Design and Fabrication of Bulk Acoustic Wave Resonator for Wireless Applications

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ISBN 13 :
Total Pages : 108 pages
Book Rating : 4.:/5 (515 download)

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Book Synopsis Design and Fabrication of Bulk Acoustic Wave Resonator for Wireless Applications by : Guntae Kim

Download or read book Design and Fabrication of Bulk Acoustic Wave Resonator for Wireless Applications written by Guntae Kim and published by . This book was released on 2002 with total page 108 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Tuneable Film Bulk Acoustic Wave Resonators

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Publisher : Springer Science & Business Media
ISBN 13 : 1447149440
Total Pages : 255 pages
Book Rating : 4.4/5 (471 download)

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Book Synopsis Tuneable Film Bulk Acoustic Wave Resonators by : Spartak Gevorgian

Download or read book Tuneable Film Bulk Acoustic Wave Resonators written by Spartak Gevorgian and published by Springer Science & Business Media. This book was released on 2013-02-14 with total page 255 pages. Available in PDF, EPUB and Kindle. Book excerpt: To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high. Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc. Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis. The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices.

Acoustic Wave and Electromechanical Resonators

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Publisher : Artech House
ISBN 13 : 1607839784
Total Pages : 364 pages
Book Rating : 4.6/5 (78 download)

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Book Synopsis Acoustic Wave and Electromechanical Resonators by : Humberto Campanella

Download or read book Acoustic Wave and Electromechanical Resonators written by Humberto Campanella and published by Artech House. This book was released on 2010 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.

RF Bulk Acoustic Wave Filters for Communications

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Publisher : Artech House
ISBN 13 : 1596933224
Total Pages : 293 pages
Book Rating : 4.5/5 (969 download)

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Book Synopsis RF Bulk Acoustic Wave Filters for Communications by : Ken-ya Hashimoto

Download or read book RF Bulk Acoustic Wave Filters for Communications written by Ken-ya Hashimoto and published by Artech House. This book was released on 2009 with total page 293 pages. Available in PDF, EPUB and Kindle. Book excerpt: This timely book presents a thorough overview of RF BAW filters, covering a vast range of technologies, optimal device design, filter topologies, packaging, fabrication processes, and high quality piezoelectric thin films. Moreover, the book discusses the integration of BAW filters in RF systems.

Multilayer Integrated Film Bulk Acoustic Resonators

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Publisher : Springer Science & Business Media
ISBN 13 : 3642317766
Total Pages : 159 pages
Book Rating : 4.6/5 (423 download)

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Book Synopsis Multilayer Integrated Film Bulk Acoustic Resonators by : Yafei Zhang

Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Yafei Zhang and published by Springer Science & Business Media. This book was released on 2012-08-28 with total page 159 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.

Simulation and Fabrication of Thin Film Bulk Acoustic Wave Resonator*Project Supported by the National Natural Science Foundation of China (Nos. 61274119, 61306141, 61335008) and the Natural Science Foundation of Jiangsu Province (No. BK20131099).

Download Simulation and Fabrication of Thin Film Bulk Acoustic Wave Resonator*Project Supported by the National Natural Science Foundation of China (Nos. 61274119, 61306141, 61335008) and the Natural Science Foundation of Jiangsu Province (No. BK20131099). PDF Online Free

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ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (15 download)

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Book Synopsis Simulation and Fabrication of Thin Film Bulk Acoustic Wave Resonator*Project Supported by the National Natural Science Foundation of China (Nos. 61274119, 61306141, 61335008) and the Natural Science Foundation of Jiangsu Province (No. BK20131099). by :

Download or read book Simulation and Fabrication of Thin Film Bulk Acoustic Wave Resonator*Project Supported by the National Natural Science Foundation of China (Nos. 61274119, 61306141, 61335008) and the Natural Science Foundation of Jiangsu Province (No. BK20131099). written by and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Abstract: In this paper, we present the simulation and fabrication of a thin film bulk acoustic resonator (FBAR). In order to improve the accuracy of simulation, an improved Mason model was introduced to design the resonator by taking the coupling effect between electrode and substrate into consideration. The resonators were fabricated by the eight inch CMOS process, and the measurements show that the improved Mason model is more accurate than a simple Mason model. The Q s ( Q at series resonance), Q p ( Q at parallel resonance), Q max and k t 2 of the FBAR were measured to be 695, 814, 1049, and 7.01% respectively, showing better performance than previous reports.

Design, Modeling and Fabrication of Shear Mode Bulk Acoustic Wave Sensor as a Potential Biosensor

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Publisher :
ISBN 13 :
Total Pages : 117 pages
Book Rating : 4.:/5 (812 download)

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Book Synopsis Design, Modeling and Fabrication of Shear Mode Bulk Acoustic Wave Sensor as a Potential Biosensor by : Chi-Jung Cheng

Download or read book Design, Modeling and Fabrication of Shear Mode Bulk Acoustic Wave Sensor as a Potential Biosensor written by Chi-Jung Cheng and published by . This book was released on 2012 with total page 117 pages. Available in PDF, EPUB and Kindle. Book excerpt: There has been an increasing interest in development of thin film bulk acoustic wave resonator devices for chemical and biological sensing applications in the environmental and biomedical industries. The zinc oxide thin film FBAR devices provide attractive advantages, such as high resonant frequency, small size, and rapid response. Typically, the ZnO-based FBAR devices are operated in the longitudinal wave mode where the ZnO crystallites are perpendicular to the substrate. However, the longitudinal wave mode is adversely affected when used in liquid environments. To overcome this limitation, the shear mode solidly mounted film bulk acoustic wave resonator device is presented in this dissertation.

Surface Acoustic Wave Devices for Mobile and Wireless Communications, Four-Volume Set

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Publisher : Academic Press
ISBN 13 : 9780121573409
Total Pages : 660 pages
Book Rating : 4.5/5 (734 download)

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Book Synopsis Surface Acoustic Wave Devices for Mobile and Wireless Communications, Four-Volume Set by : Colin Campbell

Download or read book Surface Acoustic Wave Devices for Mobile and Wireless Communications, Four-Volume Set written by Colin Campbell and published by Academic Press. This book was released on 1998-06-17 with total page 660 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written for readers with or without surface acoustic wave (SAW) experience, this book covers a wide range of SAW filter- and device-design techniques as well as applications to mobile and wireless circuitry. It provides numerous references and worked examples on SAW devices to highlight various design aspects, and contains illustrations from many leading electronic companies around the world. The first half of the book covers the principles of SAW devices. The secondhalf focuses on applications to the mobile/wireless field, including SAW devices for antenna duplexers, RF and IF filters for cellular cordless phones, front-end filters for wireless transceivers, fixed and tunable oscillators, filters for on-board satellite communications, as well as coding and convolvers for indoor/outdoor spread-spectrum communications. Surface Acoustic Wave Devices for Mobile and Wireless Communications serves as an excellent sourcebook for engineers and designers with some SAW background, or for technical staff with no prior knowledge of SAW devices who need to know how this technology can help their products. It can be used as a textbook for senior and graduate students engaged in the study of signal processing techniques and systems for mobile communications. Key Features * First SAW text applied to mobile and wireless communications * Written by an award-winning researcher with over 20 years of SAW device experience * Presents the theory and design of major SAW devices for mobile/wireless communications as applied to some of the major telecommunication standards * Accessible to both engineering and scientific readers with or without prior SAW device knowledge

Modeling and Measurement Methods for Acoustic Waves and for Acoustic Microdevices

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Publisher : BoD – Books on Demand
ISBN 13 : 9535111892
Total Pages : 616 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Modeling and Measurement Methods for Acoustic Waves and for Acoustic Microdevices by : Marco G. Beghi

Download or read book Modeling and Measurement Methods for Acoustic Waves and for Acoustic Microdevices written by Marco G. Beghi and published by BoD – Books on Demand. This book was released on 2013-08-28 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: Acoustics is a mature field which enjoys a never ending youth. New developments are induced by either the search for a better understanding, or by technological innovations. Micro-fabrication techniques introduced a whole new class of microdevices, which exploit acoustic waves for various tasks, and in particular for information processing and for sensing purposes. Performance improvements are achievable by better modelling tools, able to deal with more complex configurations, and by more refined techniques of fabrication and of integration in technological systems, like wireless communications. Several chapters of this book deal with modelling and fabrication techniques for microdevices, including unconventional phenomena and configurations. But this is far from exhausting the research lines in acoustics. Theoretical analyses and modelling techniques are presented, for phenomena ranging from the detection of cracks to the acoustics of the oceans. Measurement methods are also discussed, which probe by acoustic waves the properties of widely different systems.

Thin-film Bulk Acoustic Wave Resonators (FBAR)

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Publisher :
ISBN 13 : 9788469165409
Total Pages : 234 pages
Book Rating : 4.1/5 (654 download)

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Book Synopsis Thin-film Bulk Acoustic Wave Resonators (FBAR) by : Humberto Campanella Pineda

Download or read book Thin-film Bulk Acoustic Wave Resonators (FBAR) written by Humberto Campanella Pineda and published by . This book was released on 2008 with total page 234 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Design and Fabrication of Tunable Thickness Excitation Film Bulk Acoustic Resonators and Stacked Crystal Filters for High Frequency Communication Systems

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Publisher :
ISBN 13 :
Total Pages : 194 pages
Book Rating : 4.:/5 (18 download)

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Book Synopsis Design and Fabrication of Tunable Thickness Excitation Film Bulk Acoustic Resonators and Stacked Crystal Filters for High Frequency Communication Systems by : Hasnain Lakdawala

Download or read book Design and Fabrication of Tunable Thickness Excitation Film Bulk Acoustic Resonators and Stacked Crystal Filters for High Frequency Communication Systems written by Hasnain Lakdawala and published by . This book was released on 1997 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Switchable and Tunable Bulk Acoustic Wave Devices Based on Ferroelectric Material

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Publisher :
ISBN 13 :
Total Pages : 203 pages
Book Rating : 4.:/5 (14 download)

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Book Synopsis Switchable and Tunable Bulk Acoustic Wave Devices Based on Ferroelectric Material by : Almonir Abdulgader Mansour

Download or read book Switchable and Tunable Bulk Acoustic Wave Devices Based on Ferroelectric Material written by Almonir Abdulgader Mansour and published by . This book was released on 2017 with total page 203 pages. Available in PDF, EPUB and Kindle. Book excerpt: The explosive development of personal communications systems, navigation, satellite communications as well as personal computer and data processing systems together with the constant demand for higher speeds and larger bandwidths has driven fabrication technology to its limits. This, in turn, necessitates the development of novel functional materials for the fabrication of devices with superior performance and higher capacity at reduced manufacturing costs. Ferroelectric materials such as barium strontium titanate (BST) and strontium titanium oxide (STO) have received more attention by researchers and industry because of their field-induced piezoelectric property. This property gives these types of ferroelectric materials the ability to be switchable and tunable in the presence of an electric field. These features have allowed the ferroelectric materials to be used in many applications such as non-volatile memory and DRAMs, sensors, pyroelectric detectors, and tunable microwave devices. Therefore, with the ever increasing complexity in RF front-end receivers, and the demand for services (which in turn requires more functionalities), ferroelectric bulk acoustic wave (BAW) resonators and filters that are intrinsically switchable and promise to reduce the size and complexity of component parts. In this work, we present the design, fabrication and experimental evaluation of switchable and tunable thin film bulk acoustic wave (BAW) resonators, filters and duplexers for radio frequency (RF) applications. The switchability and tunability of these devices come from utilizing the electrostrictive effect of ferroelectric materials such as barium strontium titanate (BST) with the application of an external DC-bias voltage. The BAW resonators, filters and duplexers in this work were fabricated on different substrates as solidly mounted resonator (SMR) structure with number of periodic layers of silicon dioxide and tantalum oxide as a Bragg reflector in order to acoustically isolate the resonator from the damping effect of the substrate, enhancing the quality factor and temperature compensation.

Intelligent Systems Design and Applications

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Publisher : Springer Nature
ISBN 13 : 3031648471
Total Pages : 523 pages
Book Rating : 4.0/5 (316 download)

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Book Synopsis Intelligent Systems Design and Applications by : Ajith Abraham

Download or read book Intelligent Systems Design and Applications written by Ajith Abraham and published by Springer Nature. This book was released on with total page 523 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Design and Fabrication of Surface Acoustic Wave Resonators Towards Compatibility with Localized Fusion Bonding

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Publisher :
ISBN 13 :
Total Pages : 120 pages
Book Rating : 4.:/5 (111 download)

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Book Synopsis Design and Fabrication of Surface Acoustic Wave Resonators Towards Compatibility with Localized Fusion Bonding by : Adam Lazar Zachar

Download or read book Design and Fabrication of Surface Acoustic Wave Resonators Towards Compatibility with Localized Fusion Bonding written by Adam Lazar Zachar and published by . This book was released on 2018 with total page 120 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Piezoelectricity, Acoustic Waves and Device Applications

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Publisher : World Scientific
ISBN 13 : 9812708138
Total Pages : 400 pages
Book Rating : 4.8/5 (127 download)

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Book Synopsis Piezoelectricity, Acoustic Waves and Device Applications by : Ji Wang

Download or read book Piezoelectricity, Acoustic Waves and Device Applications written by Ji Wang and published by World Scientific. This book was released on 2007 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume covers important subjects in the field of piezoelectric devices and applications with the latest research on piezoelectricity, acoustic waves, manufacturing technology, and design techniques. It includes up-to-date research and information on materials, new products, technological trends, and design methods of benefit to academics and researchers in the piezoelectric device industry. Contributors to this volume include prominent experts such as Clemens Ruppel of Epcos, Daining Fang of Tsinghua University, Tong-Yi Zhang of University of Science and Technology, Hong Kong, and CS Lam of TXC Corporation. A number of papers have been dedicated to Professor Harry F Tiersten of Resselear Polytechnic Institute, who passed away in 2006, for his contributions to the fundamental theory of piezoelectricity and methods for acoustic wave device analysis. Readership: Graduate students, academics, researchers, and professionals in piezoelectric devices and applications for communication, sensors, MEMS, and other systems.

Design, Fabrication, and Characterization of Beam - Supported Aluminum Nitride Thin Film Bulk Acoustic Resonators

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Publisher :
ISBN 13 :
Total Pages : 340 pages
Book Rating : 4.:/5 (759 download)

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Book Synopsis Design, Fabrication, and Characterization of Beam - Supported Aluminum Nitride Thin Film Bulk Acoustic Resonators by : Lori Ann Callaghan

Download or read book Design, Fabrication, and Characterization of Beam - Supported Aluminum Nitride Thin Film Bulk Acoustic Resonators written by Lori Ann Callaghan and published by . This book was released on 2005 with total page 340 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-mechanical filters comprised of bulk acoustic resonators are being fabricated and studied as a solution to the demands for low power consumption, high functionality devices in the telecommunication industry. A novel, suspended thin Film Bulk Acoustic wave Resonator (SFBAR) has been fabricated using an aluminum nitride film sputtered directly on a 100 silicon substrate. The suspended membrane design uses thin beams to support, as well as electrically connect, the resonator. The SFBAR has been fabricated by combining both thin film processing and bulk silicon micro machining. The AlN was etched in an Inductively Coupled Plasma (ICP) chlorine etch, using titanium dioxide as the masking material. A silicon Deep Reactive Ion Etch (DRIE) was used to create an open ended air cavity with a novel circular shape. A representative resonator, designated here as sample W9HS8 resonator 10018, was characterized with a Quality Factor values at resonance and anti-resonance of 68 and 151,

Multilayer Integrated Film Bulk Acoustic Resonators

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Publisher :
ISBN 13 : 9787313087362
Total Pages : 152 pages
Book Rating : 4.0/5 (873 download)

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Book Synopsis Multilayer Integrated Film Bulk Acoustic Resonators by : Yafei Zhang

Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Yafei Zhang and published by . This book was released on 2013 with total page 152 pages. Available in PDF, EPUB and Kindle. Book excerpt: