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Author : Shubing Zou
Publisher :
ISBN 13 :
Total Pages : 142 pages
Book Rating : 4.:/5 (36 download)
Download or read book Deposition and Characterization of HfO2 Thin Films written by Shubing Zou and published by . This book was released on 1994 with total page 142 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Yong Gao
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (139 download)
Download or read book Deposition, Stabilization and Characterization of ZrO2 and HfO2 Thin Films for High Κ Gate Dielectrics (PHD) written by Yong Gao and published by . This book was released on with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Pratap Murali
Publisher :
ISBN 13 :
Total Pages : 288 pages
Book Rating : 4.:/5 (72 download)
Download or read book Electrical Characterization of Hafnium Oxide (HfO2) Thin Films Deposited by RF Sputtering written by Pratap Murali and published by . This book was released on 2006 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Raja Kalidas
Publisher :
ISBN 13 :
Total Pages : 114 pages
Book Rating : 4.:/5 (173 download)
Download or read book Deposition and Characterization of Thin Films of Metals and Compounds written by Raja Kalidas and published by . This book was released on 1986 with total page 114 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Ali Mahmoodinezhad
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (135 download)
Download or read book Atomic Layer Deposition and Characterization of Metal Oxide Thin Films written by Ali Mahmoodinezhad and published by . This book was released on 2022 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Deposition and Characterization of Superconductive and Antiferromagnetic Bi-layer Thin Films written by and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Bhanu P. Dharmaiahgari
Publisher :
ISBN 13 :
Total Pages : 160 pages
Book Rating : 4.:/5 (574 download)
Download or read book Physical and Electrical Characterization of Hafnium Oxide Thin Films Deposited by Pulsed Laser Deposition Technique written by Bhanu P. Dharmaiahgari and published by . This book was released on 2004 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 38 pages
Book Rating : 4.:/5 (837 download)
Download or read book Characterization of electron beam deposited thin films of HfO2 and binary thin films of (HfO2:SiO2) by XRD and exafs measurements written by and published by . This book was released on 2009 with total page 38 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Gül Dogan
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (134 download)
Download or read book Deposition and Characterization of Multi-functional, Complex Thin Films Using Atomic Layer Deposition for Copper Corrosion Protection written by Gül Dogan and published by . This book was released on 2022 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Julie Ann Tsai
Publisher :
ISBN 13 :
Total Pages : 187 pages
Book Rating : 4.:/5 (336 download)
Download or read book Deposition and Characterization of Silicon-germanium Alloy Thin Films on Oxide written by Julie Ann Tsai and published by . This book was released on 1995 with total page 187 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Bahadir Tunaboylu
Publisher :
ISBN 13 :
Total Pages : 452 pages
Book Rating : 4.:/5 (318 download)
Download or read book Synthesis, Deposition and Characterization of Ferroelectric Films for Electrooptic Devices written by Bahadir Tunaboylu and published by . This book was released on 1997 with total page 452 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Deposition and Characterization of Multiferroic BiFeO3 Thin Films written by and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Ramasamy Ravindran
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (318 download)
Download or read book Deposition and Characterization of High Permittivity Thin-film Dielectrics written by Ramasamy Ravindran and published by . This book was released on 2006 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: As integrated circuit (IC) devices scale to ever smaller nodes, replacing the front end dielectric has become a primary challenge. To enable greater device densities, control power consumption, and enhance performance, a new class of insulators with large dielectric constants (high-[kappa]) will need to be employed as a replacement for oxides and oxynitrides of silicon. A variety of semiconductor devices ranging from metal oxide semiconductor field effect transistors to flash and dynamic random access memories stand to benefit from new high-[kappa] dielectric thin-films. In addition, compact capacitors using high-[kappa] dielectrics can enable high density on-chip energy storage. Compounds of HfO2 and Al2O3 are among the leading high-[kappa] candidates. There is also potential in incorporating nanoparticles into an insulating medium to enhance its dielectric constant. Previously, the use of nanoparticles for this purpose has typically been performed using techniques and materials that cannot be readily incorporated into modern IC fabrication. This thesis presents the results of work on reactive electron beam evaporated Al2O3 and HfO2 thin-films, the incorporation of nanoparticles, and the characterization of these films on silicon substrates.
Author : Jiaxing Liu
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (1 download)
Download or read book Deposition and Characterization of Magnetron Sputtered Beta-Tungsten Thin Films written by Jiaxing Liu and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Cherng-Tsong Kuo
Publisher :
ISBN 13 :
Total Pages : 410 pages
Book Rating : 4.:/5 (265 download)
Download or read book Study of HfO2 Films as a High Dielectric Constant Material for IC Applications written by Cherng-Tsong Kuo and published by . This book was released on 1990 with total page 410 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Uwe Schroeder
Publisher : Woodhead Publishing
ISBN 13 : 0081024312
Total Pages : 570 pages
Book Rating : 4.0/5 (81 download)
Download or read book Ferroelectricity in Doped Hafnium Oxide written by Uwe Schroeder and published by Woodhead Publishing. This book was released on 2019-03-27 with total page 570 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ferroelectricity in Doped Hafnium Oxide: Materials, Properties and Devices covers all aspects relating to the structural and electrical properties of HfO2 and its implementation into semiconductor devices, including a comparison to standard ferroelectric materials. The ferroelectric and field-induced ferroelectric properties of HfO2-based films are considered promising for various applications, including non-volatile memories, negative capacitance field-effect-transistors, energy storage, harvesting, and solid-state cooling. Fundamentals of ferroelectric and piezoelectric properties, HfO2 processes, and the impact of dopants on ferroelectric properties are also extensively discussed in the book, along with phase transition, switching kinetics, epitaxial growth, thickness scaling, and more. Additional chapters consider the modeling of ferroelectric phase transformation, structural characterization, and the differences and similarities between HFO2 and standard ferroelectric materials. Finally, HfO2 based devices are summarized. Explores all aspects of the structural and electrical properties of HfO2, including processes, modelling and implementation into semiconductor devices Considers potential applications including FeCaps, FeFETs, NCFETs, FTJs and more Provides comparison of an emerging ferroelectric material to conventional ferroelectric materials with insights to the problems of downscaling that conventional ferroelectrics face
Author : Klaus Wetzig
Publisher : John Wiley & Sons
ISBN 13 : 3527606475
Total Pages : 390 pages
Book Rating : 4.5/5 (276 download)
Download or read book Metal Based Thin Films for Electronics written by Klaus Wetzig and published by John Wiley & Sons. This book was released on 2006-03-06 with total page 390 pages. Available in PDF, EPUB and Kindle. Book excerpt: This up-to-date handbook covers the main topics of preparation, characterization and properties of complex metal-based layer systems. The authors -- an outstanding group of researchers -- discuss advanced methods for structure, chemical and electronic state characterization with reference to the properties of thin functional layers, such as metallization and barrier layers for microelectronics, magnetoresistive layers for GMR and TMR, sensor and resistance layers. As such, the book addresses materials specialists in industry, especially in microelectronics, as well as scientists, and can also be recommended for advanced studies in materials science, analytics, surface and solid state science.
