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A Practical Guide To Optical Metrology For Thin Films
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Book Synopsis A Practical Guide to Optical Metrology for Thin Films by : Michael Quinten
Download or read book A Practical Guide to Optical Metrology for Thin Films written by Michael Quinten and published by John Wiley & Sons. This book was released on 2012-09-24 with total page 212 pages. Available in PDF, EPUB and Kindle. Book excerpt: A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromagnetic radiation in space and matter. The main topic of this book, the determination of the thickness of a layer in a layer stack by measuring the spectral reflectance or transmittance, is treated in the following three chapters. The color of thin layers is discussed in chapter 6. Finally, in chapter 7, the author discusses several industrial applications of the layer thickness measurement, including high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, transparent conductive films, oxides and polymers, thin film photovoltaics, and heavily doped silicon. Aimed at industrial and academic researchers, engineers, developers and manufacturers involved in all areas of optical layer and thin optical film measurement and metrology, process control, real-time monitoring, and applications.
Book Synopsis A Practical Guide to Surface Metrology by : Michael Quinten
Download or read book A Practical Guide to Surface Metrology written by Michael Quinten and published by Springer Nature. This book was released on 2020-01-01 with total page 247 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the user to select the best approach in a given context. Most methods in surface metrology are based upon the interaction of light or electromagnetic radiation (UV, NIR, IR), and different optical effects are utilized to get a certain optical response from the surface; some of them record only the intensity reflected or scattered by the surface, others use interference of EM waves to obtain a characteristic response from the surface. The book covers techniques ranging from microscopy (including confocal, SNOM and digital holographic microscopy) through interferometry (including white light, multi-wavelength, grazing incidence and shearing) to spectral reflectometry and ellipsometry. The non-optical methods comprise tactile methods (stylus tip, AFM) as well as capacitive and inductive methods (capacitive sensors, eddy current sensors). The book provides: Overview of the working principles Description of advantages and disadvantages Currently achievable numbers for resolutions, repeatability, and reproducibility Examples of real-world applications A final chapter discusses examples where the combination of different surface metrology techniques in a multi-sensor system can reasonably contribute to a better understanding of surface properties as well as a faster characterization of surfaces in industrial applications. The book is aimed at scientists and engineers who use such methods for the measurement and characterization of surfaces across a wide range of fields and industries, including electronics, energy, automotive and medical engineering.
Book Synopsis Practical Design of Optical Thin Films, Fifth Edition by : Ronald R Willey
Download or read book Practical Design of Optical Thin Films, Fifth Edition written by Ronald R Willey and published by Lulu.com. This book was released on 2018-01-18 with total page 487 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book deals with the basic fundamentals, understanding, and design of optical thin films, or interference coatings for practical production. It focuses on one of the main subjects that is critical to meeting the practical challenges of producing optical coatings. This is the design of coatings, an understanding of which allows the practitioner to know the possibilities and limitations involved in reducing, enhancing, or otherwise controlling the reflection, transmission, and absorption of light (visible or otherwise). This Fifth Edition now includes measurement of index, thickness, and color; the determination of tooling factors; and the programming of Macros, Workbooks, and FilmStar Basic.
Book Synopsis Practical Production of Optical Thin Films by : Ronald R. Willey
Download or read book Practical Production of Optical Thin Films written by Ronald R. Willey and published by Lulu.com. This book was released on 2016-11-15 with total page 742 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book deals with the typical equipment, materials, processes, monitoring, and control used in the practical fabrication/production of optical thin films. It focuses on the practical elements needed to actually produce optical coatings.
Book Synopsis Optical Characterization of Thin Solid Films by : Olaf Stenzel
Download or read book Optical Characterization of Thin Solid Films written by Olaf Stenzel and published by Springer. This book was released on 2018-03-09 with total page 462 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is an up-to-date survey of the major optical characterization techniques for thin solid films. Emphasis is placed on practicability of the various approaches. Relevant fundamentals are briefly reviewed before demonstrating the application of these techniques to practically relevant research and development topics. The book is written by international top experts, all of whom are involved in industrial research and development projects.
Book Synopsis Handbook of Thin Film Process Technology by : D Glocker
Download or read book Handbook of Thin Film Process Technology written by D Glocker and published by CRC Press. This book was released on 2018-01-18 with total page 135 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume presents additional recipe-type information (i.e. important deposition system details and process parameters) for optical materials.
Book Synopsis Optical Thin Films by : James D. Rancourt
Download or read book Optical Thin Films written by James D. Rancourt and published by SPIE Press. This book was released on 1996 with total page 308 pages. Available in PDF, EPUB and Kindle. Book excerpt: Practical, user-oriented reference for engineers who must incorporate and specify coatings for filters, antiglare effects, polarization, or other purposes in optical or electro-optical systems design. It focuses on preparation techniques and characteristics of commercially available products and provides information needed to determine what type of filter is needed to solve a particular problem, what its limitations are, and how to care for it.
Book Synopsis Quantum Metrology by : Ernst O. Goebel
Download or read book Quantum Metrology written by Ernst O. Goebel and published by John Wiley & Sons. This book was released on 2015-06-10 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt: The International System of Units (SI) is the world's most widely used system of measurement, used every day in commerce and science, and is the modern form of the metric system. It currently comprises the meter (m), the kilogram (kg), the second (s), the ampere (A), the kelvin (K), the candela (cd) and the mole (mol)). The system is changing though, units and unit definitions are modified through international agreements as the technology of measurement progresses, and as the precision of measurements improves. The SI is now being redefined based on constants of nature and their realization by quantum standards. Therefore, the underlying physics and technologies will receive increasing interest, and not only in the metrology community but in all fields of science. This book introduces and explains the applications of modern physics concepts to metrology, the science and the applications of measurements. A special focus is made on the use of quantum standards for the realization of the forthcoming new SI (the international system of units). The basic physical phenomena are introduced on a level which provides comprehensive information for the experienced reader but also provides a guide for a more intense study of these phenomena for students.
Book Synopsis Handbook of Optical Properties by : Rolf E. Hummel
Download or read book Handbook of Optical Properties written by Rolf E. Hummel and published by CRC Press. This book was released on 1995-02-24 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin Films for Optical Coating emphasizes the applications of thin films, deposition of thin films, and thin film characterization. Unlike monographs on this subject, this book presents the views of many expert authors. Individual chapters span a wide arc of topics within this field of study. The book offers an introduction to usual and unusual applications of optical thin films, treating in a more qualitative way general topics such as anticounterfeiting coatings, decorative coatings, light switches, contrast enhancement coatings, multiplexers, optical memories, and more. Contributors review thin film media for optical data storage, UV broadband and narrow-band filters, and optically active thin film coatings. Ion beam sputtering and magnetron sputtering deposition methods are described in detail. Characterization techniques are provided, including Raman spectroscopy and absorption measurements. The book also offers theories on light scattering of thin dielectric films and the electromagnetic properties of nanocermet thin films. This reference incorporates recent research by the individual authors with their views of current developments in their respective fields. Of particular interest to the reader will be an assessment of the historical developments of thin film physics written by one of the fathers of thin film technology, Professor M. Auwärter.
Book Synopsis Handbook of Optical Metrology by : Toru Yoshizawa
Download or read book Handbook of Optical Metrology written by Toru Yoshizawa and published by CRC Press. This book was released on 2009-02-25 with total page 744 pages. Available in PDF, EPUB and Kindle. Book excerpt: The field of optical metrology offers a wealth of both practical and theoretical accomplishments, and can cite any number of academic papers recording such. However, while several books covering specific areas of optical metrology do exist, until the pages herein were researched, written, and compiled, the field lacked for a comprehensive handbook, one providing an overview of optical metrology that covers practical applications as well as fundamentals. Carefully designed to make information accessible to beginners without sacrificing academic rigor, the Handbook of Optical Metrology: Principles and Applications discusses fundamental principles and techniques before exploring practical applications. With contributions from veterans in the field, as well as from up-and-coming researchers, the Handbook offers 30 substantial and well-referenced chapters. In addition to the introductory matter, forward-thinking descriptions are included in every chapter that make this a valuable reference for all those involved with optical metrology.
Book Synopsis Practical Design and Production of Optical Thin Films by : Ronald R. Willey
Download or read book Practical Design and Production of Optical Thin Films written by Ronald R. Willey and published by CRC Press. This book was released on 2002-07-09 with total page 542 pages. Available in PDF, EPUB and Kindle. Book excerpt: Providing insider viewpoints and perspectives unavailable in any other text, this book presents useful guidelines and tools to produce effective coatings and films. Covering subjects ranging from materials selection and process development to successful system construction and optimization, it contains expanded discussions on design visualization, dense wavelength division multiplexing, new coating equipment, electrochromic and chemically active coatings, ion-assisted deposition, and optical monitoring sensitivity. Furnishing real-world examples and know-how, the book introduces Fourier analysis and synthesis without difficult mathematical concepts and equations.
Book Synopsis The Nano-Micro Interface, 2 Volumes by : Marcel Van de Voorde
Download or read book The Nano-Micro Interface, 2 Volumes written by Marcel Van de Voorde and published by John Wiley & Sons. This book was released on 2015-03-09 with total page 771 pages. Available in PDF, EPUB and Kindle. Book excerpt: Controlling the properties of materials by modifying their composition and by manipulating the arrangement of atoms and molecules is a dream that can be achieved by nanotechnology. As one of the fastest developing and innovative -- as well as well-funded -- fields in science, nanotechnology has already significantly changed the research landscape in chemistry, materials science, and physics, with numerous applications in consumer products, such as sunscreens and water-repellent clothes. It is also thanks to this multidisciplinary field that flat panel displays, highly efficient solar cells, and new biological imaging techniques have become reality. This second, enlarged edition has been fully updated to address the rapid progress made within this field in recent years. Internationally recognized experts provide comprehensive, first-hand information, resulting in an overview of the entire nano-micro world. In so doing, they cover aspects of funding and commercialization, the manufacture and future applications of nanomaterials, the fundamentals of nanostructures leading to macroscale objects as well as the ongoing miniaturization toward the nanoscale domain. Along the way, the authors explain the effects occurring at the nanoscale and the nanotechnological characterization techniques. An additional topic on the role of nanotechnology in energy and mobility covers the challenge of developing materials and devices, such as electrodes and membrane materials for fuel cells and catalysts for sustainable transportation. Also new to this edition are the latest figures for funding, investments, and commercialization prospects, as well as recent research programs and organizations.
Book Synopsis The Nano-Micro Interface, 2 Volumes by : Marcel Van de Voorde
Download or read book The Nano-Micro Interface, 2 Volumes written by Marcel Van de Voorde and published by John Wiley & Sons. This book was released on 2015-01-12 with total page 756 pages. Available in PDF, EPUB and Kindle. Book excerpt: Controlling the properties of materials by modifying their composition and by manipulating the arrangement of atoms and molecules is a dream that can be achieved by nanotechnology. As one of the fastest developing and innovative -- as well as well-funded -- fields in science, nanotechnology has already significantly changed the research landscape in chemistry, materials science, and physics, with numerous applications in consumer products, such as sunscreens and water-repellent clothes. It is also thanks to this multidisciplinary field that flat panel displays, highly efficient solar cells, and new biological imaging techniques have become reality. This second, enlarged edition has been fully updated to address the rapid progress made within this field in recent years. Internationally recognized experts provide comprehensive, first-hand information, resulting in an overview of the entire nano-micro world. In so doing, they cover aspects of funding and commercialization, the manufacture and future applications of nanomaterials, the fundamentals of nanostructures leading to macroscale objects as well as the ongoing miniaturization toward the nanoscale domain. Along the way, the authors explain the effects occurring at the nanoscale and the nanotechnological characterization techniques. An additional topic on the role of nanotechnology in energy and mobility covers the challenge of developing materials and devices, such as electrodes and membrane materials for fuel cells and catalysts for sustainable transportation. Also new to this edition are the latest figures for funding, investments, and commercialization prospects, as well as recent research programs and organizations.
Book Synopsis Optical Metrology by : Kjell J. Gåsvik
Download or read book Optical Metrology written by Kjell J. Gåsvik and published by John Wiley & Sons. This book was released on 2003-04-11 with total page 372 pages. Available in PDF, EPUB and Kindle. Book excerpt: New material on computerized optical processes, computerized ray tracing, and the fast Fourier transform, Bibre-Bragg sensors, and temporal phase unwrapping. * New introductory sections to all chapters. * Detailed discussion on lasers and laser principles, including an introduction to radiometry and photometry. * Thorough coverage of the CCD camera.
Author :Alexander Axelevitch Publisher :World Scientific Publishing Company ISBN 13 :9789811246326 Total Pages :200 pages Book Rating :4.2/5 (463 download)
Book Synopsis Thin Films Technology: Practical Manual for the Laboratory Works by : Alexander Axelevitch
Download or read book Thin Films Technology: Practical Manual for the Laboratory Works written by Alexander Axelevitch and published by World Scientific Publishing Company. This book was released on 2021-12-30 with total page 200 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book deals with key aspects of modelling, deposition and characterization of thin solid films. The main attention is paid to the physical vacuum deposition methods and particularly to the magnetron sputtering. Measurement methods for optical and electrical properties of thin films, that are described in the book, are based on the equipment situated in the thin-films laboratory of the Holon Institute of Technology (HIT). The book is written based on Dr Axelevitch's long experience (more than 30 years) in the field. It is mainly intended for students of microelectronics, electrooptics and nanotechnology specialties, as well as for practical engineers.
Book Synopsis Optical Metrology for Fluids, Combustion and Solids by : Carolyn Mercer
Download or read book Optical Metrology for Fluids, Combustion and Solids written by Carolyn Mercer and published by Springer Science & Business Media. This book was released on 2013-04-17 with total page 468 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical Metrology for Fluids, Combustion and Solids is the first practical handbook that presents the assemblage of the techniques necessary to provide a basic understanding of optical measurement for fluids, combustion, and solids. The use of light as a measurement tool has grown over the past twenty years from a narrowly specialized activity to a mainstay of modern research today. Until recently, the knowledge that could be extracted from the light interaction of light with physical objects was limited to specialized activities. The invention of the laser, the computer and microelectronics has enabled a measurement revolution such that virtually every parameter of engineering interest can be measured using the minimally intrusive properties of light. The authors of this book's chapters are leaders in this revolution. They work on the front lines of research in government, industry, and universities, inventing yet more ways to harness the power of light for the generation of knowledge.
Book Synopsis A User's Guide to Ellipsometry by : Harland G. Tompkins
Download or read book A User's Guide to Ellipsometry written by Harland G. Tompkins and published by Courier Corporation. This book was released on 2013-03-21 with total page 370 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry — particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
