A Low Power Readout Circuit for a Tri-axial Piezoelectric MEMS Accelerometer

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Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (141 download)

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Book Synopsis A Low Power Readout Circuit for a Tri-axial Piezoelectric MEMS Accelerometer by :

Download or read book A Low Power Readout Circuit for a Tri-axial Piezoelectric MEMS Accelerometer written by and published by . This book was released on 2022 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

MEMS Silicon Oscillating Accelerometers and Readout Circuits

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Publisher : River Publishers
ISBN 13 : 877022045X
Total Pages : 312 pages
Book Rating : 4.7/5 (72 download)

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Book Synopsis MEMS Silicon Oscillating Accelerometers and Readout Circuits by : Xu, Yong Ping

Download or read book MEMS Silicon Oscillating Accelerometers and Readout Circuits written by Xu, Yong Ping and published by River Publishers. This book was released on 2019-02-12 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

Readout Circuit and Chip Design for a Piezoelectric MEMS Accelerometer

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Publisher :
ISBN 13 :
Total Pages : 102 pages
Book Rating : 4.:/5 (123 download)

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Book Synopsis Readout Circuit and Chip Design for a Piezoelectric MEMS Accelerometer by : 翁睿佟

Download or read book Readout Circuit and Chip Design for a Piezoelectric MEMS Accelerometer written by 翁睿佟 and published by . This book was released on 2020 with total page 102 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Silicon Based MEMS Materials and Technologies

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Publisher : Elsevier
ISBN 13 : 012817787X
Total Pages : 1028 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Handbook of Silicon Based MEMS Materials and Technologies by : Markku Tilli

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2020-04-17 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Accelerometer Design with A Low-Power Capacitor to Frequency Readout Circuit

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Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (895 download)

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Book Synopsis Accelerometer Design with A Low-Power Capacitor to Frequency Readout Circuit by :

Download or read book Accelerometer Design with A Low-Power Capacitor to Frequency Readout Circuit written by and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Low-Noise Readout Circuit for Automotive MEMS Accelerometers

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Publisher :
ISBN 13 : 9783844092752
Total Pages : 0 pages
Book Rating : 4.0/5 (927 download)

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Book Synopsis Low-Noise Readout Circuit for Automotive MEMS Accelerometers by : Alice Lanniel

Download or read book Low-Noise Readout Circuit for Automotive MEMS Accelerometers written by Alice Lanniel and published by . This book was released on 2023 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

MEMS Accelerometers

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Publisher : MDPI
ISBN 13 : 3038974145
Total Pages : 252 pages
Book Rating : 4.0/5 (389 download)

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Book Synopsis MEMS Accelerometers by : Mahmoud Rasras

Download or read book MEMS Accelerometers written by Mahmoud Rasras and published by MDPI. This book was released on 2019-05-27 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

Piezoelectric Energy Harvesting

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Publisher : John Wiley & Sons
ISBN 13 : 1119991358
Total Pages : 377 pages
Book Rating : 4.1/5 (199 download)

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Book Synopsis Piezoelectric Energy Harvesting by : Alper Erturk

Download or read book Piezoelectric Energy Harvesting written by Alper Erturk and published by John Wiley & Sons. This book was released on 2011-04-04 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: The transformation of vibrations into electric energy through the use of piezoelectric devices is an exciting and rapidly developing area of research with a widening range of applications constantly materialising. With Piezoelectric Energy Harvesting, world-leading researchers provide a timely and comprehensive coverage of the electromechanical modelling and applications of piezoelectric energy harvesters. They present principal modelling approaches, synthesizing fundamental material related to mechanical, aerospace, civil, electrical and materials engineering disciplines for vibration-based energy harvesting using piezoelectric transduction. Piezoelectric Energy Harvesting provides the first comprehensive treatment of distributed-parameter electromechanical modelling for piezoelectric energy harvesting with extensive case studies including experimental validations, and is the first book to address modelling of various forms of excitation in piezoelectric energy harvesting, ranging from airflow excitation to moving loads, thus ensuring its relevance to engineers in fields as disparate as aerospace engineering and civil engineering. Coverage includes: Analytical and approximate analytical distributed-parameter electromechanical models with illustrative theoretical case studies as well as extensive experimental validations Several problems of piezoelectric energy harvesting ranging from simple harmonic excitation to random vibrations Details of introducing and modelling piezoelectric coupling for various problems Modelling and exploiting nonlinear dynamics for performance enhancement, supported with experimental verifications Applications ranging from moving load excitation of slender bridges to airflow excitation of aeroelastic sections A review of standard nonlinear energy harvesting circuits with modelling aspects.

3D and Circuit Integration of MEMS

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Publisher : John Wiley & Sons
ISBN 13 : 3527823255
Total Pages : 528 pages
Book Rating : 4.5/5 (278 download)

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Book Synopsis 3D and Circuit Integration of MEMS by : Masayoshi Esashi

Download or read book 3D and Circuit Integration of MEMS written by Masayoshi Esashi and published by John Wiley & Sons. This book was released on 2021-03-16 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.

Inertial MEMS

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Publisher : Cambridge University Press
ISBN 13 : 1139494821
Total Pages : 497 pages
Book Rating : 4.1/5 (394 download)

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Book Synopsis Inertial MEMS by : Volker Kempe

Download or read book Inertial MEMS written by Volker Kempe and published by Cambridge University Press. This book was released on 2011-02-17 with total page 497 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.

Optical MEMS

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Publisher : MDPI
ISBN 13 : 3039213032
Total Pages : 176 pages
Book Rating : 4.0/5 (392 download)

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Book Synopsis Optical MEMS by : Huikai Xie

Download or read book Optical MEMS written by Huikai Xie and published by MDPI. This book was released on 2019-08-06 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines

Nyquist AD Converters, Sensor Interfaces, and Robustness

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Publisher : Springer Science & Business Media
ISBN 13 : 1461445876
Total Pages : 291 pages
Book Rating : 4.4/5 (614 download)

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Book Synopsis Nyquist AD Converters, Sensor Interfaces, and Robustness by : Arthur H.M. van Roermund

Download or read book Nyquist AD Converters, Sensor Interfaces, and Robustness written by Arthur H.M. van Roermund and published by Springer Science & Business Media. This book was released on 2012-11-26 with total page 291 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is based on the 18 presentations during the 21st workshop on Advances in Analog Circuit Design. Expert designers provide readers with information about a variety of topics at the frontier of analog circuit design, including Nyquist analog-to-digital converters, capacitive sensor interfaces, reliability, variability, and connectivity. This book serves as a valuable reference to the state-of-the-art, for anyone involved in analog circuit research and development.

Data Analytics and Applications of the Wearable Sensors in Healthcare

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Publisher : MDPI
ISBN 13 : 3039363506
Total Pages : 498 pages
Book Rating : 4.0/5 (393 download)

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Book Synopsis Data Analytics and Applications of the Wearable Sensors in Healthcare by : Shabbir Syed-Abdul

Download or read book Data Analytics and Applications of the Wearable Sensors in Healthcare written by Shabbir Syed-Abdul and published by MDPI. This book was released on 2020-06-17 with total page 498 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a collection of comprehensive research articles on data analytics and applications of wearable devices in healthcare. This Special Issue presents 28 research studies from 137 authors representing 37 institutions from 19 countries. To facilitate the understanding of the research articles, we have organized the book to show various aspects covered in this field, such as eHealth, technology-integrated research, prediction models, rehabilitation studies, prototype systems, community health studies, ergonomics design systems, technology acceptance model evaluation studies, telemonitoring systems, warning systems, application of sensors in sports studies, clinical systems, feasibility studies, geographical location based systems, tracking systems, observational studies, risk assessment studies, human activity recognition systems, impact measurement systems, and a systematic review. We would like to take this opportunity to invite high quality research articles for our next Special Issue entitled “Digital Health and Smart Sensors for Better Management of Cancer and Chronic Diseases” as a part of Sensors journal.

Mems Packaging

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Publisher : World Scientific
ISBN 13 : 9813229373
Total Pages : 363 pages
Book Rating : 4.8/5 (132 download)

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Book Synopsis Mems Packaging by : Yung-cheng Lee

Download or read book Mems Packaging written by Yung-cheng Lee and published by World Scientific. This book was released on 2018-01-03 with total page 363 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS sensors and actuators are enabling components for smartphones, AR/VR, and wearable electronics. MEMS packaging is recognized as one of the most critical activities to design and manufacture reliable MEMS. A unique challenge to MEMS packaging is how to protect moving MEMS devices during manufacturing and operation. With the introduction of wafer level capping and encapsulation processes, this barrier is removed successfully. In addition, MEMS devices should be integrated with their electronic chips with the smallest footprint possible. As a result, 3D packaging is applied to connect the devices vertically for the most effective integration. Such 3D packaging also paves the way for further heterogenous integration of MEMS devices, electronics, and other functional devices.This book consists of chapters written by leaders developing products in a MEMS industrial setting and faculty members conducting research in an academic setting. After an introduction chapter, the practical issues are covered: through-silicon vias (TSVs), vertical interconnects, wafer level packaging, motion sensor-to-CMOS bonding, and use of printed circuit board technology to fabricate MEMS. These chapters are written by leaders developing MEMS products. Then, fundamental issues are discussed, topics including encapsulation of MEMS, heterogenous integration, microfluidics, solder bonding, localized sealing, microsprings, and reliability.

Handbook of Medical and Healthcare Technologies

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Publisher : Springer Science & Business Media
ISBN 13 : 1461484952
Total Pages : 530 pages
Book Rating : 4.4/5 (614 download)

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Book Synopsis Handbook of Medical and Healthcare Technologies by : Borko Furht

Download or read book Handbook of Medical and Healthcare Technologies written by Borko Furht and published by Springer Science & Business Media. This book was released on 2013-11-20 with total page 530 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book equips readers to understand a complex range of healthcare products that are used to diagnose, monitor, and treat diseases or medical conditions affecting humans. The first part of the book presents medical technologies such as medical information retrieval, tissue engineering techniques, 3D medical imaging, nanotechnology innovations in medicine, medical wireless sensor networks, and knowledge mining techniques in medicine. The second half of the book focuses on healthcare technologies including prediction hospital readmission risk, modeling e-health framework, personal Web in healthcare, security issues for medical records, and personalized services in healthcare. The contributors are leading world researchers who share their innovations, making this handbook the definitive resource on these topics. Handbook of Medical and Healthcare Technologies is intended for a wide audience including academicians, designers, developers, researchers and advanced-level students. It is also valuable for business managers, entrepreneurs, and investors within the medical and healthcare industries.

Handbook of Experimental Structural Dynamics

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Publisher : Springer
ISBN 13 : 9781461445463
Total Pages : 1403 pages
Book Rating : 4.4/5 (454 download)

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Book Synopsis Handbook of Experimental Structural Dynamics by : Randall Allemang

Download or read book Handbook of Experimental Structural Dynamics written by Randall Allemang and published by Springer. This book was released on 2022-08-06 with total page 1403 pages. Available in PDF, EPUB and Kindle. Book excerpt: The SEM Handbook of Experimental Structural Dynamics stands as a comprehensive overview and reference for its subject, applicable to workers in research, product design and manufacture, and practice. The Handbook is devoted primarily to the areas of structural mechanics served by the Society for Experimental Mechanics IMAC community, such as modal analysis, rotating machinery, structural health monitoring, shock and vibration, sensors and instrumentation, aeroelasticity, ground testing, finite element techniques, model updating, sensitivity analysis, verification and validation, experimental dynamics sub-structuring, quantification of margin and uncertainty, and testing of civil infrastructure. Chapters offer comprehensive, detailed coverage of decades of scientific and technologic advance and all demonstrate an experimental perspective. Several sections specifically discuss the various types of experimental testing and common practices utilized in the automotive, aerospace, and civil structures industries. · History of Experimental Structural Mechanics · DIC Methods - Dynamic Photogrammetry · LDV Methods · Applied Digital Signal Processing · Introduction to Spectral - Basic Measurements · Structural Measurements - FRF · Random and Shock Testing · Rotating System Analysis Methods * · Sensors Signal Conditioning Instrumentation · Design of Modal Tests · Experimental Modal Methods · Experimental Modal Parameter Evaluation · Operating Modal Analysis Methods * · Analytical Numerical Substructuring · Finite Element Model Correlation · Model Updating · Damping of Materials and Structures · Model Calibration and Validation in Structures* · Uncertainty Quantification: UQ, QMU and Statistics * · Nonlinear System Analysis Methods (Experimental) · Structural Health Monitoring and Damage Detection · Experimental Substructure Modeling · Modal Modeling · Response (Impedance) Modeling · Nonlinear Normal Mode Analysis Techniques (Analytical) * · Modal Modeling with Nonlinear Connection Elements (Analytical) · Acoustics of Structural Systems (VibroAcoustics) * · Automotive Structural Testing * · Civil Structural Testing · Aerospace Perspective for Modeling and Validation · Sports Equipment Testing * · Applied Math for Experimental Structural Mechanics * Chapter Forthcoming Contributions present important theory behind relevant experimental methods as well as application and technology. Topical authors emphasize and dissect proven methods and offer detail beyond a simple review of the literature. Additionally, chapters cover practical needs of scientists and engineers who are new to the field. In most cases, neither the pertinent theory nor, in particular, the practical issues have been presented formally in current academic textbooks. Each chapter in the Handbook represents a ’must read’ for someone new to the subject or for someone returning to the field after an absence. Reference lists in each chapter consist of the seminal papers in the literature. This Handbook stands in parallel to the SEM Handbook of Experimental Solid Mechanics, where this Handbook focuses on experimental dynamics of structures at a macro-scale often involving multiple components and materials where the SEM Handbook of Experimental Solid Mechanics focuses on experimental mechanics of materials at a nano-scale and/or micro-scale.

MEMS and Microsystems

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Publisher : McGraw-Hill Science, Engineering & Mathematics
ISBN 13 :
Total Pages : 456 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis MEMS and Microsystems by : Tai-Ran Hsu

Download or read book MEMS and Microsystems written by Tai-Ran Hsu and published by McGraw-Hill Science, Engineering & Mathematics. This book was released on 2002 with total page 456 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microsystems and MEMS technology is one of the biggest breakthroughs in the area of mechanical and electronic technology in recent years. This is the technology of extremely small and powerful devices, and systems built around them, which have mechanical and electrical components. MEMS technology is expanding rapidly, with major application areas being telecommunications, biomedical technology, manufacturing and robotic systems, transportation and aerospace. Academics are desperate for texts to familiarise future engineers with this broad-ranging technology. This text provides an engineering design approach to MEMS and microsystems which is appropriate for professionals and senior level students. This design approach is conveyed through good examples, cases and applied problems. The book is appropriate for mechanical and aerospace engineers, since it carefully explains the electrical/electronic aspects of the subject. Electrical engineering students will be given strong coverage of the mechanical side of MEMS, something they may not receive elsewhere.