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Author : Vahid Vahedi
Publisher :
ISBN 13 :
Total Pages : 316 pages
Book Rating : 4.:/5 (33 download)
Download or read book Modeling and Simulation of RF Discharges Used for Plasma Processing written by Vahid Vahedi and published by . This book was released on 1993 with total page 316 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : National Research Council
Publisher : National Academies Press
ISBN 13 : 0309045975
Total Pages : 88 pages
Book Rating : 4.3/5 (9 download)
Download or read book Plasma Processing of Materials written by National Research Council and published by National Academies Press. This book was released on 1991-02-01 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.
Author : Ismail Rafatov
Publisher :
ISBN 13 : 9780750323604
Total Pages : 0 pages
Book Rating : 4.3/5 (236 download)
Download or read book Introduction to Simulation Methods for Gas Discharge Plasmas written by Ismail Rafatov and published by . This book was released on 2020 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Gas discharge plasma is the most common type of low-temperature plasma, with a large number of practical applications covering almost all areas of modern science and technology. This book is an introduction to the numerical modeling methods for gas discharge plasmas. It is intended to assist and direct graduate students and junior researchers, whose research activity deals with computational plasma physics. Topics covered include the essentials of basic modeling approaches (particle, fluid, and hybrid) for gas discharges, and the implementation of these methods with examples of glow (DC and RF) discharges. Numerical studies of nonlinear dynamics and formation of spatio-temporal patterns in gas discharge systems are also presented.
Author : Michael A. Lieberman
Publisher : John Wiley & Sons
ISBN 13 : 1394245378
Total Pages : 837 pages
Book Rating : 4.3/5 (942 download)
Download or read book Principles of Plasma Discharges and Materials Processing written by Michael A. Lieberman and published by John Wiley & Sons. This book was released on 2024-10-15 with total page 837 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new edition of this industry classic on the principles of plasma processing Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors, memory, and analog chips, to plasma deposition for creating solar panels and flat-panel displays, plasma-based materials processes have reached huge areas of technology. As key technologies scale down in size from the nano- to the atomic level, further developments in plasma materials processing will only become more essential. Principles of Plasma Discharges and Materials Processing is the foundational introduction to the subject. It offers detailed information and procedures for designing plasma-based equipment and analyzing plasma-based processes, with an emphasis on the abiding fundamentals. Now fully updated to reflect the latest research and data, it promises to continue as an indispensable resource for graduate students and industry professionals in a myriad of technological fields. Readers of the third edition of Principles of Plasma Discharges and Materials Processing will also find: Extensive figures and tables to facilitate understanding A new chapter covering the recent development of processes involving high-pressure capacitive discharges New subsections on discharge and processing chemistry, physics, and diagnostics Principles of Plasma Discharges and Materials Processing is ideal for professionals and process engineers in the field of plasma-assisted materials processing with experience in the field of science or engineering. It is the premiere world-wide basic text for graduate courses in the field.
Author : Ismail Rafatov
Publisher :
ISBN 13 : 9780750323598
Total Pages : pages
Book Rating : 4.3/5 (235 download)
Download or read book Introduction to Simulation Methods for Gas Discharge Plasmas written by Ismail Rafatov and published by . This book was released on 2020 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Gas discharge plasma is the most common type of low-temperature plasma, with a large number of practical applications covering almost all areas of modern science and technology. This book is an introduction to the numerical modeling methods for gas discharge plasmas. It is intended to assist and direct graduate students and junior researchers, whose research activity deals with computational plasma physics. Topics covered include the essentials of basic modeling approaches (particle, fluid, and hybrid) for gas discharges, and the implementation of these methods with examples of glow (DC and RF) discharges. Numerical studies of nonlinear dynamics and formation of spatio-temporal patterns in gas discharge systems are also presented.
Author : Michael Scott Barnes
Publisher :
ISBN 13 :
Total Pages : 282 pages
Book Rating : 4.:/5 (132 download)
Download or read book Computer Modeling of RF Glow Discharges for the Study of Plasma Processing in Microelectronics written by Michael Scott Barnes and published by . This book was released on 1989 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : George Rob Misium
Publisher :
ISBN 13 :
Total Pages : 194 pages
Book Rating : 4.:/5 (218 download)
Download or read book Modeling of RF Plasma Discharges for IC Processing written by George Rob Misium and published by . This book was released on 1988 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Ronald Leonel Kinder Oxom
Publisher :
ISBN 13 :
Total Pages : 304 pages
Book Rating : 4.:/5 (511 download)
Download or read book Modeling of Wave Heated Discharges Used in Plasma Processing Reactors written by Ronald Leonel Kinder Oxom and published by . This book was released on 2001 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Yuri P. Raizer
Publisher : CRC Press
ISBN 13 : 135141996X
Total Pages : 305 pages
Book Rating : 4.3/5 (514 download)
Download or read book Radio-Frequency Capacitive Discharges written by Yuri P. Raizer and published by CRC Press. This book was released on 2017-12-14 with total page 305 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.
Author : Jean-Marc Philibert
Publisher : EDP Sciences
ISBN 13 : 2759801721
Total Pages : 603 pages
Book Rating : 4.7/5 (598 download)
Download or read book Atom movements - Diffusion and mass transport in solids written by Jean-Marc Philibert and published by EDP Sciences. This book was released on 2012-12-03 with total page 603 pages. Available in PDF, EPUB and Kindle. Book excerpt: The present book is the result of diverse courses on diffusion. It is intended to give as complete an overview as possible of diffusion in solid media, while relating the process of diffusion to both their physical bases and their applications. A series of a real situations is covered in this account, from self-diffusion of radiotracers to the more complex cases of mass flow under chemical or thermal gradients or under electric fields, or diffusion in structures of lower dimensionality (surfaces and interfaces). In all these analyses, no category of materials was favored; metals, ionic crystals, oxydes, and semiconductors all had their turn. Only polymers were not specifically touched. One chapter is specifically devoted to techniques for studying diffusion, including methods of numerical simulation, and a last and long chapter gives a number of metallurgical phenomena in which diffusion plays a fundamental role.
Author : NATIONAL RESEARCH COUNCIL WASHINGTON DC.
Publisher :
ISBN 13 :
Total Pages : 71 pages
Book Rating : 4.:/5 (227 download)
Download or read book Database Needs for Modeling and Simulation of Plasma Processing written by NATIONAL RESEARCH COUNCIL WASHINGTON DC. and published by . This book was released on 1996 with total page 71 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Paul Williams
Publisher : Springer Science & Business Media
ISBN 13 : 9780792345671
Total Pages : 634 pages
Book Rating : 4.3/5 (456 download)
Download or read book Plasma Processing of Semiconductors written by Paul Williams and published by Springer Science & Business Media. This book was released on 1997-05-31 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Author : Toshiaki Makabe
Publisher : Elsevier Publishing Company
ISBN 13 : 9780444510952
Total Pages : 0 pages
Book Rating : 4.5/5 (19 download)
Download or read book Advances in Low Temperature Rf Plasmas written by Toshiaki Makabe and published by Elsevier Publishing Company. This book was released on 2002 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low temperature plasmas have had a very broad range of applications ever since their discovery. However, recent developments in the dextrous handling of dry etching non-equilibrium plasma have attracted a great common interest that has driving force behind the major developments in diagnostic, theoretical and numerical techniques since the 1980s. A greater fundamental understanding of the kinetics of radio-frequency (rf) plasmas and their interaction with surfaces in regard to the process of large scale integrated circuits has been achieved through the cooperation between academia and industry. At the same time, new applications have become possible, and the basic understanding of low temperature rf plasmas has diffused to other areas of plasma physics. in the special issue of Applied Surface Science, which is published in memory of the International Workshop on Basis for Low Temperature Plasma Applications at Hakone in Japan on July 24 - 25 of 2001. The basic goal in the selection of topics was to cover the range of issues that represent the building blocks of the complex, vertically integrated plasma simulation schemes including surface processes. The text also shows examples of integrated codes and how they are implemented in the development of new strategies of plasma processing. Such codes may be used both in modern experiments and in the computer aided design and control of the plasma devices of the next generation. These are based on the transport theory of electrons, ions and neutrals, as well as on numerical modellings and on the available collision and transport data describing gas and surface phases. density plasmas. All the chapters present a relatively complete review of the developments in these fields since the 1980s as well as a review of their status of development in 2002, and there is a blend of research reviews from both academia and industry.
Author : A. I. Morozov
Publisher : CRC Press
ISBN 13 : 1439881332
Total Pages : 828 pages
Book Rating : 4.4/5 (398 download)
Download or read book Introduction to Plasma Dynamics written by A. I. Morozov and published by CRC Press. This book was released on 2012-12-06 with total page 828 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the twenty-first century progresses, plasma technology will play an increasing role in our lives, providing new sources of energy, ion-plasma processing of materials, wave electromagnetic radiation sources, space plasma thrusters, and more. Studies of the plasma state of matter not only accelerate technological developments but also improve the
Author : Heon Chang Kim
Publisher :
ISBN 13 :
Total Pages : 234 pages
Book Rating : 4.:/5 (436 download)
Download or read book Modeling and Simulation of Plasma Processing Equipment written by Heon Chang Kim and published by . This book was released on 1998 with total page 234 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Carlos M. Ferreira
Publisher : Springer Science & Business Media
ISBN 13 : 1489911308
Total Pages : 556 pages
Book Rating : 4.4/5 (899 download)
Download or read book Microwave Discharges written by Carlos M. Ferreira and published by Springer Science & Business Media. This book was released on 2013-11-21 with total page 556 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992
Author : Daniel Dale Wake
Publisher :
ISBN 13 :
Total Pages : 378 pages
Book Rating : 4.:/5 (59 download)
Download or read book The Simulation of Plasma Based Semiconductor Processing Using Block Structured Locally Refined Grids written by Daniel Dale Wake and published by . This book was released on 1998 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt:
