Nano And Micro Metrology

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Fundamental Principles of Engineering Nanometrology

Author : Richard Leach
Publisher : William Andrew
ISBN 13 : 1437778321
Total Pages : 349 pages
Book Rating : 4.4/5 (377 download)

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Book Synopsis Fundamental Principles of Engineering Nanometrology by : Richard Leach

Download or read book Fundamental Principles of Engineering Nanometrology written by Richard Leach and published by William Andrew. This book was released on 2009-09-03 with total page 349 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. - Provides a basic introduction to measurement and instruments - Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force - Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) - Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) - Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge

Nano- and Micro-metrology

Author : Heidi Ottevaere
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 370 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Nano- and Micro-metrology by : Heidi Ottevaere

Download or read book Nano- and Micro-metrology written by Heidi Ottevaere and published by SPIE-International Society for Optical Engineering. This book was released on 2005 with total page 370 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Surface Metrology for Micro- and Nanofabrication

Author : Wei Gao
Publisher : Elsevier
ISBN 13 : 0128178515
Total Pages : 452 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Surface Metrology for Micro- and Nanofabrication by : Wei Gao

Download or read book Surface Metrology for Micro- and Nanofabrication written by Wei Gao and published by Elsevier. This book was released on 2020-10-30 with total page 452 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. - Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology - Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components - Assesses the best techniques for repairing micro-defects

Nanoscale Calibration Standards and Methods

Author : Günter Wilkening
Publisher : John Wiley & Sons
ISBN 13 : 3527606874
Total Pages : 541 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Nanoscale Calibration Standards and Methods by : Günter Wilkening

Download or read book Nanoscale Calibration Standards and Methods written by Günter Wilkening and published by John Wiley & Sons. This book was released on 2006-05-12 with total page 541 pages. Available in PDF, EPUB and Kindle. Book excerpt: The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and Methods) at the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on Quantitative Microscopy. The series stimulates the exchange of information between manufacturers of relevant hard- and software and the users in science and industry. Topics addressed in these proceedings are a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing

Fundamental Principles of Engineering Nanometrology

Author : Richard Leach
Publisher : Elsevier
ISBN 13 : 1455777501
Total Pages : 384 pages
Book Rating : 4.4/5 (557 download)

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Book Synopsis Fundamental Principles of Engineering Nanometrology by : Richard Leach

Download or read book Fundamental Principles of Engineering Nanometrology written by Richard Leach and published by Elsevier. This book was released on 2014-05-17 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt: Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques. The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology. - Demystifies nanometrology for a wide audience of engineers, scientists, and students involved in nanotech and advanced manufacturing applications and research - Introduces metrologists to the specific techniques and equipment involved in measuring at the nano-scale or to nano-scale uncertainty - Fully updated to cover the latest technological developments, standards, and regulations

Micro/Nano Manufacturing

Author : Hans Nørgaard Hansen
Publisher : MDPI
ISBN 13 : 3038426040
Total Pages : 191 pages
Book Rating : 4.0/5 (384 download)

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Book Synopsis Micro/Nano Manufacturing by : Hans Nørgaard Hansen

Download or read book Micro/Nano Manufacturing written by Hans Nørgaard Hansen and published by MDPI. This book was released on 2018-07-03 with total page 191 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue "Micro/Nano Manufacturing" that was published in Micromachines

Signal Measurement and Estimation Techniques for Micro and Nanotechnology

Author : Cédric Clévy
Publisher : Springer Science & Business Media
ISBN 13 : 1441999469
Total Pages : 245 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Signal Measurement and Estimation Techniques for Micro and Nanotechnology by : Cédric Clévy

Download or read book Signal Measurement and Estimation Techniques for Micro and Nanotechnology written by Cédric Clévy and published by Springer Science & Business Media. This book was released on 2011-07-25 with total page 245 pages. Available in PDF, EPUB and Kindle. Book excerpt: Signal Measurement and Estimation Techniques for Micro and Nanotechnology discusses micro, nano and robotic cells and gives a state-of-the-art presentation of the different techniques and solutions to measure and estimate signals at the micro and nano scale. New technologies and applications such as micromanipulation (artificial components, biological objects), micro-assembly (MEMS, MOEMS, NEMS) and material and surface force characterization are covered. The importance of sensing at the micro and nano scale is presented as a key issue in control systems, as well as for understanding the physical phenomena of these systems. The book also: Explains issues that make signal measurement and estimation techniques difficult at the micro-nano-scale and offers solutions Discusses automated micro-assembly, and control of micro-nano robotic devices Presents and links signal measurement and estimation techniques for micro-nano scale systems with microfabrication methods, sensors integration and control schemes Signal Measurement and Estimation Techniques for Micro and Nanotechnology is a must-read for researchers and engineers working in MEMS and control systems.

The Nano-Micro Interface

Author : Marcel Van de Voorde
Publisher : John Wiley & Sons
ISBN 13 : 3527679227
Total Pages : 756 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis The Nano-Micro Interface by : Marcel Van de Voorde

Download or read book The Nano-Micro Interface written by Marcel Van de Voorde and published by John Wiley & Sons. This book was released on 2015-01-08 with total page 756 pages. Available in PDF, EPUB and Kindle. Book excerpt: Controlling the properties of materials by modifying their composition and by manipulating the arrangement of atoms and molecules is a dream that can be achieved by nanotechnology. As one of the fastest developing and innovative -- as well as well-funded -- fields in science, nanotechnology has already significantly changed the research landscape in chemistry, materials science, and physics, with numerous applications in consumer products, such as sunscreens and water-repellent clothes. It is also thanks to this multidisciplinary field that flat panel displays, highly efficient solar cells, and new biological imaging techniques have become reality. This second, enlarged edition has been fully updated to address the rapid progress made within this field in recent years. Internationally recognized experts provide comprehensive, first-hand information, resulting in an overview of the entire nano-micro world. In so doing, they cover aspects of funding and commercialization, the manufacture and future applications of nanomaterials, the fundamentals of nanostructures leading to macroscale objects as well as the ongoing miniaturization toward the nanoscale domain. Along the way, the authors explain the effects occurring at the nanoscale and the nanotechnological characterization techniques. An additional topic on the role of nanotechnology in energy and mobility covers the challenge of developing materials and devices, such as electrodes and membrane materials for fuel cells and catalysts for sustainable transportation. Also new to this edition are the latest figures for funding, investments, and commercialization prospects, as well as recent research programs and organizations.

Precision Nanometrology

Author : Wei Gao
Publisher : Springer Science & Business Media
ISBN 13 : 1849962545
Total Pages : 358 pages
Book Rating : 4.8/5 (499 download)

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Book Synopsis Precision Nanometrology by : Wei Gao

Download or read book Precision Nanometrology written by Wei Gao and published by Springer Science & Business Media. This book was released on 2010-06-14 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.

Micro and Nano Fluidics, Micro and Nano Manufacturing, Metrology and Control, Commercialization of Micro and Nano Technology, General

Author : Nanotechnology Institute
Publisher :
ISBN 13 :
Total Pages : 36 pages
Book Rating : 4.:/5 (255 download)

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Book Synopsis Micro and Nano Fluidics, Micro and Nano Manufacturing, Metrology and Control, Commercialization of Micro and Nano Technology, General by : Nanotechnology Institute

Download or read book Micro and Nano Fluidics, Micro and Nano Manufacturing, Metrology and Control, Commercialization of Micro and Nano Technology, General written by Nanotechnology Institute and published by . This book was released on 2007 with total page 36 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Measurement Technology for Micro-Nanometer Devices

Author : Wendong Zhang
Publisher : John Wiley & Sons
ISBN 13 : 1118717961
Total Pages : 341 pages
Book Rating : 4.1/5 (187 download)

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Book Synopsis Measurement Technology for Micro-Nanometer Devices by : Wendong Zhang

Download or read book Measurement Technology for Micro-Nanometer Devices written by Wendong Zhang and published by John Wiley & Sons. This book was released on 2017-01-17 with total page 341 pages. Available in PDF, EPUB and Kindle. Book excerpt: A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices

Metrology and Instrumentation

Author : Samir Mekid
Publisher : John Wiley & Sons
ISBN 13 : 1119721717
Total Pages : 404 pages
Book Rating : 4.1/5 (197 download)

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Book Synopsis Metrology and Instrumentation by : Samir Mekid

Download or read book Metrology and Instrumentation written by Samir Mekid and published by John Wiley & Sons. This book was released on 2021-12-02 with total page 404 pages. Available in PDF, EPUB and Kindle. Book excerpt: Metrology and Instrumentation: Practical Applications for Engineering and Manufacturing provides students and professionals with an accessible foundation in the metrology techniques, instruments, and governing standards used in mechanical engineering and manufacturing. The book opens with an overview of metrology units and scale, then moves on to explain topics such as sources of error, calibration systems, uncertainty, and dimensional, mechanical, and thermodynamic measurement systems. A chapter on tolerance stack-ups covers GD&T, ASME Y14.5-2018, and the ISO standard for general tolerances, while a chapter on digital measurements connects metrology to newer, Industry 4.0 applications.

Multi-material micro manufacture

Author : Cardiff University (Cardiff, UK).
Publisher :
ISBN 13 :
Total Pages : 20 pages
Book Rating : 4.:/5 (44 download)

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Book Synopsis Multi-material micro manufacture by : Cardiff University (Cardiff, UK).

Download or read book Multi-material micro manufacture written by Cardiff University (Cardiff, UK). and published by . This book was released on 2007 with total page 20 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Metrology and Diagnostic Techniques for Nanoelectronics

Author : Mudiwa Afolayan
Publisher :
ISBN 13 : 9781681177199
Total Pages : 304 pages
Book Rating : 4.1/5 (771 download)

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Book Synopsis Metrology and Diagnostic Techniques for Nanoelectronics by : Mudiwa Afolayan

Download or read book Metrology and Diagnostic Techniques for Nanoelectronics written by Mudiwa Afolayan and published by . This book was released on 2017-02 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Characterization of Nanoparticles

Author : Vasile-Dan Hodoroaba
Publisher : Elsevier
ISBN 13 : 0128141832
Total Pages : 566 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Characterization of Nanoparticles by : Vasile-Dan Hodoroaba

Download or read book Characterization of Nanoparticles written by Vasile-Dan Hodoroaba and published by Elsevier. This book was released on 2019-10-05 with total page 566 pages. Available in PDF, EPUB and Kindle. Book excerpt: Characterization of Nanoparticles: Measurement Processes for Nanoparticles surveys this fast growing field, including established methods for the physical and chemical characterization of nanoparticles. The book focuses on sample preparation issues (including potential pitfalls), with measurement procedures described in detail. In addition, the book explores data reduction, including the quantitative evaluation of the final result and its uncertainty of measurement. The results of published inter-laboratory comparisons are referred to, along with the availability of reference materials necessary for instrument calibration and method validation. The application of these methods are illustrated with practical examples on what is routine and what remains a challenge. In addition, this book summarizes promising methods still under development and analyzes the need for complementary methods to enhance the quality of nanoparticle characterization with solutions already in operation. - Helps readers decide which nanocharacterization method is best for each measurement problem, including limitations, advantages and disadvantages - Shows which nanocharacterization methods are best for different classes of nanomaterial - Demonstrates the practical use of a method based on selected case studies

Micro and Nano Thermal Transport

Author : Lin Qiu
Publisher : Academic Press
ISBN 13 : 012823623X
Total Pages : 358 pages
Book Rating : 4.1/5 (282 download)

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Book Synopsis Micro and Nano Thermal Transport by : Lin Qiu

Download or read book Micro and Nano Thermal Transport written by Lin Qiu and published by Academic Press. This book was released on 2022-02-09 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro and Nano Thermal Transport Research: Characterization, Measurement and Mechanism is a complete and reliable reference on thermal measurement methods and mechanisms of micro and nanoscale materials. The book has a strong focus on applications and simulation, providing clear guidance on how to measure thermal properties in a systematic way. Sections cover the fundamentals of thermal properties before introducing tools to help readers identify and analyze thermal characteristics of these materials. The thermal transport properties are then further explored by means of simulation which reflect the internal mechanisms used to generate such thermal properties. Readers will gain a clear understanding of thermophysical measurement methods and the representative thermal transport characteristics of micro/nanoscale materials with different structures and are guided through a decision-making process to choose the most effective method to master thermal analysis. The book is particularly suitable for those engaged in the design and development of thermal property measurement instruments, as well as researchers of thermal transport at the micro and nanoscale. - Includes a variety of measurement methods and thermal transport characteristics of micro and nanoscale materials under different structures - Guides the reader through the decision-making process to ensure the best thermal analysis method is selected for their setting - Contains experiments and simulations throughout that help apply understanding to practice

Handbook of Surface and Nanometrology

Author : David J. Whitehouse
Publisher : CRC Press
ISBN 13 : 1420082027
Total Pages : 982 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Handbook of Surface and Nanometrology by : David J. Whitehouse

Download or read book Handbook of Surface and Nanometrology written by David J. Whitehouse and published by CRC Press. This book was released on 2010-12-20 with total page 982 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since the publication of the first edition, miniaturization and nanotechnology have become inextricably linked to traditional surface geometry and metrology. This interdependence of scales has had profound practical implications.Updated and expanded to reflect many new developments, Handbook of Surface and Nanometrology, Second Edition determines h