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Plasma Processing Of Materials
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Book Synopsis Plasma Processing of Materials by : National Research Council
Download or read book Plasma Processing of Materials written by National Research Council and published by National Academies Press. This book was released on 1991-02-01 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
Book Synopsis Lecture Notes on Principles of Plasma Processing by : Francis F. Chen
Download or read book Lecture Notes on Principles of Plasma Processing written by Francis F. Chen and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 213 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.
Book Synopsis Plasma-Surface Interactions and Processing of Materials by : O. Auciello
Download or read book Plasma-Surface Interactions and Processing of Materials written by O. Auciello and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt: An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.
Book Synopsis Plasma Processing of Nanomaterials by : R. Mohan Sankaran
Download or read book Plasma Processing of Nanomaterials written by R. Mohan Sankaran and published by CRC Press. This book was released on 2017-12-19 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: We are at a critical evolutionary juncture in the research and development of low-temperature plasmas, which have become essential to synthesizing and processing vital nanoscale materials. More and more industries are increasingly dependent on plasma technology to develop integrated small-scale devices, but physical limits to growth, and other challenges, threaten progress. Plasma Processing of Nanomaterials is an in-depth guide to the art and science of plasma-based chemical processes used to synthesize, process, and modify various classes of nanoscale materials such as nanoparticles, carbon nanotubes, and semiconductor nanowires. Plasma technology enables a wide range of academic and industrial applications in fields including electronics, textiles, automotives, aerospace, and biomedical. A prime example is the semiconductor industry, in which engineers revolutionized microelectronics by using plasmas to deposit and etch thin films and fabricate integrated circuits. An overview of progress and future potential in plasma processing, this reference illustrates key experimental and theoretical aspects by presenting practical examples of: Nanoscale etching/deposition of thin films Catalytic growth of carbon nanotubes and semiconductor nanowires Silicon nanoparticle synthesis Functionalization of carbon nanotubes Self-organized nanostructures Significant advances are expected in nanoelectronics, photovoltaics, and other emerging fields as plasma technology is further optimized to improve the implementation of nanomaterials with well-defined size, shape, and composition. Moving away from the usual focus on wet techniques embraced in chemistry and physics, the author sheds light on pivotal breakthroughs being made by the smaller plasma community. Written for a diverse audience working in fields ranging from nanoelectronics and energy sensors to catalysis and nanomedicine, this resource will help readers improve development and application of nanomaterials in their own work. About the Author: R. Mohan Sankaran received the American Vacuum Society’s 2011 Peter Mark Memorial Award for his outstanding contributions to tandem plasma synthesis.
Book Synopsis Applications of Plasma Technologies to Material Processing by : Giorgio Speranza
Download or read book Applications of Plasma Technologies to Material Processing written by Giorgio Speranza and published by CRC Press. This book was released on 2019-04-10 with total page 121 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a survey of the latest research and developments in plasma technology. In an easy and comprehensive manner, it explores what plasma is and the technologies utilized to produce plasma. It then investigates the main applications and their benefits. Different from other books on the topic that focus on specific aspects of plasma technology, the intention is to provide an introduction to all aspects related to plasma technologies. This book will be an ideal resource for graduate students studying plasma technologies, in addition to researchers in physics, engineering, and materials science Features Accessible and easy to understand Provides simple yet exhaustive explanations of the foundations Explores the latest technologies and is filled with practical applications and case studies
Book Synopsis Principles of Plasma Discharges and Materials Processing by : Michael A. Lieberman
Download or read book Principles of Plasma Discharges and Materials Processing written by Michael A. Lieberman and published by John Wiley & Sons. This book was released on 2005-04-08 with total page 795 pages. Available in PDF, EPUB and Kindle. Book excerpt: A Thorough Update of the Industry Classic on Principles of Plasma Processing The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals. The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters. New and expanded topics include: * Updated cross sections * Diffusion and diffusion solutions * Generalized Bohm criteria * Expanded treatment of dc sheaths * Langmuir probes in time-varying fields * Electronegative discharges * Pulsed power discharges * Dual frequency discharges * High-density rf sheaths and ion energy distributions * Hysteresis and instabilities * Helicon discharges * Hollow cathode discharges * Ionized physical vapor deposition * Differential substrate charging With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.
Book Synopsis Handbook of Advanced Plasma Processing Techniques by : R.J. Shul
Download or read book Handbook of Advanced Plasma Processing Techniques written by R.J. Shul and published by Springer Science & Business Media. This book was released on 2011-06-28 with total page 664 pages. Available in PDF, EPUB and Kindle. Book excerpt: Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.
Book Synopsis Plasma Processing of Semiconductors by : Paul Williams
Download or read book Plasma Processing of Semiconductors written by Paul Williams and published by Springer Science & Business Media. This book was released on 1997-05-31 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Book Synopsis Non-Thermal Plasma Technology for Polymeric Materials by : Sabu Thomas
Download or read book Non-Thermal Plasma Technology for Polymeric Materials written by Sabu Thomas and published by Elsevier. This book was released on 2018-10-08 with total page 494 pages. Available in PDF, EPUB and Kindle. Book excerpt: Non-Thermal Plasma Technology for Polymeric Materials: Applications in Composites, Nanostructured Materials and Biomedical Fields provides both an introduction and practical guide to plasma synthesis, modification and processing of polymers, their composites, nancomposites, blends, IPNs and gels. It examines the current state-of-the-art and new challenges in the field, including the use of plasma treatment to enhance adhesion, characterization techniques, and the environmental aspects of the process. Particular attention is paid to the effects on the final properties of composites and the characterization of fiber/polymer surface interactions. This book helps demystify the process of plasma polymerization, providing a thorough grounding in the fundamentals of plasma technology as they relate to polymers. It is ideal for materials scientists, polymer chemists, and engineers, acting as a guide to further research into new applications of this technology in the real world. Enables materials scientists and engineers to deploy plasma technology for surface treatment, characterization and analysis of polymeric materials Reviews the state-of-the-art in plasma technology for polymer synthesis and processing Presents detailed coverage of the most advanced applications for plasma polymerization, particularly in medicine and biomedical engineering, areas such as implants, biosensors and tissue engineering
Book Synopsis Cold Plasma in Materials Fabrication by : Alfred Grill
Download or read book Cold Plasma in Materials Fabrication written by Alfred Grill and published by IEEE. This book was released on 1994-01-01 with total page 257 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Plasma Technologies for Textiles by : Roshan Shishoo
Download or read book Plasma Technologies for Textiles written by Roshan Shishoo and published by Elsevier. This book was released on 2007-02-21 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma technologies present an environmentally-friendly and versatile way of treating textile materials in order to enhance a variety of properties such as wettability, liquid repellency, dyeability and coating adhesion. Recent advances made in commercially viable plasma systems have greatly increased the potential of using plasma technology in industrial textile finishing. This pioneering book provides an essential guide to both the technology and science related to plasmas and its practical applications in the textile industry. The first part of the book discusses the science and technology behind plasmas. Chapters give detailed and comprehensive descriptions on the characteristics of plasmas and methods of control and treatment in the processing of textiles. Both low pressure cold plasma and atmospheric pressure cold plasma processes are described as well as the diagnosis and control of plasma parameters in plasma generating reactors. A chapter is devoted to the use of plasma technology to achieve nanoscale treatment of textile surfaces. The second part of the book concentrates on specific applications of plasma technologies. Chapters cover treatments for water and oil repellency of textiles, engineering of biomedical textiles and woollen finishing techniques through the use of plasma technologies. Further chapters cover the modification of fibres for use in composites and the potential use of plasma technologies for the finishing of fabrics made of man made fibres. The final chapter in the book gives a comprehensive analysis of the surface chemical and physical characterisation of plasma treated fabrics. Written by a distinguished international team of experts, Plasma technologies for textiles is an invaluable reference for researchers, scientists and technologists alike. Summarises both the science and technology of plasma processing, and its practical applications Discusses how plasma technology improves textile properties such as wettability and liquid repelling An invaluable reference for researchers, scientists and technologists
Book Synopsis Plasma Science by : National Research Council
Download or read book Plasma Science written by National Research Council and published by National Academies Press. This book was released on 1995-02-01 with total page 231 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma science is the study of ionized states of matter. This book discusses the field's potential contributions to society and recommends actions that would optimize those contributions. It includes an assessment of the field's scientific and technological status as well as a discussion of broad themes such as fundamental plasma experiments, theoretical and computational plasma research, and plasma science education.
Book Synopsis Spark Plasma Sintering of Materials by : Pasquale Cavaliere
Download or read book Spark Plasma Sintering of Materials written by Pasquale Cavaliere and published by Springer. This book was released on 2019-02-18 with total page 781 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes spark plasma sintering (SPS) in depth. It addresses fundamentals and material-specific considerations, techniques, and applications across a broad spectrum of materials. The book highlights methods used to consolidate metallic or ceramic particles in very short times. It highlights the production of complex alloys and metal matrix composites with enhanced mechanical and wear properties. Emphasis is placed on the speed of the sintering processes, uniformity in product microstructure and properties, reduced grain growth, the compaction and sintering of materials in one processing step, various materials processing, and high energy efficiency. Current and potential applications in space science and aeronautics, automation, mechanical engineering, and biomedicine are addressed throughout the book.
Book Synopsis Arc Plasma Technology in Materials Science by : Dennis A. Gerdeman
Download or read book Arc Plasma Technology in Materials Science written by Dennis A. Gerdeman and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 215 pages. Available in PDF, EPUB and Kindle. Book excerpt: Although a considerable amount of information concerning the applications for arc plasmas in the materials sciences is available, it is contained in literally thousands of separate manuals, technical notes, textbooks, and government and industrial reports. Each source generally deals with only one specific application or, at best, a narrow range of utilization. This book was developed to provide a comprehensive and up-to-date compilation of information in the technology of arc plasma utilization. The book is divided into two general categories: flame spraying and materials evaluation. In the flame spraying section a comprehensive review of the plasma spraying process is presented. The design and operation of plasma spraying equipment are described. Included are a description of the nature of a plasma, and the design and operation of plasma generators, powder feed systems and accessory control equip ment. The general process procedures, and associated process variables are de scribed. Particular emphasis is given to the particle heating process and the mechanisms for adherence and cohesion of coatings. Competitive flame spraying equipment is also detailed (combustion process, detonation and electric arc) and compared with the plasma spray process. A discussion and compilation of flame sprayed ceramic and metal materials, their properties and applications are also included.
Book Synopsis Plasma Physics and Engineering by : Alexander Fridman
Download or read book Plasma Physics and Engineering written by Alexander Fridman and published by CRC Press. This book was released on 2004-04-15 with total page 888 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma engineering is a rapidly expanding area of science and technology with increasing numbers of engineers using plasma processes over a wide range of applications. An essential tool for understanding this dynamic field, Plasma Physics and Engineering provides a clear, fundamental introduction to virtually all aspects of modern plasma science and technology, including plasma chemistry and engineering, combustion, chemical physics, lasers, electronics, methods of material treatment, fuel conversion, and environmental control. The book contains an extensive database on plasma kinetics and thermodynamics, many helpful numerical formulas for practical calculations, and an array of problems and concept questions.
Book Synopsis Plasma Deposition, Treatment, and Etching of Polymers by : Riccardo d'Agostino
Download or read book Plasma Deposition, Treatment, and Etching of Polymers written by Riccardo d'Agostino and published by Elsevier. This book was released on 2012-12-02 with total page 544 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Deposition, Treatment, and Etching of Polymers takes a broad look at the basic principles, the chemical processes, and the diagnostic procedures in the interaction of plasmas with polymer surfaces. This recent technology has yielded a large class of new materials offering many applications, including their use as coatings for chemical fibers and films. Additional applications include uses for the passivation of metals, the surface hardening of tools, increased biocompatibility of biomedical materials, chemical and physical sensors, and a variety of micro- and optoelectronic devices. Appeals to a broad range of industries from microelectronics to space technology Discusses a wide array of new uses for plasma polymers Provides a tutorial introduction to the field Surveys various classes of plasma polymers, their chemical and morphological properties, effects of plasma process parameters on the growth and structure of these synthetic materials, and techniques for characterization Interests scientists, engineers, and students alike
Book Synopsis Plasma-Material Interaction in Controlled Fusion by : Dirk Naujoks
Download or read book Plasma-Material Interaction in Controlled Fusion written by Dirk Naujoks and published by Springer Science & Business Media. This book was released on 2006-08-25 with total page 279 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book deals with the specific contact between the fourth state of matter, i.e. plasma, and the first state of matter, i.e. a solid wall, in controlled fusion experiments. A comprehensive analysis of the main processes of plasma-surface interaction is given together with an assessment of the most critical questions within the context of general criteria and operation limits. It also contains a survey on other important aspects in nuclear fusion.
