Silicon Carbide Micro Electromechanical Systems For Harsh Environments

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Silicon Carbide Micro Electromechanical Systems for Harsh Environments

Author : Rebecca Cheung
Publisher : Imperial College Press
ISBN 13 : 1860949096
Total Pages : 193 pages
Book Rating : 4.8/5 (69 download)

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Book Synopsis Silicon Carbide Micro Electromechanical Systems for Harsh Environments by : Rebecca Cheung

Download or read book Silicon Carbide Micro Electromechanical Systems for Harsh Environments written by Rebecca Cheung and published by Imperial College Press. This book was released on 2006 with total page 193 pages. Available in PDF, EPUB and Kindle. Book excerpt: This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Sample Chapter(s). Chapter 1: Introduction to Silicon Carbide (SIC) Microelectromechanical Systems (MEMS) (800 KB). Contents: Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) (R Cheung); Deposition Techniques for SiC MEMS (C A Zorman et al.); Review of Issues Pertaining to the Development of Contacts to Silicon Carbide: 1996OCo2002 (L M Porter & F A Mohammad); Dry Etching of SiC (S J Pearton); Design, Performance and Applications of SiC MEMS (S Zappe). Readership: Academic researchers in MEMS and industrial engineers engaged in SiC MEMS research."

Silicon Carbide Micro Electromechanical Systems for Harsh Environments

Author :
Publisher :
ISBN 13 :
Total Pages : 181 pages
Book Rating : 4.:/5 (16 download)

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Book Synopsis Silicon Carbide Micro Electromechanical Systems for Harsh Environments by :

Download or read book Silicon Carbide Micro Electromechanical Systems for Harsh Environments written by and published by . This book was released on 2006 with total page 181 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Silicon Carbide Microsystems for Harsh Environments

Author : Muthu Wijesundara
Publisher : Springer Science & Business Media
ISBN 13 : 1441971211
Total Pages : 232 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Silicon Carbide Microsystems for Harsh Environments by : Muthu Wijesundara

Download or read book Silicon Carbide Microsystems for Harsh Environments written by Muthu Wijesundara and published by Springer Science & Business Media. This book was released on 2011-05-17 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments, technological readiness of the system components, key issues when integrating these components into systems, and other hurdles in harsh environment operation. The authors use the SiC technology platform suite the model platform for developing harsh environment microsystems and then detail the current status of the specific individual technologies (electronics, MEMS, packaging). Additionally, methods towards system level integration of components and key challenges are evaluated and discussed based on the current state of SiC materials processing and device technology. Issues such as temperature mismatch, process compatibility and temperature stability of individual components and how these issues manifest when building the system receive thorough investigation. The material covered not only reviews the state-of-the-art MEMS devices, provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.

Silicon Carbide Microelectromechanical Systems for Harsh Environments

Author : Rebecca Cheung
Publisher : World Scientific
ISBN 13 : 1783260025
Total Pages : 192 pages
Book Rating : 4.7/5 (832 download)

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Book Synopsis Silicon Carbide Microelectromechanical Systems for Harsh Environments by : Rebecca Cheung

Download or read book Silicon Carbide Microelectromechanical Systems for Harsh Environments written by Rebecca Cheung and published by World Scientific. This book was released on 2006-06-29 with total page 192 pages. Available in PDF, EPUB and Kindle. Book excerpt: This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Contents:Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) (R Cheung)Deposition Techniques for SiC MEMS (C A Zorman et al.)Review of Issues Pertaining to the Development of Contacts to Silicon Carbide: 1996–2002 (L M Porter & F A Mohammad)Dry Etching of SiC (S J Pearton)Design, Performance and Applications of SiC MEMS (S Zappe) Readership: Academic researchers in MEMS and industrial engineers engaged in SiC MEMS research. Key Features:Includes contributions from technical and academic experts in the field of SiCUp-to-date information from scientific papers with relevant referencesIndispensible volume for academic researchers and industrial engineers working in MEMS and particularly SiC MEMSKeywords:Silicon Carbide;Microelectromechanical Systems (MEMS);Harsh Environments;Growth Etching;Microfabrication;Sensors

MEMS Materials and Processes Handbook

Author : Reza Ghodssi
Publisher : Springer Science & Business Media
ISBN 13 : 0387473181
Total Pages : 1211 pages
Book Rating : 4.3/5 (874 download)

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Book Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi

Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Piezoresistive Effect of p-Type Single Crystalline 3C-SiC

Author : Hoang-Phuong Phan
Publisher : Springer
ISBN 13 : 3319555448
Total Pages : 156 pages
Book Rating : 4.3/5 (195 download)

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Book Synopsis Piezoresistive Effect of p-Type Single Crystalline 3C-SiC by : Hoang-Phuong Phan

Download or read book Piezoresistive Effect of p-Type Single Crystalline 3C-SiC written by Hoang-Phuong Phan and published by Springer. This book was released on 2017-04-06 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book addresses the piezoresistance in p-type 3C-SiC, which it investigates using experimental characterization and theoretical analysis. The gauge factor, the piezoresistive coefficients in two-terminal and four-terminal resistors, the comparison between single crystalline and nanocrystalline SiC, along with the temperature dependence of the piezoresistive effect in p-type 3C-SiC are also discussed. Silicon carbide (SiC) is an excellent material for electronic devices operating at high temperatures, thanks to its large energy band gap, superior mechanical properties and extreme chemical inertness. Among the numerous polytypes of SiC, the cubic single crystal, which is also well known as 3C-SiC, is the most promising platform for microelectromechanical (MEMS) applications, as it can be epitaxially grown on an Si substrate with diameters of up to several hundred millimeters. This feature makes 3C-SiC compatible with the conventional Si-based micro/nano processing and also cuts down the cost of SiC wafers. The investigation into the piezoresistive effect in 3C-SiC is of significant interest for the development of mechanical transducers such as pressure sensors and strain sensors used for controlling combustion and deep well drilling. Although a number of studies have focused on the piezoresistive effect in n-type 3C-SiC, 4H-SiC and 6H-SiC, comparatively little attention has been paid to piezoresistance in p-type 3C-SiC. In addition, the book investigates the piezoresistive effect of top-down fabricated SiC nanowires, revealing a high degree of sensitivity in nanowires employing an innovative nano strain-amplifier. The large gauge factors of the p-type 3C-SiC at both room temperature and high temperatures found here indicate that this polytype could be suitable for the development of mechanical sensing devices operating in harsh environments with high temperatures.

MEMS and Nanotechnology, Volume 6

Author : Gordon A. Shaw
Publisher : Springer Science & Business Media
ISBN 13 : 1461444365
Total Pages : 156 pages
Book Rating : 4.4/5 (614 download)

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Book Synopsis MEMS and Nanotechnology, Volume 6 by : Gordon A. Shaw

Download or read book MEMS and Nanotechnology, Volume 6 written by Gordon A. Shaw and published by Springer Science & Business Media. This book was released on 2012-09-06 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS and Nanotechnology, Volume 6: Proceedings of the 2012 Annual Conference on Experimental and Applied Mechanics represents one of seven volumes of technical papers presented at the Society for Experimental Mechanics SEM 12th International Congress & Exposition on Experimental and Applied Mechanics, held at Costa Mesa, California, June 11-14, 2012. The full set of proceedings also includes volumes on Dynamic Behavior of Materials, Challenges in Mechanics of Time-Dependent Materials and Processes in Conventional and Multifunctional Materials, Imaging Methods for Novel Materials and Challenging Applications, Experimental and Applied Mechanics, Mechanics of Biological Systems and Materials and, Composite Materials and Joining Technologies for Composites.

An Introduction to Microelectromechanical Systems Engineering

Author : Nadim Maluf
Publisher : Artech House
ISBN 13 : 9781580535915
Total Pages : 312 pages
Book Rating : 4.5/5 (359 download)

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Book Synopsis An Introduction to Microelectromechanical Systems Engineering by : Nadim Maluf

Download or read book An Introduction to Microelectromechanical Systems Engineering written by Nadim Maluf and published by Artech House. This book was released on 2004 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.

Advanced Silicon Carbide Devices and Processing

Author : Stephen Saddow
Publisher : BoD – Books on Demand
ISBN 13 : 9535121685
Total Pages : 260 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Advanced Silicon Carbide Devices and Processing by : Stephen Saddow

Download or read book Advanced Silicon Carbide Devices and Processing written by Stephen Saddow and published by BoD – Books on Demand. This book was released on 2015-09-17 with total page 260 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since the production of the first commercially available blue LED in the late 1980s, silicon carbide technology has grown into a billion-dollar industry world-wide in the area of solid-state lighting and power electronics. With this in mind we organized this book to bring to the attention of those well versed in SiC technology some new developments in the field with a particular emphasis on particularly promising technologies such as SiC-based solar cells and optoelectronics. We have balanced this with the more traditional subjects such as power electronics and some new developments in the improvement of the MOS system for SiC MOSFETS. Given the importance of advanced microsystems and sensors based on SiC, we also included a review on 3C-SiC for both microsystem and electronic applications.

Advancing Silicon Carbide Electronics Technology II

Author : Konstantinos Zekentes
Publisher : Materials Research Forum LLC
ISBN 13 : 164490067X
Total Pages : 292 pages
Book Rating : 4.6/5 (449 download)

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Book Synopsis Advancing Silicon Carbide Electronics Technology II by : Konstantinos Zekentes

Download or read book Advancing Silicon Carbide Electronics Technology II written by Konstantinos Zekentes and published by Materials Research Forum LLC. This book was released on 2020-03-15 with total page 292 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book presents an in-depth review and analysis of Silicon Carbide device processing. The main topics are: (1) Silicon Carbide Discovery, Properties and Technology, (2) Processing and Application of Dielectrics in Silicon Carbide Devices, (3) Doping by Ion Implantation, (4) Plasma Etching and (5) Fabrication of Silicon Carbide Nanostructures and Related Devices. The book is also suited as supplementary textbook for graduate courses. Keywords: Silicon Carbide, SiC, Technology, Processing, Semiconductor Devices, Material Properties, Polytypism, Thermal Oxidation, Post Oxidation Annealing, Surface Passivation, Dielectric Deposition, Field Effect Mobility, Ion Implantation, Post Implantation Annealing, Channeling, Surface Roughness, Dry Etching, Plasma Etching, Ion Etching, Sputtering, Chemical Etching, Plasma Chemistry, Micromasking, Microtrenching, Nanocrystal, Nanowire, Nanotube, Nanopillar, Nanoelectromechanical Systems (NEMS).

Advances in Ceramic Armor X

Author : Jerry C. LaSalvia
Publisher : John Wiley & Sons
ISBN 13 : 1119040612
Total Pages : 176 pages
Book Rating : 4.1/5 (19 download)

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Book Synopsis Advances in Ceramic Armor X by : Jerry C. LaSalvia

Download or read book Advances in Ceramic Armor X written by Jerry C. LaSalvia and published by John Wiley & Sons. This book was released on 2015-01-20 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: A collection of 14 papers from the Armor Ceramics symposium held during The American Ceramic Society’s 38th International Conference on Advanced Ceramics and Composites, held in Daytona Beach, Florida, January 26-31, 2014.

New Developments in Sensing Technology for Structural Health Monitoring

Author : Subhas Chandra Mukhopadhyay
Publisher : Springer Science & Business Media
ISBN 13 : 3642210996
Total Pages : 427 pages
Book Rating : 4.6/5 (422 download)

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Book Synopsis New Developments in Sensing Technology for Structural Health Monitoring by : Subhas Chandra Mukhopadhyay

Download or read book New Developments in Sensing Technology for Structural Health Monitoring written by Subhas Chandra Mukhopadhyay and published by Springer Science & Business Media. This book was released on 2011-07-14 with total page 427 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book has focussed on the different aspects of sensing technology, i.e. high reliability, adaptability, recalibration, information processing, data fusion, validation and integration of novel and high performance sensors specifically aims to use to inspect mechanical health of structure and similar applications. This book is dedicated to Sensing systems for Structural Health Monitoring offers to variety of users, namely, Master and PhD degree students, researchers, practitioners, especially Civil and Construction engineers. The book will provide an opportunity of a dedicated and a deep approach in order to improve their knowledge in this specific field.

Modern Sensing Technologies

Author : Subhas Chandra Mukhopadhyay
Publisher : Springer
ISBN 13 : 3319995405
Total Pages : 421 pages
Book Rating : 4.3/5 (199 download)

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Book Synopsis Modern Sensing Technologies by : Subhas Chandra Mukhopadhyay

Download or read book Modern Sensing Technologies written by Subhas Chandra Mukhopadhyay and published by Springer. This book was released on 2018-08-24 with total page 421 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides an overview of modern sensing technologies and reflects the remarkable advances that have been made in the field of intelligent and smart sensors, environmental monitoring, health monitoring, and many other sensing and monitoring contexts in today’s world. It addresses a broad range of aspects, from human health monitoring to the monitoring of environmental conditions, from wireless sensor networks and the Internet of Things to structural health monitoring. Given its breadth of scope, the book will benefit researchers, practitioners, technologists and graduate students involved in the monitoring of systems within the human body, functions and activities, healthcare technologies and services, the environment, etc.

MEMS and Microstructures in Aerospace Applications

Author : Robert Osiander
Publisher : CRC Press
ISBN 13 : 1420027743
Total Pages : 400 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis MEMS and Microstructures in Aerospace Applications by : Robert Osiander

Download or read book MEMS and Microstructures in Aerospace Applications written by Robert Osiander and published by CRC Press. This book was released on 2018-10-03 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: The promise of MEMS for aerospace applications has been germinating for years, and current advances bring the field to the very cusp of fruition. Reliability is chief among the challenges limiting the deployment of MEMS technologies in space, as the requirement of zero failure during the mission is quite stringent for this burgeoning field. MEMS and Microstructures in Aerospace Applications provides all the necessary tools to overcome these obstacles and take MEMS from the lab bench to beyond the exosphere. The book begins with an overview of MEMS development and provides several demonstrations of past and current examples of MEMS in space. From this platform, the discussion builds to fabrication technologies; the effect of space environmental factors on MEMS devices; and micro technologies for space systems, instrumentation, communications, thermal control, guidance navigation and control, and propulsion. Subsequent chapters explore factors common to all of the described systems, such as MEMS packaging, handling and contamination control, material selection for specific applications, reliability practices for design and application, and assurance practices. Edited and contributed by an outstanding team of leading experts from industry, academia, and national laboratories, MEMS and Microstructures in Aerospace Applications illuminates the path toward qualifying and integrating MEMS devices and instruments into future space missions and developing innovative satellite systems.

The VLSI Handbook

Author : Wai-Kai Chen
Publisher : CRC Press
ISBN 13 : 1420005960
Total Pages : 2320 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis The VLSI Handbook by : Wai-Kai Chen

Download or read book The VLSI Handbook written by Wai-Kai Chen and published by CRC Press. This book was released on 2018-10-03 with total page 2320 pages. Available in PDF, EPUB and Kindle. Book excerpt: For the new millenium, Wai-Kai Chen introduced a monumental reference for the design, analysis, and prediction of VLSI circuits: The VLSI Handbook. Still a valuable tool for dealing with the most dynamic field in engineering, this second edition includes 13 sections comprising nearly 100 chapters focused on the key concepts, models, and equations. Written by a stellar international panel of expert contributors, this handbook is a reliable, comprehensive resource for real answers to practical problems. It emphasizes fundamental theory underlying professional applications and also reflects key areas of industrial and research focus. WHAT'S IN THE SECOND EDITION? Sections on... Low-power electronics and design VLSI signal processing Chapters on... CMOS fabrication Content-addressable memory Compound semiconductor RF circuits High-speed circuit design principles SiGe HBT technology Bipolar junction transistor amplifiers Performance modeling and analysis using SystemC Design languages, expanded from two chapters to twelve Testing of digital systems Structured for convenient navigation and loaded with practical solutions, The VLSI Handbook, Second Edition remains the first choice for answers to the problems and challenges faced daily in engineering practice.

Mineral Physics—In Memory of Orson Anderson

Author : Robert Cooper Liebermann
Publisher : MDPI
ISBN 13 : 303936541X
Total Pages : 627 pages
Book Rating : 4.0/5 (393 download)

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Book Synopsis Mineral Physics—In Memory of Orson Anderson by : Robert Cooper Liebermann

Download or read book Mineral Physics—In Memory of Orson Anderson written by Robert Cooper Liebermann and published by MDPI. This book was released on 2020-12-29 with total page 627 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Special Issue contains original scientific papers in the field of mineral physics (and also rock physics). These papers are grouped into four categories: Reviews, Experimental Science, Theoretical Science and Technological Developments. These papers include those from first authors covering 5 generations of mineral physicists, including contemporaries of Orson [e.g., William Bassett, Frank Stacey], the next generation of leaders in mineral physics throughout the world [e.g., Michael Brown, Eiji Ohtani], current leaders in this field [e.g., Agnes Dewaele, Jun Tsuchiya], senior graduate students [e.g., Jan Borgomano, Vasilije Dobrosavlijevic, Francesca Miozzi], and an undergraduate student [e.g., Tyler Perez]. Mineral physics is the study of mineralogical problems through the application of condensed matter physics. In reality, mineral physicists use not only physics, but also solid-state chemistry; they study not only minerals, but all materials related to natural minerals (e.g., structural analogs, but also glasses, melts and fluids). Mineral and rock physics is intimately connected to many other geoscience disciplines including seismology, planetary science, petrology, geochemistry, geomagnetism, and geodynamics, and even materials and climate science. This book is dedicated to Orson Anderson who died in June 2019 at the age of 94.

Comprehensive Semiconductor Science and Technology

Author :
Publisher : Newnes
ISBN 13 : 0080932282
Total Pages : 3572 pages
Book Rating : 4.0/5 (89 download)

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Book Synopsis Comprehensive Semiconductor Science and Technology by :

Download or read book Comprehensive Semiconductor Science and Technology written by and published by Newnes. This book was released on 2011-01-28 with total page 3572 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductors are at the heart of modern living. Almost everything we do, be it work, travel, communication, or entertainment, all depend on some feature of semiconductor technology. Comprehensive Semiconductor Science and Technology, Six Volume Set captures the breadth of this important field, and presents it in a single source to the large audience who study, make, and exploit semiconductors. Previous attempts at this achievement have been abbreviated, and have omitted important topics. Written and Edited by a truly international team of experts, this work delivers an objective yet cohesive global review of the semiconductor world. The work is divided into three sections. The first section is concerned with the fundamental physics of semiconductors, showing how the electronic features and the lattice dynamics change drastically when systems vary from bulk to a low-dimensional structure and further to a nanometer size. Throughout this section there is an emphasis on the full understanding of the underlying physics. The second section deals largely with the transformation of the conceptual framework of solid state physics into devices and systems which require the growth of extremely high purity, nearly defect-free bulk and epitaxial materials. The last section is devoted to exploitation of the knowledge described in the previous sections to highlight the spectrum of devices we see all around us. Provides a comprehensive global picture of the semiconductor world Each of the work's three sections presents a complete description of one aspect of the whole Written and Edited by a truly international team of experts