Oxydation basse température assistée par plasma des alliages silicium-germanium

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ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (15 download)

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Book Synopsis Oxydation basse température assistée par plasma des alliages silicium-germanium by : Claude Tételin

Download or read book Oxydation basse température assistée par plasma des alliages silicium-germanium written by Claude Tételin and published by . This book was released on 2013 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Deux aspects fondamentaux de l'oxydation basse température assistée par plasma d'oxygène des alliages silicium germanium ont été étudies: la nature chimique de l'oxyde et les cinétiques d'oxydations de ces alliages. La nature de l'oxyde forme varie en fonction du temps d'oxydation. Dans un premier temps, l'oxyde forme est du dioxyde de silicium (sio#2) et le germanium s'accumule a l'interface oxyde/substrat. Nous avons montre, que cette accumulation se fait sous la forme d'une couche de germanium pur. Dans un deuxième temps, le germanium s'incorpore au dioxyde de silicium sous forme d'agrégats avant d'être oxydé et de diffuser vers la surface externe de l'oxyde. En oxydation assistée par oxygène atomique, nous avons montre que les alliages sige s'oxydent plus vite qu'un substrat de silicium. Ceci est attribué à la fragilisation des liaisons du substrat due à la présence de germanium. Dans le cas de l'anodisation, les alliages sige ne s'oxydent également plus vite que le silicium. Nous avons montré que le mécanisme limitant la réaction d'anodisation est la relaxation de contrainte entre l'oxyde et le substrat. La qualité électronique des oxydes formes à partir de sige est moins bonne que ceux formes à partir de silicium mais nous pouvons envisager une amélioration de cette qualité grâce a des traitements thermiques appropries.

MECANISMES D'OXYDATION ET CARACTERISATION DE COUCHES D'OXYDE REALISEES A BASSE TEMPERATURE PAR ANODISATION PLASMA DE SILICIUM MONO ET POLY-CRISTALLIN, GERMANIUM ET ALLIAGES SIGE

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ISBN 13 :
Total Pages : 138 pages
Book Rating : 4.:/5 (492 download)

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Book Synopsis MECANISMES D'OXYDATION ET CARACTERISATION DE COUCHES D'OXYDE REALISEES A BASSE TEMPERATURE PAR ANODISATION PLASMA DE SILICIUM MONO ET POLY-CRISTALLIN, GERMANIUM ET ALLIAGES SIGE by : HELENE.. PLANTIER NIEL

Download or read book MECANISMES D'OXYDATION ET CARACTERISATION DE COUCHES D'OXYDE REALISEES A BASSE TEMPERATURE PAR ANODISATION PLASMA DE SILICIUM MONO ET POLY-CRISTALLIN, GERMANIUM ET ALLIAGES SIGE written by HELENE.. PLANTIER NIEL and published by . This book was released on 1999 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt: LE TRAVAIL PRESENTE DANS CE MANUSCRIT S'INSERE DANS LE CADRE DES RECHERCHES MENEES SUR LA REALISATION D'OXYDES, DITS BASSE TEMPERATURE (ENVIRON 100\C), DESTINES AUX COMPOSANTS ELECTRONIQUES. L'OXYDATION PAR PLASMA D'OXYGENE A ETE ETUDIEE SUR DIFFERENTS MATERIAUX : LE SILICIUM MONO-CRISTALLIN ET POLY-CRISTALLIN, LE GERMANIUM ET DES ALLIAGES SIGE. NOUS AVONS TOUT D'ABORD DECRIT ET DISCUTE LES MECANISMES D'OXYDATION THERMIQUES ET PLASMA, ET NOUS AVONS PRESENTE LES CINETIQUES EXPERIMENTALES DE CROISSANCE D'OXYDE. NOUS AVONS ENSUITE COMPARE LES CARACTERISTIQUES DES OXYDES THERMIQUES ET PLASMA, ET MIS EN EVIDENCE DES DIFFERENCES DE STRUCTURE INTERNE. EN PARTICULIER, GRACE AUX EXPERIENCES ET AUX SIMULATIONS DES SPECTRES INFRAROUGES, NOUS AVONS DETERMINE L'ANGLE DES LIAISONS SI-O-SI ET GE-O-GE, LES CONSTANTES DE FORCES CENTRALE ET NON CENTRALE, ET IDENTIFIE LES BANDES D'ABSORPTION ASSOCIEES AUX DIFFERENTS MODES DE VIBRATION DES ATOMES. DE PLUS, LA VARIATION DE LA FREQUENCE DE VIBRATION DES MODES TO ET LO AVEC L'EPAISSEUR, INDIQUE QUE LES OXYDES PLASMA N'ONT PAS UNE STRUCTURE INTER ATOMIQUE HOMOGENE SUR LA TOTALITE DE L'EPAISSEUR. CETTE INHOMOGENEITE EST EGALEMENT OBSERVEE PAR SPECTROMETRIE AUGER. FINALEMENT, LES CARACTERISATIONS ELECTRIQUES (C(V), I(V)) ONT MONTRE QU'IL ETAIT DIFFICILE DE DISSOCIER L'INFLUENCE DES EFFETS DU PLASMA, DES CONDITIONS DE REALISATION (EN SALLE BLANCHE OU HORS SALLE BLANCHE). TOUTEFOIS, LES CARACTERISTIQUES DE NOS OXYDES PLASMA SONT PROCHES DE CELLES OBTENUES POUR LES OXYDES SIO 2 DEPOSES EN SALLE BLANCHE, CE QUI CONSTITUE UN RESULTAT TRES PROMETTEUR.

Crystal Growth and Evaluation of Silicon for VLSI and ULSI

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Publisher : CRC Press
ISBN 13 : 1482232812
Total Pages : 432 pages
Book Rating : 4.4/5 (822 download)

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Book Synopsis Crystal Growth and Evaluation of Silicon for VLSI and ULSI by : Golla Eranna

Download or read book Crystal Growth and Evaluation of Silicon for VLSI and ULSI written by Golla Eranna and published by CRC Press. This book was released on 2014-12-08 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges. Crystal Growth and Evaluation of Silicon for VLSI and ULSI is one of the first books to cover the systematic growth of silicon single crystals and the complete evaluation of silicon, from sand to useful wafers for device fabrication. Written for engineers and researchers working in semiconductor fabrication industries, this practical text: Describes different techniques used to grow silicon single crystals Explains how grown single-crystal ingots become a complete silicon wafer for integrated-circuit fabrication Reviews different methods to evaluate silicon wafers to determine suitability for device applications Analyzes silicon wafers in terms of resistivity and impurity concentration mapping Examines the effect of intentional and unintentional impurities Explores the defects found in regular silicon-crystal lattice Discusses silicon wafer preparation for VLSI and ULSI processing Crystal Growth and Evaluation of Silicon for VLSI and ULSI is an essential reference for different approaches to the selection of the basic silicon-containing compound, separation of silicon as metallurgical-grade pure silicon, subsequent purification, single-crystal growth, and defects and evaluation of the deviations within the grown crystals.

Fundamentals of III-V Semiconductor MOSFETs

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Publisher : Springer Science & Business Media
ISBN 13 : 1441915478
Total Pages : 451 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Fundamentals of III-V Semiconductor MOSFETs by : Serge Oktyabrsky

Download or read book Fundamentals of III-V Semiconductor MOSFETs written by Serge Oktyabrsky and published by Springer Science & Business Media. This book was released on 2010-03-16 with total page 451 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fundamentals of III-V Semiconductor MOSFETs presents the fundamentals and current status of research of compound semiconductor metal-oxide-semiconductor field-effect transistors (MOSFETs) that are envisioned as a future replacement of silicon in digital circuits. The material covered begins with a review of specific properties of III-V semiconductors and available technologies making them attractive to MOSFET technology, such as band-engineered heterostructures, effect of strain, nanoscale control during epitaxial growth. Due to the lack of thermodynamically stable native oxides on III-V's (such as SiO2 on Si), high-k oxides are the natural choice of dielectrics for III-V MOSFETs. The key challenge of the III-V MOSFET technology is a high-quality, thermodynamically stable gate dielectric that passivates the interface states, similar to SiO2 on Si. Several chapters give a detailed description of materials science and electronic behavior of various dielectrics and related interfaces, as well as physics of fabricated devices and MOSFET fabrication technologies. Topics also include recent progress and understanding of various materials systems; specific issues for electrical measurement of gate stacks and FETs with low and wide bandgap channels and high interface trap density; possible paths of integration of different semiconductor materials on Si platform.

ICREEC 2019

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Publisher : Springer Nature
ISBN 13 : 9811554447
Total Pages : 659 pages
Book Rating : 4.8/5 (115 download)

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Book Synopsis ICREEC 2019 by : Ahmed Belasri

Download or read book ICREEC 2019 written by Ahmed Belasri and published by Springer Nature. This book was released on 2020-06-10 with total page 659 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book highlights peer reviewed articles from the 1st International Conference on Renewable Energy and Energy Conversion, ICREEC 2019, held at Oran in Algeria. It presents recent advances, brings together researchers and professionals in the area and presents a platform to exchange ideas and establish opportunities for a sustainable future. Topics covered in this proceedings, but not limited to, are photovoltaic systems, bioenergy, laser and plasma technology, fluid and flow for energy, software for energy and impact of energy on the environment.

Materials and Surface Engineering in Tribology

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Publisher : John Wiley & Sons
ISBN 13 : 1118623061
Total Pages : 179 pages
Book Rating : 4.1/5 (186 download)

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Book Synopsis Materials and Surface Engineering in Tribology by : Jamal Takadoum

Download or read book Materials and Surface Engineering in Tribology written by Jamal Takadoum and published by John Wiley & Sons. This book was released on 2013-05-10 with total page 179 pages. Available in PDF, EPUB and Kindle. Book excerpt: This title is designed to provide a clear and comprehensive overview of tribology. The book introduces the notion of a surface in tribology where a solid surface is described from topographical, structural, mechanical, and energetic perspectives. It also describes the principal techniques used to characterize and analyze surfaces. The title then discusses what may be called the fundamentals of tribology by introducing and describing the concepts of adhesion, friction, wear, and lubrication. The book focuses on the materials used in tribology, introducing the major classes of materials used, either in their bulk states or as coatings, including both protective layers and other coatings used for decorative purposes. Of especial importance to the tribology community are sections that provide the latest information on Nanotribology, Wear, Lubrication, and Wear-Corrosion: Tribocorrosion and Erosion-Corrosion.

Handbook of Thin Film Technology

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Publisher : Springer Science & Business Media
ISBN 13 : 3642054307
Total Pages : 385 pages
Book Rating : 4.6/5 (42 download)

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Book Synopsis Handbook of Thin Film Technology by : Hartmut Frey

Download or read book Handbook of Thin Film Technology written by Hartmut Frey and published by Springer Science & Business Media. This book was released on 2015-05-06 with total page 385 pages. Available in PDF, EPUB and Kindle. Book excerpt: “Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.

Strengthening Mechanisms in Crystal Plasticity

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Publisher : Oxford University Press on Demand
ISBN 13 : 0198516002
Total Pages : 425 pages
Book Rating : 4.1/5 (985 download)

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Book Synopsis Strengthening Mechanisms in Crystal Plasticity by : Ali Argon

Download or read book Strengthening Mechanisms in Crystal Plasticity written by Ali Argon and published by Oxford University Press on Demand. This book was released on 2008 with total page 425 pages. Available in PDF, EPUB and Kindle. Book excerpt: Technologically important metals and alloys have been strengthened throughout history by empirical means. The scientific bases of the central mechanisms of such forms of strengthening, developed over the past several decades are presented here through mechanistic models and associated experimental results.

Law of Corresponding States for Fused Salts

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ISBN 13 :
Total Pages : 28 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Law of Corresponding States for Fused Salts by : H. Reiss

Download or read book Law of Corresponding States for Fused Salts written by H. Reiss and published by . This book was released on 1961 with total page 28 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Surface Engineering of Metals

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Publisher : CRC Press
ISBN 13 : 9781420049923
Total Pages : 612 pages
Book Rating : 4.0/5 (499 download)

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Book Synopsis Surface Engineering of Metals by : Tadeusz Burakowski

Download or read book Surface Engineering of Metals written by Tadeusz Burakowski and published by CRC Press. This book was released on 1998-12-23 with total page 612 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface Engineering of Metals provides basic definitions of classical and modern surface treatments, addressing mechanisms of formation, microstructure, and properties of surface layers. Part I outlines the fundamentals of surface engineering, presents the history of its development, and proposes a two-category classification of surface layers. Discussions include the basic potential and usable properties of superficial layers and coatings, explaining their concept, interaction with other properties, and the significance of these properties for proper selection and functioning. Part II provides an original classification of the production methods of surface layers. Discussions include the latest technologies in this field, characterized by directional or beam interaction of particles or of the heating medium with the treat surface.

Analytical Methods in the Nuclear Fuel Cycle

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ISBN 13 :
Total Pages : 610 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Analytical Methods in the Nuclear Fuel Cycle by :

Download or read book Analytical Methods in the Nuclear Fuel Cycle written by and published by . This book was released on 1972 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Molecular Beam Epitaxy

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ISBN 13 : 0199695822
Total Pages : 529 pages
Book Rating : 4.1/5 (996 download)

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Book Synopsis Molecular Beam Epitaxy by : John Wilfred Orton

Download or read book Molecular Beam Epitaxy written by John Wilfred Orton and published by . This book was released on 2015 with total page 529 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book is a history of Molecular Beam Epitaxy (MBE) as applied to the growth of semiconductor thin films (note that it does not cover the subject of metal thin films). It begins by examining the origins of MBE, first of all looking at the nature of molecular beams and considering their application to fundamental physics, to the development of nuclear magnetic resonance and to the invention of the microwave MASER. It shows how molecular beams of silane (SiH4) were used to study the nucleation of silicon films on a silicon substrate and how such studies were extended to compound semiconductors such as GaAs. From such surface studies in ultra-high vacuum the technique developed into a method of growing high quality single crystal films of a wide range of semiconductors. Comparing this with earlier evaporation methods of deposition and with other epitaxial deposition methods such as liquid phase and vapour phase epitaxy (LPE and VPE). The text describes the development of MBE machines from the early 'home-made' variety to that of commercial equipment and show how MBE was gradually refined to produce high quality films with atomic dimensions. This was much aided by the use of various in-situ surface analysis techniques, such as reflection high energy electron diffraction (RHEED) and mass spectrometry, a feature unique to MBE. It looks at various modified versions of the basic MBE process, then proceed to describe their application to the growth of so-called 'low-dimensional structures' (LDS) based on ultra-thin heterostructure films with thickness of order a few molecular monolayers. Further chapters cover the growth of a wide range of different compounds and describe their application to fundamental physics and to the fabrication of electronic and opto-electronic devices. The authors study the historical development of all these aspects and emphasise both the (often unexpected) manner of their discovery and development and the unique features which MBE brings to the growth of extremely complex structures with monolayer accuracy.

Diffusion in Materials - DIMAT 2011

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Publisher : Trans Tech Publications Ltd
ISBN 13 : 3038137030
Total Pages : 600 pages
Book Rating : 4.0/5 (381 download)

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Book Synopsis Diffusion in Materials - DIMAT 2011 by : Igor Bezverkhyy

Download or read book Diffusion in Materials - DIMAT 2011 written by Igor Bezverkhyy and published by Trans Tech Publications Ltd. This book was released on 2012-04-12 with total page 600 pages. Available in PDF, EPUB and Kindle. Book excerpt: The International Conference on Diffusion in Materials (DIMAT) is the benchmark conference series for diffusion in solids. DIMAT 2011 was organized by the University of Bourgogne in association with CNRS, Dijon (France). The conference showcased new results concerning theoretical tools as well as applied research approaches. Diffusion processes affect all types of materials: nanomaterials, materials for energy, metallurgy, glasses and ceramics, but each requires its own numerical tools. Volume is indexed by Thomson Reuters CPCI-S (WoS). This volume comprises most of the contributions presented at DIMAT 2011: 4 plenary lectures delivered by famous high-level scientists plus 88 contributions in the form of keynote lectures, talks and posters.

Application of Particle and Laser Beams in Materials Technology

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Publisher : Springer Science & Business Media
ISBN 13 : 9780792333241
Total Pages : 702 pages
Book Rating : 4.3/5 (332 download)

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Book Synopsis Application of Particle and Laser Beams in Materials Technology by : P. Misaelides

Download or read book Application of Particle and Laser Beams in Materials Technology written by P. Misaelides and published by Springer Science & Business Media. This book was released on 1995-01-31 with total page 702 pages. Available in PDF, EPUB and Kindle. Book excerpt: The development of advanced materials with preselected properties is one of the main goals of materials research. Of especial interest are electronics, high-temperature and superhard materials for various applications, as well as alloys with improved wear, corrosion and mechanical resistance properties. The technical challenge connected with the production of these materials is not only associated with the development of new specialised preparation techniques but also with quality control. The energetic charged particle, electron and photon beams offer the possibility of modifying the properties of the near-surface regions of materials without seriously affecting their bulk, and provide unique analytical tools for testing their quality. Application of Particle and Laser Beams in Materials Technology provides an overview of this rapidly expanding field. Fundamental aspects concerning the interactions and collisions on atomic, nuclear and solid state scale are presented in a didactic way, along with the application of a variety of techniques for the solution of problems ranging from the development of electronics materials to corrosion research and from archaeometry to environmental protection. The book is divided into six thematic units: Fundamentals, Surface Analysis Techniques, Laser Beams in Materials Technology, Accelerator-Based Techniques in Materials Technology, Materials Modification and Synchrotron Radiation.

Proceedings of 5th International Conference on Advanced Manufacturing Engineering and Technologies

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Publisher :
ISBN 13 : 9783319564319
Total Pages : 475 pages
Book Rating : 4.5/5 (643 download)

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Book Synopsis Proceedings of 5th International Conference on Advanced Manufacturing Engineering and Technologies by : Vidosav Majstorovic

Download or read book Proceedings of 5th International Conference on Advanced Manufacturing Engineering and Technologies written by Vidosav Majstorovic and published by . This book was released on 2017 with total page 475 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Intelligent Textiles and Clothing

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Publisher : Woodhead Publishing
ISBN 13 : 1845691628
Total Pages : 525 pages
Book Rating : 4.8/5 (456 download)

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Book Synopsis Intelligent Textiles and Clothing by : H Mattila

Download or read book Intelligent Textiles and Clothing written by H Mattila and published by Woodhead Publishing. This book was released on 2006-07-28 with total page 525 pages. Available in PDF, EPUB and Kindle. Book excerpt: The use of intelligent textiles in clothing is an exciting new field with wide-ranging applications. Intelligent textiles and clothing summarises some of the main types of intelligent textiles and their uses.Part one of the book reviews phase change materials (PCM), their role in such areas as thermal regulation and ways they can be integrated into outdoor and other types of clothing. The second part of the book discusses shape memory materials (SMM) and their applications in medical textiles, clothing and composite materials. Part three deals with chromic (colour change) and conductive materials and their use in such areas as sensors within clothing. The final part of the book looks at current and potential applications, including work wear and medical applications.With its distinguished editor and international team of contributors, Intelligent textiles and clothing is an essential guide for textile manufacturers in such areas as specialist clothing (for example, protective, sports and outdoor clothing) as well as medical textiles. Summarises the main types of intelligent textiles and their uses Reviews phase change materials and their role in clothing Discusses shape memory materials and their applications

Diffusion Bonding 2

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Publisher : Springer Science & Business Media
ISBN 13 : 9401136742
Total Pages : 326 pages
Book Rating : 4.4/5 (11 download)

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Book Synopsis Diffusion Bonding 2 by : D.J. Stephenson

Download or read book Diffusion Bonding 2 written by D.J. Stephenson and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 326 pages. Available in PDF, EPUB and Kindle. Book excerpt: There is currently great interest in the process of diffusion bonding. The main thrust has been in the joining of advanced materials such as superplastic alloys, metal matrix composites and ceramics and, most importantly, to introduce the process into mass-production operations. Diffusion bonding has also led to reduced manufacturing costs and weight savings in conventional materials and developments in hot isostatic pressing have allowed greater design flexibility. Since the first conference on Diffusion Bonding, held at Cranfield in 1987, considerable advances have been made and it was therefore considered appropriate to organise the Second International Conference on Diffusion Bonding which was held at Cranfield Institute of Technology on 28 and 29 March 1990. The meeting provided a forum for the presentation and discussion of recent developments in Diffusion Bonding and was divided into four main subject areas: steel bonding and quality control, diffusion bonding of aluminium alloys, bonding of high temperature materials and general applications. This structure is retained in the proceedings. DAVID STEPHENSON vii CONTENTS v Preface ......................... .