Author : Tetsu Mieno
Publisher : BoD – Books on Demand
ISBN 13 : 9535122800
Total Pages : 550 pages
Book Rating : 4.5/5 (351 download)
Book Synopsis Plasma Science and Technology by : Tetsu Mieno
Download or read book Plasma Science and Technology written by Tetsu Mieno and published by BoD – Books on Demand. This book was released on 2016-04-20 with total page 550 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the early twentieth century, Dr. Irving Langmuir actively studied plasma discharge and surface science. Since then, great progress has been made in the development of applications of discharges and plasmas such as discharge lamps, electric tubes, and arc welding. In relation to studies on space physics and controlled nuclear fusion, plasma physics has greatly advanced. Plasma chemistry has also progressed along with its applications in LSI fabrication technology, the chemical vapor deposition of functional films, and the production of nanomaterials. In the twenty-first century, the further development of applications of plasma physics and plasma chemistry is certainly expected. In this book, 18 chapters on the recent progress in plasma science and technology have been written by active specialists worldwide.