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Author : Kevin M. Monahan
Publisher :
ISBN 13 :
Total Pages : 476 pages
Book Rating : 4.:/5 (318 download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control II written by Kevin M. Monahan and published by . This book was released on 1988 with total page 476 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 576 pages
Book Rating : 4.3/5 (91 download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control written by and published by . This book was released on 1994 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Michael T. Postek
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 716 pages
Book Rating : 4.0/5 ( download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control VI written by Michael T. Postek and published by SPIE-International Society for Optical Engineering. This book was released on 1992 with total page 716 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Kevin M. Monahan
Publisher :
ISBN 13 :
Total Pages : 556 pages
Book Rating : 4.:/5 (318 download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control III written by Kevin M. Monahan and published by . This book was released on 1989 with total page 556 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : William H. Arnold
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 648 pages
Book Rating : 4.:/5 (318 download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control V written by William H. Arnold and published by SPIE-International Society for Optical Engineering. This book was released on 1991 with total page 648 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Kevin M. Monahan
Publisher :
ISBN 13 :
Total Pages : 340 pages
Book Rating : 4.E/5 ( download)
Download or read book Integrated Circuit Metrology, Inspection, and Process Control written by Kevin M. Monahan and published by . This book was released on 1987 with total page 340 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Bruce W. Smith
Publisher : CRC Press
ISBN 13 : 1351643444
Total Pages : 913 pages
Book Rating : 4.3/5 (516 download)
Download or read book Microlithography written by Bruce W. Smith and published by CRC Press. This book was released on 2020-05-01 with total page 913 pages. Available in PDF, EPUB and Kindle. Book excerpt: The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithography. The book is divided into chapters covering all important aspects related to the imaging, materials, and processes that have been necessary to drive semiconductor lithography toward nanometer-scale generations. Renowned experts from the world’s leading academic and industrial organizations have provided in-depth coverage of the technologies involved in optical, deep-ultraviolet (DUV), immersion, multiple patterning, extreme ultraviolet (EUV), maskless, nanoimprint, and directed self-assembly lithography, together with comprehensive descriptions of the advanced materials and processes involved. New in the Third Edition In addition to the full revision of existing chapters, this new Third Edition features coverage of the technologies that have emerged over the past several years, including multiple patterning lithography, design for manufacturing, design process technology co-optimization, maskless lithography, and directed self-assembly. New advances in lithography modeling are covered as well as fully updated information detailing the new technologies, systems, materials, and processes for optical UV, DUV, immersion, and EUV lithography. The Third Edition of Microlithography: Science and Technology authoritatively covers the science and engineering involved in the latest generations of microlithography and looks ahead to the future systems and technologies that will bring the next generations to fruition. Loaded with illustrations, equations, tables, and time-saving references to the most current technology, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to better understand the complex world of microlithography science and technology.
Author : Kevin M. Monahan
Publisher : SPIE-International Society for Optical Engineering
ISBN 13 :
Total Pages : 376 pages
Book Rating : 4.:/5 (318 download)
Download or read book Handbook of Critical Dimension Metrology and Process Control written by Kevin M. Monahan and published by SPIE-International Society for Optical Engineering. This book was released on 1994 with total page 376 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Author : National Semiconductor Metrology Program (U.S.)
Publisher :
ISBN 13 :
Total Pages : 108 pages
Book Rating : 4.3/5 ( download)
Download or read book National Semiconductor Metrology Program written by National Semiconductor Metrology Program (U.S.) and published by . This book was released on 1996 with total page 108 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : National Institute of Standards and Technology (U.S.)
Publisher :
ISBN 13 :
Total Pages : 160 pages
Book Rating : 4.3/5 (91 download)
Download or read book National Semiconductor Metrology Program written by National Institute of Standards and Technology (U.S.) and published by . This book was released on 2000 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : W. Murray Bullis
Publisher :
ISBN 13 :
Total Pages : 716 pages
Book Rating : 4.:/5 (44 download)
Download or read book Proceedings of the Second Symposium on Defects in Silicon written by W. Murray Bullis and published by . This book was released on 1991 with total page 716 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 160 pages
Book Rating : 4.F/5 ( download)
Download or read book National Semiconductor Metrology Program, NIST List OF Publications, LP 103, May 2000 written by and published by . This book was released on 2000 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 148 pages
Book Rating : 4.F/5 ( download)
Download or read book National Semiconductor Metrology Program, Semiconductor Electronics Division, NIST List Of Publications, LP 103, March 1999 written by and published by . This book was released on 1999 with total page 148 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Ronald G. Driggers
Publisher : CRC Press
ISBN 13 : 9780824742515
Total Pages : 1130 pages
Book Rating : 4.7/5 (425 download)
Download or read book Encyclopedia of Optical Engineering: Las-Pho, pages 1025-2048 written by Ronald G. Driggers and published by CRC Press. This book was released on 2003 with total page 1130 pages. Available in PDF, EPUB and Kindle. Book excerpt: Compiled by 330 of the most widely respected names in the electro-optical sciences, the Encyclopedia is destined to serve as the premiere guide in the field with nearly 2000 figures, 560 photographs, 260 tables, and 3800 equations. From astronomy to x-ray optics, this reference contains more than 230 vivid entries examining the most intriguing technological advances and perspectives from distinguished professionals around the globe. The contributors have selected topics of utmost importance in areas including digital image enhancement, biological modeling, biomedical spectroscopy, and ocean optics, providing thorough coverage of recent applications in this continually expanding field.
Author : P. Rai-Choudhury
Publisher : The Electrochemical Society
ISBN 13 : 9781566771399
Total Pages : 496 pages
Book Rating : 4.7/5 (713 download)
Download or read book Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices written by P. Rai-Choudhury and published by The Electrochemical Society. This book was released on 1997 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Gordon S. Kino
Publisher : Academic Press
ISBN 13 : 008052978X
Total Pages : 353 pages
Book Rating : 4.0/5 (85 download)
Download or read book Confocal Scanning Optical Microscopy and Related Imaging Systems written by Gordon S. Kino and published by Academic Press. This book was released on 1996-09-18 with total page 353 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers. The book concentrates mainly on two instruments: the Confocal Scanning Optical Microscope (CSOM), and the Optical Interference Microscope (OIM). A comprehensive discussion of the theory and design of the Near-Field Scanning Optical Microscope (NSOM) is also given. The text discusses the practical aspects of building a confocal scanning optical microscope or optical interference microscope, and the applications of these microscopes to phase imaging, biological imaging, and semiconductor inspection and metrology.A comprehensive theoretical discussion of the depth and transverse resolution is given with emphasis placed on the practical results of the theoretical calculations and how these can be used to help understand the operation of these microscopes. - Provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers - Explains many practical applications of scanning optical and interference microscopy in such diverse fields as biology and semiconductor metrology - Discusses in theoretical terms the origin of the improved depth and transverse resolution of scanning optical and interference microscopes with emphasis on the practical results of the theoretical calculations - Considers the practical aspects of building a confocal scanning or interference microscope and explores some of the design tradeoffs made for microscopes used in various applications - Discusses the theory and design of near-field optical microscopes - Explains phase imaging in the scanning optical and interference microscopes
Author :
Publisher :
ISBN 13 :
Total Pages : 388 pages
Book Rating : 4.0/5 ( download)
Download or read book Journal of Research of the National Institute of Standards and Technology written by and published by . This book was released on 1993 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt:
