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Characterization Of Electron Beam Exposed Negative Resists
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Book Synopsis Characterization of Solid Polymers by : S.J. Spells
Download or read book Characterization of Solid Polymers written by S.J. Spells and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 380 pages. Available in PDF, EPUB and Kindle. Book excerpt: The last decade or so has seen a dramatic increase in the amount of detailed structural information available from a range of experimental techniques. Exciting new techniques such as atomic force microscopy have become widely available, while the potential of established methods like X-ray diffraction and electron microscopy has been greatly enhanced by powerful new sources and analytical methods. Progress in computing has also had a widespread impact: in areas such as neutron scattering, large data sets can now be manipulated more readily. The software supplied with commercial instruments generally provides more sophisti cated analytical facilities, while time-resolved X-ray studies rely on rapid data handling capabilities. The polymer scientist is faced with an expanding array of experimental tools for addressing both fundamental science and industrial problems. This work reviews some recent developments in structural techniques, with the aim of presenting the current 'state of the art' in a selection of areas.
Book Synopsis Materials and Process Characterization by : Norman G. Einspruch
Download or read book Materials and Process Characterization written by Norman G. Einspruch and published by Academic Press. This book was released on 2014-12-01 with total page 614 pages. Available in PDF, EPUB and Kindle. Book excerpt: VLSI Electronics: Microstructure Science, Volume 6: Materials and Process Characterization addresses the problem of how to apply a broad range of sophisticated materials characterization tools to materials and processes used for development and production of very large scale integration (VLSI) electronics. This book discusses the various characterization techniques, such as Auger spectroscopy, secondary ion mass spectroscopy, X-ray topography, transmission electron microscopy, and spreading resistance. The systematic approach to the technologies of VLSI electronic materials and device manufacture are also considered. This volume is beneficial to materials scientists, chemists, and engineers who are commissioned with the responsibility of developing and implementing the production of materials and devices to support the VLSI era.
Book Synopsis Nanofabrication by : Maria Stepanova
Download or read book Nanofabrication written by Maria Stepanova and published by Springer Science & Business Media. This book was released on 2011-11-08 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Book Synopsis Electron Microscopy and Analysis 2001 by : M. Aindow
Download or read book Electron Microscopy and Analysis 2001 written by M. Aindow and published by CRC Press. This book was released on 2001-12-01 with total page 548 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electron microscopy is now a mainstay characterization tool for solid state physicists and chemists as well as materials scientists. Electron Microscopy and Analysis 2001 presents a useful snapshot of the latest developments in instrumentation, analysis techniques, and applications of electron and scanning probe microscopies. The book is ideal for
Download or read book Physics Briefs written by and published by . This book was released on 1991 with total page 1132 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis The Physics of Micro/Nano-Fabrication by : Ivor Brodie
Download or read book The Physics of Micro/Nano-Fabrication written by Ivor Brodie and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 661 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
Book Synopsis Sub-Half-Micron Lithography for ULSIs by : Katsumi Suzuki
Download or read book Sub-Half-Micron Lithography for ULSIs written by Katsumi Suzuki and published by Cambridge University Press. This book was released on 2000-06 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: Original figures and tables are presented to highlight the key issues and recent developments." "This book will be of value to graduate students studying semiconductor-device fabrication, to engineers engaged in such fabrication and to designers of ULSI devices."--Jacket.
Book Synopsis The Physics of Submicron Lithography by : Kamil A. Valiev
Download or read book The Physics of Submicron Lithography written by Kamil A. Valiev and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 502 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations. The astonishing achievements in microelectronics are in large part connected with successfully applying the relatively new technology of processing (changing the prop erties of) a material into a device whose component dimensions are submicron, called photolithography. In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer. The smallest dimensions of the device components are limited by the diffraction of the light when the pattern is transferred and are approximately the same as the wavelength of the light. Photolithography by light having a wavelength of A ~ 0.4 flm has made it possible to serially produce integrated circuits having devices whose minimal size is 2-3 flm in the 4 pattern and having 10-105 transistors per circuit.
Book Synopsis Optical Antennas by : Matthias Dominik Wissert
Download or read book Optical Antennas written by Matthias Dominik Wissert and published by KIT Scientific Publishing. This book was released on 2014-09-03 with total page 212 pages. Available in PDF, EPUB and Kindle. Book excerpt: The linear and nonlinear resonance behaviour of optical antennas (metallic nanostructures showing resonance behaviour at optical frequencies) made of gold and aluminum using electron-beam lithography is investigated. Specifically, it is of interest how the emission behaviour is changed by the coupling of two antenna arms via a small gap. Experimental techniques applied include dark-field spectroscopy and two-photon luminescence.
Book Synopsis VLSI Electronics: Materials and process characterization by : Norman G. Einspruch
Download or read book VLSI Electronics: Materials and process characterization written by Norman G. Einspruch and published by . This book was released on 1981 with total page 624 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography by : P. Rai-Choudhury
Download or read book Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography written by P. Rai-Choudhury and published by IET. This book was released on 1997 with total page 784 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
Book Synopsis The Physics of Microfabrication by : Ivor Brodie
Download or read book The Physics of Microfabrication written by Ivor Brodie and published by Springer Science & Business Media. This book was released on 2013-11-11 with total page 518 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.
Book Synopsis Introduction to Micro- and Nanooptics by : Jürgen Jahns
Download or read book Introduction to Micro- and Nanooptics written by Jürgen Jahns and published by John Wiley & Sons. This book was released on 2012-07-10 with total page 452 pages. Available in PDF, EPUB and Kindle. Book excerpt: Dieses erste Lehrbuch, das Mikro- und Nanooptik unter einem Dach behandelt, führt Sie in Physik, Technologie und Schlüsselanwendungen gleichermaßen gründlich ein. Zunächst geht es um die Physik des Lichts, ergänzt durch Kapitel zu brechenden und beugenden optischen Elementen. Die erfahrenen Autoren erläutern lithographische und andere Herstellungsverfahren für mikro- und nanooptische Bauelemente vor. Im zweiten Teil werden detail- und kenntnisreich optische Mikrosysteme und Wellenleiter sowie optischen Nanostrukturen wie photonische Kristalle und Metamaterialien behandelt. Jedes Kapitel enthält Fragen und Aufgaben. Das Lehrbuch ist geeignet für Vorlesungen in Physik und angewandter Optik.
Book Synopsis Simulation of Semiconductor Processes and Devices 2001 by : Dimitris Tsoukalas
Download or read book Simulation of Semiconductor Processes and Devices 2001 written by Dimitris Tsoukalas and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 463 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains the Proceedings of the International Conference on Simulation of Semiconductor Devices and Processes, SISPAD 01, held on September 5–7, 2001, in Athens. The conference provided an open forum for the presentation of the latest results and trends in process and device simulation. The trend towards shrinking device dimensions and increasing complexity in process technology demands the continuous development of advanced models describing basic physical phenomena involved. New simulation tools are developed to complete the hierarchy in the Technology Computer Aided Design simulation chain between microscopic and macroscopic approaches. The conference program featured 8 invited papers, 60 papers for oral presentation and 34 papers for poster presentation, selected from a total of 165 abstracts from 30 countries around the world. These papers disclose new and interesting concepts for simulating processes and devices.
Book Synopsis Basic Principles of Nanotechnology by : Wesley C. Sanders
Download or read book Basic Principles of Nanotechnology written by Wesley C. Sanders and published by CRC Press. This book was released on 2018-07-11 with total page 277 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book allows the reader to have a basic understanding of the structure and properties of nanoscale materials routinely used in nanotechnology-based research and industries. To add, the book describes the operation of nanoscale transistors and the processes used to fabricate the devices. Additionally, it presents research involving the use of carbon nanotubes, graphene, and molecules to create non-silicon based electronic devices. It aims to provide an understanding of the operation of the most frequently used fabrication and characterization procedures, such as scanning electron microscopy, atomic force microscopy, etch, e-beam lithography, and photolithography. Provides explanations of the common techniques used in nanofabrication. Focuses on nanomaterials that are almost exclusively used in academic research and incorporated in consumer materials, such as carbon nanotubes, graphene, metal nanoparticles, quantum dots, and conductive polymers. Each chapter begins with a list of key objectives describing major content covered. Includes end-of-chapter questions to reinforce chapter content.
Book Synopsis The Principles and Practice of Electron Microscopy by : Ian M. Watt
Download or read book The Principles and Practice of Electron Microscopy written by Ian M. Watt and published by Cambridge University Press. This book was released on 1997-01-30 with total page 506 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first edition of this book was widely praised as an excellent introduction to electron microscopy for materials scientists, physicists, earth and biological scientists. This completely revised new edition contains expanded coverage of existing topics and much new material. The author presents the subject of electron microscopy in a readable way, open both to those inexperienced in the technique, and also to practising electron microscopists. The coverage has been brought completely up to date, whilst retaining descriptions of early classic techniques. Currently live topics such as computer control of microscopes, energy-filtered imaging, cryo- and environmental microscopy, digital imaging, and high resolution scanning and transmission microscopy are all described. The highly praised case studies of the first edition have been expanded to include some interesting new examples. This indispensable guide to electron microscopy, written by an author with thirty years practical experience, will be invaluable to new and experienced electron microscopists in any area of science and technology.
Book Synopsis Nanotribology and Nanomechanics II by : Bharat Bhushan
Download or read book Nanotribology and Nanomechanics II written by Bharat Bhushan and published by Springer Science & Business Media. This book was released on 2011-05-30 with total page 1025 pages. Available in PDF, EPUB and Kindle. Book excerpt: The comprehensive reference and textbook serves as a timely, practical introduction to the principles of nanotribology and nanomechanics. Assuming some familiarity with macroscopic tribology, the book comprises chapters by internationally recognized experts, who integrate knowledge of the field from the mechanics and materials-science perspectives. They cover key measurement techniques, their applications, and theoretical modelling of interfaces, each beginning their contributions with macro- and progressing to microconcepts.