Handbook of Advanced Plasma Processing Techniques

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Publisher : Springer Science & Business Media
ISBN 13 : 3642569897
Total Pages : 664 pages
Book Rating : 4.6/5 (425 download)

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Book Synopsis Handbook of Advanced Plasma Processing Techniques by : R.J. Shul

Download or read book Handbook of Advanced Plasma Processing Techniques written by R.J. Shul and published by Springer Science & Business Media. This book was released on 2011-06-28 with total page 664 pages. Available in PDF, EPUB and Kindle. Book excerpt: Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.

Plasma Simulations by Example

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Publisher : CRC Press
ISBN 13 : 0429801068
Total Pages : 348 pages
Book Rating : 4.4/5 (298 download)

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Book Synopsis Plasma Simulations by Example by : Lubos Brieda

Download or read book Plasma Simulations by Example written by Lubos Brieda and published by CRC Press. This book was released on 2019-12-13 with total page 348 pages. Available in PDF, EPUB and Kindle. Book excerpt: The study of plasmas is crucial in improving our understanding of the universe, and they are being increasingly utilised in key technologies such as spacecraft thrusters, plasma medicine, and fusion energy. Providing readers with an easy to follow set of examples that clearly illustrate how simulation codes are written, this book guides readers through how to develop C++ computer codes for simulating plasmas primarily with the kinetic Particle in Cell (PIC) method. This text will be invaluable to advanced undergraduates and graduate students in physics and engineering looking to learn how to put the theory to the test. Features: Provides a step-by-step introduction to plasma simulations with easy to follow examples Discusses the electrostatic and electromagnetic Particle in Cell (PIC) method on structured and unstructured meshes, magnetohydrodynamics (MHD), and Vlasov solvers Covered topics include Direct Simulation Monte Carlo (DSMC) collisions, surface interactions, axisymmetry, and parallelization strategies. Lubos Brieda has over 15 years of experience developing plasma and gas simulation codes for electric propulsion, contamination transport, and plasma-surface interactions. As part of his master’s research work, he developed a 3D ES-PIC electric propulsion plume code, Draco, which is to this date utilized by government labs and private aerospace firms to study plasma thruster plumes. His Ph.D, obtained in 2012 from George Washington University, USA, focused on a multi-scale model for Hall thrusters utilizing fluid-kinetic hybrid PIC codes. He has since then been involved in numerous projects involving development and the use of plasma simulation tools. Since 2014 he has been teaching online courses on plasma simulations through his website: particleincell.com.

Introduction to Plasma Dynamics

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Publisher : CRC Press
ISBN 13 : 1439881332
Total Pages : 828 pages
Book Rating : 4.4/5 (398 download)

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Book Synopsis Introduction to Plasma Dynamics by : A. I. Morozov

Download or read book Introduction to Plasma Dynamics written by A. I. Morozov and published by CRC Press. This book was released on 2012-12-06 with total page 828 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the twenty-first century progresses, plasma technology will play an increasing role in our lives, providing new sources of energy, ion-plasma processing of materials, wave electromagnetic radiation sources, space plasma thrusters, and more. Studies of the plasma state of matter not only accelerate technological developments but also improve the

Space Plasma Simulation

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Publisher : Springer Science & Business Media
ISBN 13 : 3540006982
Total Pages : 363 pages
Book Rating : 4.5/5 (4 download)

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Book Synopsis Space Plasma Simulation by : Jörg Büchner

Download or read book Space Plasma Simulation written by Jörg Büchner and published by Springer Science & Business Media. This book was released on 2003-04-09 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: The aim of this book is twofold: to provide an introduction for newcomers to state of the art computer simulation techniques in space plasma physics and an overview of current developments. Computer simulation has reached a stage where it can be a highly useful tool for guiding theory and for making predictions of space plasma phenomena, ranging from microscopic to global scales. The various articles are arranged, as much as possible, according to the - derlying simulation technique, starting with the technique that makes the least number of assumptions: a fully kinetic approach which solves the coupled set of Maxwell’s equations for the electromagnetic ?eld and the equations of motion for a very large number of charged particles (electrons and ions) in this ?eld. Clearly, this is also the computationally most demanding model. Therefore, even with present day high performance computers, it is the most restrictive in terms of the space and time domain and the range of particle parameters that can be covered by the simulation experiments. It still makes sense, therefore, to also use models, which due to their simp- fying assumptions, seem less realistic, although the e?ect of these assumptions on the outcome of the simulation experiments needs to be carefully assessed.

Basic Principles Of Plasma Physics

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Publisher : CRC Press
ISBN 13 : 0429970668
Total Pages : 352 pages
Book Rating : 4.4/5 (299 download)

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Book Synopsis Basic Principles Of Plasma Physics by : Setsuo Ichimaru

Download or read book Basic Principles Of Plasma Physics written by Setsuo Ichimaru and published by CRC Press. This book was released on 2018-03-08 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book describes a statistical approach to the basics of plasma physics.

Proceedings of the US-Japan Workshop on Advanced Plasma Modeling

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Publisher :
ISBN 13 :
Total Pages : 328 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Proceedings of the US-Japan Workshop on Advanced Plasma Modeling by :

Download or read book Proceedings of the US-Japan Workshop on Advanced Plasma Modeling written by and published by . This book was released on 1987 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Computational Methods in Plasma Physics

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Publisher : CRC Press
ISBN 13 : 1439810958
Total Pages : 364 pages
Book Rating : 4.4/5 (398 download)

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Book Synopsis Computational Methods in Plasma Physics by : Stephen Jardin

Download or read book Computational Methods in Plasma Physics written by Stephen Jardin and published by CRC Press. This book was released on 2010-06-02 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: Assuming no prior knowledge of plasma physics or numerical methods, Computational Methods in Plasma Physics covers the computational mathematics and techniques needed to simulate magnetically confined plasmas in modern magnetic fusion experiments and future magnetic fusion reactors. Largely self-contained, the text presents the basic concepts neces

Ideal MHD

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Publisher : Cambridge University Press
ISBN 13 : 1107006252
Total Pages : 743 pages
Book Rating : 4.1/5 (7 download)

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Book Synopsis Ideal MHD by : Jeffrey P. Freidberg

Download or read book Ideal MHD written by Jeffrey P. Freidberg and published by Cambridge University Press. This book was released on 2014-06-26 with total page 743 pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprehensive, self-contained, and clearly written, this book describes the macroscopic equilibrium and stability of high temperature plasmas.

Fundamentals of Plasma Physics

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Publisher : Cambridge University Press
ISBN 13 : 1139449737
Total Pages : 16 pages
Book Rating : 4.1/5 (394 download)

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Book Synopsis Fundamentals of Plasma Physics by : Paul M. Bellan

Download or read book Fundamentals of Plasma Physics written by Paul M. Bellan and published by Cambridge University Press. This book was released on 2008-07-31 with total page 16 pages. Available in PDF, EPUB and Kindle. Book excerpt: This rigorous explanation of plasmas is relevant to diverse plasma applications such as controlled fusion, astrophysical plasmas, solar physics, magnetospheric plasmas, and plasma thrusters. More thorough than previous texts, it exploits new powerful mathematical techniques to develop deeper insights into plasma behavior. After developing the basic plasma equations from first principles, the book explores single particle motion with particular attention to adiabatic invariance. The author then examines types of plasma waves and the issue of Landau damping. Magnetohydrodynamic equilibrium and stability are tackled with emphasis on the topological concepts of magnetic helicity and self-organization. Advanced topics follow, including magnetic reconnection, nonlinear waves, and the Fokker–Planck treatment of collisions. The book concludes by discussing unconventional plasmas such as non-neutral and dusty plasmas. Written for beginning graduate students and advanced undergraduates, this text emphasizes the fundamental principles that apply across many different contexts.

Scientific and Technical Aerospace Reports

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Publisher :
ISBN 13 :
Total Pages : 728 pages
Book Rating : 4.:/5 (3 download)

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Book Synopsis Scientific and Technical Aerospace Reports by :

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1994 with total page 728 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Introduction to Plasma Physics

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Publisher : Cambridge University Press
ISBN 13 : 9780521364836
Total Pages : 468 pages
Book Rating : 4.3/5 (648 download)

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Book Synopsis Introduction to Plasma Physics by : D. A. Gurnett

Download or read book Introduction to Plasma Physics written by D. A. Gurnett and published by Cambridge University Press. This book was released on 2005-01-06 with total page 468 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced undergraduate/beginning graduate text on space and laboratory plasma physics.

Plasma Science

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Publisher :
ISBN 13 : 9780309677608
Total Pages : 291 pages
Book Rating : 4.6/5 (776 download)

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Book Synopsis Plasma Science by : National Academies of Sciences Engineering and Medicine

Download or read book Plasma Science written by National Academies of Sciences Engineering and Medicine and published by . This book was released on 2021-02-28 with total page 291 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Science and Engineering transforms fundamental scientific research into powerful societal applications, from materials processing and healthcare to forecasting space weather. Plasma Science: Enabling Technology, Sustainability, Security and Exploration discusses the importance of plasma research, identifies important grand challenges for the next decade, and makes recommendations on funding and workforce. This publication will help federal agencies, policymakers, and academic leadership understand the importance of plasma research and make informed decisions about plasma science funding, workforce, and research directions.

Modern Methods in Collisional-Radiative Modeling of Plasmas

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Publisher : Springer
ISBN 13 : 3319275143
Total Pages : 220 pages
Book Rating : 4.3/5 (192 download)

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Book Synopsis Modern Methods in Collisional-Radiative Modeling of Plasmas by : Yuri Ralchenko

Download or read book Modern Methods in Collisional-Radiative Modeling of Plasmas written by Yuri Ralchenko and published by Springer. This book was released on 2016-02-25 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a compact yet comprehensive overview of recent developments in collisional-radiative (CR) modeling of laboratory and astrophysical plasmas. It describes advances across the entire field, from basic considerations of model completeness to validation and verification of CR models to calculation of plasma kinetic characteristics and spectra in diverse plasmas. Various approaches to CR modeling are presented, together with numerous examples of applications. A number of important topics, such as atomic models for CR modeling, atomic data and its availability and quality, radiation transport, non-Maxwellian effects on plasma emission, ionization potential lowering, and verification and validation of CR models, are thoroughly addressed. Strong emphasis is placed on the most recent developments in the field, such as XFEL spectroscopy. Written by leading international research scientists from a number of key laboratories, the book offers a timely summary of the most recent progress in this area. It will be a useful and practical guide for students and experienced researchers working in plasma spectroscopy, spectra simulations, and related fields.

Basic Space Plasma Physics (Revised Edition)

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Publisher : World Scientific Publishing Company
ISBN 13 : 1911298682
Total Pages : 496 pages
Book Rating : 4.9/5 (112 download)

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Book Synopsis Basic Space Plasma Physics (Revised Edition) by : Wolfgang Baumjohann

Download or read book Basic Space Plasma Physics (Revised Edition) written by Wolfgang Baumjohann and published by World Scientific Publishing Company. This book was released on 2012-03-20 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: This textbook begins with a description of the Earth's plasma environment, followed by the derivation of single particle motions in electromagnetic fields, with applications to the Earth's magnetosphere. Also discussed are the origin and effects of collisions and conductivities, formation of the ionosphere, magnetospheric convection and dynamics, and solar wind-magnetosphere coupling.The second half of the book presents a more theoretical foundation of plasma physics, starting with kinetic theory. Introducing moments of distribution function permits the derivation of the fluid equations, followed by an analysis of fluid boundaries, with the Earth's magnetopause and bow shock as examples, and finally, fluid and kinetic theory are applied to derive the relevant wave modes in a plasma.This revised edition seamlessly integrates new sections on magnetopause reconstruction, as well as instability theory and thermal fluctuations based on new developments in space physics. Applications such as the important problems of collisionless reconnection and collisionless shocks are covered, and some problems have also been included at the end of each chapter.

Frontiers in High Energy Density Physics

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Publisher : National Academies Press
ISBN 13 : 030908637X
Total Pages : 177 pages
Book Rating : 4.3/5 (9 download)

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Book Synopsis Frontiers in High Energy Density Physics by : National Research Council

Download or read book Frontiers in High Energy Density Physics written by National Research Council and published by National Academies Press. This book was released on 2003-05-11 with total page 177 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recent scientific and technical advances have made it possible to create matter in the laboratory under conditions relevant to astrophysical systems such as supernovae and black holes. These advances will also benefit inertial confinement fusion research and the nation's nuclear weapon's program. The report describes the major research facilities on which such high energy density conditions can be achieved and lists a number of key scientific questions about high energy density physics that can be addressed by this research. Several recommendations are presented that would facilitate the development of a comprehensive strategy for realizing these research opportunities.

Advanced Space Plasma Physics

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Publisher : World Scientific
ISBN 13 : 1911298704
Total Pages : 393 pages
Book Rating : 4.9/5 (112 download)

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Book Synopsis Advanced Space Plasma Physics by : Wolfgang Baumjohann

Download or read book Advanced Space Plasma Physics written by Wolfgang Baumjohann and published by World Scientific. This book was released on 1997-01-03 with total page 393 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book builds on the fluid and kinetic theory of equilibria and waves presented in a companion textbook, Basic Space Plasma Physics (by the same authors), but can also serve as a stand-alone text. It extends the field covered there into the domain of plasma instability and nonlinear theory.The book provides a representative selection of the many possible macro- and microinstabilities in a space plasma, from the Rayleigh-Taylor and Kelvin-Helmholtz to electrostatic and electromagnetic kinetic instabilities. Their quasilinear stabilization and nonlinear evolution and their application to space physics problems are treated. The chapters on nonlinear theory include nonlinear waves, weak turbulence and strong turbulence, all presented from the viewpoint of their relevance to space plasma physics. Special topics include auroral particle acceleration, soliton formation and caviton collapse, anomalous transport, and the theory of collisionless shocks.

A Superintense Laser-Plasma Interaction Theory Primer

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Publisher : Springer Science & Business Media
ISBN 13 : 9400761252
Total Pages : 121 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis A Superintense Laser-Plasma Interaction Theory Primer by : Andrea Macchi

Download or read book A Superintense Laser-Plasma Interaction Theory Primer written by Andrea Macchi and published by Springer Science & Business Media. This book was released on 2013-01-24 with total page 121 pages. Available in PDF, EPUB and Kindle. Book excerpt: The continuous trend towards higher and higher laser intensities has opened the way to new physical regimes and advanced applications of laser-plasma interactions, thus stimulating novel connections with ultrafast optics, astrophysics, particle physics, and biomedical applications. This book is primarily oriented towards students and young researchers who need to acquire rapidly a basic knowledge of this active and rapidly changing research field. To this aim, the presentation is focused on a selection of basic models and inspiring examples, and includes topics which emerged recently such as ion acceleration, "relativistic engineering" and radiation friction. The contents are presented in a self-contained way assuming only a basic knowledge of classical electrodynamics, mechanics and relativistic dynamics at the undergraduate (Bachelor) level, without requiring any previous knowledge of plasma physics. Hence, the book may serve in several ways: as a compact textbook for lecture courses, as a short and accessible introduction for the newcomer, as a quick reference for the experienced researcher, and also as an introduction to some nonlinear mathematical methods through examples of their application to laser-plasma modeling.