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Author : Peter J. Hesketh
Publisher : The Electrochemical Society
ISBN 13 : 9781566773720
Total Pages : 268 pages
Book Rating : 4.7/5 (737 download)
Download or read book Microfabricated Systems and MEMS VI written by Peter J. Hesketh and published by The Electrochemical Society. This book was released on 2002 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Eun Sok Kim
Publisher : McGraw Hill Professional
ISBN 13 : 1264257597
Total Pages : 415 pages
Book Rating : 4.2/5 (642 download)
Download or read book Fundamentals of Microelectromechanical Systems (MEMS) written by Eun Sok Kim and published by McGraw Hill Professional. This book was released on 2021-05-14 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: A complete guide to MEMS engineering, fabrication, and applications This comprehensive engineering guide shows, step by step, how to incorporate cutting-edge microelectromechanical (MEMS) technology to enable internet-of-things (IoT) and artificial intelligence (AI) functionality in your designs. Written by an experienced educator and microelectronics expert, Fundamentals of Microelectromechanical Systems (MEMS) clearly explains the latest technologies and methods. Real-world examples, illustrations, and in-depth questions and problems reinforce key topics throughout. Readers will also take a look at the future of MEMS in the workforce and explore MEMS research and development. Coverage includes: Basic microfabrication Micromachining Transduction principles RF and optical MEMS Mechanics and inertial sensors Thin film properties and SAW/BAW sensors Pressure sensors and microphones Piezoelectric films Material properties expressed as tensor Microfluidic systems and BioMEMS Power MEMS Electronic noises, interface circuits, and oscillators
Author : P. Rai-Choudhury
Publisher : SPIE Press
ISBN 13 : 9780819437167
Total Pages : 544 pages
Book Rating : 4.4/5 (371 download)
Download or read book MEMS and MOEMS Technology and Applications written by P. Rai-Choudhury and published by SPIE Press. This book was released on 2000 with total page 544 pages. Available in PDF, EPUB and Kindle. Book excerpt: The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
Author : Nazmul Islam
Publisher : BoD – Books on Demand
ISBN 13 : 9535103067
Total Pages : 496 pages
Book Rating : 4.5/5 (351 download)
Download or read book Microelectromechanical Systems and Devices written by Nazmul Islam and published by BoD – Books on Demand. This book was released on 2012-03-28 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators.
Author : Mohamed Gad-el-Hak
Publisher : CRC Press
ISBN 13 : 1420036556
Total Pages : 576 pages
Book Rating : 4.4/5 (2 download)
Download or read book MEMS written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2005-11-29 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection
Author : Masayoshi Esashi
Publisher : John Wiley & Sons
ISBN 13 : 3527823255
Total Pages : 528 pages
Book Rating : 4.5/5 (278 download)
Download or read book 3D and Circuit Integration of MEMS written by Masayoshi Esashi and published by John Wiley & Sons. This book was released on 2021-03-16 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
Author : Jeffrey Lang
Publisher : Springer Science & Business Media
ISBN 13 : 0387777474
Total Pages : 469 pages
Book Rating : 4.3/5 (877 download)
Download or read book Multi-Wafer Rotating MEMS Machines written by Jeffrey Lang and published by Springer Science & Business Media. This book was released on 2009-09-18 with total page 469 pages. Available in PDF, EPUB and Kindle. Book excerpt: The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.
Author :
Publisher :
ISBN 13 :
Total Pages : 750 pages
Book Rating : 4.3/5 (91 download)
Download or read book Microelectromechanical Systems written by and published by . This book was released on 2007 with total page 750 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Cesare Buffa
Publisher : Springer
ISBN 13 : 3319594125
Total Pages : 139 pages
Book Rating : 4.3/5 (195 download)
Download or read book MEMS Lorentz Force Magnetometers written by Cesare Buffa and published by Springer. This book was released on 2017-07-04 with total page 139 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book deals with compasses for consumer applications realized in MEMS technology, to support location-based and orientation-based services in addition to ‘traditional’ functionalities based on navigation. Navigation is becoming a must-have feature in portable devices and the presence of a compass also makes location-based augmented reality emerge, where a street map or a camera image could be overlaid with highly detailed information about what is in front of the user. To make these features possible both industries and scientific research focus on three axis magnetometers. The author describes a full path from specifications (driven by customers’ needs/desires) to prototype and preparing the way to industrialization and commercialization. The presentation includes an overview of all the major steps of this research and development process, highlighting critical points and potential pitfalls, as well as how to forecast or mitigate them. Coverage includes system design, specifications fulfillment, design strategy and project development methodology, in addition to traditional topics such as microelectronics design, sensor design, development of an experimental setup and characterization. The author uses a practical approach, including pragmatic guidelines and design choices, while maintaining focus on the final target, prototyping in the direction of industrialization and mass production.
Author : Paulo Jorge Bártolo
Publisher : Springer Science & Business Media
ISBN 13 : 0387929045
Total Pages : 345 pages
Book Rating : 4.3/5 (879 download)
Download or read book Stereolithography written by Paulo Jorge Bártolo and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 345 pages. Available in PDF, EPUB and Kindle. Book excerpt: Stereolithography: Materials, Processes and Applications will focus on recent advances in stereolithography covering aspects related to the most recent advances in the field, in terms of fabrication processes (two-photon polymerization, micro-stereolithography, infrared stereolithography and stereo-thermal-lithography), materials (novel resins, hydrogels for medical applications and highly reinforced resins with ceramics and metals), computer simulation and applications.
Author : Ernst Obermeier
Publisher : Springer
ISBN 13 : 3642594972
Total Pages : 1763 pages
Book Rating : 4.6/5 (425 download)
Download or read book Transducers ’01 Eurosensors XV written by Ernst Obermeier and published by Springer. This book was released on 2016-05-12 with total page 1763 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Conference is the premier international meeting for the presentation of original work addressing all aspects of the theory, design, fabrication, assembly, packaging, testing and application of solid-state sensors, actuators, MEMS, and microsystems.
Author : John X. J. Zhang
Publisher : Academic Press
ISBN 13 : 0128148632
Total Pages : 606 pages
Book Rating : 4.1/5 (281 download)
Download or read book Molecular Sensors and Nanodevices written by John X. J. Zhang and published by Academic Press. This book was released on 2018-11-19 with total page 606 pages. Available in PDF, EPUB and Kindle. Book excerpt: Molecular Sensors and Nanodevices: Principles, Designs and Applications in Biomedical Engineering, Second Edition is designed to be used as a foundational text, aimed at graduates, advanced undergraduates, early-career engineers and clinicians. The book presents the essential principles of molecular sensors, including theories, fabrication techniques and reviews. In addition, important devices and recently, highly-cited research outcomes are also cited. This differentiates the book from other titles on the market whose primary focus is more research-oriented and aimed at more of a niche market. - Covers the fundamental principles of device engineering and molecular sensing, sensor theories and applications in biomedical science and engineering - Introduces nano/micro fabrication techniques, including MEMS, bioMEMS, microTAS and nanomaterials science that are essential in the miniaturization of versatile molecular sensors - Explores applications of nanomaterials and biomaterials, including proteins, DNAs, nanoparticles, quantum dots, nanotubes/wires and graphene in biomedicine
Author : Nam-Trung Nguyen
Publisher : Artech House
ISBN 13 : 1630813656
Total Pages : 567 pages
Book Rating : 4.6/5 (38 download)
Download or read book Fundamentals and Applications of Microfluidics, Third Edition written by Nam-Trung Nguyen and published by Artech House. This book was released on 2019-01-31 with total page 567 pages. Available in PDF, EPUB and Kindle. Book excerpt: Now in its Third Edition, the Artech House bestseller, Fundamentals and Applications of Microfluidics, provides engineers and students with the most complete and current coverage of this cutting-edge field. This revised and expanded edition provides updated discussions throughout and features critical new material on microfluidic power sources, sensors, cell separation, organ-on-chip and drug delivery systems, 3D culture devices, droplet-based chemical synthesis, paper-based microfluidics for point-of-care, ion concentration polarization, micro-optofluidics and micro-magnetofluidics. The book shows how to take advantage of the performance benefits of microfluidics and serves as an instant reference for state-of-the-art microfluidics technology and applications. Readers find discussions on a wide range of applications, including fluid control devices, gas and fluid measurement devices, medical testing equipment, and implantable drug pumps. Professionals get practical guidance in choosing the best fabrication and enabling technology for a specific microfluidic application, and learn how to design a microfluidic device. Moreover, engineers get simple calculations, ready-to-use data tables, and rules of thumb that help them make design decisions and determine device characteristics quickly.
Author : Ning Xi
Publisher : Artech House
ISBN 13 : 1608071332
Total Pages : 311 pages
Book Rating : 4.6/5 (8 download)
Download or read book Introduction to Nanorobotic Manipulation and Assembly written by Ning Xi and published by Artech House. This book was released on 2012 with total page 311 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotechnology will allow us to build devices smaller than previously thought possible and will bring fundamental changes to disciplines within engineering, chemistry, medicine, biology, and physics. Understanding the principles of nano manipulation and assembly is tremendously important for those aiming to develop nanoscale systems. This forward-looking resource offers you cutting-edge coverage of the fundamentals and latest applications in this burgeoning field from an engineering perspective. The book shows you how nano-manipulation allows for the detection and manipulation of tiny entities such as single molecules, nanotubes, nanocubes, cells, viruses, proteins, and DNA molecules. You discover the most promising nanorobotic manipulation and assembly methods and find clear examples of key application areas, including nano sensors, electronics, and biomedical engineering. Supported with over 100 illustrations, this groundbreaking volumes offers comprehensive coverage of the subject, from the physics of nano manipulation... to robotic assembly of nano devices. Moreover, you get a glimpse of the future direction of this revolutionary technological area.
Author : Markku Tilli
Publisher : Elsevier
ISBN 13 : 0815519885
Total Pages : 670 pages
Book Rating : 4.8/5 (155 download)
Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2009-12-08 with total page 670 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. - Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. - Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. - Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. - Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures
Author : Tim C. Pearce
Publisher : John Wiley & Sons
ISBN 13 : 3527605630
Total Pages : 624 pages
Book Rating : 4.5/5 (276 download)
Download or read book Handbook of Machine Olfaction written by Tim C. Pearce and published by John Wiley & Sons. This book was released on 2006-01-24 with total page 624 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Electronic noses" are instruments which mimic the sense of smell. Consisting of olfactory sensors and a suitable signal processing unit, they are able to detect and distinguish odors precisely and at low cost. This makes them very useful for a remarkable variety of applications in the food and pharmaceutical industry, in environmental control or clinical diagnostics and more. The scope covers biological and technical fundamentals and up-to-date research. Contributions by renowned international scientists as well as application-oriented news from successful "e-nose" manufacturers give a well-rounded account of the topic, and this coverage from R&D to applications makes this book a must-have read for e-nose researchers, designers and users alike.
Author : Gabriel M. Rebeiz
Publisher : John Wiley & Sons
ISBN 13 : 0471462888
Total Pages : 512 pages
Book Rating : 4.4/5 (714 download)
Download or read book RF MEMS written by Gabriel M. Rebeiz and published by John Wiley & Sons. This book was released on 2004-02-06 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.
