Plasma Processing for VLSI

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Publisher : Academic Press
ISBN 13 : 1483217752
Total Pages : 544 pages
Book Rating : 4.4/5 (832 download)

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Book Synopsis Plasma Processing for VLSI by : Norman G. Einspruch

Download or read book Plasma Processing for VLSI written by Norman G. Einspruch and published by Academic Press. This book was released on 2014-12-01 with total page 544 pages. Available in PDF, EPUB and Kindle. Book excerpt: VLSI Electronics: Microstructure Science, Volume 8: Plasma Processing for VLSI (Very Large Scale Integration) discusses the utilization of plasmas for general semiconductor processing. It also includes expositions on advanced deposition of materials for metallization, lithographic methods that use plasmas as exposure sources and for multiple resist patterning, and device structures made possible by anisotropic etching. This volume is divided into four sections. It begins with the history of plasma processing, a discussion of some of the early developments and trends for VLSI. The second section, Deposition, discusses deposition techniques for VLSI such as sputtering metals for metallization and contacts, plasma-enhanced chemical vapor deposition of metals and suicides, and plasma enhanced chemical vapor deposition of dielectrics. The part on Lithography presents the high-resolution trilayer resist system, pulsed x-ray sources for submicrometer x-ray lithography, and high-intensity deep-UV sources. The last part, Etching, provides methods in etching, like ion-beam etching using reactive gases, low-pressure reactive ion etching, and the uses of inert-gas ion milling. The theory and mechanisms of plasma etching are described and a number of new device structures made possible by anisotropic etching are enumerated as well. Scientists, engineers, researchers, device designers, and systems architects will find the book useful.

Plasma Applications In Gases, Liquids And Solids: Technology And Methods

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Publisher : World Scientific
ISBN 13 : 9811275947
Total Pages : 296 pages
Book Rating : 4.8/5 (112 download)

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Book Synopsis Plasma Applications In Gases, Liquids And Solids: Technology And Methods by : Claudia Riccardi

Download or read book Plasma Applications In Gases, Liquids And Solids: Technology And Methods written by Claudia Riccardi and published by World Scientific. This book was released on 2023-09-21 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book explores the exciting and evolving world of plasma physics in materials manufacturing and processing. From ionized discharges to non-thermal equilibrium plasmas, new phenomena in physics are constantly emerging. Written, organized, and edited by internationally recognized experts, the various chapters delve into diverse issues in plasma science, including new applications at the nanoscale to the development of diagnostic tools and simulations. The interactions between the plasma state and matter, both surface and bulk, as well as gases and liquids, are explored. As electric discharges in plasmas continue to expand towards new horizons, anyone interested in this fascinating field would benefit from this book as an up-to-date and essential resource.

VLSI Electronics: Plasma processing for VLSI

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Publisher :
ISBN 13 :
Total Pages : 552 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis VLSI Electronics: Plasma processing for VLSI by : Norman G. Einspruch

Download or read book VLSI Electronics: Plasma processing for VLSI written by Norman G. Einspruch and published by . This book was released on 1981 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Publications of the National Institute of Standards and Technology ... Catalog

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Publisher :
ISBN 13 :
Total Pages : 480 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Publications of the National Institute of Standards and Technology ... Catalog by : National Institute of Standards and Technology (U.S.)

Download or read book Publications of the National Institute of Standards and Technology ... Catalog written by National Institute of Standards and Technology (U.S.) and published by . This book was released on 1991 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Chemical Abstracts

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Publisher :
ISBN 13 :
Total Pages : 2540 pages
Book Rating : 4.3/5 (91 download)

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Download or read book Chemical Abstracts written by and published by . This book was released on 2002 with total page 2540 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Comprehensive Materials Processing

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Publisher : Newnes
ISBN 13 : 0080965334
Total Pages : 5485 pages
Book Rating : 4.0/5 (89 download)

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Book Synopsis Comprehensive Materials Processing by :

Download or read book Comprehensive Materials Processing written by and published by Newnes. This book was released on 2014-04-07 with total page 5485 pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprehensive Materials Processing, Thirteen Volume Set provides students and professionals with a one-stop resource consolidating and enhancing the literature of the materials processing and manufacturing universe. It provides authoritative analysis of all processes, technologies, and techniques for converting industrial materials from a raw state into finished parts or products. Assisting scientists and engineers in the selection, design, and use of materials, whether in the lab or in industry, it matches the adaptive complexity of emergent materials and processing technologies. Extensive traditional article-level academic discussion of core theories and applications is supplemented by applied case studies and advanced multimedia features. Coverage encompasses the general categories of solidification, powder, deposition, and deformation processing, and includes discussion on plant and tool design, analysis and characterization of processing techniques, high-temperatures studies, and the influence of process scale on component characteristics and behavior. Authored and reviewed by world-class academic and industrial specialists in each subject field Practical tools such as integrated case studies, user-defined process schemata, and multimedia modeling and functionality Maximizes research efficiency by collating the most important and established information in one place with integrated applets linking to relevant outside sources

Publications

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Publisher :
ISBN 13 :
Total Pages : 480 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Publications by : United States. National Bureau of Standards

Download or read book Publications written by United States. National Bureau of Standards and published by . This book was released on 1991 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Electrical & Electronics Abstracts

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Publisher :
ISBN 13 :
Total Pages : 1904 pages
Book Rating : 4.3/5 (243 download)

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Download or read book Electrical & Electronics Abstracts written by and published by . This book was released on 1997 with total page 1904 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Scientific and Technical Aerospace Reports

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Publisher :
ISBN 13 :
Total Pages : 702 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Scientific and Technical Aerospace Reports by :

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 702 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Physics Briefs

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Publisher :
ISBN 13 :
Total Pages : 1146 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Physics Briefs by :

Download or read book Physics Briefs written by and published by . This book was released on 1994 with total page 1146 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Deposition Technologies for Films and Coatings

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Publisher : William Andrew
ISBN 13 : 0815520328
Total Pages : 932 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Handbook of Deposition Technologies for Films and Coatings by : Peter M. Martin

Download or read book Handbook of Deposition Technologies for Films and Coatings written by Peter M. Martin and published by William Andrew. This book was released on 2009-12-01 with total page 932 pages. Available in PDF, EPUB and Kindle. Book excerpt: This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.

Laser Processing and Chemistry

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Publisher : Springer Science & Business Media
ISBN 13 : 3662032538
Total Pages : 649 pages
Book Rating : 4.6/5 (62 download)

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Book Synopsis Laser Processing and Chemistry by : Dieter Bäuerle

Download or read book Laser Processing and Chemistry written by Dieter Bäuerle and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 649 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser--matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas--solid, liquid--solid, and solid--solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. Students, engineers, and manufacturers alike will find this book an invaluable reference work for the state of the art in laser processing.

Ceramic Abstracts

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Publisher :
ISBN 13 :
Total Pages : 250 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis Ceramic Abstracts by :

Download or read book Ceramic Abstracts written by and published by . This book was released on 1998 with total page 250 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Plasma Deposition, Treatment, and Etching of Polymers

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Publisher : Elsevier
ISBN 13 : 0323139086
Total Pages : 544 pages
Book Rating : 4.3/5 (231 download)

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Book Synopsis Plasma Deposition, Treatment, and Etching of Polymers by : Riccardo d'Agostino

Download or read book Plasma Deposition, Treatment, and Etching of Polymers written by Riccardo d'Agostino and published by Elsevier. This book was released on 2012-12-02 with total page 544 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Deposition, Treatment, and Etching of Polymers takes a broad look at the basic principles, the chemical processes, and the diagnostic procedures in the interaction of plasmas with polymer surfaces. This recent technology has yielded a large class of new materials offering many applications, including their use as coatings for chemical fibers and films. Additional applications include uses for the passivation of metals, the surface hardening of tools, increased biocompatibility of biomedical materials, chemical and physical sensors, and a variety of micro- and optoelectronic devices. - Appeals to a broad range of industries from microelectronics to space technology - Discusses a wide array of new uses for plasma polymers - Provides a tutorial introduction to the field - Surveys various classes of plasma polymers, their chemical and morphological properties, effects of plasma process parameters on the growth and structure of these synthetic materials, and techniques for characterization - Interests scientists, engineers, and students alike

International Aerospace Abstracts

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Publisher :
ISBN 13 :
Total Pages : 940 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis International Aerospace Abstracts by :

Download or read book International Aerospace Abstracts written by and published by . This book was released on 1997 with total page 940 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Nuclear Science Abstracts

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Publisher :
ISBN 13 :
Total Pages : 1652 pages
Book Rating : 4.3/5 (555 download)

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Download or read book Nuclear Science Abstracts written by and published by . This book was released on 1966-05 with total page 1652 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Reference Data for Engineers

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Publisher : Butterworth-Heinemann
ISBN 13 : 9780750670647
Total Pages : 1546 pages
Book Rating : 4.6/5 (76 download)

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Book Synopsis Reference Data for Engineers by : Mac E. Van Valkenburg

Download or read book Reference Data for Engineers written by Mac E. Van Valkenburg and published by Butterworth-Heinemann. This book was released on 1998 with total page 1546 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by professionals for professionals, this book was originally published as a limited private edition used by engineers, mathematicians, and physicians at ITT. Its title was Reference Data for Radio Engineers. 50 years later, it is still the familiar and dependable reference for engineers worldwide.In this completely updated Eighth Edition, the title has changed to reflect the range of new disciplines. The scope of coverage has been greatly expanded to include data on radio technology, as well as digital electronics, computers, and communications. The result is the combined effort of more than seventy engineers, scientists, educators, and other recognized specialists.You hold in your hands the most respected, reliable, and indispensable reference tool for all technical professionals. No matter what field you work in, this is a book you re sure to refer to again and again