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Chemical Mechanical Polishing 2000 Fundamentals And Materials Issues Volume 613
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Book Synopsis Chemical-Mechanical Polishing 2000 - Fundamentals and Materials Issues: by : Rajiv K. Singh
Download or read book Chemical-Mechanical Polishing 2000 - Fundamentals and Materials Issues: written by Rajiv K. Singh and published by Cambridge University Press. This book was released on 2014-06-05 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical-mechanical polishing (CMP) is a critical technology in the planarization of multilevel metallization systems and shallow-trench isolation in semiconductor manufacturing. Other emerging applications for this technology include flat-panel displays, magnetic data storage and microelectromechanical systems. The rapid emergence of copper as the conducting material for integrated circuits has further pushed CMP technology to the forefront of semiconductor manufacturing. However, a basic understanding of the CMP process, which is necessary to enable further advances, is inadequate. This book, first published in 2001, provides an insight into the fundamental processes in CMP. Presentations from academia, government institutions and industry are featured. Topics include: CMP mechanisms; dielectric and metal CMP; process integration and manufacturability; and CMP consumables.
Book Synopsis Chemical-Mechanical Polishing - Fundamentals and Challenges: Volume 566 by : S. V. Babu
Download or read book Chemical-Mechanical Polishing - Fundamentals and Challenges: Volume 566 written by S. V. Babu and published by . This book was released on 2000-02-10 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Chemical-mechanical Polishing written by and published by . This book was released on 2000 with total page 184 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Polycrystalline Metal and Magnetic Thin Films 2000: Volume 615 by : Bruce M. Clemens
Download or read book Polycrystalline Metal and Magnetic Thin Films 2000: Volume 615 written by Bruce M. Clemens and published by . This book was released on 2001-04-09 with total page 218 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Book Synopsis Solid Freeform and Additive Fabrication - 2000: Volume 625 by : Stephen C. Danforth
Download or read book Solid Freeform and Additive Fabrication - 2000: Volume 625 written by Stephen C. Danforth and published by Mrs Proceedings. This book was released on 2000-10-02 with total page 240 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Book Synopsis Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics by :
Download or read book Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics written by and published by . This book was released on 2001 with total page 624 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Solid-State Chemistry of Inorganic Materials III: Volume 658 by : Margret J. Geselbracht
Download or read book Solid-State Chemistry of Inorganic Materials III: Volume 658 written by Margret J. Geselbracht and published by . This book was released on 2001-11-07 with total page 556 pages. Available in PDF, EPUB and Kindle. Book excerpt: Solid-state chemistry is an interdisciplinary field, and these researchers share the common challenge of understanding, controlling, and predicting the structures and properties of solids at the atomic level. This book provides a forum for the presentation of recent advances in the solid-state chemistry of inorganic materials and the impact of these advances on the development of practical applications. Topics include: crystal chemistry of complex systems; dielectrics, crystal chemistry, glasses and electrical transport; transport properties/metal-insulator systems; magnetism and manganates; new materials - meso/nanoporous materials; micro/meso/ nanoporous materials - inorganic/organic hybrids; synthesis, new methods and new materials; solid-state ionics, battery materials, thermopower and optical materials; solid-state ionics, battery materials and energy storage; and thermopower, themal expansion and optical materials. A highlight is a section dedicated to Professor J.M. Honig in recognition of his many contributions to the discipline of solid-state chemistry and his stewardship of the Journal of Solid-State Chemistry.
Book Synopsis Fundamentals of Nanoindentation and Nanotribology II by : Shefford P. Baker
Download or read book Fundamentals of Nanoindentation and Nanotribology II written by Shefford P. Baker and published by . This book was released on 2001 with total page 342 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis The Granular State: Volume 627 by : Surajit Sen
Download or read book The Granular State: Volume 627 written by Surajit Sen and published by . This book was released on 2001-04-09 with total page 338 pages. Available in PDF, EPUB and Kindle. Book excerpt: These 38 papers from the April 2000 symposium study granular structure, granular flows, nonlinear waves in granular media, vibrated and rotated granular media, and stress distributions. Topics include jamming in liquids and granular materials, nuclear magnetic resonance studies of granular flows, the blueprint of a concept for a nozzle- free inkjet printer, mixing and segregation processes in a Turbula blender, persistence of granular structure during die compaction of ceramic powders, and humidity-induced cohesion effects in granular media. c. Book News Inc.
Book Synopsis Materials Science of Microelectromechanical Systems (MEMS) Devices by :
Download or read book Materials Science of Microelectromechanical Systems (MEMS) Devices written by and published by . This book was released on 2000 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Microphotonics - Materials, Physics and Applications: Volume 637 by : Kazumi Wada
Download or read book Microphotonics - Materials, Physics and Applications: Volume 637 written by Kazumi Wada and published by . This book was released on 2001-09-20 with total page 234 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Book Synopsis Si Front End Processing - Physics and Technology II of Dopant-Defect Interactions II: Volume 610 by : Aditya Agarwal
Download or read book Si Front End Processing - Physics and Technology II of Dopant-Defect Interactions II: Volume 610 written by Aditya Agarwal and published by . This book was released on 2001-04-09 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt: This proceedings of the April 2000 symposium deals with formation of electrical junctions in the front-end processing of devices for the approaching end-of-the-roadmap. The 60 papers address 2D dopant characterization, ion implantation and shallow junction technology, group III diffusion and activation, carbon diffusion and activation, group V diffusion and activation, vacancy-type defects, regrown amorphous layers, and structure and properties of point and extended defects. Topics include ultra-shallow junction formation and gate activation in deep-submicron CMOS, low energy implantation of boron with decaborane ions, modeling ramp rate effects on shallow junction formation, clustering equilibrium and deactivation kinetics in As doped silicon, and atomistic modeling of complex silicon processing scenarios. c. Book News Inc.
Book Synopsis Role of Chemical Engineering in Processing of Minerals and Materials by :
Download or read book Role of Chemical Engineering in Processing of Minerals and Materials written by and published by Allied Publishers. This book was released on 2003 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Materials Development for Direct Write Technologies: Volume 624 by : Douglas B. Chrisey
Download or read book Materials Development for Direct Write Technologies: Volume 624 written by Douglas B. Chrisey and published by . This book was released on 2001-01-08 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Book Synopsis High-temperature Ordered Intermetallic Alloys by :
Download or read book High-temperature Ordered Intermetallic Alloys written by and published by . This book was released on 2001 with total page 618 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Molecular Electronics: Volume 582 by : Sokrates T. Pantelides
Download or read book Molecular Electronics: Volume 582 written by Sokrates T. Pantelides and published by . This book was released on 2001-01-19 with total page 144 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Book Synopsis High-temperature Ordered Intermetallic Alloys IX by : Joachim H. Schneibel
Download or read book High-temperature Ordered Intermetallic Alloys IX written by Joachim H. Schneibel and published by . This book was released on 2001 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt:
