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Author : Stephen Ernest Harris
Publisher : American Institute of Physics
ISBN 13 :
Total Pages : 552 pages
Book Rating : 4.:/5 (41 download)
Download or read book Laser Techniques in Extreme Ultraviolet written by Stephen Ernest Harris and published by American Institute of Physics. This book was released on 1984 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Thomas J. McIlrath
Publisher : American Institute of Physics
ISBN 13 :
Total Pages : 520 pages
Book Rating : 4.:/5 (43 download)
Download or read book Laser Techniques for Extreme Ultraviolet written by Thomas J. McIlrath and published by American Institute of Physics. This book was released on 1982 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Seymour Edwin Harris
Publisher :
ISBN 13 :
Total Pages : 530 pages
Book Rating : 4.:/5 (94 download)
Download or read book Laser Techniques in the Extreme Ultraviolet written by Seymour Edwin Harris and published by . This book was released on 1984 with total page 530 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Vivek Bakshi
Publisher : SPIE Press
ISBN 13 : 9780819458452
Total Pages : 1104 pages
Book Rating : 4.4/5 (584 download)
Download or read book EUV Sources for Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2006 with total page 1104 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.
Author : David Attwood
Publisher : Cambridge University Press
ISBN 13 : 1107062896
Total Pages : 655 pages
Book Rating : 4.1/5 (7 download)
Download or read book X-Rays and Extreme Ultraviolet Radiation written by David Attwood and published by Cambridge University Press. This book was released on 2016 with total page 655 pages. Available in PDF, EPUB and Kindle. Book excerpt: Master the physics and understand the current applications of modern X-ray and EUV sources with this fully updated second edition.
Author : David Attwood
Publisher : Cambridge University Press
ISBN 13 : 1139643428
Total Pages : 611 pages
Book Rating : 4.1/5 (396 download)
Download or read book Soft X-Rays and Extreme Ultraviolet Radiation written by David Attwood and published by Cambridge University Press. This book was released on 2007-02-22 with total page 611 pages. Available in PDF, EPUB and Kindle. Book excerpt: This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.
Author : Prabhakar Misra
Publisher : CRC Press
ISBN 13 : 0824744063
Total Pages : 572 pages
Book Rating : 4.8/5 (247 download)
Download or read book Ultraviolet Spectroscopy And Uv Lasers written by Prabhakar Misra and published by CRC Press. This book was released on 2002-02-25 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume presents a complete and thorough examination of advances in the instrumentation, evaluation, and implementation of UV technology for reliable and efficient data acquisition and analysis. It provides real-world applications in expanding fields such as chemical physics, plasma science, photolithography, laser spectroscopy, astronomy and atmospheric science.
Author : Vivek Bakshi
Publisher : SPIE Press
ISBN 13 : 0819469645
Total Pages : 704 pages
Book Rating : 4.8/5 (194 download)
Download or read book EUV Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2009 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt: Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an historical perspective of EUV lithography, through source technology, optics, projection system design, mask, resist, and patterning performance, to cost of ownership. Each section contains worked examples, a comprehensive review of challenges, and relevant citations for those who wish to further investigate the subject matter. Dr. Bakshi succeeds in presenting sometimes unfamiliar material in a very clear manner. This book is also valuable as a teaching tool. It has become an instant classic and far surpasses others in the EUVL field. --Dr. Akira Endo, Chief Development Manager, Gigaphoton Inc. Description Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, and recent progress has been made on several fronts: EUV light sources, optics, optics metrology, contamination control, masks and mask handling, and resists. This comprehensive volume is comprised of contributions from the world's leading EUVL researchers and provides all of the critical information needed by practitioners and those wanting an introduction to the field. Interest in EUVL technology continues to increase, and this volume provides the foundation required for understanding and applying this exciting technology. About the editor of EUV Lithography Dr. Vivek Bakshi previously served as a senior member of the technical staff at SEMATECH; he is now president of EUV Litho, Inc., in Austin, Texas.
Author : David L. Elliott
Publisher : Academic Press
ISBN 13 : 1483296512
Total Pages : 367 pages
Book Rating : 4.4/5 (832 download)
Download or read book Ultraviolet Laser Technology and Applications written by David L. Elliott and published by Academic Press. This book was released on 2014-06-28 with total page 367 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultraviolet Laser Technology and Applications is a hands-on reference text that identifies the main areas of UV laser technology; describes how each is applied; offers clearly illustrated examples of UV opticalsystems applications; and includes technical data on optics, lasers, materials, and systems. This book is unique for its comprehensive, in-depth coverage. Each chapter deals with a different aspect of the subject, beginning with UV light itself; moving through the optics, sources, and systems; and concluding with detailed descriptions of applications in various fields. The text enables practicing engineers and researchers to utilize concepts and innovations to solve actual problems encountered in UV optical technology applications. It also offers a wealth of information for equipment designers and manufacturers. Those in laser fields (including medical, electronics, and semiconductors), students, engineers, technicians, as well as newcomers to the subject who require a basic introduction to the topic, will all find Ultraviolet Laser Technology and Applications to be an essential resource. Serves as a valuable, practical reference to UV laser technology Presents detailed technical data and techniques Offers highly illustrated optics designs and beam delivery systems Includes an extensive bibliography, references, and glossary Covers all major UV laser markets and technology systems
Author : Dirk Basting
Publisher : Springer Science & Business Media
ISBN 13 : 9783540200567
Total Pages : 462 pages
Book Rating : 4.2/5 (5 download)
Download or read book Excimer Laser Technology written by Dirk Basting and published by Springer Science & Business Media. This book was released on 2005-04-21 with total page 462 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.
Author : Neal B. Abraham
Publisher : Springer
ISBN 13 : 1475761872
Total Pages : 487 pages
Book Rating : 4.4/5 (757 download)
Download or read book Physics of New Laser Sources written by Neal B. Abraham and published by Springer. This book was released on 2013-12-19 with total page 487 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains the lectures and seminars presented at the NATO Advanced Study Institute on "Physics of New Laser Sources", the twelfth course of the Europhysics School of Quantum Electronics, held under the supervision of the Quantum Electronics Division of the European Physical Society. The Institute was held at Centro "I Cappuccini" San Miniato, Tuscany, July 11-21, 1984. The Europhysics School of Quantum Electronics was started in 1970 with the aim of providing instruction for young researchers and advanced students already engaged in the area of quantum electronics or for those wishing to switch into this area after working previously in other areas. From the outset, the School has been under the direction of Prof. F. T. Arecchi, then at the University of Pavia, now at the University of Florence, and Dr. D. Roess of Heraeus, Hanau. In 1981, Prof. H. Walther, University of Munich and Max-Planck Institut fur Quantenoptik joined as co-director. Each year the Directors choose a subj~ct of particular interest, alternating fundamental topics with technological ones, and ask colleagues specifically competent in the chosen areas to take the scientific responsibility for that course.
Author : Richard H. Huddlestone
Publisher :
ISBN 13 :
Total Pages : 652 pages
Book Rating : 4.3/5 (91 download)
Download or read book Plasma Diagnostic Techniques written by Richard H. Huddlestone and published by . This book was released on 1965 with total page 652 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Jonathan C. White
Publisher : Springer Science & Business Media
ISBN 13 : 3662106353
Total Pages : 413 pages
Book Rating : 4.6/5 (621 download)
Download or read book Tunable Lasers written by Jonathan C. White and published by Springer Science & Business Media. This book was released on 2013-03-14 with total page 413 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ever since the invention of the laser itself, the spectroscopist has dreamed of lasers that could be tuned continuously over whatever set of resonances he wished to study. Two developments of the mid-1960s - the optical paramet ric oscillator and the dye laser - were the first to begin to fulfill that dream. The cw dye laser, with its ability to produce extremely narrow linewidths, was particularly successful and revitalized the study of atomic physics. Other, complementary developments soon followed. These included the excimer, color center, and high pressure gas lasers, as well as Raman shifting and four wave mixing techniques for further extending the tuning ranges of such primary tunable laser sources. By the end of the 1970s, continuously or quasi-continuously tunable coherent sources were thus available for the visible and the near infrared, and a good part of the ultraviolet and the far infrared. Despite the existence of a number of excellent treatises on individual tech nologies, to the best of our knowledge, no one has yet attempted to survey the entire field of tunable lasers in a single volume. The purpose of this book is to fill that void. It is particularly aimed at those who are not necessarily laser ex perts, but who may wish to discover quickly and with a minimum of effort the best technology to satisfy a particular problem, and what the possibilities and limitations of that technology are.
Author :
Publisher :
ISBN 13 :
Total Pages : 782 pages
Book Rating : 4.3/5 (129 download)
Download or read book Energy Research Abstracts written by and published by . This book was released on 1995 with total page 782 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Federico Canova
Publisher : Springer
ISBN 13 : 3662474433
Total Pages : 205 pages
Book Rating : 4.6/5 (624 download)
Download or read book Optical Technologies for Extreme-Ultraviolet and Soft X-ray Coherent Sources written by Federico Canova and published by Springer. This book was released on 2015-08-17 with total page 205 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book reviews the most recent achievements in optical technologies for XUV and X-ray coherent sources. Particular attention is given to free-electron-laser facilities, but also to other sources available at present, such as synchrotrons, high-order laser harmonics and X-ray lasers. The optical technologies relevant to each type of source are discussed. In addition, the main technologies used for photon handling and conditioning, namely multilayer mirrors, adaptive optics, crystals and gratings are explained. Experiments using coherent light received during the last decades a lot of attention for the X-ray regime. Strong efforts were taken for the realization of almost fully coherent sources, e.g. the free-electron lasers, both as independent sources in the femtosecond and attosecond regimes and as seeding sources for free-electron-lasers and X-ray gas lasers. In parallel to the development of sources, optical technologies for photon handling and conditioning of such coherent and intense X-ray beams advanced. New problems were faced for the realization of optical components of beamlines demanding to manage coherent X-ray photons, e.g. the preservation of coherence and time structure of ultra short pulses.
Author : Wolfgang Demtröder
Publisher : Springer Science & Business Media
ISBN 13 : 354073418X
Total Pages : 469 pages
Book Rating : 4.5/5 (47 download)
Download or read book Laser Spectroscopy written by Wolfgang Demtröder and published by Springer Science & Business Media. This book was released on 2008-05-31 with total page 469 pages. Available in PDF, EPUB and Kindle. Book excerpt: Keeping abreast of the latest techniques and applications, this new edition of the standard reference and graduate text on laser spectroscopy has been completely revised and expanded. While the general concept is unchanged, the new edition features a broad array of new material, including applications in chemical analysis, medical diagnostics, and engineering. No other book with such a broad scope is available. The author is one of the most renowned experts in this area. The book is well illustrated, and is supplemented by an extensive set of references. It will benefit all students and scientists working in the field.
Author :
Publisher :
ISBN 13 :
Total Pages : 456 pages
Book Rating : 4.:/5 (31 download)
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 456 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.
