Mechanical Characterization Of Polycrystalline 3c Silicon Carbide Thin Films

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MEMS Materials and Processes Handbook

Author : Reza Ghodssi
Publisher : Springer Science & Business Media
ISBN 13 : 0387473181
Total Pages : 1211 pages
Book Rating : 4.3/5 (874 download)

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Book Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi

Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Springer Handbook of Nanotechnology

Author : Bharat Bhushan
Publisher : Springer
ISBN 13 : 3662543575
Total Pages : 1704 pages
Book Rating : 4.6/5 (625 download)

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Book Synopsis Springer Handbook of Nanotechnology by : Bharat Bhushan

Download or read book Springer Handbook of Nanotechnology written by Bharat Bhushan and published by Springer. This book was released on 2017-11-05 with total page 1704 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive handbook has become the definitive reference work in the field of nanoscience and nanotechnology, and this 4th edition incorporates a number of recent new developments. It integrates nanofabrication, nanomaterials, nanodevices, nanomechanics, nanotribology, materials science, and reliability engineering knowledge in just one volume. Furthermore, it discusses various nanostructures; micro/nanofabrication; micro/nanodevices and biomicro/nanodevices, as well as scanning probe microscopy; nanotribology and nanomechanics; molecularly thick films; industrial applications and nanodevice reliability; societal, environmental, health and safety issues; and nanotechnology education. In this new edition, written by an international team of over 140 distinguished experts and put together by an experienced editor with a comprehensive understanding of the field, almost all the chapters are either new or substantially revised and expanded, with new topics of interest added. It is an essential resource for anyone working in the rapidly evolving field of key technology, including mechanical and electrical engineers, materials scientists, physicists, and chemists.

Silicon Carbide Microsystems for Harsh Environments

Author : Muthu Wijesundara
Publisher : Springer Science & Business Media
ISBN 13 : 1441971211
Total Pages : 247 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Silicon Carbide Microsystems for Harsh Environments by : Muthu Wijesundara

Download or read book Silicon Carbide Microsystems for Harsh Environments written by Muthu Wijesundara and published by Springer Science & Business Media. This book was released on 2011-05-17 with total page 247 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments, technological readiness of the system components, key issues when integrating these components into systems, and other hurdles in harsh environment operation. The authors use the SiC technology platform suite the model platform for developing harsh environment microsystems and then detail the current status of the specific individual technologies (electronics, MEMS, packaging). Additionally, methods towards system level integration of components and key challenges are evaluated and discussed based on the current state of SiC materials processing and device technology. Issues such as temperature mismatch, process compatibility and temperature stability of individual components and how these issues manifest when building the system receive thorough investigation. The material covered not only reviews the state-of-the-art MEMS devices, provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.

Poly-SiGe for MEMS-above-CMOS Sensors

Author : Pilar Gonzalez Ruiz
Publisher : Springer Science & Business Media
ISBN 13 : 9400767994
Total Pages : 210 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Poly-SiGe for MEMS-above-CMOS Sensors by : Pilar Gonzalez Ruiz

Download or read book Poly-SiGe for MEMS-above-CMOS Sensors written by Pilar Gonzalez Ruiz and published by Springer Science & Business Media. This book was released on 2013-07-17 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead to more compact MEMS with improved performance. The potential of poly-SiGe for MEMS above-aluminum-backend CMOS integration has already been demonstrated. However, aggressive interconnect scaling has led to the replacement of the traditional aluminum metallization by copper (Cu) metallization, due to its lower resistivity and improved reliability. Poly-SiGe for MEMS-above-CMOS sensors demonstrates the compatibility of poly-SiGe with post-processing above the advanced CMOS technology nodes through the successful fabrication of an integrated poly-SiGe piezoresistive pressure sensor, directly fabricated above 0.13 m Cu-backend CMOS. Furthermore, this book presents the first detailed investigation on the influence of deposition conditions, germanium content and doping concentration on the electrical and piezoresistive properties of boron-doped poly-SiGe. The development of a CMOS-compatible process flow, with special attention to the sealing method, is also described. Piezoresistive pressure sensors with different areas and piezoresistor designs were fabricated and tested. Together with the piezoresistive pressure sensors, also functional capacitive pressure sensors were successfully fabricated on the same wafer, proving the versatility of poly-SiGe for MEMS sensor applications. Finally, a detailed analysis of the MEMS processing impact on the underlying CMOS circuit is also presented.

Advanced Silicon Carbide Devices and Processing

Author : Stephen Saddow
Publisher : BoD – Books on Demand
ISBN 13 : 9535121685
Total Pages : 260 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Advanced Silicon Carbide Devices and Processing by : Stephen Saddow

Download or read book Advanced Silicon Carbide Devices and Processing written by Stephen Saddow and published by BoD – Books on Demand. This book was released on 2015-09-17 with total page 260 pages. Available in PDF, EPUB and Kindle. Book excerpt: Since the production of the first commercially available blue LED in the late 1980s, silicon carbide technology has grown into a billion-dollar industry world-wide in the area of solid-state lighting and power electronics. With this in mind we organized this book to bring to the attention of those well versed in SiC technology some new developments in the field with a particular emphasis on particularly promising technologies such as SiC-based solar cells and optoelectronics. We have balanced this with the more traditional subjects such as power electronics and some new developments in the improvement of the MOS system for SiC MOSFETS. Given the importance of advanced microsystems and sensors based on SiC, we also included a review on 3C-SiC for both microsystem and electronic applications.

Silicon Carbide Biotechnology

Author : Stephen E. Saddow
Publisher : Elsevier
ISBN 13 : 0123859069
Total Pages : 496 pages
Book Rating : 4.1/5 (238 download)

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Book Synopsis Silicon Carbide Biotechnology by : Stephen E. Saddow

Download or read book Silicon Carbide Biotechnology written by Stephen E. Saddow and published by Elsevier. This book was released on 2011-11-28 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon Carbide (SiC) is a wide-band-gap semiconductor biocompatible material that has the potential to advance advanced biomedical applications. SiC devices offer higher power densities and lower energy losses, enabling lighter, more compact and higher efficiency products for biocompatible and long-term in vivo applications ranging from heart stent coatings and bone implant scaffolds to neurological implants and sensors. The main problem facing the medical community today is the lack of biocompatible materials that are also capable of electronic operation. Such devices are currently implemented using silicon technology, which either has to be hermetically sealed so it cannot interact with the body or the material is only stable in vivo for short periods of time. For long term use (permanent implanted devices such as glucose sensors, brain-machine-interface devices, smart bone and organ implants) a more robust material that the body does not recognize and reject as a foreign (i.e., not organic) material is needed. Silicon Carbide has been proven to be just such a material and will open up a whole new host of fields by allowing the development of advanced biomedical devices never before possible for long-term use in vivo. This book not only provides the materials and biomedical engineering communities with a seminal reference book on SiC that they can use to further develop the technology, it also provides a technology resource for medical doctors and practitioners who are hungry to identify and implement advanced engineering solutions to their everyday medical problems that currently lack long term, cost effective solutions. Discusses Silicon Carbide biomedical materials and technology in terms of their properties, processing, characterization, and application, in one book, from leading professionals and scientists Critical assesses existing literature, patents and FDA approvals for clinical trials, enabling the rapid assimilation of important data from the current disparate sources and promoting the transition from technology research and development to clinical trials Explores long-term use and applications in vivo in devices and applications with advanced sensing and semiconducting properties, pointing to new product devekipment particularly within brain trauma, bone implants, sub-cutaneous sensors and advanced kidney dialysis devices

Fundamentals of Tribology and Bridging the Gap Between the Macro- and Micro/Nanoscales

Author : Bharat Bhushan
Publisher : Springer Science & Business Media
ISBN 13 : 9401007365
Total Pages : 961 pages
Book Rating : 4.4/5 (1 download)

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Book Synopsis Fundamentals of Tribology and Bridging the Gap Between the Macro- and Micro/Nanoscales by : Bharat Bhushan

Download or read book Fundamentals of Tribology and Bridging the Gap Between the Macro- and Micro/Nanoscales written by Bharat Bhushan and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 961 pages. Available in PDF, EPUB and Kindle. Book excerpt: The word tribology was fIrst reported in a landmark report by P. Jost in 1966 (Lubrication (Tribology)--A Report on the Present Position and Industry's Needs, Department of Education and Science, HMSO, London). Tribology is the science and technology of two interacting surfaces in relative motion and of related subjects and practices. The popular equivalent is friction, wear and lubrication. The economic impact of the better understanding of tribology of two interacting surfaces in relative motion is known to be immense. Losses resulting from ignorance of tribology amount in the United States alone to about 6 percent of its GNP or about $200 billion dollars per year (1966), and approximately one-third of the world's energy resources in present' use, appear as friction in one form or another. A fundamental understanding of the tribology of the head-medium interface in magnetic recording is crucial to the future growth of the $100 billion per year information storage industry. In the emerging microelectromechanical systems (MEMS) industry, tribology is also recognized as a limiting technology. The advent of new scanning probe microscopy (SPM) techniques (starting with the invention of the scanning tunneling microscope in 1981) to measure surface topography, adhesion, friction, wear, lubricant-fIlm thickness, mechanical properties all on a micro to nanometer scale, and to image lubricant molecules and the availability of supercomputers to conduct atomic-scale simulations has led to the development of a new fIeld referred to as Microtribology, Nanotribology, or Molecular Tribology (see B. Bhushan, J. N. Israelachvili and U.

The MEMS Handbook

Author : Mohamed Gad-el-Hak
Publisher : CRC Press
ISBN 13 : 9781420050905
Total Pages : 1386 pages
Book Rating : 4.0/5 (59 download)

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Book Synopsis The MEMS Handbook by : Mohamed Gad-el-Hak

Download or read book The MEMS Handbook written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2001-09-27 with total page 1386 pages. Available in PDF, EPUB and Kindle. Book excerpt: The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS. The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.

Piezoresistive Effect of p-Type Single Crystalline 3C-SiC

Author : Hoang-Phuong Phan
Publisher : Springer
ISBN 13 : 3319555448
Total Pages : 156 pages
Book Rating : 4.3/5 (195 download)

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Book Synopsis Piezoresistive Effect of p-Type Single Crystalline 3C-SiC by : Hoang-Phuong Phan

Download or read book Piezoresistive Effect of p-Type Single Crystalline 3C-SiC written by Hoang-Phuong Phan and published by Springer. This book was released on 2017-04-06 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book addresses the piezoresistance in p-type 3C-SiC, which it investigates using experimental characterization and theoretical analysis. The gauge factor, the piezoresistive coefficients in two-terminal and four-terminal resistors, the comparison between single crystalline and nanocrystalline SiC, along with the temperature dependence of the piezoresistive effect in p-type 3C-SiC are also discussed. Silicon carbide (SiC) is an excellent material for electronic devices operating at high temperatures, thanks to its large energy band gap, superior mechanical properties and extreme chemical inertness. Among the numerous polytypes of SiC, the cubic single crystal, which is also well known as 3C-SiC, is the most promising platform for microelectromechanical (MEMS) applications, as it can be epitaxially grown on an Si substrate with diameters of up to several hundred millimeters. This feature makes 3C-SiC compatible with the conventional Si-based micro/nano processing and also cuts down the cost of SiC wafers. The investigation into the piezoresistive effect in 3C-SiC is of significant interest for the development of mechanical transducers such as pressure sensors and strain sensors used for controlling combustion and deep well drilling. Although a number of studies have focused on the piezoresistive effect in n-type 3C-SiC, 4H-SiC and 6H-SiC, comparatively little attention has been paid to piezoresistance in p-type 3C-SiC. In addition, the book investigates the piezoresistive effect of top-down fabricated SiC nanowires, revealing a high degree of sensitivity in nanowires employing an innovative nano strain-amplifier. The large gauge factors of the p-type 3C-SiC at both room temperature and high temperatures found here indicate that this polytype could be suitable for the development of mechanical sensing devices operating in harsh environments with high temperatures.

MEMS

Author : Mohamed Gad-el-Hak
Publisher : CRC Press
ISBN 13 : 1420036572
Total Pages : 494 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis MEMS by : Mohamed Gad-el-Hak

Download or read book MEMS written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2005-11-29 with total page 494 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. The first volume, MEMS: Introduction and Fundamentals builds the required background and explores various physical considerations of MEMS. Topics include scaling, simulation models, the basics of control theory, and the physics of materials flow, thin liquid films, and bubble/drop transport. New chapters in this edition address lattice Boltzmann simulations and microscale hydrodynamics. Standing well on its own, this books builds an outstanding foundation for further exploration of MEMS and their applications.

Modern Tribology Handbook, Two Volume Set

Author : Bharat Bhushan
Publisher : CRC Press
ISBN 13 : 0849377870
Total Pages : 1760 pages
Book Rating : 4.8/5 (493 download)

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Book Synopsis Modern Tribology Handbook, Two Volume Set by : Bharat Bhushan

Download or read book Modern Tribology Handbook, Two Volume Set written by Bharat Bhushan and published by CRC Press. This book was released on 2000-12-28 with total page 1760 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recent research has led to a deeper understanding of the nature and consequences of interactions between materials on an atomic scale. The results have resonated throughout the field of tribology. For example, new applications require detailed understanding of the tribological process on macro- and microscales and new knowledge guides the rational

SiC based Miniaturized Devices

Author : Stephen Edward Saddow
Publisher : MDPI
ISBN 13 : 3039360108
Total Pages : 170 pages
Book Rating : 4.0/5 (393 download)

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Book Synopsis SiC based Miniaturized Devices by : Stephen Edward Saddow

Download or read book SiC based Miniaturized Devices written by Stephen Edward Saddow and published by MDPI. This book was released on 2020-06-18 with total page 170 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS devices are found in many of today’s electronic devices and systems, from air-bag sensors in cars to smart phones, embedded systems, etc. Increasingly, the reduction in dimensions has led to nanometer-scale devices, called NEMS. The plethora of applications on the commercial market speaks for itself, and especially for the highly precise manufacturing of silicon-based MEMS and NEMS. While this is a tremendous achievement, silicon as a material has some drawbacks, mainly in the area of mechanical fatigue and thermal properties. Silicon carbide (SiC), a well-known wide-bandgap semiconductor whose adoption in commercial products is experiening exponential growth, especially in the power electronics arena. While SiC MEMS have been around for decades, in this Special Issue we seek to capture both an overview of the devices that have been demonstrated to date, as well as bring new technologies and progress in the MEMS processing area to the forefront. Thus, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on: (1) novel designs, fabrication, control, and modeling of SiC MEMS and NEMS based on all kinds of actuation mechanisms; and (2) new developments in applying SiC MEMS and NEMS in consumer electronics, optical communications, industry, medicine, agriculture, space, and defense.

Silicon Carbide

Author : Peter Friedrichs
Publisher : John Wiley & Sons
ISBN 13 : 3527629068
Total Pages : 528 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Silicon Carbide by : Peter Friedrichs

Download or read book Silicon Carbide written by Peter Friedrichs and published by John Wiley & Sons. This book was released on 2011-04-08 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book prestigiously covers our current understanding of SiC as a semiconductor material in electronics. Its physical properties make it more promising for high-powered devices than silicon. The volume is devoted to the material and covers methods of epitaxial and bulk growth. Identification and characterization of defects is discussed in detail. The contributions help the reader to develop a deeper understanding of defects by combining theoretical and experimental approaches. Apart from applications in power electronics, sensors, and NEMS, SiC has recently gained new interest as a substrate material for the manufacture of controlled graphene. SiC and graphene research is oriented towards end markets and has high impact on areas of rapidly growing interest like electric vehicles. The list of contributors reads like a "Who's Who" of the SiC community, strongly benefiting from collaborations between research institutions and enterprises active in SiC crystal growth and device development.

Handbook of Micro/Nano Tribology

Author : Bharat Bushan
Publisher : CRC Press
ISBN 13 : 1000359506
Total Pages : 1323 pages
Book Rating : 4.0/5 (3 download)

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Book Synopsis Handbook of Micro/Nano Tribology by : Bharat Bushan

Download or read book Handbook of Micro/Nano Tribology written by Bharat Bushan and published by CRC Press. This book was released on 2020-10-28 with total page 1323 pages. Available in PDF, EPUB and Kindle. Book excerpt: This second edition of Handbook of Micro/Nanotribology addresses the rapid evolution within this field, serving as a reference for the novice and the expert alike. Two parts divide this handbook: Part I covers basic studies, and Part II addresses design, construction, and applications to magnetic storage devices and MEMS. Discussions include: surface physics and methods for physically and chemically characterizing solid surfaces roughness characterization and static contact models using fractal analysis sliding at the interface and friction on an atomic scale scratching and wear as a result of sliding nanofabrication/nanomachining as well as nano/picoindentation lubricants for minimizing friction and wear surface forces and microrheology of thin liquid films measurement of nanomechanical properties of surfaces and thin films atomic-scale simulations of interfacial phenomena micro/nanotribology and micro/nanomechanics of magnetic storage devices This comprehensive book contains 16 chapters contributed by more than 20 international researchers. In each chapter, the presentation starts with macroconcepts and then lead to microconcepts. With more than 500 illustrations and 50 tables, Handbook of Micro/Nanotribology covers the range of relevant topics, including characterization of solid surfaces, measurement techniques and applications, and theoretical modeling of interfaces. What's New in the Second Edition? New chapters on: AFM instrumentation Surface forces and adhesion Design and construction of magnetic storage devices Microdynamical devices and systems Mechanical properties of materials in microstructure Micro/nanotribology and micro/nanomechanics of MEMS devices

Physics and Technology of Silicon Carbide Devices

Author : Yasuto Hijikata
Publisher : BoD – Books on Demand
ISBN 13 : 9535109170
Total Pages : 416 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis Physics and Technology of Silicon Carbide Devices by : Yasuto Hijikata

Download or read book Physics and Technology of Silicon Carbide Devices written by Yasuto Hijikata and published by BoD – Books on Demand. This book was released on 2012-10-16 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recently, some SiC power devices such as Schottky-barrier diodes (SBDs), metal-oxide-semiconductor field-effect-transistors (MOSFETs), junction FETs (JFETs), and their integrated modules have come onto the market. However, to stably supply them and reduce their cost, further improvements for material characterizations and those for device processing are still necessary. This book abundantly describes recent technologies on manufacturing, processing, characterization, modeling, and so on for SiC devices. In particular, for explanation of technologies, I was always careful to argue physics underlying the technologies as much as possible. If this book could be a little helpful to progress of SiC devices, it will be my unexpected happiness.

Annual Review of Materials Research

Author :
Publisher :
ISBN 13 :
Total Pages : 818 pages
Book Rating : 4.3/5 (97 download)

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Book Synopsis Annual Review of Materials Research by :

Download or read book Annual Review of Materials Research written by and published by . This book was released on 2007 with total page 818 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Process Variations in Microsystems Manufacturing

Author : Michael Huff
Publisher : Springer Nature
ISBN 13 : 3030405605
Total Pages : 531 pages
Book Rating : 4.0/5 (34 download)

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Book Synopsis Process Variations in Microsystems Manufacturing by : Michael Huff

Download or read book Process Variations in Microsystems Manufacturing written by Michael Huff and published by Springer Nature. This book was released on 2020-04-09 with total page 531 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.