Molecular Dynamics (MD) Computer Simulations of Chemical Mechanical Polishing (CMP) Phenomena

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Publisher :
ISBN 13 :
Total Pages : 242 pages
Book Rating : 4.:/5 (663 download)

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Book Synopsis Molecular Dynamics (MD) Computer Simulations of Chemical Mechanical Polishing (CMP) Phenomena by : Chien-Hsien Sam Lee

Download or read book Molecular Dynamics (MD) Computer Simulations of Chemical Mechanical Polishing (CMP) Phenomena written by Chien-Hsien Sam Lee and published by . This book was released on 2006 with total page 242 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Molecular Dynamics

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Publisher : BoD – Books on Demand
ISBN 13 : 1789235243
Total Pages : 102 pages
Book Rating : 4.7/5 (892 download)

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Book Synopsis Molecular Dynamics by : Alexander Vakhrushev

Download or read book Molecular Dynamics written by Alexander Vakhrushev and published by BoD – Books on Demand. This book was released on 2018-08-01 with total page 102 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is devoted to a description of the modeling of nanosystems and a detailed exposition of the application of molecular dynamics methods to problems from various fields of technology: material science, the formation of composite molecular complexes, and transport of nanosystems. The research results of the modeling of various nanosystems are presented: soft supramolecular nanostructures, nanosized beams of single-crystal Cu, metallic nanosized crystals, drug delivery systems, and systems stabilized by hydrogen bonds. The information from this book will be useful for engineers, technologists, researchers, and postgraduate students interested in the study of the whole complex of computer simulation based on the concept of molecular dynamics methods for the task of designing and producing nanomaterials with controlled properties.

Lipid Domains

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Publisher : Academic Press
ISBN 13 : 0128033274
Total Pages : 393 pages
Book Rating : 4.1/5 (28 download)

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Book Synopsis Lipid Domains by :

Download or read book Lipid Domains written by and published by Academic Press. This book was released on 2015-06-08 with total page 393 pages. Available in PDF, EPUB and Kindle. Book excerpt: Current Topics in Membranes is targeted toward scientists and researchers in biochemistry and molecular and cellular biology, providing the necessary membrane research to assist them in discovering the current state of a particular field and in learning where that field is heading. This volume offers an up to date presentation of current knowledge in the field of Lipid Domains. Written by leading experts Contains original material, both textual and illustrative, that should become a very relevant reference material The material is presented in a very comprehensive manner Both researchers in the field and general readers should find relevant and up-to-date information

Advances in Chemical Mechanical Planarization (CMP)

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Publisher : Woodhead Publishing
ISBN 13 : 0128218193
Total Pages : 650 pages
Book Rating : 4.1/5 (282 download)

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Book Synopsis Advances in Chemical Mechanical Planarization (CMP) by : Babu Suryadevara

Download or read book Advances in Chemical Mechanical Planarization (CMP) written by Babu Suryadevara and published by Woodhead Publishing. This book was released on 2021-09-10 with total page 650 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in Chemical Mechanical Planarization (CMP), Second Edition provides the latest information on a mainstream process that is critical for high-volume, high-yield semiconductor manufacturing, and even more so as device dimensions continue to shrink. The second edition includes the recent advances of CMP and its emerging materials, methods, and applications, including coverage of post-CMP cleaning challenges and tribology of CMP. This important book offers a systematic review of fundamentals and advances in the area. Part one covers CMP of dielectric and metal films, with chapters focusing on the use of current and emerging techniques and processes and on CMP of various materials, including ultra low-k materials and high-mobility channel materials, and ending with a chapter reviewing the environmental impacts of CMP processes. New content addressed includes CMP challenges with tungsten, cobalt, and ruthenium as interconnect and barrier films, consumables for ultralow topography and CMP for memory devices. Part two addresses consumables and process control for improved CMP and includes chapters on CMP pads, diamond disc pad conditioning, the use of FTIR spectroscopy for characterization of surface processes and approaches for defection characterization, mitigation, and reduction. Advances in Chemical Mechanical Planarization (CMP), Second Edition is an invaluable resource and key reference for materials scientists and engineers in academia and R&D. Reviews the most relevant techniques and processes for CMP of dielectric and metal films Includes chapters devoted to CMP for current and emerging materials Addresses consumables and process control for improved CMP, including post-CMP

Complexity

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Publisher : Open Road Media
ISBN 13 : 150405914X
Total Pages : 492 pages
Book Rating : 4.5/5 (4 download)

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Book Synopsis Complexity by : M. Mitchell Waldrop

Download or read book Complexity written by M. Mitchell Waldrop and published by Open Road Media. This book was released on 2019-10-01 with total page 492 pages. Available in PDF, EPUB and Kindle. Book excerpt: “If you liked Chaos, you’ll love Complexity. Waldrop creates the most exciting intellectual adventure story of the year” (The Washington Post). In a rarified world of scientific research, a revolution has been brewing. Its activists are not anarchists, but rather Nobel Laureates in physics and economics and pony-tailed graduates, mathematicians, and computer scientists from all over the world. They have formed an iconoclastic think-tank and their radical idea is to create a new science: complexity. They want to know how a primordial soup of simple molecules managed to turn itself into the first living cell—and what the origin of life some four billion years ago can tell us about the process of technological innovation today. This book is their story—the story of how they have tried to forge what they like to call the science of the twenty-first century. “Lucidly shows physicists, biologists, computer scientists and economists swapping metaphors and reveling in the sense that epochal discoveries are just around the corner . . . [Waldrop] has a special talent for relaying the exhilaration of moments of intellectual insight.” —The New York Times Book Review “Where I enjoyed the book was when it dove into the actual question of complexity, talking about complex systems in economics, biology, genetics, computer modeling, and so on. Snippets of rare beauty here and there almost took your breath away.” —Medium “[Waldrop] provides a good grounding of what may indeed be the first flowering of a new science.” —Publishers Weekly

Atomic Layer Deposition for Semiconductors

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Publisher : Springer Science & Business Media
ISBN 13 : 146148054X
Total Pages : 266 pages
Book Rating : 4.4/5 (614 download)

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Book Synopsis Atomic Layer Deposition for Semiconductors by : Cheol Seong Hwang

Download or read book Atomic Layer Deposition for Semiconductors written by Cheol Seong Hwang and published by Springer Science & Business Media. This book was released on 2013-10-18 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt: Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

Microelectronic Applications of Chemical Mechanical Planarization

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Publisher : John Wiley & Sons
ISBN 13 : 0471719196
Total Pages : 764 pages
Book Rating : 4.4/5 (717 download)

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Book Synopsis Microelectronic Applications of Chemical Mechanical Planarization by : Yuzhuo Li

Download or read book Microelectronic Applications of Chemical Mechanical Planarization written by Yuzhuo Li and published by John Wiley & Sons. This book was released on 2007-10-19 with total page 764 pages. Available in PDF, EPUB and Kindle. Book excerpt: An authoritative, systematic, and comprehensive description of current CMP technology Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit (IC) planarization, CMP is playing an increasingly important role in other related applications such as microelectromechanical systems (MEMS) and computer hard drive manufacturing. This reference focuses on the chemical aspects of the technology and includes contributions from the foremost experts on specific applications. After a detailed overview of the fundamentals and basic science of CMP, Microelectronic Applications of Chemical Mechanical Planarization: * Provides in-depth coverage of a wide range of state-of-the-art technologies and applications * Presents information on new designs, capabilities, and emerging technologies, including topics like CMP with nanomaterials and 3D chips * Discusses different types of CMP tools, pads for IC CMP, modeling, and the applicability of tribometrology to various aspects of CMP * Covers nanotopography, CMP performance and defect profiles, CMP waste treatment, and the chemistry and colloidal properties of the slurries used in CMP * Provides a perspective on the opportunities and challenges of the next fifteen years Complete with case studies, this is a valuable, hands-on resource for professionals, including process engineers, equipment engineers, formulation chemists, IC manufacturers, and others. With systematic organization and questions at the end of each chapter to facilitate learning, it is an ideal introduction to CMP and an excellent text for students in advanced graduate courses that cover CMP or related semiconductor manufacturing processes.

Colloidal Silica

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Publisher : CRC Press
ISBN 13 : 1420028707
Total Pages : 926 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Colloidal Silica by : Horacio E. Bergna

Download or read book Colloidal Silica written by Horacio E. Bergna and published by CRC Press. This book was released on 2005-12-19 with total page 926 pages. Available in PDF, EPUB and Kindle. Book excerpt: In spite of the apparent simplicity of silica's composition and structure, scientists are still investigating fundamental questions regarding the formation, constitution, and behavior of colloidal silica systems. Colloidal Silica: Fundamentals and Applications introduces new information on colloid science related to silica chemistry as well

Mathematical Modelling and Computer Simulation of Activated Sludge Systems

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Publisher : IWA Publishing
ISBN 13 : 1780409516
Total Pages : 682 pages
Book Rating : 4.7/5 (84 download)

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Book Synopsis Mathematical Modelling and Computer Simulation of Activated Sludge Systems by : Jacek Makinia

Download or read book Mathematical Modelling and Computer Simulation of Activated Sludge Systems written by Jacek Makinia and published by IWA Publishing. This book was released on 2020-03-02 with total page 682 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mathematical Modelling and Computer Simulation of Activated Sludge Systems – Second Edition provides, from the process engineering perspective, a comprehensive and up-to-date overview regarding various aspects of the mechanistic (“white box”) modelling and simulation of advanced activated sludge systems performing biological nutrient removal. In the new edition of the book, a special focus is given to nitrogen removal and the latest developments in modelling the innovative nitrogen removal processes. Furthermore, a new section on micropollutant removal has been added. The focus of modelling has been shifting in the last years to models that can describe the performance of a whole plant (plant-wide modelling). The expanded part of this new edition introduces models describing the most important processes interrelated with the mainstream activated sludge systems as well as models describing the energy balance, operating costs and environmental impact. The complex process evaluation, including minimization of energy consumption and carbon footprint, is in line with the present and future wastewater treatment goals. By combining a general introduction and a textbook, this book serves both intermediate and more experienced model users, both researchers and practitioners, as a comprehensive guide to modelling and simulation studies. The book can be used as a supplemental material at graduate and post-graduate levels of wastewater engineering/modelling courses.

Chemical Mechanical Planarization of Microelectronic Materials

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Publisher : John Wiley & Sons
ISBN 13 : 3527617752
Total Pages : 337 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Chemical Mechanical Planarization of Microelectronic Materials by : Joseph M. Steigerwald

Download or read book Chemical Mechanical Planarization of Microelectronic Materials written by Joseph M. Steigerwald and published by John Wiley & Sons. This book was released on 2008-09-26 with total page 337 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical Mechanical Planarization (CMP) plays an important role in today's microelectronics industry. With its ability to achieve global planarization, its universality (material insensitivity), its applicability to multimaterial surfaces, and its relative cost-effectiveness, CMP is the ideal planarizing medium for the interlayered dielectrics and metal films used in silicon integrated circuit fabrication. But although the past decade has seen unprecedented research and development into CMP, there has been no single-source reference to this rapidly emerging technology-until now. Chemical Mechanical Planarization of Microelectronic Materials provides engineers and scientists working in the microelectronics industry with unified coverage of both the fundamental mechanisms and engineering applications of CMP. Authors Steigerwald, Murarka, and Gutmann-all leading CMP pioneers-provide a historical overview of CMP, explain the various chemical and mechanical concepts involved, describe CMP materials and processes, review the latest scientific data on CMP worldwide, and offer examples of its uses in the microelectronics industry. They provide detailed coverage of the CMP of various materials used in the making of microcircuitry: tungsten, aluminum, copper, polysilicon, and various dielectric materials, including polymers. The concluding chapter describes post-CMP cleaning techniques, and most chapters feature problem sets to assist readers in developing a more practical understanding of CMP. The only comprehensive reference to one of the fastest growing integrated circuit manufacturing technologies, Chemical Mechanical Planarization of Microelectronic Materials is an important resource for research scientists and engineers working in the microelectronics industry. An indispensable resource for scientists and engineers working in the microelectronics industry Chemical Mechanical Planarization of Microelectronic Materials is the only comprehensive single-source reference to one of the fastest growing integrated circuit manufacturing technologies. It provides engineers and scientists who work in the microelectronics industry with unified coverage of both the fundamental mechanisms and engineering applications of CMP, including: * The history of CMP * Chemical and mechanical underpinnings of CMP * CMP materials and processes * Applications of CMP in the microelectronics industry * The CMP of tungsten, aluminum, copper, polysilicon, and various dielectrics, including polymers used in integrated circuit fabrication * Post-CMP cleaning techniques * Chapter-end problem sets are also included to assist readers in developing a practical understanding of CMP.

Nanotechnology Research Directions: IWGN Workshop Report

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Publisher : Springer Science & Business Media
ISBN 13 : 9401595763
Total Pages : 367 pages
Book Rating : 4.4/5 (15 download)

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Book Synopsis Nanotechnology Research Directions: IWGN Workshop Report by : R.S. Williams

Download or read book Nanotechnology Research Directions: IWGN Workshop Report written by R.S. Williams and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 367 pages. Available in PDF, EPUB and Kindle. Book excerpt: energy production, environmental management, transportation, communication, computation, and education. As the twenty-first century unfolds, nanotechnology's impact on the health, wealth, and security of the world's people is expected to be at least as significant as the combined influences in this century of antibiotics, the integrated circuit, and human-made polymers. Dr. Neal Lane, Advisor to the President for Science and Technology and former National Science Foundation (NSF) director, stated at a Congressional hearing in April 1998, "If I were asked for an area of science and engineering that will most likely produce the breakthroughs of tomorrow, I would point to nanoscale science and engineering. " Recognizing this potential, the White House Office of Science and Technology Policy (OSTP) and the Office of Management and Budget (OMB) have issued a joint memorandum to Federal agency heads that identifies nanotechnology as a research priority area for Federal investment in fiscal year 2001. This report charts "Nanotechnology Research Directions," as developed by the Interagency W orking Group on Nano Science, Engineering, and Technology (IWGN) of the National Science and Technology Council (NSTC). The report incorporates the views of leading experts from government, academia, and the private sector. It reflects the consensus reached at an IWGN-sponsored workshop held on January 27-29, 1999, and detailed in contributions submitted thereafter by members of the V. S. science and engineering community. (See Appendix A for a list of contributors.

Integrated Circuit Processes

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Publisher :
ISBN 13 : 9780070451612
Total Pages : 52 pages
Book Rating : 4.4/5 (516 download)

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Book Synopsis Integrated Circuit Processes by :

Download or read book Integrated Circuit Processes written by and published by . This book was released on 1975 with total page 52 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Complex Inorganic Solids

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Publisher : Springer Science & Business Media
ISBN 13 : 0387259538
Total Pages : 420 pages
Book Rating : 4.3/5 (872 download)

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Book Synopsis Complex Inorganic Solids by : Patrice E. A. Turchi

Download or read book Complex Inorganic Solids written by Patrice E. A. Turchi and published by Springer Science & Business Media. This book was released on 2007-12-31 with total page 420 pages. Available in PDF, EPUB and Kindle. Book excerpt: One of the key aspects of this volume is to cut across the traditional taxonomy of disciplines in the study of alloys. Hence there has been a deliberate attempt to integrate the different approaches taken towards alloys as a class of materials in different fields, ranging from geology to metallurgical engineering. The emphasis of this book is to highlight commonalities between different fields with respect to how alloys are studied. The topics in this book fall into several themes, which suggest a number of different classification schemes. We have chosen a scheme that classifies the papers in the volume into the categories Microstructural Considerations, Ordering, Kinetics and Diffusion, Magnetic Considerations and Elastic Considerations. The book has juxtaposed apparently disparate approaches to similar physical processes, in the hope of revealing a more dynamic character of the processes under consideration. This monograph will invigorate new kinds of discussion and reveal challenges and new avenues to the description and prediction of properties of materials in the solid state and the conditions that produce them.

Determination and Use of Stability Constants

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Publisher : Wiley-VCH
ISBN 13 :
Total Pages : 216 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Determination and Use of Stability Constants by : Arthur Earl Martell

Download or read book Determination and Use of Stability Constants written by Arthur Earl Martell and published by Wiley-VCH. This book was released on 1992 with total page 216 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes potentiometric methods for determining stability constants and explains how these constants can be used to describe metal ion speciation in complex environmental and biological systems. It also provides three original computer programs on a disk for calculating stability constants and for using stability constants to calculate concentrations of molecular species in solution. The author gives examples of calculations for simple metal chelates, for metal complexes of large organic molecules, and for mixtures containing several metal ions and complexing agents in aqueous solution. They also describe common errors in calculating stability constants and how to avoid them. This carefully revised second edition is now even more useful to the reader, and, in particular, to those who make use of the program disk. Each program has been revised to improve speed, control, and error trapping.

Principles of Fluorescence Spectroscopy

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Publisher : Springer Science & Business Media
ISBN 13 : 146157658X
Total Pages : 487 pages
Book Rating : 4.4/5 (615 download)

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Book Synopsis Principles of Fluorescence Spectroscopy by : Joseph R. Lakowicz

Download or read book Principles of Fluorescence Spectroscopy written by Joseph R. Lakowicz and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 487 pages. Available in PDF, EPUB and Kindle. Book excerpt: Fluorescence methods are being used increasingly in biochemical, medical, and chemical research. This is because of the inherent sensitivity of this technique. and the favorable time scale of the phenomenon of fluorescence. 8 Fluorescence emission occurs about 10- sec (10 nsec) after light absorp tion. During this period of time a wide range of molecular processes can occur, and these can effect the spectral characteristics of the fluorescent compound. This combination of sensitivity and a favorable time scale allows fluorescence methods to be generally useful for studies of proteins and membranes and their interactions with other macromolecules. This book describes the fundamental aspects of fluorescence. and the biochemical applications of this methodology. Each chapter starts with the -theoreticalbasis of each phenomenon of fluorescence, followed by examples which illustrate the use of the phenomenon in the study of biochemical problems. The book contains numerous figures. It is felt that such graphical presentations contribute to pleasurable reading and increased understand ing. Separate chapters are devoted to fluorescence polarization, lifetimes, quenching, energy transfer, solvent effects, and excited state reactions. To enhance the usefulness of this work as a textbook, problems are included which illustrate the concepts described in each chapter. Furthermore, a separate chapter is devoted to the instrumentation used in fluorescence spectroscopy. This chapter will be especially valuable for those perform ing or contemplating fluorescence measurements. Such measurements are easily compromised by failure to consider a number of simple principles.

Nanostructure Science and Technology

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Publisher : Springer Science & Business Media
ISBN 13 : 9780792358541
Total Pages : 378 pages
Book Rating : 4.3/5 (585 download)

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Book Synopsis Nanostructure Science and Technology by : Richard W. Siegel

Download or read book Nanostructure Science and Technology written by Richard W. Siegel and published by Springer Science & Business Media. This book was released on 1999-09-30 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt: Timely information on scientific and engineering developments occurring in laboratories around the world provides critical input to maintaining the economic and technological strength of the United States. Moreover, sharing this information quickly with other countries can greatly enhance the productivity of scientists and engineers. These are some of the reasons why the National Science Foundation (NSF) has been involved in funding science and technology assessments comparing the United States and foreign countries since the early 1980s. A substantial number of these studies have been conducted by the World Technology Evaluation Center (WTEC) managed by Loyola College through a cooperative agreement with NSF. The National Science and Technology Council (NSTC), Committee on Technology's Interagency Working Group on NanoScience, Engineering and Technology (CT/IWGN) worked with WTEC to develop the scope of this Nanostucture Science and Technology report in an effort to develop a baseline of understanding for how to strategically make Federal nanoscale R&D investments in the coming years. The purpose of the NSTC/WTEC activity is to assess R&D efforts in other countries in specific areas of technology, to compare these efforts and their results to U. S. research in the same areas, and to identify opportunities for international collaboration in precompetitive research. Many U. S. organizations support substantial data gathering and analysis efforts focusing on nations such as Japan. But often the results of these studies are not widely available. At the same time, government and privately sponsored studies that are in the public domain tend to be "input" studies.

Pathways to Modern Chemical Physics

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Publisher : Springer Science & Business Media
ISBN 13 : 364228180X
Total Pages : 293 pages
Book Rating : 4.6/5 (422 download)

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Book Synopsis Pathways to Modern Chemical Physics by : Salvatore Califano

Download or read book Pathways to Modern Chemical Physics written by Salvatore Califano and published by Springer Science & Business Media. This book was released on 2012-05-26 with total page 293 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this historical volume Salvatore Califano traces the developments of ideas and theories in physical and theoretical chemistry throughout the 20th century. This seldom-told narrative provides details of topics from thermodynamics to atomic structure, radioactivity and quantum chemistry. Califano’s expertise as a physical chemist allows him to judge the historical developments from the point of view of modern chemistry. This detailed and unique historical narrative is fascinating for chemists working in the fields of physical chemistry and is also a useful resource for science historians who will enjoy access to material not previously dealt with in a coherent way.