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Micromachining
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Author :Robert W. Johnstone Publisher :Springer Science & Business Media ISBN 13 :9781402080203 Total Pages :210 pages Book Rating :4.0/5 (82 download)
Book Synopsis An Introduction to Surface-Micromachining by : Robert W. Johnstone
Download or read book An Introduction to Surface-Micromachining written by Robert W. Johnstone and published by Springer Science & Business Media. This book was released on 2004-06-03 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function. This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.
Download or read book Micromachining written by and published by BoD – Books on Demand. This book was released on 2024-05-29 with total page 110 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this volume, Micromachining - New Trends and Applications, researchers from distant parts of the world have combined efforts and contributed their ideas and research work on micromachining. Their chapters will give you the opportunity to learn about materials, techniques, applications, challenges, and recent advancements in micromachining technology as well as about the state of the current micromachining market. Chapters also discuss concepts of micro-scale electronic component manufacturing, advancements in micromachining techniques of micro-electromechanical system (MEMS) piezoresistive pressure sensors to minimize offset drift due to humidity and temperature, the principles and classifications of force measuring systems with zero-compliance suspension, and triangular microcavity fabrication using micro-electrical discharge machining.
Book Synopsis Fundamentals of Laser Micromachining by : Ronald Schaeffer
Download or read book Fundamentals of Laser Micromachining written by Ronald Schaeffer and published by Taylor & Francis. This book was released on 2016-04-19 with total page 249 pages. Available in PDF, EPUB and Kindle. Book excerpt: Due to their flexible and efficient capabilities, lasers are often used over more traditional machining technologies, such as mechanical drilling and chemical etching, in manufacturing a wide variety of products, from medical implants, gyroscopes, and drug delivery catheters to aircraft engines, printed circuit boards, and fuel cells. Fundamentals
Book Synopsis Micromachining of Engineering Materials by : J.A. McGeough
Download or read book Micromachining of Engineering Materials written by J.A. McGeough and published by CRC Press. This book was released on 2001-11-29 with total page 420 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explaining principles underlying the main micromachining practices currently being used and developed in industrial countries around the world, Micromachining of Engineering Materials outlines advances in material removal that have led to micromachining, discusses procedures for precise measurement, includes molecular-level theories, describes vaporizing workpiece material with spark discharges and photon light energy, examines mask-based and maskless anodic dissolution processes, investigates nanomachining by firing ions at surfaces to remove groups of atoms, analyzes the conversion of kinetic to thermal energy through a controlled fine-focused beam of electrons, and more.
Book Synopsis Micromachining by : Zdravko Stanimirović
Download or read book Micromachining written by Zdravko Stanimirović and published by BoD – Books on Demand. This book was released on 2019-11-20 with total page 174 pages. Available in PDF, EPUB and Kindle. Book excerpt: To present their work in the field of micromachining, researchers from distant parts of the world have joined their efforts and contributed their ideas according to their interest and engagement. Their articles will give you the opportunity to understand the concepts of micromachining of advanced materials. Surface texturing using pico- and femto-second laser micromachining is presented, as well as the silicon-based micromachining process for flexible electronics. You can learn about the CMOS compatible wet bulk micromachining process for MEMS applications and the physical process and plasma parameters in a radio frequency hybrid plasma system for thin-film production with ion assistance. Last but not least, study on the specific coefficient in the micromachining process and multiscale simulation of influence of surface defects on nanoindentation using quasi-continuum method provides us with an insight in modelling and the simulation of micromachining processes. The editors hope that this book will allow both professionals and readers not involved in the immediate field to understand and enjoy the topic.
Book Synopsis Non-traditional Micromachining Processes by : Golam Kibria
Download or read book Non-traditional Micromachining Processes written by Golam Kibria and published by Springer. This book was released on 2017-03-07 with total page 431 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents a complete coverage of micromachining processes from their basic material removal phenomena to past and recent research carried by a number of researchers worldwide. Chapters on effective utilization of material resources, improved efficiency, reliability, durability, and cost effectiveness of the products are presented. This book provides the reader with new and recent developments in the field of micromachining and microfabrication of engineering materials.
Book Synopsis Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology by : Bijoy Bhattacharyya
Download or read book Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology written by Bijoy Bhattacharyya and published by William Andrew. This book was released on 2015-04-10 with total page 297 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)
Book Synopsis Hybrid Micromachining and Microfabrication Technologies by : Sandip Kunar
Download or read book Hybrid Micromachining and Microfabrication Technologies written by Sandip Kunar and published by John Wiley & Sons. This book was released on 2023-06-14 with total page 340 pages. Available in PDF, EPUB and Kindle. Book excerpt: HYBRID MICROMACHINING and MICROFABRICATION TECHNOLOGIES The book aims to provide a thorough understanding of numerous advanced hybrid micromachining and microfabrication techniques as well as future directions, providing researchers and engineers who work in hybrid micromachining with a much-appreciated orientation. The book is dedicated to advanced hybrid micromachining and microfabrication technologies by detailing principals, techniques, processes, conditions, research advances, research challenges, and opportunities for various types of advanced hybrid micromachining and microfabrication. It discusses the mechanisms of material removal supported by experimental validation. Constructional features of hybrid micromachining setup suitable for industrial micromachining applications are explained. Separate chapters are devoted to different advanced hybrid micromachining and microfabrication to design and development of micro-tools, which is one of the most vital components in advanced hybrid micromachining, and which can also be used for various micro and nano applications. Power supply, and other major factors which influence advanced hybrid micromachining processes, are covered and research findings concerning the improvement of machining accuracy and efficiency are reported.
Book Synopsis Electro-Micromachining and Microfabrication by : Sandip Kunar
Download or read book Electro-Micromachining and Microfabrication written by Sandip Kunar and published by CRC Press. This book was released on 2024-04-09 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: Bridging the gap between the need for micro elements and the profitable microfabrication of goods, this new book provides an informative overview of the electro-micromachining and microfabrication processes, varieties, and important applications. Opening with an overview of a variety of micromachining technologies, with an emphasis on nontraditional approaches and recent advances in each, the volume discusses the ultrasonic micromachining processes for producing a variety of micro-shapes, such as micro-holes, micro-slots, and micro-walls, as well as assisted hybrid micromachining with ultrasonic vibration of the tool or workpiece, all which help to improve precision and to advance research. Computer-aided design and computer-aided manufacturing dental micromachining technologies are discussed. Micro-electrical discharge machining, laser micro grooving, and laser micromachining are among the advanced micro-manufacturing processes addressed as well. The volume also covers the use of an electrochemical micromachining method to improve micro texturing and the use of nano-additives to enhance MQL and micromachining process optimization.
Book Synopsis Micromachining Techniques for Fabrication of Micro and Nano Structures by : Mojtaba Kahrizi
Download or read book Micromachining Techniques for Fabrication of Micro and Nano Structures written by Mojtaba Kahrizi and published by BoD – Books on Demand. This book was released on 2012-02-03 with total page 316 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.
Book Synopsis Silicon Wet Bulk Micromachining for MEMS by : Prem Pal
Download or read book Silicon Wet Bulk Micromachining for MEMS written by Prem Pal and published by CRC Press. This book was released on 2017-04-07 with total page 315 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical–based silicon bulk micromachining continues to be a widely used technique for the fabrication of microstructures used in MEMS devices. Researchers all over the world have contributed significantly to the advancement of wet chemical–based micromachining, from understanding the etching mechanism to exploring its application to the fabrication of simple to complex MEMS structures. In addition to its various benefits, one of the unique features of wet chemical–based bulk micromachining is the ability to fabricate slanted sidewalls, such as 45° walls as micromirrors, as well as freestanding structures, such as cantilevers and diaphragms. This makes wet bulk micromachining necessary for the fabrication of structures for myriad applications. This book provides a comprehensive understating of wet bulk micromachining for the fabrication of simple to advanced microstructures for various applications in MEMS. It includes introductory to advanced concepts and covers research on basic and advanced topics on wet chemical–based silicon bulk micromachining. The book thus serves as an introductory textbook for undergraduate- and graduate-level students of physics, chemistry, electrical and electronic engineering, materials science, and engineering, as well as a comprehensive reference for researchers working or aspiring to work in the area of MEMS and for engineers working in microfabrication technology.
Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication by : P. Rai-Choudhury
Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication written by P. Rai-Choudhury and published by SPIE Press. This book was released on 1997 with total page 706 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
Book Synopsis Hybrid Micro-Machining Processes by : Sumit Bhowmik
Download or read book Hybrid Micro-Machining Processes written by Sumit Bhowmik and published by Springer. This book was released on 2019-02-09 with total page 70 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents some of the recent hybrid micro-machining processes used to manufacture miniaturized products with micro level precision. The current developed technologies to manufacture the micro dimensioned products while meeting the desired precision level are described within the text. The authors especially highlight research that focuses on the development of new micro machining platforms while integrating the different technologies to manufacture the micro components in a high throughput and cost effective manner.
Book Synopsis Comparative Study of the Capabilities of Various Micromachining Processes by :
Download or read book Comparative Study of the Capabilities of Various Micromachining Processes written by and published by GRIN Verlag. This book was released on 2002-10-16 with total page 233 pages. Available in PDF, EPUB and Kindle. Book excerpt: Master's Thesis from the year 2002 in the subject Engineering - Mechanical Engineering, grade: 1.0 (A), University of Illinois at Chicago (Department of Mechanical Engineering), language: English, abstract: Introduction 1.1 Background and Motivation There has been a significant increase in the importance of miniature parts in recent years. The forerunner of this technology was mostly the electronics industry with their need of manufacturing processes for electronic components, like printed circuit boards and integrated circuits. The market of microsystem technologies is in general a very fast growing market. According to a study of the European NEXUS organization (Network of Excellence in Multifunctional Microsystems), the worldwide market for microsystem technologies is growing at an average rate of 18% a year to a total of $38 billion in 2002. However, the focus of the development is distributed different in certain countries. While the US has for example a focus on parts for micro-electro-mechanical systems (MEMS), equipment for information technology, biomedicine and genetic engineering, Germany dominates in sensor technology for the automotive industry. Japan has traditionally a strong position in fine mechanics and precision engineering as well as in equipment for information technology and consumer goods. Until recently, the production of miniature components was focused on technologies, traditionally used in the electronics and semiconductor industry, like etching and other photofabrication techniques. Using these technologies extremely small feature sizes can be produced. Optical lithography for example produces features as small as 0.18 um and X-ray lithography can be used to produce even smaller features. Table 1.1 gives an overview of some of the methods which can be used for the production of miniature parts. An introduction to these techniques is given in some papers which brie y summarize different micromachining methods. A very good paper was published by Masuzawa. The most complete description of different processes is included in the book "Fundamentals of microfabrication: the science of miniaturization" by Marc J. Madou. Some other papers summarizing different micromachining methods are for example. [...]
Book Synopsis Silicon Micromachining by : Miko Elwenspoek
Download or read book Silicon Micromachining written by Miko Elwenspoek and published by Cambridge University Press. This book was released on 2004-08-19 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.
Book Synopsis Femtosecond Laser Micromachining by : Roberto Osellame
Download or read book Femtosecond Laser Micromachining written by Roberto Osellame and published by Springer Science & Business Media. This book was released on 2012-03-05 with total page 485 pages. Available in PDF, EPUB and Kindle. Book excerpt: Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with unprecedented functionalities. The book is mainly focused on micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and can be exploited for the fabrication of complex microsystems with unprecedented functionalities.This book presents an overview of the state of the art of this rapidly emerging topic with contributions from leading experts in the field, ranging from principles of nonlinear material modification to fabrication techniques and applications to photonics and optofluidics.
Book Synopsis AMST'05 Advanced Manufacturing Systems and Technology by : Elso Kuljanic
Download or read book AMST'05 Advanced Manufacturing Systems and Technology written by Elso Kuljanic and published by Springer Science & Business Media. This book was released on 2005-07-01 with total page 818 pages. Available in PDF, EPUB and Kindle. Book excerpt: Manufacturing a product is not difficult, the difficulty consists in manufacturing a product of high quality, at a low cost and rapidly. Drastic technological advances are changing global markets very rapidly. In such conditions the ability to compete successfully must be based on innovative ideas and new products which has to be of high quality yet low in price. One way to achieve these objecti ves would be through massive investments in research of computer based technology and by applying the approaches presented in this book. The First International Conference on Advanced Manufacturing Systems and Technology AMST87 was held in Opatija (Croatia) in October 1987. The Second International Conference on Advanced Manufacturing Systems and Technology AMSV90 was held in Trento (Italy) in lune 1990. The Third, Fourth, Fifth and Sixth Conferences on Advanced Manufacturing Systems and Technology were all held in Udine (Italy) as follows: AMST93 in April 1993, AMST96 in September 1996, AMST99 in June 1999 and AMST02 in June 2002.
