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Author : Yu-Chong Tai
Publisher :
ISBN 13 :
Total Pages : 400 pages
Book Rating : 4.:/5 (7 download)
Download or read book IC-processed Polysilicon Micromechanics written by Yu-Chong Tai and published by . This book was released on 1989 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Abraham Phillip Lee
Publisher :
ISBN 13 :
Total Pages : 344 pages
Book Rating : 4.:/5 (33 download)
Download or read book Impact Actuation of Polysilicon Micromechanical Structures written by Abraham Phillip Lee and published by . This book was released on 1992 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Sami Franssila
Publisher : John Wiley & Sons
ISBN 13 : 1119991897
Total Pages : 534 pages
Book Rating : 4.1/5 (199 download)
Download or read book Introduction to Microfabrication written by Sami Franssila and published by John Wiley & Sons. This book was released on 2010-10-29 with total page 534 pages. Available in PDF, EPUB and Kindle. Book excerpt: This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes: expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques 200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of microfabrication 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike. www.wiley.com/go/Franssila_Micro2e
Author :
Publisher :
ISBN 13 :
Total Pages : 124 pages
Book Rating : 4.3/5 (91 download)
Download or read book Micromechanical Systems written by and published by . This book was released on 1993 with total page 124 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : David William Burns
Publisher :
ISBN 13 :
Total Pages : 448 pages
Book Rating : 4.:/5 (89 download)
Download or read book Micromechanics of Integrated Sensors and the Planar Processed Pressure Transducer written by David William Burns and published by . This book was released on 1988 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : National Research Council
Publisher : National Academies Press
ISBN 13 : 0309059801
Total Pages : 76 pages
Book Rating : 4.3/5 (9 download)
Download or read book Microelectromechanical Systems written by National Research Council and published by National Academies Press. This book was released on 1998-01-01 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.
Author : Leslie Ann Field
Publisher :
ISBN 13 :
Total Pages : 420 pages
Book Rating : 4.:/5 (35 download)
Download or read book Fluid-actuated Micromachined Rotors and Gears written by Leslie Ann Field and published by . This book was released on 1991 with total page 420 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1420055194
Total Pages : 672 pages
Book Rating : 4.4/5 (2 download)
Download or read book Manufacturing Techniques for Microfabrication and Nanotechnology written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 672 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Author : T. Fukuda
Publisher : Elsevier
ISBN 13 : 0080536549
Total Pages : 278 pages
Book Rating : 4.0/5 (85 download)
Download or read book Micro Mechanical Systems written by T. Fukuda and published by Elsevier. This book was released on 1998-07-24 with total page 278 pages. Available in PDF, EPUB and Kindle. Book excerpt: In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.
Author : Henry G. Hughes
Publisher : The Electrochemical Society
ISBN 13 : 9781566772068
Total Pages : 286 pages
Book Rating : 4.7/5 (72 download)
Download or read book Proceedings of the Symposium on Microstructures and Microfabricated Systems IV written by Henry G. Hughes and published by The Electrochemical Society. This book was released on 1998 with total page 286 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : A. Preumont
Publisher : Springer Science & Business Media
ISBN 13 : 9401004838
Total Pages : 395 pages
Book Rating : 4.4/5 (1 download)
Download or read book Responsive Systems for Active Vibration Control written by A. Preumont and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 395 pages. Available in PDF, EPUB and Kindle. Book excerpt: Structural vibrations have become the critical factor limiting the performance of many engineering systems, typical amplitudes ranging from meters to a few nanometers. Many acoustic nuisances in transportation systems and residential and office buildings are also related to structural vibrations. The active control of such vibrations involves nine orders of magnitude of vibration amplitude, which exerts a profound influence on the technology. Active vibration control is highly multidisciplinary, involving structural vibration, acoustics, signal processing, materials science, and actuator and sensor technology. Chapters 1-3 of this book provide a state-of-the-art introduction to active vibration control, active sound control, and active vibroacoustic control, respectively. Chapter 4 discusses actuator/sensor placement, Chapter 5 deals with robust control of vibrating structures, Chapter 6 discusses finite element modelling of piezoelectric continua and Chapter 7 addresses the latest trends in piezoelectric multiple-degree-of-freedom actuators/sensors. Chapters 8-12 deal with example applications, including semi-active joints, active isolation and health monitoring. Chapter 13 addresses MEMS technology, while Chapter 14 discusses the design of power amplifiers for piezoelectric actuators.
Author : Wendong Zhang
Publisher : John Wiley & Sons
ISBN 13 : 1118717961
Total Pages : 341 pages
Book Rating : 4.1/5 (187 download)
Download or read book Measurement Technology for Micro-Nanometer Devices written by Wendong Zhang and published by John Wiley & Sons. This book was released on 2017-01-17 with total page 341 pages. Available in PDF, EPUB and Kindle. Book excerpt: A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices
Author : A. Peter Jardine
Publisher :
ISBN 13 :
Total Pages : 344 pages
Book Rating : 4.3/5 (91 download)
Download or read book Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems: Volume 276 written by A. Peter Jardine and published by . This book was released on 1992-10-26 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author : Zhaoying Zhou
Publisher : Springer Science & Business Media
ISBN 13 : 3642182933
Total Pages : 1011 pages
Book Rating : 4.6/5 (421 download)
Download or read book Microsystems and Nanotechnology written by Zhaoying Zhou and published by Springer Science & Business Media. This book was released on 2012-08-30 with total page 1011 pages. Available in PDF, EPUB and Kindle. Book excerpt: “Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies. Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.
Author : Antoni Rogalski
Publisher : CRC Press
ISBN 13 : 100054348X
Total Pages : 551 pages
Book Rating : 4.0/5 (5 download)
Download or read book Detection of Optical Signals written by Antoni Rogalski and published by CRC Press. This book was released on 2022-06-09 with total page 551 pages. Available in PDF, EPUB and Kindle. Book excerpt: Detection of Optical Signals provides a comprehensive overview of important technologies for photon detection, from the X-ray through ultraviolet, visible, infrared to far-infrared spectral regions. It uniquely combines perspectives from many disciplines, particularly within physics and electronics, which are necessary to have a complete understanding of optical receivers. This interdisciplinary textbook aims to: Guide readers into more detailed and technical treatments of readout optical signals Give a broad overview of optical signal detection including terahertz region and two-dimensional material Help readers further their studies by offering chapter-end problems and recommended reading. This is an invaluable resource for graduate students in physics and engineering, as well as a helpful refresher for those already working with aerospace sensors and systems, remote sensing, thermal imaging, military imaging, optical telecommunications, infrared spectroscopy, and light detection.
Author : Bharat Bushan
Publisher : CRC Press
ISBN 13 : 1000359506
Total Pages : 1323 pages
Book Rating : 4.0/5 (3 download)
Download or read book Handbook of Micro/Nano Tribology written by Bharat Bushan and published by CRC Press. This book was released on 2020-10-28 with total page 1323 pages. Available in PDF, EPUB and Kindle. Book excerpt: This second edition of Handbook of Micro/Nanotribology addresses the rapid evolution within this field, serving as a reference for the novice and the expert alike. Two parts divide this handbook: Part I covers basic studies, and Part II addresses design, construction, and applications to magnetic storage devices and MEMS. Discussions include: surface physics and methods for physically and chemically characterizing solid surfaces roughness characterization and static contact models using fractal analysis sliding at the interface and friction on an atomic scale scratching and wear as a result of sliding nanofabrication/nanomachining as well as nano/picoindentation lubricants for minimizing friction and wear surface forces and microrheology of thin liquid films measurement of nanomechanical properties of surfaces and thin films atomic-scale simulations of interfacial phenomena micro/nanotribology and micro/nanomechanics of magnetic storage devices This comprehensive book contains 16 chapters contributed by more than 20 international researchers. In each chapter, the presentation starts with macroconcepts and then lead to microconcepts. With more than 500 illustrations and 50 tables, Handbook of Micro/Nanotribology covers the range of relevant topics, including characterization of solid surfaces, measurement techniques and applications, and theoretical modeling of interfaces. What's New in the Second Edition? New chapters on: AFM instrumentation Surface forces and adhesion Design and construction of magnetic storage devices Microdynamical devices and systems Mechanical properties of materials in microstructure Micro/nanotribology and micro/nanomechanics of MEMS devices
Author : Mohamed Gad-el-Hak
Publisher : CRC Press
ISBN 13 : 9781420050905
Total Pages : 1386 pages
Book Rating : 4.0/5 (59 download)
Download or read book The MEMS Handbook written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2001-09-27 with total page 1386 pages. Available in PDF, EPUB and Kindle. Book excerpt: The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS. The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.
