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Author :
Publisher :
ISBN 13 :
Total Pages : 246 pages
Book Rating : 4.3/5 (91 download)
Download or read book European Conference on Mask Technology for Integrated Circuits and Microcomponents written by and published by . This book was released on 2004 with total page 246 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : BACUS (Technical group)
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 194 pages
Book Rating : 4.F/5 ( download)
Download or read book 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 written by BACUS (Technical group) and published by SPIE-International Society for Optical Engineering. This book was released on 1999 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher : Margret Schneider
ISBN 13 : 3800728117
Total Pages : 258 pages
Book Rating : 4.8/5 (7 download)
Download or read book EMC 2004 written by and published by Margret Schneider. This book was released on 2004 with total page 258 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 264 pages
Book Rating : 4.:/5 (746 download)
Download or read book 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents written by and published by . This book was released on 2003 with total page 264 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Uwe Behringer
Publisher : Margret Schneider
ISBN 13 : 3800728753
Total Pages : 301 pages
Book Rating : 4.8/5 (7 download)
Download or read book EMLC 2005 written by Uwe Behringer and published by Margret Schneider. This book was released on 2005 with total page 301 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : European Conference on Mask Technology for Integrated Circuits and Microcomponents
Publisher :
ISBN 13 :
Total Pages : 210 pages
Book Rating : 4.:/5 (11 download)
Download or read book 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents written by European Conference on Mask Technology for Integrated Circuits and Microcomponents and published by . This book was released on 2004 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Uwe F. W. Behringer
Publisher : Society of Photo Optical
ISBN 13 : 9780819436146
Total Pages : 252 pages
Book Rating : 4.4/5 (361 download)
Download or read book 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents written by Uwe F. W. Behringer and published by Society of Photo Optical. This book was released on 2000 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Uwe F. W. Behringer
Publisher : Society of Photo Optical
ISBN 13 : 9780819450180
Total Pages : 264 pages
Book Rating : 4.4/5 (51 download)
Download or read book 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents written by Uwe F. W. Behringer and published by Society of Photo Optical. This book was released on 2003 with total page 264 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 606 pages
Book Rating : 4.3/5 (91 download)
Download or read book Annual Symposium on Photomask Technology written by and published by . This book was released on 2002 with total page 606 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 written by and published by . This book was released on 1999 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Syed Rizvi
Publisher : CRC Press
ISBN 13 : 1420028782
Total Pages : 728 pages
Book Rating : 4.4/5 (2 download)
Download or read book Handbook of Photomask Manufacturing Technology written by Syed Rizvi and published by CRC Press. This book was released on 2018-10-03 with total page 728 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the semiconductor industry attempts to increase the number of functions that will fit into the smallest space on a chip, it becomes increasingly important for new technologies to keep apace with these demands. Photomask technology is one of the key areas to achieving this goal. Although brief overviews of photomask technology exist in the literature, the Handbook of Photomask Manufacturing Technology is the first in-depth, comprehensive treatment of existing and emerging photomask technologies available. The Handbook of Photomask Manufacturing Technology features contributions from 40 internationally prominent authors from industry, academia, government, national labs, and consortia. These authors discuss conventional masks and their supporting technologies, as well as next-generation, non-optical technologies such as extreme ultraviolet, electron projection, ion projection, and x-ray lithography. The book begins with an overview of the history of photomask development. It then demonstrates the steps involved in designing, producing, testing, inspecting, and repairing photomasks, following the sequences observed in actual production. The text also includes sections on materials used as well as modeling and simulation. Continued refinements in the photomask-making process have ushered in the sub-wavelength era in nanolithography. This invaluable handbook synthesizes these refinements and provides the tools and possibilities necessary to reach the next generation of microfabrication technologies.
Author : Günter Wilkening
Publisher : John Wiley & Sons
ISBN 13 : 3527606874
Total Pages : 541 pages
Book Rating : 4.5/5 (276 download)
Download or read book Nanoscale Calibration Standards and Methods written by Günter Wilkening and published by John Wiley & Sons. This book was released on 2006-05-12 with total page 541 pages. Available in PDF, EPUB and Kindle. Book excerpt: The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and Methods) at the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on Quantitative Microscopy. The series stimulates the exchange of information between manufacturers of relevant hard- and software and the users in science and industry. Topics addressed in these proceedings are a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing
Author : Arvi Kruusing
Publisher : Elsevier
ISBN 13 : 0080555047
Total Pages : 465 pages
Book Rating : 4.0/5 (85 download)
Download or read book Handbook of Liquids-Assisted Laser Processing written by Arvi Kruusing and published by Elsevier. This book was released on 2010-07-07 with total page 465 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser processing of solid materials has been commonly performed in gas ambient. Having the workpiece immersed into liquid, having a liquid film on it, or soaking the material with liquid gives several advantages such as removal of the debris, lowering the heat load on the workpiece, and confining the vapour and plasma, resulting in higher shock pressure on the surface. Introduced in the 1980s, neutral liquids assisted laser processing (LALP) has proved to be advantageous in the cutting of heat-sensitive materials, shock peening of machine parts, cleaning of surfaces, fabrication of micro-optical components, and for generation of nanoparticles in liquids. The liquids used range from water through organic solvents to cryoliquids. The primary aim of Handbook of Liquids-Assisted Laser Processing is to present the essentials of previous research (tabulated data of experimental conditions and results), and help researchers develop new processing and diagnostics techniques (presenting data of liquids and a review of physical phenomena associated with LALP). Engineers can use the research results and technological innovation information to plan their materials processing tasks. Laser processing in liquids has been applied to a number of different tasks in various fields such as mechanical engineering, microengineering, chemistry, optics, and bioscience. A comprehensive glossary with definitions of the terms and explanations has been added. The book covers the use of chemically inert liquids under normal conditions. Laser chemical processing examples are presented for comparison only. - First book in this rapidly growing field impacting mechanical and micro/nano-engineering - Covers different kinds of liquid-assisted laser processing of a large variety of materials - Covers lasers emitting from UV to IR with pulse lengths down to femtoseconds - Reviews over 500 scientific articles and 300 inventions and tabulates their main features - Gives a qualitative and quantitative description of the physical phenomena associated with LALP - Tabulates 61 parameters for 100 liquids - Glossary of over 200 terms and abbreviations
Author : Francesco De Bona
Publisher : Springer Science & Business Media
ISBN 13 : 321148549X
Total Pages : 219 pages
Book Rating : 4.2/5 (114 download)
Download or read book Microsystems Mechanical Design written by Francesco De Bona and published by Springer Science & Business Media. This book was released on 2007-03-23 with total page 219 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.
Author : British Library. Document Supply Centre
Publisher :
ISBN 13 :
Total Pages : 696 pages
Book Rating : 4.F/5 ( download)
Download or read book Index of Conference Proceedings written by British Library. Document Supply Centre and published by . This book was released on 2002 with total page 696 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Phillip L. Reu
Publisher :
ISBN 13 :
Total Pages : 172 pages
Book Rating : 4.:/5 (89 download)
Download or read book Comparative Analysis of Next Generation Ligthography Masks written by Phillip L. Reu and published by . This book was released on 2001 with total page 172 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Juan Rodríguez-Hernández
Publisher : Springer
ISBN 13 : 3319170619
Total Pages : 388 pages
Book Rating : 4.3/5 (191 download)
Download or read book Design of Polymeric Platforms for Selective Biorecognition written by Juan Rodríguez-Hernández and published by Springer. This book was released on 2015-08-21 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book addresses in an integrated manner all the critical aspects for building the next generation of biorecognition platforms - from biomolecular recognition to surface fabrication. The most recent strategies reported to create surface nano and micropatterns are thoroughly analyzed. This book contains descriptions of the types of molecules immobilized at surfaces that can be used for specific biorecognition, how to immobilize them, and how to control their arrangement and functionality at the surface. Small molecules, peptides, proteins and oligonucleotides are at the core of the biorecognition processes and will constitute a special part of this book. The authors include detailed information on biological processes, biomolecular screening, biosensing, diagnostic and detection devices, tissue engineering, development of biocompatible materials and biomedical devices.
