Materials Science of Microelectromechanical Systems (MEMS) Devices IV:

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Publisher : Cambridge University Press
ISBN 13 : 9781107412125
Total Pages : 334 pages
Book Rating : 4.4/5 (121 download)

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Book Synopsis Materials Science of Microelectromechanical Systems (MEMS) Devices IV: by : Arturo A. Ayón

Download or read book Materials Science of Microelectromechanical Systems (MEMS) Devices IV: written by Arturo A. Ayón and published by Cambridge University Press. This book was released on 2014-06-05 with total page 334 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) has been able to successfully acceded to several markets, including pressure sensors, gyroscopes, accelerometers, fluidics and data storage, representing a total revenue of some $2 billion in 2000. However, MEMS has the potential to offer reliable and cost-effective solutions to many other fields. The current expectation is that we will witness the appearance of diverse MEMS structures for power generation, propulsion, biomedical applications, optical switching, infrared sensing, microphones and displays, to name just a few. This plethora of activity is possible due to the increased understanding of the properties of the micromanufacturing materials involved, the availability of processing equipment with enhanced capabilities, and the effort of a large number of researchers and scientists. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures. Topics include: applications metrology; mechanical properties; microstructure and processing; applications; processing techniques; alternative materials; and surface engineering issues in MEMS structures and devices.

Materials Science of Microelectromechanical Systems (MEMS) Devices IV: Volume 687

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Publisher :
ISBN 13 :
Total Pages : 344 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Materials Science of Microelectromechanical Systems (MEMS) Devices IV: Volume 687 by : Arturo A. Ayón

Download or read book Materials Science of Microelectromechanical Systems (MEMS) Devices IV: Volume 687 written by Arturo A. Ayón and published by . This book was released on 2002-05-23 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures.

Materials Science of Microelectromechanical Systems (MEMS) Devices IV

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Publisher :
ISBN 13 :
Total Pages : 318 pages
Book Rating : 4.:/5 (2 download)

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Book Synopsis Materials Science of Microelectromechanical Systems (MEMS) Devices IV by :

Download or read book Materials Science of Microelectromechanical Systems (MEMS) Devices IV written by and published by . This book was released on 2002 with total page 318 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Materials Science of Microelectromechanical Systems (MEMS) Devices

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Author :
Publisher :
ISBN 13 :
Total Pages : 344 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Materials Science of Microelectromechanical Systems (MEMS) Devices by :

Download or read book Materials Science of Microelectromechanical Systems (MEMS) Devices written by and published by . This book was released on 2001 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Materials Science of Microelectromechanical Systems (MEMS) Devices III:

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Publisher : Cambridge University Press
ISBN 13 : 9781107412293
Total Pages : 366 pages
Book Rating : 4.4/5 (122 download)

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Book Synopsis Materials Science of Microelectromechanical Systems (MEMS) Devices III: by : Harold Kahn

Download or read book Materials Science of Microelectromechanical Systems (MEMS) Devices III: written by Harold Kahn and published by Cambridge University Press. This book was released on 2014-06-05 with total page 366 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) is a growing field with numerous potential commercial applications, including pressure and inertial sensing, optical and electrical switching, power conversion, fluidic flow control, and chemical analysis. MEMS combine mechanical and electrical (and sometimes optical, chemical, or biological) function at small scales using many of the batch fabrication techniques developed for the micro-electronics industry. Materials have been developed or adapted for MEMS applications for use as structures, actuators, and sensors. Processing techniques also have been established for integrating these materials with existing MEMS. In addition, MEMS technology has proven ideal for allowing the mechanical and tribological characterization of materials at small scales. This book, first published in 2001, addresses these issues and a variety of materials are discussed, including Si, porous Si, SiC, SiGe, diamond, electroplated Ni and Cu, as well as piezoelectric, ferroelectric, and shape memory materials, and self-assembled organic monolayers. Fabrication processes include plasma and chemical etching, Si bonding, high-aspect-ratio lithography and micromolding. In addition, the stress, fracture strength, fatigue, and friction of MEMS materials and structures are also discussed.

Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605

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Publisher : Mrs Proceedings
ISBN 13 :
Total Pages : 344 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605 by : Maarten De Boer

Download or read book Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605 written by Maarten De Boer and published by Mrs Proceedings. This book was released on 2000-10-02 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

BioMEMS and Bionanotechnology

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Publisher :
ISBN 13 :
Total Pages : 268 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis BioMEMS and Bionanotechnology by : Ronald P. Manginell

Download or read book BioMEMS and Bionanotechnology written by Ronald P. Manginell and published by . This book was released on 2002 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) can be a critical link between the macroworld and the realm of nanobiotechnology. Top-down MEMS methods and devices will likely serve as an important handle for interfacing with the bottom-up techniques and structures that typify nanobiotechnology. This volume focuses on recent advances in the fields of MEMS and BioMEMS, including microfluidics, bioanalysis, packaging, materials and fabrication methods. It is clear from these presentations that top-down semiconductor-based processing remains vital. Indeed, frontiers are expanding within this realm, with new research on materials like poly-SiGe. However, new materials, particularly polymers, and bottom-up methods such as soft lithography and chemical synthesis, are continually gaining in utility and importance. It is also apparent from this volume that microanalytical techniques continue to be advanced, including new ways of separating samples by optical, adhesion-based and dielectrophoretic methods. And sensors, always of interest, are demonstrated here by research into sensors for environmental and material analysis. Capacitance-based sensors for DNA analysis, and magnetic sensors for position sensing, are also highlighted. Finally, systems for direct interfacing with biological systems are addressed, with presentations on neural recording methods, retinal implants, and tissue engineering.

Materials Science of Microelectromechanical Systems (MEMS) Devices

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Publisher :
ISBN 13 :
Total Pages : 378 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Materials Science of Microelectromechanical Systems (MEMS) Devices by :

Download or read book Materials Science of Microelectromechanical Systems (MEMS) Devices written by and published by . This book was released on 2000 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Magnetic and Electronic Films - Microstructure, Texture and Application to Data Storage: Volume 721

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Publisher :
ISBN 13 :
Total Pages : 336 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Magnetic and Electronic Films - Microstructure, Texture and Application to Data Storage: Volume 721 by : Patrick W. DeHaven

Download or read book Magnetic and Electronic Films - Microstructure, Texture and Application to Data Storage: Volume 721 written by Patrick W. DeHaven and published by . This book was released on 2002-08-02 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Microelectromechanical Systems - Materials and Devices:

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Publisher : Cambridge University Press
ISBN 13 : 9781107408586
Total Pages : 342 pages
Book Rating : 4.4/5 (85 download)

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Book Synopsis Microelectromechanical Systems - Materials and Devices: by : David A. LaVan

Download or read book Microelectromechanical Systems - Materials and Devices: written by David A. LaVan and published by Cambridge University Press. This book was released on 2014-06-05 with total page 342 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is part of a popular series on the materials science of MEMS devices, first published in 1999. In the years since, many sophisticated devices have emerged and many aspects of MEMS materials behaviors have been characterized. However, there remain many basic questions about the relationship between process, properties and function for MEMS materials. Experimental methods have been developed, but there REMAINS a lack of standardization that would allow comparison between laboratories and commercial vendors or the creation of materials specifications that would enable greater commercialization of MEMS. The book addresses many of these issues including: RF-MEMS; optical MEMS; MEMS metrology, tribology, materials characterization and mechanical behavior; MEMS surfaces, MEMS reliability, packaging and life assessment; MEMS modeling and software tools for materials integration; biocompatibility of MEMS materials and devices; new materials and fabrication methodologies for MEMS; microfluidics and nanofluidics; in vivo drug/gene/protein delivery; novel actuators; MEMS cell-based systems; MEMS neural interfaces; MEMS sensors; and MEMS microengines and microfuel cells.

Microelectromechanical Systems-Materials and Devices III: Volume 1222

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Publisher : Cambridge University Press
ISBN 13 : 9781605111957
Total Pages : 0 pages
Book Rating : 4.1/5 (119 download)

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Book Synopsis Microelectromechanical Systems-Materials and Devices III: Volume 1222 by : Jörg Bagdahn

Download or read book Microelectromechanical Systems-Materials and Devices III: Volume 1222 written by Jörg Bagdahn and published by Cambridge University Press. This book was released on 2010-06-18 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Developing advanced materials and processes can enable the creation of microsystems (MEMS) with enhanced functionality, and improved performance and reliability. These considerations are of growing importance as MEMS make the difficult transition from research laboratories to full-fledged commercialization. Equally, MEMS designers continue to introduce new device concepts and system architectures which motivate fundamental studies of materials behavior at micrometer- and nanometer length scales. Together, this collection of papers serves as a useful resource for the growing community of scientists and engineers working at the intersection of materials science and microdevices. Firstly it focuses on developing advanced materials specific to sensing and actuation. Section Two presents fundamental studies of the mechanical behavior of microscale and nanoscale structures. Section Three presents new materials and processes that can potentially influence the development of many new and different types of MEMS.

Materials Issues for Tunable RF and Microwave Devices III: Volume 720

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Publisher :
ISBN 13 :
Total Pages : 232 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Materials Issues for Tunable RF and Microwave Devices III: Volume 720 by : Steven C. Tidrow

Download or read book Materials Issues for Tunable RF and Microwave Devices III: Volume 720 written by Steven C. Tidrow and published by . This book was released on 2002-08-09 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt: Challenges facing the implementation of an affordable tunable RF and microwave device technology are discussed in these papers from an April 2002 meeting. Materials issues and devices are examined, with information on new tunable materials, issues of preparation and optimization of bulk and think film properties, material and surface characterization, evaluation of material loss and loss mechanisms, and effects of microstructure. At the device level, phase shifters are discussed and a new device concept for variable true time delay versus phase shift is introduced. At the system level, a paraelectric lens is used to demonstrate electronic beam steering of an antenna. Tidrow is affiliated with the US Army Research Laboratory. Annotation copyrighted by Book News, Inc., Portland, OR

Microelectromechanical Systems - Materials and Devices IV:

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Publisher : Cambridge University Press
ISBN 13 : 9781107406834
Total Pages : 220 pages
Book Rating : 4.4/5 (68 download)

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Book Synopsis Microelectromechanical Systems - Materials and Devices IV: by : Frank W. DelRio

Download or read book Microelectromechanical Systems - Materials and Devices IV: written by Frank W. DelRio and published by Cambridge University Press. This book was released on 2014-06-05 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt: Symposium S, "Microelectromechanical Systems-Materials and Devices IV," held November 29-December 3 at the 2010 MRS Fall Meeting in Boston, Massachusetts, focused on micro- and nanoelectromechanical systems (MEMS/NEMS), technologies which were spawned from the fabrication and integration of small-scale mechanical, electrical, thermal, magnetic, fluidic, and optical sensors and actuators with micro-electronic components. MEMS and NEMS have enabled performance enhancements and manufacturing cost reductions in a number of applications, including optical displays, acceleration sensing, radio-frequency switching, drug delivery, chemical detection, and power generation and storage. Although originally based on silicon microelectronics, the reach of MEMS and NEMS has extended well beyond traditional engineering materials, and now includes nanomaterials (nanotubes, nanowires, nanoparticles), smart materials (piezoelectric and ferroelectric materials, shape memory alloys, pH-sensitive polymers), metamaterials, and biomaterials (ceramic, metallic, polymeric, composite based implant materials). While these new materials provide more freedom with regards to the design space of MEMS and NEMS, they also introduce a number of new fabrication and characterization challenges not previously encountered with silicon-based technology.

Materials Science of Microelectromechanical Systems (MEMS) Devices

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Publisher :
ISBN 13 :
Total Pages : 274 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Materials Science of Microelectromechanical Systems (MEMS) Devices by : Arthur H. Heuer

Download or read book Materials Science of Microelectromechanical Systems (MEMS) Devices written by Arthur H. Heuer and published by . This book was released on 1999 with total page 274 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Advanced Structural Materials

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Publisher : CRC Press
ISBN 13 : 1420017462
Total Pages : 526 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Advanced Structural Materials by : Winston O. Soboyejo

Download or read book Advanced Structural Materials written by Winston O. Soboyejo and published by CRC Press. This book was released on 2006-12-21 with total page 526 pages. Available in PDF, EPUB and Kindle. Book excerpt: A snapshot of the central ideas used to control fracture properties of engineered structural metallic materials, Advanced Structural Materials: Properties, Design Optimization, and Applications illustrates the critical role that advanced structural metallic materials play in aerospace, biomedical, automotive, sporting goods, and other indust

Defect and Impurity Engineered Semiconductors and Devices III: Volume 719

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Publisher :
ISBN 13 :
Total Pages : 522 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Defect and Impurity Engineered Semiconductors and Devices III: Volume 719 by : S. Ashok

Download or read book Defect and Impurity Engineered Semiconductors and Devices III: Volume 719 written by S. Ashok and published by . This book was released on 2002-08-09 with total page 522 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book focuses on the deliberate introduction and manipulation of defects and impurities in order to engineer desired properties in semiconductor materials and devices. In view of current exciting developments in wide-bandgap semiconductors like GaN for blue light emission, as well as high-speed and high-temperature electronics, dopant and defect issues relevant to these materials are addressed. Also featured are semiconductor nanocavities and nano-structures, with emphasis on the formation and impact of vacancy-type defects. Defect reaction problems pertaining to impurity gettering, precipitation and hydrogen passivation are specific examples of defect engineering that improve the electronic quality of the material. A number of papers also deal with characterization techniques needed to study and to identify defects in materials and device structures. Finally, papers also address issues such as interface control and passivation, application of ion implantation, plasma treatment and rapid thermal processing for creating/activating/suppressing trap levels, and device applications.

Defect and Impurity Engineered Semiconductors and Devices

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Publisher :
ISBN 13 :
Total Pages : 520 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Defect and Impurity Engineered Semiconductors and Devices by :

Download or read book Defect and Impurity Engineered Semiconductors and Devices written by and published by . This book was released on 2002 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt: