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Author : Patricia Ann Beck
Publisher :
ISBN 13 :
Total Pages : 480 pages
Book Rating : 4.F/5 ( download)
Download or read book Micromachined VLSI Sensors written by Patricia Ann Beck and published by . This book was released on 1990 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Wai-Kai Chen
Publisher : CRC Press
ISBN 13 : 9781420049671
Total Pages : 1788 pages
Book Rating : 4.0/5 (496 download)
Download or read book The VLSI Handbook written by Wai-Kai Chen and published by CRC Press. This book was released on 2019-07-17 with total page 1788 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over the years, the fundamentals of VLSI technology have evolved to include a wide range of topics and a broad range of practices. To encompass such a vast amount of knowledge, The VLSI Handbook focuses on the key concepts, models, and equations that enable the electrical engineer to analyze, design, and predict the behavior of very large-scale integrated circuits. It provides the most up-to-date information on IC technology you can find. Using frequent examples, the Handbook stresses the fundamental theory behind professional applications. Focusing not only on the traditional design methods, it contains all relevant sources of information and tools to assist you in performing your job. This includes software, databases, standards, seminars, conferences and more. The VLSI Handbook answers all your needs in one comprehensive volume at a level that will enlighten and refresh the knowledge of experienced engineers and educate the novice. This one-source reference keeps you current on new techniques and procedures and serves as a review for standard practice. It will be your first choice when looking for a solution.
Author : P. Rai-Choudhury
Publisher : IET
ISBN 13 : 9780852969113
Total Pages : 716 pages
Book Rating : 4.9/5 (691 download)
Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication written by P. Rai-Choudhury and published by IET. This book was released on 1997 with total page 716 pages. Available in PDF, EPUB and Kindle. Book excerpt: Contains useful process details, recipes, tables, charts and includes numerous device applications.
Author : Jean Laconte
Publisher : Springer Science & Business Media
ISBN 13 : 0387288430
Total Pages : 293 pages
Book Rating : 4.3/5 (872 download)
Download or read book Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration written by Jean Laconte and published by Springer Science & Business Media. This book was released on 2006-10-11 with total page 293 pages. Available in PDF, EPUB and Kindle. Book excerpt: Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.
Author :
Publisher :
ISBN 13 :
Total Pages : 302 pages
Book Rating : 4.3/5 (91 download)
Download or read book Micromachined Devices and Components written by and published by . This book was released on 2000 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 382 pages
Book Rating : 4.:/5 (317 download)
Download or read book Proceedings of the Workshop on Microtechnologies and Applications to Space Systems written by and published by . This book was released on 1993 with total page 382 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Behraad Bahreyni
Publisher : William Andrew
ISBN 13 : 0815519710
Total Pages : 234 pages
Book Rating : 4.8/5 (155 download)
Download or read book Fabrication and Design of Resonant Microdevices written by Behraad Bahreyni and published by William Andrew. This book was released on 2008-10-20 with total page 234 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. - Offers numerous academic and industrial examples of resonant MEMS - Provides an analytic model of device behaviour - Explains two-port systems in detail - Devotes ample space to excitation and signal detection methods - Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
Author : Randy Frank
Publisher : Artech House
ISBN 13 : 1608075079
Total Pages : 390 pages
Book Rating : 4.6/5 (8 download)
Download or read book Understanding Smart Sensors written by Randy Frank and published by Artech House. This book was released on 2013 with total page 390 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in its third edition, Understanding Smart Sensors is the most complete, up-to-date, and authoritative summary of the latest applications and developments impacting smart sensors in a single volume. This thoroughly expanded and revised edition of an Artech bestseller contains a wealth of new material, including critical coverage of sensor fusion and energy harvesting, the latest details on wireless technology, the role and challenges involved with sensor apps and cloud sensing, greater emphasis on applications throughout the book, and dozens of figures and examples of current technologies from over 50 companies. This edition provides you with knowledge regarding a broad spectrum of possibilities for technology advancements based on current industry, university and national laboratories R & D efforts in smart sensors. Updated material also identifies the need for trusted sensing, the efforts of many organizations that impact smart sensing, and more. Utilizing the latest in smart sensor, microelectromechanical systems (MEMS) and microelectronic research and development, you get the technical and practical information you need keep your designs and products on the cutting edge. Plus, you see how network (wired and wireless) connectivity continues to impact smart sensor development. By combining information on micromachining and microelectronics, this is the first book that links these two important aspects of smart sensor technology so you don't have to keep multiple references on hand. This comprehensive resource also includes an extensive list of smart sensor acronyms and a glossary of key terms. With an effective blend of historical information and the latest content, the third edition of Understanding Smart Sensors provides a unique combination of foundational and future-changing information.
Author : Miko Elwenspoek
Publisher : Cambridge University Press
ISBN 13 : 9780521607674
Total Pages : 424 pages
Book Rating : 4.6/5 (76 download)
Download or read book Silicon Micromachining written by Miko Elwenspoek and published by Cambridge University Press. This book was released on 2004-08-19 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.
Author : Yu Sun
Publisher : John Wiley & Sons
ISBN 13 : 3527337849
Total Pages : 608 pages
Book Rating : 4.5/5 (273 download)
Download or read book Micro- and Nanomanipulation Tools written by Yu Sun and published by John Wiley & Sons. This book was released on 2015-11-23 with total page 608 pages. Available in PDF, EPUB and Kindle. Book excerpt: Das erste Handbuch, das Robotertechnik und Nanotechnologie verbindet, als Nachschlagewerk die Grundlagen zusammenfasst und neue Anwendungen in den Bereichen Halbleiter-Packaging, klinische Diagnose und Chirurgie vorstellt. Durchgängig mit aufregenden Aufnahmen auf Nanoebene.
Author :
Publisher :
ISBN 13 :
Total Pages : 880 pages
Book Rating : 4.3/5 (91 download)
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1994 with total page 880 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.
Author : Raivo Jaaniso
Publisher : Elsevier
ISBN 13 : 0857098667
Total Pages : 571 pages
Book Rating : 4.8/5 (57 download)
Download or read book Semiconductor Gas Sensors written by Raivo Jaaniso and published by Elsevier. This book was released on 2013-08-31 with total page 571 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductor gas sensors have a wide range of applications in safety, process control, environmental monitoring, indoor or cabin air quality and medical diagnosis. This important book summarises recent research on basic principles, new materials and emerging technologies in this essential field.The first part of the book reviews the underlying principles and sensing mechanisms for n- and p-type oxide semiconductors, introduces the theory for nanosize materials and describes the role of electrode–semiconductor interfaces. The second part of the book describes recent developments in silicon carbide- and graphene-based gas sensors, wide bandgap semiconductor gas sensors and micromachined and direct thermoelectric gas sensors. Part 3 discusses the use of nanomaterials for gas sensing, including metal oxide nanostructures, quantum dots, single-alled carbon nanotubes and porous silicon. The final part of the book surveys key applications in environmental monitoring, detecting chemical warfare agents and monitoring gases such as carbon dioxide.Semiconductor gas sensors is a valuable reference work for all those involved in gas monitoring, including those in the building industry, environmental engineers, defence and security specialists and researchers in this field. - Provides an overview of resistor and non-resistor sensors - Reviews developments in gas sensors and sensing methods, including graphene based sensors and direct thermoelectric sensors - Discusses the use of nanomaterials in gas sensing
Author : Vikas Choudhary
Publisher : CRC Press
ISBN 13 : 135183228X
Total Pages : 481 pages
Book Rating : 4.3/5 (518 download)
Download or read book MEMS written by Vikas Choudhary and published by CRC Press. This book was released on 2017-12-19 with total page 481 pages. Available in PDF, EPUB and Kindle. Book excerpt: The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.
Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1439895244
Total Pages : 650 pages
Book Rating : 4.4/5 (398 download)
Download or read book From MEMS to Bio-MEMS and Bio-NEMS written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 650 pages. Available in PDF, EPUB and Kindle. Book excerpt: From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling la
Author : Henry Baltes
Publisher : John Wiley & Sons
ISBN 13 : 352767506X
Total Pages : 610 pages
Book Rating : 4.5/5 (276 download)
Download or read book CMOS - MEMS written by Henry Baltes and published by John Wiley & Sons. This book was released on 2013-03-26 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt: This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.
Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1482274000
Total Pages : 764 pages
Book Rating : 4.4/5 (822 download)
Download or read book Fundamentals of Microfabrication written by Marc J. Madou and published by CRC Press. This book was released on 2018-10-08 with total page 764 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter
Author : K. N. Bhat
Publisher : Alpha Science Int'l Ltd.
ISBN 13 : 9788173195679
Total Pages : 1310 pages
Book Rating : 4.1/5 (956 download)
Download or read book Physics of Semiconductor Devices written by K. N. Bhat and published by Alpha Science Int'l Ltd.. This book was released on 2004 with total page 1310 pages. Available in PDF, EPUB and Kindle. Book excerpt: Contributed papers of the workshop held at IIT, Madras, in 2003.
