Handbook Of Chemicals And Gases For The Semiconductor Industry

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Handbook of Chemicals and Gases for the Semiconductor Industry

Author : Ashutosh Misra
Publisher : John Wiley & Sons
ISBN 13 : 0471316717
Total Pages : 386 pages
Book Rating : 4.4/5 (713 download)

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Book Synopsis Handbook of Chemicals and Gases for the Semiconductor Industry by : Ashutosh Misra

Download or read book Handbook of Chemicals and Gases for the Semiconductor Industry written by Ashutosh Misra and published by John Wiley & Sons. This book was released on 2002-03-22 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need. Each of the Handbook's eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the process, followed by tables containing physical properties, handling, safety, and other pertinent information on chemicals and gases typically used in these processes. The 270 chemical and gas entries include data on physical properties, emergency treatment procedures, waste disposal, and incompatible materials, as well as descriptions of applications, chemical mechanisms involved, and references to the literature. Appendices cross-reference entries by process, chemical name, and CAS number. The Handbook's eight chapters are: Thin Film Deposition Materials Wafer Cleaning Materials Photolithography Materials Wet and Dry Etching Materials Chemical Mechanical Planarizing Methods Carrier Gases Uncategorized Materials Semiconductor Chemicals Analysis No other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The Handbook of Chemicals and Gases for the Semiconductor Industry will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.

Handbook of Chemicals and Gases for the Semiconductor Industry

Author :
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (11 download)

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Book Synopsis Handbook of Chemicals and Gases for the Semiconductor Industry by :

Download or read book Handbook of Chemicals and Gases for the Semiconductor Industry written by and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Semiconductor Manufacturing Handbook

Author : Hwaiyu Geng
Publisher : McGraw Hill Professional
ISBN 13 : 0071445595
Total Pages : 915 pages
Book Rating : 4.0/5 (714 download)

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Book Synopsis Semiconductor Manufacturing Handbook by : Hwaiyu Geng

Download or read book Semiconductor Manufacturing Handbook written by Hwaiyu Geng and published by McGraw Hill Professional. This book was released on 2005-05-18 with total page 915 pages. Available in PDF, EPUB and Kindle. Book excerpt: WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including: Yield Management Automated Material Handling System Fab and Cleanroom Design and Operation Gas Abatement and Waste Treatment Management And much more Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field. STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES: SEMICONDUCTOR FUNDAMENTALS How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask WAFER PROCESSING TECHNOLOGIES Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning FINAL MANUFACTURING Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water FAB YIELD, OPERATIONS, AND FACILITIES Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems

Semiconductor Manufacturing Handbook, Second Edition

Author : Hwaiyu Geng
Publisher : McGraw Hill Professional
ISBN 13 : 1259583120
Total Pages : 704 pages
Book Rating : 4.2/5 (595 download)

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Book Synopsis Semiconductor Manufacturing Handbook, Second Edition by : Hwaiyu Geng

Download or read book Semiconductor Manufacturing Handbook, Second Edition written by Hwaiyu Geng and published by McGraw Hill Professional. This book was released on 2017-10-06 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thoroughly Revised, State-of-the-Art Semiconductor Design, Manufacturing, and Operations Information Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, covers the emerging technologies that enable the Internet of Things, the Industrial Internet of Things, data analytics, artificial intelligence, augmented reality, and and smart manufacturing. You will get complete details on semiconductor fundamentals, front- and back-end processes, nanotechnology, photovoltaics, gases and chemicals, fab yield, and operations and facilities. •Nanotechnology and microsystems manufacturing •FinFET and nanoscale silicide formation •Physical design for high-performance, low-power 3D circuits •Epitaxi, anneals, RTP, and oxidation •Microlithography, etching, and ion implantations •Physical, chemical, electrochemical, and atomic layer vapor deposition •Chemical mechanical planarization •Atomic force metrology •Packaging, bonding, and interconnects •Flexible hybrid electronics •Flat-panel,flexible display electronics, and photovoltaics •Gas distribution systems •Ultrapure water and filtration •Process chemicals handling and abatement •Chemical and slurry handling systems •Yield management, CIM, and factory automation •Manufacturing execution systems •Advanced process control •Airborne molecular contamination •ESD controls in clean-room environments •Vacuum systems and RF plasma systems •IC manufacturing parts cleaning technology •Vibration and noise design •And much more

Semiconductor Safety Handbook

Author : Richard A. Bolmen
Publisher : William Andrew
ISBN 13 : 0815518994
Total Pages : 635 pages
Book Rating : 4.8/5 (155 download)

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Book Synopsis Semiconductor Safety Handbook by : Richard A. Bolmen

Download or read book Semiconductor Safety Handbook written by Richard A. Bolmen and published by William Andrew. This book was released on 1998-12-31 with total page 635 pages. Available in PDF, EPUB and Kindle. Book excerpt: Interwoven within our semiconductor technology development had been the development of technologies aimed at identifying, evaluating and mitigating the environmental, health and safety (EH&S) risks and exposures associated with the manufacturing and packaging of integrated circuits. Driving and advancing these technologies have been international efforts by SEMI's Safety Division, the Semiconductor Safety Association (SSA), and the Semiconductor Industry Association (SIA). The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH&S technologies and disciplines. To this end, the contributors have assembled a comprehensive text written by some of the leading experts in EH&S in the semiconductor industry. This text had taken three years to complete and has involved tremendous effort and commitment by the authors.They have attempted to construct a reference manual that is comprehensive in its coverage of the technical aspects of each individual subject, while at the same time addressing practical applications of each topic. The scope of this text, from its inception, was intended to address significantly more than what would typically be classified under the definition of ""safety."" However, all of the chapters have a direct application to the protection and preservation of semiconductor employees, the surrounding communities and the environment.This book is a hands-on reference to environmental, health and safety issues critical to the semiconductor industry. It was also the author's intent to produce a text that provides a practical user's guide for semiconductor environmental, health and safety practitioners as well as those individuals responsible for operation, maintenance and production in wafer fabrication facilities.

Handbook of Semiconductor Manufacturing Technology

Author : Yoshio Nishi
Publisher : CRC Press
ISBN 13 : 1351829823
Total Pages : 3276 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis Handbook of Semiconductor Manufacturing Technology by : Yoshio Nishi

Download or read book Handbook of Semiconductor Manufacturing Technology written by Yoshio Nishi and published by CRC Press. This book was released on 2017-12-19 with total page 3276 pages. Available in PDF, EPUB and Kindle. Book excerpt: Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

Semiconductor Safety Handbook

Author : Richard A. Bolmen
Publisher : William Andrew
ISBN 13 :
Total Pages : 646 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Semiconductor Safety Handbook by : Richard A. Bolmen

Download or read book Semiconductor Safety Handbook written by Richard A. Bolmen and published by William Andrew. This book was released on 1998-12-31 with total page 646 pages. Available in PDF, EPUB and Kindle. Book excerpt: It should also be of interest to semiconductor health and safety consultants, insurance companies and insurance brokers specializing in high technology risks.

Semiconductor Manufacturing Handbook, Second Edition

Author : Hwaiyu Geng
Publisher : McGraw-Hill Education
ISBN 13 : 9781259587696
Total Pages : 0 pages
Book Rating : 4.5/5 (876 download)

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Book Synopsis Semiconductor Manufacturing Handbook, Second Edition by : Hwaiyu Geng

Download or read book Semiconductor Manufacturing Handbook, Second Edition written by Hwaiyu Geng and published by McGraw-Hill Education. This book was released on 2017-09-20 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product. Thoroughly Revised, State-of-the-Art Semiconductor Design, Manufacturing, and Operations Information Written by 70 international experts and reviewed by a seasoned technical advisory board, this fully updated resource clearly explains the cutting-edge processes used in the design and fabrication of IC chips, MEMS, sensors, and other electronic devices. Semiconductor Manufacturing Handbook, Second Edition, covers the emerging technologies that enable the Internet of Things, the Industrial Internet of Things, data analytics, artificial intelligence, augmented reality, and and smart manufacturing. You will get complete details on semiconductor fundamentals, front- and back-end processes, nanotechnology, photovoltaics, gases and chemicals, fab yield, and operations and facilities. •Nanotechnology and microsystems manufacturing •FinFET and nanoscale silicide formation •Physical design for high-performance, low-power 3D circuits •Epitaxi, anneals, RTP, and oxidation •Microlithography, etching, and ion implantations •Physical, chemical, electrochemical, and atomic layer vapor deposition •Chemical mechanical planarization •Atomic force metrology •Packaging, bonding, and interconnects •Flexible hybrid electronics •Flat-panel,flexible display electronics, and photovoltaics •Gas distribution systems •Ultrapure water and filtration •Process chemicals handling and abatement •Chemical and slurry handling systems •Yield management, CIM, and factory automation •Manufacturing execution systems •Advanced process control •Airborne molecular contamination •ESD controls in clean-room environments •Vacuum systems and RF plasma systems •IC manufacturing parts cleaning technology •Vibration and noise design •And much more

Chemistry of the Semiconductor Industry

Author : S.J. Moss
Publisher : Springer Science & Business Media
ISBN 13 : 9780216920057
Total Pages : 456 pages
Book Rating : 4.9/5 (2 download)

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Book Synopsis Chemistry of the Semiconductor Industry by : S.J. Moss

Download or read book Chemistry of the Semiconductor Industry written by S.J. Moss and published by Springer Science & Business Media. This book was released on 1989-02-28 with total page 456 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some interesting processes which are currently being developed and hold future promise. Each chapter covers the current state of knowledge of the underlying chemistry of a particular process, and identifies areas of uncertainty requiring further research.

Chemical Safety Handbook

Author : David G. Baldwin
Publisher : OEM Health Information, Incorporated
ISBN 13 : 9781883595623
Total Pages : 0 pages
Book Rating : 4.5/5 (956 download)

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Book Synopsis Chemical Safety Handbook by : David G. Baldwin

Download or read book Chemical Safety Handbook written by David G. Baldwin and published by OEM Health Information, Incorporated. This book was released on 2015 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Semiconductor Technology, Volume 2

Author : Kenneth A. Jackson
Publisher : Wiley-VCH
ISBN 13 :
Total Pages : 724 pages
Book Rating : 4.:/5 (318 download)

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Book Synopsis Handbook of Semiconductor Technology, Volume 2 by : Kenneth A. Jackson

Download or read book Handbook of Semiconductor Technology, Volume 2 written by Kenneth A. Jackson and published by Wiley-VCH. This book was released on 2000-08-15 with total page 724 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductor technology is the basis of today's microelectronics industry with its many impacts on our modern life, i.e. computer and communication technology. This two-volume handbook covers the basics of semiconductor processing technology, which are as essential for the design of new microelectronic devices as the fundamental physics. Volume 1 'Electronic Structure and Properties' covers the structure and properties of semiconductors, with particular emphasis on concepts relevant to semiconductor technology. Volume 2 'Processing of Semiconductors' deals with the enabling materials technology for the electronics industry. World-renowned authors have contributed to this unique treatment of the processing of semiconductors and related technologies. Of interest to physicists and engineers in research and in the electronics industry, this is a valuable reference source and state-of-the-art review by the world's top authors.

Chemical Safety Handbook

Author : David G. Baldwin
Publisher : OEM Health Information, Incorporated
ISBN 13 : 9781883595074
Total Pages : 438 pages
Book Rating : 4.5/5 (95 download)

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Book Synopsis Chemical Safety Handbook by : David G. Baldwin

Download or read book Chemical Safety Handbook written by David G. Baldwin and published by OEM Health Information, Incorporated. This book was released on 1996-01-01 with total page 438 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Semiconductor Manufacturing Technology

Author : Chue San Yoo
Publisher : World Scientific
ISBN 13 : 9812568239
Total Pages : 483 pages
Book Rating : 4.8/5 (125 download)

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Book Synopsis Semiconductor Manufacturing Technology by : Chue San Yoo

Download or read book Semiconductor Manufacturing Technology written by Chue San Yoo and published by World Scientific. This book was released on 2008 with total page 483 pages. Available in PDF, EPUB and Kindle. Book excerpt: This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.

Materials Chemistry

Author : Bradley D. Fahlman
Publisher : Springer
ISBN 13 : 9402412557
Total Pages : 815 pages
Book Rating : 4.4/5 (24 download)

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Book Synopsis Materials Chemistry by : Bradley D. Fahlman

Download or read book Materials Chemistry written by Bradley D. Fahlman and published by Springer. This book was released on 2018-08-28 with total page 815 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 3rd edition of this successful textbook continues to build on the strengths that were recognized by a 2008 Textbook Excellence Award from the Text and Academic Authors Association (TAA). Materials Chemistry addresses inorganic-, organic-, and nano-based materials from a structure vs. property treatment, providing a suitable breadth and depth coverage of the rapidly evolving materials field — in a concise format. The 3rd edition offers significant updates throughout, with expanded sections on sustainability, energy storage, metal-organic frameworks, solid electrolytes, solvothermal/microwave syntheses, integrated circuits, and nanotoxicity. Most appropriate for Junior/Senior undergraduate students, as well as first-year graduate students in chemistry, physics, or engineering fields, Materials Chemistry may also serve as a valuable reference to industrial researchers. Each chapter concludes with a section that describes important materials applications, and an updated list of thought-provoking questions.

Handbook of Integrated Circuit Industry

Author : Yangyuan Wang
Publisher : Springer Nature
ISBN 13 : 9819928362
Total Pages : 2006 pages
Book Rating : 4.8/5 (199 download)

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Book Synopsis Handbook of Integrated Circuit Industry by : Yangyuan Wang

Download or read book Handbook of Integrated Circuit Industry written by Yangyuan Wang and published by Springer Nature. This book was released on 2023-12-29 with total page 2006 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by hundreds experts who have made contributions to both enterprise and academics research, these excellent reference books provide all necessary knowledge of the whole industrial chain of integrated circuits, and cover topics related to the technology evolution trends, fabrication, applications, new materials, equipment, economy, investment, and industrial developments of integrated circuits. Especially, the coverage is broad in scope and deep enough for all kind of readers being interested in integrated circuit industry. Remarkable data collection, update marketing evaluation, enough working knowledge of integrated circuit fabrication, clear and accessible category of integrated circuit products, and good equipment insight explanation, etc. can make general readers build up a clear overview about the whole integrated circuit industry. This encyclopedia is designed as a reference book for scientists and engineers actively involved in integrated circuit research and development field. In addition, this book provides enough guide lines and knowledges to benefit enterprisers being interested in integrated circuit industry.

Introduction to Microfabrication

Author : Sami Franssila
Publisher : John Wiley & Sons
ISBN 13 : 0470020563
Total Pages : 424 pages
Book Rating : 4.4/5 (7 download)

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Book Synopsis Introduction to Microfabrication by : Sami Franssila

Download or read book Introduction to Microfabrication written by Sami Franssila and published by John Wiley & Sons. This book was released on 2005-01-28 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.

Handbook of Semiconductor Interconnection Technology

Author : Geraldine Cogin Shwartz
Publisher : CRC Press
ISBN 13 : 9780849384660
Total Pages : 598 pages
Book Rating : 4.3/5 (846 download)

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Book Synopsis Handbook of Semiconductor Interconnection Technology by : Geraldine Cogin Shwartz

Download or read book Handbook of Semiconductor Interconnection Technology written by Geraldine Cogin Shwartz and published by CRC Press. This book was released on 1997-11-24 with total page 598 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covering materials, processes, equipment, methodologies, characterization techniques, clean room practices, and ways to control contamination-related defects, this work offers up-to-date information on the application of interconnection technology to semiconductors. It offers an integration of technical, patent and industry literature.