Rating : 4.0/5 (7 download)

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Book Synopsis Sensors and Measurement Systems by : Walter Lang

Download or read book Sensors and Measurement Systems written by Walter Lang and published by CRC Press. This book was released on 2022-09-01 with total page 244 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and measurement systems is an introduction to microsensors for engineering students in the final undergraduate or early graduate level, technicians who wants to know more about the systems they are using, and anybody curious enough to know what microsystems and microsensors can do. The book discusses five families of sensors: - Thermal sensors - Force and pressure sensors- Inertial sensors - Magnetic field sensors- Flow sensorsFor each sensor, theoretical, technology and application aspects are examined. The sensor function is modelled to understand sensitivity, resolution and noise. We ask ourselves: What do we want to measure? What are possible applications? How are the sensor chips made in the cleanroom? How are they mounted and integrated in a system?After reading this book, you should be able to:- Understand important thermal, mechanical, inertial and magnetic sensors- Work with characterization parameters for sensors- Choose sensors for a given application and apply them- Understand micromachining technologies for sensors

Microsensors

Author : Julian W. Gardner
Publisher :
ISBN 13 :
Total Pages : 346 pages
Book Rating : 4.3/5 (97 download)

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Book Synopsis Microsensors by : Julian W. Gardner

Download or read book Microsensors written by Julian W. Gardner and published by . This book was released on 1994-09-06 with total page 346 pages. Available in PDF, EPUB and Kindle. Book excerpt: Devoted primarily to the many applications of microsensors, this text covers thermal, radiation, mechanical, magnetic, chemical and biological microsensors. Information is also provided on basic processing, interfacing and bus systems, microsensor array and intelligent sensors.

Introduction to Sensors for Electrical and Mechanical Engineers

Author : Martin Novák
Publisher : CRC Press
ISBN 13 : 1000164268
Total Pages : 330 pages
Book Rating : 4.0/5 (1 download)

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Book Synopsis Introduction to Sensors for Electrical and Mechanical Engineers by : Martin Novák

Download or read book Introduction to Sensors for Electrical and Mechanical Engineers written by Martin Novák and published by CRC Press. This book was released on 2020-08-16 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors are all around us. They are in phones, cars, planes, trains, robots, mils, lathes, packaging lines, chemical plants, power plants, etc. Modern technology could not exist without sensors. The sensors measure what we need to know and the control system then performs the desired actions. When an engineer builds any machine he or she needs to have basic understanding about sensors. Correct sensors need to be selected for the design right from the start. The designer needs to think about the ranges, required accuracy, sensor cost, wiring, correct installation and placement etc. Without the basic knowledge of sensors fundamental no machine can be built successfully today. The objective of this book is to provide the basic knowledge to electrical and mechanical engineers, engineering students and hobbyist from the field of sensors to help them with the selection of “proper” sensors for their designs. No background knowledge in electrical engineering is required, all the necessary basics are provided. The book explains how a sensor works, in what ranges it can be used, with what accuracy etc. It also provides examples of industrial application for selected sensors. The book covers all the major variables in mechanical engineering such as temperature, force, torque, pressure, humidity, position, speed, acceleration etc. The approach is always as follows: - Explain how the sensor works, what is the principle - Explain in what ranges and with what accuracy it can work - Describe its properties with charts, eventually equations - Give examples of such sensors including application examples

Sensors and Sensing in Biology and Engineering

Author : Friedrich G. Barth
Publisher : Springer Science & Business Media
ISBN 13 : 3709160251
Total Pages : 392 pages
Book Rating : 4.7/5 (91 download)

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Book Synopsis Sensors and Sensing in Biology and Engineering by : Friedrich G. Barth

Download or read book Sensors and Sensing in Biology and Engineering written by Friedrich G. Barth and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 392 pages. Available in PDF, EPUB and Kindle. Book excerpt: Biological sensors are usually remarkably small, sensitive and efficient. It is highly desirable to design corresponding artificial sensors for scientific, industrial and commercial purposes. This book is designed to fill an urgent need for interdisciplinary exchange between biologists studying sensors in the natural world and engineers and physical scientists developing artificial sensors. The main topics cover mechanical sensors, e.g. waves and sounds, visual sensors and vision and chemosensors. Readers will obtain a fuller understanding of the nature and performance of natural sensors as well as enhanced appreciation for the current status and the potential applicability of artificial microsensors.

Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies

Author : Krzysztof Iniewski
Publisher : CRC Press
ISBN 13 : 1351832840
Total Pages : 361 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies by : Krzysztof Iniewski

Download or read book Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies written by Krzysztof Iniewski and published by CRC Press. This book was released on 2017-12-19 with total page 361 pages. Available in PDF, EPUB and Kindle. Book excerpt: Light on physics and math, with a heavy focus on practical applications, Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies discusses the developments necessary to realize the growth of truly integrated sensors for use in physical, biological, optical, and chemical sensing, as well as future micro- and nanotechnologies. Used to pick up sound, movement, and optical or magnetic signals, portable and lightweight sensors are perpetually in demand in consumer electronics, biomedical engineering, military applications, and a wide range of other sectors. However, despite extensive existing developments in computing and communications for integrated microsystems, we are only just now seeing real transformational changes in sensors, which are critical to conducting so many advanced, integrated tasks. This book is designed in two sections—Optical and Acoustic Sensors and Magnetic and Mechanical Sensors—that address the latest developments in sensors. The first part covers: Optical and acoustic sensors, particularly those based on polymer optical fibers Potential of integrated optical biosensors and silicon photonics Luminescent thermometry and solar cell analyses Description of research from United States Army Research Laboratory on sensing applications using photoacoustic spectroscopy Advances in the design of underwater acoustic modems The second discusses: Magnetic and mechanical sensors, starting with coverage of magnetic field scanning Some contributors’ personal accomplishments in combining MEMS and CMOS technologies for artificial microsystems used to sense airflow, temperature, and humidity MEMS-based micro hot-plate devices Vibration energy harvesting with piezoelectric MEMS Self-powered wireless sensing As sensors inevitably become omnipresent elements in most aspects of everyday life, this book assesses their massive potential in the development of interfacing applications for various areas of product design and sciences—including electronics, photonics, mechanics, chemistry, and biology, to name just a few.

Physics of Semiconductor Devices

Author : K. N. Bhat
Publisher : Alpha Science Int'l Ltd.
ISBN 13 : 9788173195679
Total Pages : 1310 pages
Book Rating : 4.1/5 (956 download)

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Book Synopsis Physics of Semiconductor Devices by : K. N. Bhat

Download or read book Physics of Semiconductor Devices written by K. N. Bhat and published by Alpha Science Int'l Ltd.. This book was released on 2004 with total page 1310 pages. Available in PDF, EPUB and Kindle. Book excerpt: Contributed papers of the workshop held at IIT, Madras, in 2003.

Microactuators, Microsensors and Micromechanisms

Author : Lena Zentner
Publisher :
ISBN 13 : 9783030616533
Total Pages : 0 pages
Book Rating : 4.6/5 (165 download)

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Book Synopsis Microactuators, Microsensors and Micromechanisms by : Lena Zentner

Download or read book Microactuators, Microsensors and Micromechanisms written by Lena Zentner and published by . This book was released on 2021 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers twelve contributions presented at the 5th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Ilmenau, Germany in November 2020. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).

Polymeric Sensors and Actuators

Author : Johannes Karl Fink
Publisher : John Wiley & Sons
ISBN 13 : 1118547624
Total Pages : 532 pages
Book Rating : 4.1/5 (185 download)

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Book Synopsis Polymeric Sensors and Actuators by : Johannes Karl Fink

Download or read book Polymeric Sensors and Actuators written by Johannes Karl Fink and published by John Wiley & Sons. This book was released on 2012-11-13 with total page 532 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book exhaustively covers the various polymers that are used for sensors and actuators from the perspective of organic chemistry. The field of polymeric sensors and actuators is developing very rapidly as newly derived polymer materials are suitable for sensor technology. This book uniquely and comprehensively covers the various polymers that are used for sensors and actuators. The author has researched both scientific papers and patents to include all the recent discoveries and applications. Since many chemists may not be very familiar with the physical background as well as how sensors operate, Polymeric Sensors and Actuators includes a general chapter dealing with the overall physics and basic principles of sensors. Complementary chapters on their methods of fabrication as well as the processing of data are included. The actuators sections examine the fields of applications, special designs, and materials. The final chapter is dedicated to liquid crystal displays. The book concludes with four extensive indices including one special one on analytes to allow the practitioner to easily use the text. This comprehensive text examines the following sensor types: Humidity Sensors Biosensors Mechanical Sensors Optical Sensors Surface Plasmon Resonance Test Strips Microelectromechanical (MEMS) Sensors Piezoelectric Sensors Acoustic Wave Sensors Electronic Nose Switchable Polymers