Fundamentals Of Microfabrication

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Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1482274663
Total Pages : 1992 pages
Book Rating : 4.4/5 (822 download)

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Book Synopsis Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set by : Marc J. Madou

Download or read book Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set written by Marc J. Madou and published by CRC Press. This book was released on 2018-12-14 with total page 1992 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Fundamentals of Microfabrication

Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 9780849308260
Total Pages : 826 pages
Book Rating : 4.3/5 (82 download)

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Book Synopsis Fundamentals of Microfabrication by : Marc J. Madou

Download or read book Fundamentals of Microfabrication written by Marc J. Madou and published by CRC Press. This book was released on 2002-03-13 with total page 826 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter

Fundamental Principles of Optical Lithography

Author : Chris Mack
Publisher : John Wiley & Sons
ISBN 13 : 1119965071
Total Pages : 503 pages
Book Rating : 4.1/5 (199 download)

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Book Synopsis Fundamental Principles of Optical Lithography by : Chris Mack

Download or read book Fundamental Principles of Optical Lithography written by Chris Mack and published by John Wiley & Sons. This book was released on 2011-08-10 with total page 503 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.

Introduction to Microfabrication

Author : Sami Franssila
Publisher : John Wiley & Sons
ISBN 13 : 0470020563
Total Pages : 424 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Introduction to Microfabrication by : Sami Franssila

Download or read book Introduction to Microfabrication written by Sami Franssila and published by John Wiley & Sons. This book was released on 2005-01-28 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.

Transport in Laser Microfabrication

Author : Costas P. Grigoropoulos
Publisher : Cambridge University Press
ISBN 13 : 052182172X
Total Pages : 413 pages
Book Rating : 4.5/5 (218 download)

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Book Synopsis Transport in Laser Microfabrication by : Costas P. Grigoropoulos

Download or read book Transport in Laser Microfabrication written by Costas P. Grigoropoulos and published by Cambridge University Press. This book was released on 2009-07-30 with total page 413 pages. Available in PDF, EPUB and Kindle. Book excerpt: Provides researchers and practitioners with the technical background to understand transport phenomena in laser microfabrication applications.

Manufacturing Techniques for Microfabrication and Nanotechnology

Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1420055194
Total Pages : 672 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Manufacturing Techniques for Microfabrication and Nanotechnology by : Marc J. Madou

Download or read book Manufacturing Techniques for Microfabrication and Nanotechnology written by Marc J. Madou and published by CRC Press. This book was released on 2011-06-13 with total page 672 pages. Available in PDF, EPUB and Kindle. Book excerpt: Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

Three-Dimensional Microfabrication Using Two-Photon Polymerization

Author : Tommaso Baldacchini
Publisher : William Andrew
ISBN 13 : 0128178280
Total Pages : 766 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis Three-Dimensional Microfabrication Using Two-Photon Polymerization by : Tommaso Baldacchini

Download or read book Three-Dimensional Microfabrication Using Two-Photon Polymerization written by Tommaso Baldacchini and published by William Andrew. This book was released on 2019-10-31 with total page 766 pages. Available in PDF, EPUB and Kindle. Book excerpt: Three-Dimensional Microfabrication Using Two-Photon Polymerization, Second Edition offers a comprehensive guide to TPP microfabrication and a unified description of TPP microfabrication across disciplines. It offers in-depth discussion and analysis of all aspects of TPP, including the necessary background, pros and cons of TPP microfabrication, material selection, equipment, processes and characterization. Current and future applications are covered, along with case studies that illustrate the book's concepts. This new edition includes updated chapters on metrology, synthesis and the characterization of photoinitiators used in TPP, negative- and positive-tone photoresists, and nonlinear optical characterization of polymers. This is an important resource that will be useful for scientists involved in microfabrication, generation of micro- and nano-patterns and micromachining. Discusses the major types of nanomaterials used in the agriculture and forestry sectors, exploring how their properties make them effective for specific applications Explores the design, fabrication, characterization and applications of nanomaterials for new Agri-products Offers an overview of regulatory aspects regarding the use of nanomaterials for agriculture and forestry

Fundamentals of Microfabrication

Author : Marc J. Madou
Publisher : CRC Press
ISBN 13 : 1482274000
Total Pages : 764 pages
Book Rating : 4.4/5 (822 download)

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Book Synopsis Fundamentals of Microfabrication by : Marc J. Madou

Download or read book Fundamentals of Microfabrication written by Marc J. Madou and published by CRC Press. This book was released on 2018-10-08 with total page 764 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter

3D Laser Microfabrication

Author : Hiroaki Misawa
Publisher : John Wiley & Sons
ISBN 13 : 3527608400
Total Pages : 403 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis 3D Laser Microfabrication by : Hiroaki Misawa

Download or read book 3D Laser Microfabrication written by Hiroaki Misawa and published by John Wiley & Sons. This book was released on 2006-08-21 with total page 403 pages. Available in PDF, EPUB and Kindle. Book excerpt: A thorough introduction to 3D laser microfabrication technology, leading readers from the fundamentals and theory to its various potent applications, such as the generation of tiny objects or three-dimensional structures within the bulk of transparent materials. The book also presents new theoretical material on dielectric breakdown, allowing a better understanding of the differences between optical damage on surfaces and inside the bulk, as well as a look into the future. Chemists, physicists, materials scientists and engineers will find this a valuable source of interdisciplinary knowledge in the field of laser optics and nanotechnology.

Laser Precision Microfabrication

Author : Koji Sugioka
Publisher : Springer
ISBN 13 : 3642105238
Total Pages : 353 pages
Book Rating : 4.6/5 (421 download)

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Book Synopsis Laser Precision Microfabrication by : Koji Sugioka

Download or read book Laser Precision Microfabrication written by Koji Sugioka and published by Springer. This book was released on 2010-08-13 with total page 353 pages. Available in PDF, EPUB and Kindle. Book excerpt: Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapters covers all the topics of laser precision processing from fundamental aspects to industrial applications to both inorganic and biological materials. It reviews the sate of the art of research and technological development in the area of laser processing.

Microfabrication for Microfluidics

Author : Sang-Joon John Lee
Publisher : Artech House
ISBN 13 : 1596934727
Total Pages : 276 pages
Book Rating : 4.5/5 (969 download)

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Book Synopsis Microfabrication for Microfluidics by : Sang-Joon John Lee

Download or read book Microfabrication for Microfluidics written by Sang-Joon John Lee and published by Artech House. This book was released on 2010 with total page 276 pages. Available in PDF, EPUB and Kindle. Book excerpt: Providing a definitive source of knowledge about the principles, materials, and process techniques used in the fabrication of microfluidics, this practical volume is a must for your reference shelf. The book focuses on fabrication, but also covers the basic purpose, benefits, and limitations of the fabricated structures as they are applied to microfluidic sensor and actuator functions. You find guidance on rapidly assessing options and tradeoffs for the selection of a fabrication method with clear tabulated process comparisons.

Fundamentals of Laser Micromachining

Author : Ronald Schaeffer
Publisher : Taylor & Francis
ISBN 13 : 1439860564
Total Pages : 260 pages
Book Rating : 4.4/5 (398 download)

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Book Synopsis Fundamentals of Laser Micromachining by : Ronald Schaeffer

Download or read book Fundamentals of Laser Micromachining written by Ronald Schaeffer and published by Taylor & Francis. This book was released on 2016-04-19 with total page 260 pages. Available in PDF, EPUB and Kindle. Book excerpt: Due to their flexible and efficient capabilities, lasers are often used over more traditional machining technologies, such as mechanical drilling and chemical etching, in manufacturing a wide variety of products, from medical implants, gyroscopes, and drug delivery catheters to aircraft engines, printed circuit boards, and fuel cells. Fundamentals of Laser Micromachining explains how laser technology is applied to precision micromachining. The book combines background on physics, lasers, optics, and hardware with analysis of markets, materials, and applications. It gives sufficient theoretical background for readers to understand basic concepts while including a further reading appendix for those interested in more detailed theoretical discussions. After reviewing laser history and technology, the author compares available laser sources, including CO2, excimer, Nd:YAG, fiber, and short pulse. He also addresses topics crucial to obtaining good processing results, such as IR and UV material–photon interaction, basic optical components, and system integration. The text goes on to cover real-world applications in the medical, microelectronics, aerospace, and other fields. It concludes with details on processing many common materials, such as metals, silicon, ceramics, and glasses. For engineers and project managers, this book provides the foundation to achieve cost-effectiveness, the best edge quality, and the highest resolution in small-scale industrial laser machining. It will help you select the correct kind of laser for your application and identify real opportunities for growth in the marketplace.

Microfluidics and Microfabrication

Author : Suman Chakraborty
Publisher : Springer Science & Business Media
ISBN 13 : 1441915435
Total Pages : 345 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Microfluidics and Microfabrication by : Suman Chakraborty

Download or read book Microfluidics and Microfabrication written by Suman Chakraborty and published by Springer Science & Business Media. This book was released on 2009-12-15 with total page 345 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfluidics and Microfabrication discusses the interconnect between microfluidics, microfabrication and the life sciences. Specifically, this includes fundamental aspects of fluid mechanics in micro-scale and nano-scale confinements and microfabrication. Material is also presented discussing micro-textured engineered surfaces, high-performance AFM probe-based, micro-grooving processes, fabrication with metals and polymers in bio-micromanipulation and microfluidic applications. Editor Suman Chakraborty brings together leading minds in both fields who also: Cover the fundamentals of microfluidics in a manner accessible to multi-disciplinary researchers, with a balance of mathematical details and physical principles Discuss the explicit interconnection between microfluiodics and microfabrication from an application perspective Detail the amalgamation of microfluidics with logic circuits and applications in micro-electronics Microfluidics and Microfabrication is an ideal book for researchers, engineers and senior-level graduate students interested in learning more about the two fields.

Microsystem Design

Author : Stephen D. Senturia
Publisher : Springer Science & Business Media
ISBN 13 : 0306476010
Total Pages : 689 pages
Book Rating : 4.3/5 (64 download)

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Book Synopsis Microsystem Design by : Stephen D. Senturia

Download or read book Microsystem Design written by Stephen D. Senturia and published by Springer Science & Business Media. This book was released on 2007-05-08 with total page 689 pages. Available in PDF, EPUB and Kindle. Book excerpt: It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.

Nanofluidics and Microfluidics

Author : Shaurya Prakash
Publisher : William Andrew
ISBN 13 : 1437744702
Total Pages : 312 pages
Book Rating : 4.4/5 (377 download)

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Book Synopsis Nanofluidics and Microfluidics by : Shaurya Prakash

Download or read book Nanofluidics and Microfluidics written by Shaurya Prakash and published by William Andrew. This book was released on 2014-01-16 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: To provide an interdisciplinary readership with the necessary toolkit to work with micro- and nanofluidics, this book provides basic theory, fundamentals of microfabrication, advanced fabrication methods, device characterization methods and detailed examples of applications of nanofluidics devices and systems. Case studies describing fabrication of complex micro- and nanoscale systems help the reader gain a practical understanding of developing and fabricating such systems. The resulting work covers the fundamentals, processes and applied challenges of functional engineered nanofluidic systems for a variety of different applications, including discussions of lab-on-chip, bio-related applications and emerging technologies for energy and environmental engineering. The fundamentals of micro- and nanofluidic systems and micro- and nanofabrication techniques provide readers from a variety of academic backgrounds with the understanding required to develop new systems and applications. Case studies introduce and illustrate state-of-the-art applications across areas, including lab-on-chip, energy and bio-based applications. Prakash and Yeom provide readers with an essential toolkit to take micro- and nanofluidic applications out of the research lab and into commercial and laboratory applications.

Fundamentals of Semiconductor Manufacturing and Process Control

Author : Gary S. May
Publisher : John Wiley & Sons
ISBN 13 : 0471790273
Total Pages : 428 pages
Book Rating : 4.4/5 (717 download)

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Book Synopsis Fundamentals of Semiconductor Manufacturing and Process Control by : Gary S. May

Download or read book Fundamentals of Semiconductor Manufacturing and Process Control written by Gary S. May and published by John Wiley & Sons. This book was released on 2006-05-26 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.

Micromanufacturing Engineering and Technology

Author : Yi Qin
Publisher : William Andrew
ISBN 13 : 9780815519805
Total Pages : 432 pages
Book Rating : 4.5/5 (198 download)

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Book Synopsis Micromanufacturing Engineering and Technology by : Yi Qin

Download or read book Micromanufacturing Engineering and Technology written by Yi Qin and published by William Andrew. This book was released on 2010-07-02 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and forming (bulk, sheet, hydro, laser); mechanical assembly, laser joining, soldering, and packaging. • Presents case studies, material and design considerations, working principles, process configurations, and information on tools, equipment, parameters and control • Explains the many facets of recently emerging additive / hybrid technologies and systems, incl: photo-electric-forming, liga, surface treatment, and thin film fabrication • Outlines system engineering issues pertaining to handling, metrology, testing, integration & software • Explains widely used micro parts in bio / medical industry, information technology and automotive engineering. • Covers technologies in high demand, such as: micro-mechanical-cutting, lasermachining, micro-forming, micro-EDM, micro-joining, photo-chemical-etching, photo-electro-forming, and micro-packaging