Investigation Of Combined So2 No3 Removal By Ceria Sorbents Quarterly Technical Progress Report

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Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report

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ISBN 13 :
Total Pages : 9 pages
Book Rating : 4.:/5 (16 download)

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Download or read book Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report written by and published by . This book was released on 1995 with total page 9 pages. Available in PDF, EPUB and Kindle. Book excerpt: Simultaneous removal of SO2 and NOx using a regenerable solid sorbent will constitute an important improvement over the use of separate processes for the removal of these two pollutants from stack gases and possibly eliminate several shortcomings of the individual SO2 and NOx removal operations. Recent studies at PETC considered cerium oxide as an alternate sorbent to CuO. The present study aims to determine the effects of ammonia on the sulfation of the sorbent and to obtain a rate expression for the regeneration of alumina-supported Ce2 sorbents. The sulfation experiments indicated that 100% conversion of ceria can be attained. Activation energy for the sulfation reaction was found to be 19 KJ/mol. The rate of sulfation reaction is first order with respect to SO2 and solid reactant concentrations. For regeneration with hydrogen, the activation energy and the reaction order with respect to hydrogen was found to be 114 KJ/mol and 0.56, respectively. The ceria sorbent preserved its activity and structural stability after 6 cycles. In the last quarter regeneration with methane was studied. Since regeneration with methane is more complicated than regeneration with hydrogen, the evaluation of data needs the development of new methods. The information obtained from these studies will be used to develop models for reactor-regenerator configurations. Subsequently, the SO2/NOx removal facility will be integrated into the power production process using a commercial process simulation software.

Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, January 1995--March 1995

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ISBN 13 :
Total Pages : 14 pages
Book Rating : 4.:/5 (16 download)

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Book Synopsis Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, January 1995--March 1995 by :

Download or read book Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, January 1995--March 1995 written by and published by . This book was released on 1995 with total page 14 pages. Available in PDF, EPUB and Kindle. Book excerpt: Simultaneous removal of SO2 and NOxusing a regenerable solid sorbent will constitute an important improvement over the use of separate processes for the removal of these two pollutants from stack gases and possibly eliminate several shortcomings of the individual SO2 and NOx removal operations. Recent studies at PETC considered cerium oxide as an alternate sorbent to CuO. The present study aims to determine the effects of ammonia on the sulfation of the sorbent and to obtain a rate expression for the regeneration of alumina-supported CeO2 sorbents. The sulfation experiments indicated that 100 % conversion of ceria can be attained. Activation energy for the sulfation reaction was found to be 19 kJ/mol. The rate of sulfation reaction is first order with respect to SO2 and solid reactant concentrations. For regeneration with hydrogen, the activation energy and the reaction order with respect to hydrogen was found to be 114 kJ/mol and 0.56, respectively. The ceria sorbent preserved its activity and structural stability after 6 cycles. In the last quarter regeneration with methane was studied. Since regeneration with methane is more complicated than regeneration with hydrogen, the evaluation of data needs the development of new methods. The information obtained from these studies will be used to develop models for reactor-regenerator configurations. Subsequently, the SO2/NOx removal facility will be integrated into the power production process using a commercial process simulation software.

Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, October--December, 1994

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ISBN 13 :
Total Pages : 16 pages
Book Rating : 4.:/5 (16 download)

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Book Synopsis Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, October--December, 1994 by :

Download or read book Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, October--December, 1994 written by and published by . This book was released on 1995 with total page 16 pages. Available in PDF, EPUB and Kindle. Book excerpt: Simultaneous removal of SO2 and NOx using a regenerable solid sorbent will constitute an important improvement over the use of separate processes for the removal of these two pollutants from stack gases and possibly eliminate several shortcomings of the individual SO2 and NOx removal operations. Recent studies at PETC considered cerium oxide as an alternate sorbent to CuO. The present study aims to determine the effects of ammonia on the sulfation of the sorbent and to obtain a rate expression for the regeneration of alumina-supported CeO2 sorbents. The sulfation experiments indicated that 100% conversion of ceria could be attained. Activation energy for the sulfation reaction was found to be 19 kJ/mol. The rate of sulfation reaction is first order with respect to SO2 and solid reactant concentrations. For regeneration with hydrogen, the activation energy and the reaction order with respect to hydrogen was found to be 114 kJ/mol and 0.56, respectively. The ceria sorbent preserved its activity and structural stability after 6 cycles. The information obtained from these studies will be used to develop models for reactor-regenerator configurations. Subsequently, the SO2/NOx removal facility will be integrated into the power production process using a commercial process simulation software. In this quarter of the project, the main focus was on the performance of the experimental program for the regeneration of the ceria sorbent by hydrogen and evaluation of experimental results.

Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, October 1993--December 1993

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ISBN 13 :
Total Pages : 8 pages
Book Rating : 4.:/5 (16 download)

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Book Synopsis Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, October 1993--December 1993 by :

Download or read book Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, October 1993--December 1993 written by and published by . This book was released on 1994 with total page 8 pages. Available in PDF, EPUB and Kindle. Book excerpt: Simultaneous removal of SO2 and NOx using a regenerable solid sorbent will constitute an important improvement over the use of separate processes for the removal of these two pollutants from stack gases and possibly eliminate several shortcomings of the individual SO2 and NOx removal operations. This process will allow simple and reliable cleanup of large volumes of stack gases as a competitive cost; produce a concentrated stream of SO2 which can easily be converted into valuable by-products; be compatible with existing power generation plants; and essentially eliminate the waste materials generated in some other sulfur removal processes. Department of Energys̀ Pittsburgh Energy Technology Center (PETC) and UOP/Shell have developed processes which both employ copper oxide-based sorbents in different reactor configurations, namely, former uses a regenerative fluidized bed while the latter employs a cyclic fixed bed contactor. More recent studies at PETC considered cerium oxide as an alternate sorbent to CuO. Ceria improves the resistance of the alumina support to thermal sintering and produces a regeneration off-gas stream that can be easily converted to elemental sulfur. It has a potentially higher sulfur capture capacity than copper. The objective of this research is to determine the effects of ammonia on the sulfation of the sorbent; to determine the effects of fly ash on the sulfation and regeneration of the sorbent; to obtain a rate expression for the regeneration of alumina-supported CeO2 sorbents; to model reactor configurations for a commercial scale combined CeO2/Al2O3 sorbent; and to study alternative designs, effects of design variables on the performance of the facility, and the economics of the process using the developed model.

Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, January 1993--March 1993

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ISBN 13 :
Total Pages : 6 pages
Book Rating : 4.:/5 (16 download)

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Book Synopsis Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, January 1993--March 1993 by :

Download or read book Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, January 1993--March 1993 written by and published by . This book was released on 1994 with total page 6 pages. Available in PDF, EPUB and Kindle. Book excerpt: Simultaneous removal of SO2 and NOx using a regenerable solid sorbent will constitute an important improvement over the use of separate processes for the removal of these two pollutants from stack gases and possibly eliminate several shortcomings of the individual SO2 and NOx removal operations. This process will allow simple and reliable cleanup of large volumes of stack gases at a competitive cost; produce a concentrated stream of SO2 which an easily be converted into valuable by-products; be compatible with existing power generation plants; and essentially eliminate the waste materials generated in some other sulfur removal processes. Department of Energys̀ Pittsburgh Energy Technology Center (PETC) and UOP/Shell have developed processes which both employ copper oxide-based sorbents in different reactor configurations, namely, former uses a regenerative fluidized bed while the latter employs a cyclic fixed bed contactor. More recent studies at PETC considered cerium oxide as an alternate sorbent to CuO. Ceria improves the resistance of the alumina support to thermal sintering and produces a regeneration off-gas stream that can be easily converted to elemental sulfur. It has a potentially higher sulfur capture capacity than copper. The objective of this research is to determine the effects of ammonia on the sulfation of the sorbent; to determine the effects of fly ash on the sulfation and regeneration of the sorbent; to obtain a rate expression for the regeneration of alumina-supported CeO2 sorbents; to model reactor configurations for a commercial scale combined CeO2/Al2O3 sorbent; and to study alternative designs, effects of design variables on the performance of the facility, and the economics of the process using the developed model.

Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, January 1, 1994--March 31, 1994

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ISBN 13 :
Total Pages : 23 pages
Book Rating : 4.:/5 (16 download)

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Book Synopsis Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, January 1, 1994--March 31, 1994 by :

Download or read book Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, January 1, 1994--March 31, 1994 written by and published by . This book was released on 1994 with total page 23 pages. Available in PDF, EPUB and Kindle. Book excerpt: Simultaneous removal of SO2 and NOx using a regenerable solid sorbent will constitute an important improvement over the use of separate processes for the removal of these two pollutants from stack gases and possibly eliminate several shortcomings of the individual SO2 and NOx removal operations. This process will allow simple and reliable cleanup of large volumes of stack gases at a competitive cost; produce a concentrated stream of SO2 which an easily be converted into valuable by-products; be compatible with existing power generation plants; and essentially eliminate the waste materials generated in some other sulfur removal processes. Department of Energys̀ Pittsburgh Energy Technology Center (PETC) and UOP/Shell have developed processes which both employ copper oxide-based sorbents in different reactor configurations, namely, former uses a regenerative fluidized bed while the latter employs a cyclic fixed bed contactor. More recent studies at PETC considered cerium oxide as an alternate sorbent to CuO{sup (1,2)}. Ceria improves the resistance of the alumina support to thermal sintering and produces a regeneration off-gas stream that can be easily converted to elemental sulfur. It has potentially higher sulfur capture capacity than copper. The objective of this research is to determine the effects of ammonia on the sulfation of the sorbent; to determine the effects of fly ash on the sulfation and regeneration of the sorbent; to obtain a rate expression for the regeneration of alumina-supported CeO2 sorbents; to model reactor configurations for a commercial scale combined CeO2/Al2O3 sorbent; and to study alternative designs, effects of design variables on the performance of the facility, and the economics of the process using the developed model.

Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, [April--June 1995].

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ISBN 13 :
Total Pages : 57 pages
Book Rating : 4.:/5 (16 download)

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Book Synopsis Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, [April--June 1995]. by :

Download or read book Investigation of Combined SO2/NO3 Removal by Ceria Sorbents. Quarterly Technical Progress Report, [April--June 1995]. written by and published by . This book was released on 1995 with total page 57 pages. Available in PDF, EPUB and Kindle. Book excerpt: Simultaneous removal of SO2 and NOx using a regenerable solid sorbent will constitute an important improvement over the use of separate processes for the removal of these two pollutants from stack gases and possibly eliminate several shortcomings of the individual SO2 and NOx removal operations. Recent studies at PETC considered cerium oxide as an alternate sorbent to CuO. The present study aims to determine the effects of ammonia on the sulfation of the sorbent and to obtain a rate expression for the regeneration of alumina-supported CeO2 sorbents. In this quarter runs for methane regeneration were completed. The data obtained were evaluated and interpreted. When the sulfated sorbent was regenerated with methane coke formation on the sorbent was observed. Treatment of fresh sorbent with methane also resulted in coking. Coke formed on the sorbent disappeared very rapidly after the methane flow was replaced with nitrogen. The order of the regeneration reaction with respect to methane was estimated as 0:76 and the activation energy of the reaction was estimated as 130 kJ/mol. During repeated sulfation-regeneration cycles the decrease in the sulfur capacity after the first cycle was slightly more when regeneration was done with methane compared to that observed with hydrogen regeneration. In the subsequent 4 cycles, the ceria sorbent preserved its sulfur capacity. The regenerated sorbent was able to capture 1.5 sulfur atoms per cerium atom in less than an hour of sulfation, compared to S/Ce of 2.5 for fresh sorbents and 2 for sorbents regenerated with hydrogen.

Energy Research Abstracts

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ISBN 13 :
Total Pages : 1032 pages
Book Rating : 4.:/5 (3 download)

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Book Synopsis Energy Research Abstracts by :

Download or read book Energy Research Abstracts written by and published by . This book was released on 1994 with total page 1032 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiannual, with semiannual and annual indexes. References to all scientific and technical literature coming from DOE, its laboratories, energy centers, and contractors. Includes all works deriving from DOE, other related government-sponsored information, and foreign nonnuclear information. Arranged under 39 categories, e.g., Biomedical sciences, basic studies; Biomedical sciences, applied studies; Health and safety; and Fusion energy. Entry gives bibliographical information and abstract. Corporate, author, subject, report number indexes.

Investigation of Combined SO2

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ISBN 13 :
Total Pages : 9 pages
Book Rating : 4.:/5 (683 download)

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Book Synopsis Investigation of Combined SO2 by :

Download or read book Investigation of Combined SO2 written by and published by . This book was released on 1995 with total page 9 pages. Available in PDF, EPUB and Kindle. Book excerpt: Simultaneous removal of SO2 and NO(subscript x) using a regenerable solid sorbent will constitute an important improvement over the use of separate processes for the removal of these two pollutants from stack gases and possibly eliminate several shortcomings of the individual SO2 and NO(subscript x) removal operations. Recent studies at PETC considered cerium oxide as an alternate sorbent to CuO. The present study aims to determine the effects of ammonia on the sulfation of the sorbent and to obtain a rate expression for the regeneration of alumina-supported Ce2 sorbents. The sulfation experiments indicated that 100% conversion of ceria can be attained. Activation energy for the sulfation reaction was found to be 19 KJ/mol. The rate of sulfation reaction is first order with respect to SO2 and solid reactant concentrations. For regeneration with hydrogen, the activation energy and the reaction order with respect to hydrogen was found to be 114 KJ/mol and 0.56, respectively. The ceria sorbent preserved its activity and structural stability after 6 cycles. In the last quarter regeneration with methane was studied. Since regeneration with methane is more complicated than regeneration with hydrogen, the evaluation of data needs the development of new methods. The information obtained from these studies will be used to develop models for reactor-regenerator configurations. Subsequently, the SO2/NO(subscript x) removal facility will be integrated into the power production process using a commercial process simulation software.

Government Reports Annual Index

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ISBN 13 :
Total Pages : 1372 pages
Book Rating : 4.:/5 (319 download)

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Book Synopsis Government Reports Annual Index by :

Download or read book Government Reports Annual Index written by and published by . This book was released on 1994 with total page 1372 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Pilot-scale Testing of a New Sorbent for Combined SO2/NO3 Removal. Final Report

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ISBN 13 :
Total Pages : 117 pages
Book Rating : 4.:/5 (16 download)

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Book Synopsis Pilot-scale Testing of a New Sorbent for Combined SO2/NO3 Removal. Final Report by :

Download or read book Pilot-scale Testing of a New Sorbent for Combined SO2/NO3 Removal. Final Report written by and published by . This book was released on 1994 with total page 117 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new regenerable sorbent concept for SO2 and NOx removal was pilot-tested at Ohio Edisons̀ Edgewater generating station at a 1.5 to 2-MW(e) level. A radial panel-bed filter of a new dry, granular sorbent was exposed to flue gas and regenerated in an experimental proof-of-concept program. The project was successful in demonstrating the new sorbents̀ ability to achieve 90% SO2 removal, 30% NOx removal, and over 80% removal of residual particulates with realistic approach temperatures and low pressure drops. Based on the results of this project, the retrofit cost of this technology is expected to be on the order of $400 per ton of SO2 and $900 per ton of NOx removed. This assumes that gas distribution is even and methane regeneration is used for a 30% average utilization. For a 2.5%-sulfur Ohio coal, this translates to a cost of approximately $17 per ton of coal. Two by-product streams were generated in the process that was tested: a solid, spent-sorbent stream and a highly-concentrated SO2 or elemental-sulfur stream. While not within the scope of the project, it was found possible to process these streams into useful products. The spent sorbent materials were shown to be excellent substrates for soil amendments; the elemental sulfur produced is innocuous and eminently marketable.

Government Reports Announcements & Index

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ISBN 13 :
Total Pages : 548 pages
Book Rating : 4.:/5 (3 download)

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Book Synopsis Government Reports Announcements & Index by :

Download or read book Government Reports Announcements & Index written by and published by . This book was released on 1995-06 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt:

INVESTIGATION OF MIXED METAL SORBENT

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ISBN 13 :
Total Pages : 73 pages
Book Rating : 4.:/5 (684 download)

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Download or read book INVESTIGATION OF MIXED METAL SORBENT written by and published by . This book was released on 2001 with total page 73 pages. Available in PDF, EPUB and Kindle. Book excerpt: Simultaneous removal of SO2 and NO(subscript x) using a regenerable solid sorbent will constitute an important improvement over the use of separate processes for the removal of these two pollutants from stack gases and possibly eliminate several shortcomings of the individual SO2 and NO(subscript x) removal operations. The work done at PETC and the DOE-funded investigation of the investigators on the sulfation and regeneration of alumina-supported cerium oxide sorbents have shown that they can perform well at relatively high temperatures (823-900 K) as regenerable desulfurization sorbents. Survey of the recent literature shows that addition of copper oxide to ceria lowers the sulfation temperature of ceria down to 773 K, sulfated ceria-based sorbents can function as selective SCR catalysts even at elevated temperatures, SO2 can be directly reduced to sulfur by CO on CuO-ceria catalysts, and ceria-based catalysts may have a potential for selective catalytic reduction of NO(subscript x) by methane. These observations indicate a possibility of developing a ceria-based sorbent/catalyst which can remove both SO2 and NO(subscript x) from flue gases within a relatively wide temperature window, produce significant amounts of elemental sulfur during regeneration, and use methane for the selective catalytic reduction of NO(subscript x).

Combined SO2/NO3 Reduction Technology

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ISBN 13 :
Total Pages : 17 pages
Book Rating : 4.:/5 (16 download)

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Download or read book Combined SO2/NO3 Reduction Technology written by and published by . This book was released on 1992 with total page 17 pages. Available in PDF, EPUB and Kindle. Book excerpt: Enactment of the Clean Air Act Amendments and passage of state legislation leading to more stringent nitrogen oxides (NO3 regulations have fueled research and development efforts on technologies for the combined control of sulfur dioxide (SO2) and NO3 The integrated removal of both SO2 and NO3 in a single system can offer significant advantages over the use of several separate processes, including such factors as reduced system complexity, better operability, and lower costs. This paper reviews the status of a number of integrated flue-gas-cleanup (FGC) systems that have reached a significant stage of development, focusing on post-combustion processes that have been tested or are ready for testing at the pilot scale or larger. A brief process description, a summary of the development status and performance achieved to date, pending commercialization issues, and process economics (when available) are given for each technology.

Production and Use of Activated Char for Combined SO2/NO3 Removal. [Quarterly] Technical Report, December 1, 1993--February 28, 1994

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ISBN 13 :
Total Pages : 29 pages
Book Rating : 4.:/5 (16 download)

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Book Synopsis Production and Use of Activated Char for Combined SO2/NO3 Removal. [Quarterly] Technical Report, December 1, 1993--February 28, 1994 by :

Download or read book Production and Use of Activated Char for Combined SO2/NO3 Removal. [Quarterly] Technical Report, December 1, 1993--February 28, 1994 written by and published by . This book was released on 1994 with total page 29 pages. Available in PDF, EPUB and Kindle. Book excerpt: During this reporting period, a thermogravimetric technique was developed to determine the kinetics of SO2 adsorption on a series of chars prepared from IBC-102 coal. Also, a temperature programmed desorption (TPD) method was developed to determine the nature and extent of carbon-oxygen (C-O) complexes formed on the surface of the char. An attempt was made to relate this information to observed SO2 adsorption behavior. An IBC-102 char prepared with an N2-BET surface area of 10 m2/g adsorbed significantly less SO2 than chars prepared with surface areas> 200 m2/g. However, for chars with surface areas> 200 m2/g, the amount of available surface area was not as important as the chemistry of the surface. A steam activated char adsorbed the most SO2, comparable to the amount adsorbed by a commercial activated carbon. TPD performed on the steam activated char revealed the presence of CO-forming C-O complexes which were basic in nature. The other chars all contained significant amounts of more acidic CO2-forming complexes. Because SO2 is an acid gas, a carbon adsorbent with a basic surface should adsorb more SO2. To enhance SO2 adsorption, a novel char preparation method was devised to 2 create a basic surface with up to ten times more CO-forming C-O complexes than formed by steam activation.

The Chemistry of the Actinide and Transactinide Elements (3rd ed., Volumes 1-5)

Author : L.R. Morss
Publisher : Springer Science & Business Media
ISBN 13 : 1402035985
Total Pages : 4059 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis The Chemistry of the Actinide and Transactinide Elements (3rd ed., Volumes 1-5) by : L.R. Morss

Download or read book The Chemistry of the Actinide and Transactinide Elements (3rd ed., Volumes 1-5) written by L.R. Morss and published by Springer Science & Business Media. This book was released on 2007-12-31 with total page 4059 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Chemistry of the Actinide and Transactinide Elements is a contemporary and definitive compilation of chemical properties of all of the actinide elements, especially of the technologically important elements uranium and plutonium, as well as the transactinide elements. In addition to the comprehensive treatment of the chemical properties of each element, ion, and compound from atomic number 89 (actinium) through to 109 (meitnerium), this multi-volume work has specialized and definitive chapters on electronic theory, optical and laser fluorescence spectroscopy, X-ray absorption spectroscopy, organoactinide chemistry, thermodynamics, magnetic properties, the metals, coordination chemistry, separations, and trace analysis. Several chapters deal with environmental science, safe handling, and biological interactions of the actinide elements. The Editors invited teams of authors, who are active practitioners and recognized experts in their specialty, to write each chapter and have endeavoured to provide a balanced and insightful treatment of these fascinating elements at the frontier of the periodic table. Because the field has expanded with new spectroscopic techniques and environmental focus, the work encompasses five volumes, each of which groups chapters on related topics. All chapters represent the current state of research in the chemistry of these elements and related fields.

Chemical Mechanical Planarization of Microelectronic Materials

Author : Joseph M. Steigerwald
Publisher : John Wiley & Sons
ISBN 13 : 3527617752
Total Pages : 337 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Chemical Mechanical Planarization of Microelectronic Materials by : Joseph M. Steigerwald

Download or read book Chemical Mechanical Planarization of Microelectronic Materials written by Joseph M. Steigerwald and published by John Wiley & Sons. This book was released on 2008-09-26 with total page 337 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical Mechanical Planarization (CMP) plays an important role in today's microelectronics industry. With its ability to achieve global planarization, its universality (material insensitivity), its applicability to multimaterial surfaces, and its relative cost-effectiveness, CMP is the ideal planarizing medium for the interlayered dielectrics and metal films used in silicon integrated circuit fabrication. But although the past decade has seen unprecedented research and development into CMP, there has been no single-source reference to this rapidly emerging technology-until now. Chemical Mechanical Planarization of Microelectronic Materials provides engineers and scientists working in the microelectronics industry with unified coverage of both the fundamental mechanisms and engineering applications of CMP. Authors Steigerwald, Murarka, and Gutmann-all leading CMP pioneers-provide a historical overview of CMP, explain the various chemical and mechanical concepts involved, describe CMP materials and processes, review the latest scientific data on CMP worldwide, and offer examples of its uses in the microelectronics industry. They provide detailed coverage of the CMP of various materials used in the making of microcircuitry: tungsten, aluminum, copper, polysilicon, and various dielectric materials, including polymers. The concluding chapter describes post-CMP cleaning techniques, and most chapters feature problem sets to assist readers in developing a more practical understanding of CMP. The only comprehensive reference to one of the fastest growing integrated circuit manufacturing technologies, Chemical Mechanical Planarization of Microelectronic Materials is an important resource for research scientists and engineers working in the microelectronics industry. An indispensable resource for scientists and engineers working in the microelectronics industry Chemical Mechanical Planarization of Microelectronic Materials is the only comprehensive single-source reference to one of the fastest growing integrated circuit manufacturing technologies. It provides engineers and scientists who work in the microelectronics industry with unified coverage of both the fundamental mechanisms and engineering applications of CMP, including: * The history of CMP * Chemical and mechanical underpinnings of CMP * CMP materials and processes * Applications of CMP in the microelectronics industry * The CMP of tungsten, aluminum, copper, polysilicon, and various dielectrics, including polymers used in integrated circuit fabrication * Post-CMP cleaning techniques * Chapter-end problem sets are also included to assist readers in developing a practical understanding of CMP.