EUV Sources for Lithography

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Publisher : SPIE Press
ISBN 13 : 9780819458452
Total Pages : 1104 pages
Book Rating : 4.4/5 (584 download)

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Book Synopsis EUV Sources for Lithography by : Vivek Bakshi

Download or read book EUV Sources for Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2006 with total page 1104 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.

Modern Methods in Collisional-Radiative Modeling of Plasmas

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Author :
Publisher : Springer
ISBN 13 : 3319275143
Total Pages : 220 pages
Book Rating : 4.3/5 (192 download)

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Book Synopsis Modern Methods in Collisional-Radiative Modeling of Plasmas by : Yuri Ralchenko

Download or read book Modern Methods in Collisional-Radiative Modeling of Plasmas written by Yuri Ralchenko and published by Springer. This book was released on 2016-02-25 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a compact yet comprehensive overview of recent developments in collisional-radiative (CR) modeling of laboratory and astrophysical plasmas. It describes advances across the entire field, from basic considerations of model completeness to validation and verification of CR models to calculation of plasma kinetic characteristics and spectra in diverse plasmas. Various approaches to CR modeling are presented, together with numerous examples of applications. A number of important topics, such as atomic models for CR modeling, atomic data and its availability and quality, radiation transport, non-Maxwellian effects on plasma emission, ionization potential lowering, and verification and validation of CR models, are thoroughly addressed. Strong emphasis is placed on the most recent developments in the field, such as XFEL spectroscopy. Written by leading international research scientists from a number of key laboratories, the book offers a timely summary of the most recent progress in this area. It will be a useful and practical guide for students and experienced researchers working in plasma spectroscopy, spectra simulations, and related fields.

The Physics of Inertial Fusion

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Publisher : OUP Oxford
ISBN 13 : 9780191524059
Total Pages : 488 pages
Book Rating : 4.5/5 (24 download)

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Book Synopsis The Physics of Inertial Fusion by : Stefano Atzeni

Download or read book The Physics of Inertial Fusion written by Stefano Atzeni and published by OUP Oxford. This book was released on 2004-06-03 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is on inertial confinement fusion, an alternative way to produce electrical power from hydrogen fuel by using powerful lasers or particle beams. It involves the compression of tiny amounts (micrograms) of fuel to thousand times solid density and pressures otherwise existing only in the centre of stars. Thanks to advances in laser technology, it is now possible to produce such extreme states of matter in the laboratory. Recent developments have boosted laser intensities again with new possibilities for laser particle accelerators, laser nuclear physics, and fast ignition of fusion targets. This is a reference book for those working on beam plasma physics, be it in the context of fundamental research or applications to fusion energy or novel ultra-bright laser sources. The book combines quite different areas of physics: beam target interaction, dense plasmas, hydrodynamic implosion and instabilities, radiative energy transfer as well as fusion reactions. Particular attention is given to simple and useful modelling, including dimensional analysis and similarity solutions. Both authors have worked in this field for more than 20 years. They want to address in particular those teaching this topic to students and all those interested in understanding the technical basis.

High Energy and Short Pulse Lasers

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Author :
Publisher : BoD – Books on Demand
ISBN 13 : 9535126067
Total Pages : 426 pages
Book Rating : 4.5/5 (351 download)

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Book Synopsis High Energy and Short Pulse Lasers by : Richard Viskup

Download or read book High Energy and Short Pulse Lasers written by Richard Viskup and published by BoD – Books on Demand. This book was released on 2016-09-07 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gives the readers an introduction to experimental and theoretical knowledge acquired by large-scale laser laboratories that are dealing with extra-high peak power and ultrashort laser pulses for research of terawatt (TW), petawatt (PW), or near-future exawatt (EW) laser interactions, for soft X-ray sources, for acceleration of particles, or for generation of hot dense thermal plasma for the laser fusion. The other part of this book is dealing with the small-scale laser laboratories that are using for its research on commercial sources of laser radiation, nanosecond (ns), picosecond (ps), or femtosecond (fs) laser pulses, either for basic research or for more advanced applications. This book is divided into six main sections dealing with short and ultrashort laser pulses, laser-produced soft X-ray sources, large-scale high-power laser systems, free-electron lasers, fiber-based sources of short optical pulse, and applications of short pulse lasers. In each chapter readers can find fascinating topics related to the high energy and/or short pulse laser technique. Individual chapters should serve the broad spectrum of readers of different expertise, layman, undergraduate and postgraduate students, scientists, and engineers, who may in this book find easily explained fundamentals as well as advanced principles of particular subjects related to these phenomena.

Atomic Properties in Hot Plasmas

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Author :
Publisher : Springer
ISBN 13 : 3319181475
Total Pages : 386 pages
Book Rating : 4.3/5 (191 download)

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Book Synopsis Atomic Properties in Hot Plasmas by : Jacques Bauche

Download or read book Atomic Properties in Hot Plasmas written by Jacques Bauche and published by Springer. This book was released on 2015-08-03 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is devoted to the calculation of hot-plasma properties which generally requires a huge number of atomic data. It is the first book that combines information on the details of the basic atomic physics and its application to atomic spectroscopy with the use of the relevant statistical approaches. Information like energy levels, radiative rates, collisional and radiative cross-sections, etc., must be included in equilibrium or non-equilibrium models in order to describe both the atomic-population kinetics and the radiative properties. From the very large number of levels and transitions involved in complex ions, some statistical (global) properties emerge. The book presents a coherent set of concepts and compact formulas suitable for tractable and accurate calculations. The topics addressed are: radiative emission and absorption, and a dozen of other collisional and radiative processes; transition arrays between level ensembles (configurations, superconfigurations); effective temperatures of configurations, superconfigurations, and ions; charge-state distributions; radiative power losses and opacity. There are many numerical examples and comparisons with experiment presented throughout the book. The plasma properties described in this book are especially relevant to large nuclear fusion facilities such as the NIF (California) and the ITER (France), and to astrophysics. Methods relevant to the central-field configurational model are described in detail in the appendices: tensor-operator techniques, second-quantization formalism, statistical distribution moments, and the algebra of partition functions. Some extra tools are propensity laws, correlations, and fractals. These methods are applied to the analytical derivation of many properties, specially the global ones, through which the complexity is much reduced. The book is intended for graduate-level students, and for physicists working in the field.

Materials and Processes for Next Generation Lithography

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Author :
Publisher : Elsevier
ISBN 13 : 0081003587
Total Pages : 636 pages
Book Rating : 4.0/5 (81 download)

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Book Synopsis Materials and Processes for Next Generation Lithography by :

Download or read book Materials and Processes for Next Generation Lithography written by and published by Elsevier. This book was released on 2016-11-08 with total page 636 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. - Assembles up-to-date information from the world's premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation - Includes information on processing and metrology techniques - Brings together multiple approaches to litho pattern recording from academia and industry in one place

The Theory of Atomic Structure and Spectra

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Publisher : Univ of California Press
ISBN 13 : 0520906152
Total Pages : 752 pages
Book Rating : 4.5/5 (29 download)

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Book Synopsis The Theory of Atomic Structure and Spectra by : Robert D. Cowan

Download or read book The Theory of Atomic Structure and Spectra written by Robert D. Cowan and published by Univ of California Press. This book was released on 2023-11-15 with total page 752 pages. Available in PDF, EPUB and Kindle. Book excerpt: Both the interpretation of atomic spectra and the application of atomic spectroscopy to current problems in astrophysics, laser physics, and thermonuclear plasmas require a thorough knowledge of the Slater-Condon theory of atomic structure and spectra. This book gathers together aspects of the theory that are widely scattered in the literature and augments them to produce a coherent set of closed-form equations suitable both for computer calculations on cases of arbitrary complexity and for hand calculations for very simple cases.

Surface and Thin Film Analysis

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Author :
Publisher : Wiley-VCH
ISBN 13 : 9783527320479
Total Pages : 0 pages
Book Rating : 4.3/5 (24 download)

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Book Synopsis Surface and Thin Film Analysis by : Gernot Friedbacher

Download or read book Surface and Thin Film Analysis written by Gernot Friedbacher and published by Wiley-VCH. This book was released on 2011-06-07 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surveying and comparing all techniques relevant for practical applications in surface and thin film analysis, this second edition of a bestseller is a vital guide to this hot topic in nano- and surface technology. This new book has been revised and updated and is divided into four parts - electron, ion, and photon detection, as well as scanning probe microscopy. New chapters have been added to cover such techniques as SNOM, FIM, atom probe (AP),and sum frequency generation (SFG). Appendices with a summary and comparison of techniques and a list of equipment suppliers make this book a rapid reference for materials scientists, analytical chemists, and those working in the biotechnological industry. From a Review of the First Edition (edited by Bubert and Jenett) "... a useful resource..." (Journal of the American Chemical Society)

Plasma Spectroscopy

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Publisher : Clarendon Press
ISBN 13 : 0191523895
Total Pages : 300 pages
Book Rating : 4.1/5 (915 download)

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Book Synopsis Plasma Spectroscopy by : Takashi Fujimoto

Download or read book Plasma Spectroscopy written by Takashi Fujimoto and published by Clarendon Press. This book was released on 2004-06-17 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book focuses on the characteristics of optical radiation, or a spectrum, emitted by various plasmas. In plasma, the same atomic species can produce quite different spectra, or colours, depending on the nature of the plasma. This book gives a theoretical framework by which a particular spectrum can be interpreted correctly and coherently. The uniqueness of the book lies in its comprehensive treatment of the intensity distribution of spectral lines and the population density distribution among the atomic levels in plasmas. It is intended to provide beginners with a good perspective of the field, laying out the physics in an extremely clear manner and starting from an elementary level. A useful feature of the book is the asterisked sections and chapters which can be skipped by readers who only wish to gain a quick and basic introduction to plasma spectroscopy. It will also be useful to researchers working actively in the field, acting as a guide for carrying out experiments and interpreting experimental observations.

Optical Measurements for Scientists and Engineers

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Publisher : Cambridge University Press
ISBN 13 : 1107173019
Total Pages : 321 pages
Book Rating : 4.1/5 (71 download)

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Book Synopsis Optical Measurements for Scientists and Engineers by : Arthur McClelland

Download or read book Optical Measurements for Scientists and Engineers written by Arthur McClelland and published by Cambridge University Press. This book was released on 2018-04-19 with total page 321 pages. Available in PDF, EPUB and Kindle. Book excerpt: An accessible, introductory text explaining how to select, set up and use optical spectroscopy and optical microscopy techniques.

Laser Precision Microfabrication

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Publisher : Springer
ISBN 13 : 3642105238
Total Pages : 353 pages
Book Rating : 4.6/5 (421 download)

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Book Synopsis Laser Precision Microfabrication by : Koji Sugioka

Download or read book Laser Precision Microfabrication written by Koji Sugioka and published by Springer. This book was released on 2010-08-13 with total page 353 pages. Available in PDF, EPUB and Kindle. Book excerpt: Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapters covers all the topics of laser precision processing from fundamental aspects to industrial applications to both inorganic and biological materials. It reviews the sate of the art of research and technological development in the area of laser processing.

Pulsed Laser Ablation of Solids

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Publisher : Springer Science & Business Media
ISBN 13 : 3642409784
Total Pages : 241 pages
Book Rating : 4.6/5 (424 download)

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Book Synopsis Pulsed Laser Ablation of Solids by : Mihai Stafe

Download or read book Pulsed Laser Ablation of Solids written by Mihai Stafe and published by Springer Science & Business Media. This book was released on 2013-11-09 with total page 241 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book introduces ‘the state of the art' of pulsed laser ablation and its applications. It is based on recent theoretical and experimental studies. The book reaches from the basics to advanced topics of pulsed laser ablation. Theoretical and experimental fundamental phenomena involved in pulsed laser ablation are discussed with respect to material properties, laser wavelength, fluence and intensity regime of the light absorbed linearly or non-linearly in the target material. The energy absorbed by the electrons leads to atom/molecule excitation, ionization and/or direct chemical bond breaking and is also transferred to the lattice leading to material heating and phase transitions. Experimental non-invasive optical methods for analyzing these phenomena in real time are described. Theoretical models for pulsed laser ablation and phase transitions induced by laser beams and laser-vapour/plasma interaction during the plume expansion above the target are also presented. Calculations of the ablation speed and dimensions of the ablated micro- and nano-structures are performed. The validity and required refinement of different models in different experimental conditions is provided. The pulsed laser deposition process which bases on collecting the ablated particles on a surface is analyzed in terms of efficiency and quality of the deposited films as a function of ambient conditions, target material, laser parameters and substrate characteristics. The interaction between the incident laser and the ablation plasma is analyzed with respect to its influence on the structures of the deposited films and its capacity to generate high harmonics and single attosecond pulses which are highly desirable in pump-probe experiments.

National Semiconductor Metrology Program

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Publisher :
ISBN 13 :
Total Pages : 146 pages
Book Rating : 4.:/5 (7 download)

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Book Synopsis National Semiconductor Metrology Program by : National Institute of Standards and Technology (U.S.)

Download or read book National Semiconductor Metrology Program written by National Institute of Standards and Technology (U.S.) and published by . This book was released on 1995 with total page 146 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Lithography Process Control

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Publisher : SPIE Press
ISBN 13 : 9780819430526
Total Pages : 210 pages
Book Rating : 4.4/5 (35 download)

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Book Synopsis Lithography Process Control by : Harry J. Levinson

Download or read book Lithography Process Control written by Harry J. Levinson and published by SPIE Press. This book was released on 1999 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback. In addition, it presents control methodologies that may be applied to process development pilot lines.

Metal Nanoparticles and Clusters

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Publisher : Springer
ISBN 13 : 3319680536
Total Pages : 431 pages
Book Rating : 4.3/5 (196 download)

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Book Synopsis Metal Nanoparticles and Clusters by : Francis Leonard Deepak

Download or read book Metal Nanoparticles and Clusters written by Francis Leonard Deepak and published by Springer. This book was released on 2017-11-17 with total page 431 pages. Available in PDF, EPUB and Kindle. Book excerpt: ​This book covers the continually expanding field of metal nanoparticles and clusters, in particular their size-dependent properties and quantum phenomena. The approaches to the organization of atoms that form clusters and nanoparticles have been advancing rapidly in recent times. These advancements are described through a combination of experimental and computational approaches and are covered in detail by the authors. Recent highlights of the various emerging properties and applications ranging from plasmonics to catalysis are showcased.

Analytical Heat Diffusion Theory

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Publisher : Academic Press
ISBN 13 :
Total Pages : 700 pages
Book Rating : 4.:/5 (319 download)

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Book Synopsis Analytical Heat Diffusion Theory by : Alekseĭ Vasilʹevich Lykov

Download or read book Analytical Heat Diffusion Theory written by Alekseĭ Vasilʹevich Lykov and published by Academic Press. This book was released on 1968-01-28 with total page 700 pages. Available in PDF, EPUB and Kindle. Book excerpt: Analytical Heat Diffusion Theory is a revised edition of an earlier book by Academician Luikov, which was widely used throughout the Soviet Union and the surrounding socialist countries. This book is divided into 15 chapters that treat heat conduction problems by the classical methods and emphasize the advantages of the transform method, particularly in obtaining short time solutions of many transient problems. This book starts with a discussion on the physical fundamentals, generalized variables, and solution of boundary value problems of heat transfer. Considerable chapters are devoted to the basic classical heat transfer problems and problems in which the body surface temperature is a specified function of time. Other chapters explore the heat transfer problems under different heat sources, including continuous and pulse-type. The discussion then shifts to the problem of freezing wet ground, two-dimensional temperature field, and heat conduction with variable transfer coefficients. The final chapters deal with the fundamentals of the integral transforms and their application to heat conduction problems. These chapters also look into the application of the theory of analytic functions to the heat conduction theory of mathematical physics. This book is an invaluable source for advanced undergraduate or graduate in analytical heat transfer.

The British Chess Magazine; Volume 16

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Publisher : Legare Street Press
ISBN 13 : 9781016407649
Total Pages : 0 pages
Book Rating : 4.4/5 (76 download)

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Book Synopsis The British Chess Magazine; Volume 16 by : Anonymous

Download or read book The British Chess Magazine; Volume 16 written by Anonymous and published by Legare Street Press. This book was released on 2022-10-27 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work has been selected by scholars as being culturally important, and is part of the knowledge base of civilization as we know it. This work is in the "public domain in the United States of America, and possibly other nations. Within the United States, you may freely copy and distribute this work, as no entity (individual or corporate) has a copyright on the body of the work. Scholars believe, and we concur, that this work is important enough to be preserved, reproduced, and made generally available to the public. We appreciate your support of the preservation process, and thank you for being an important part of keeping this knowledge alive and relevant.