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Author : Hyongsok T. Soh
Publisher :
ISBN 13 :
Total Pages : 242 pages
Book Rating : 4.:/5 (839 download)
Download or read book Advancements in Scanning Probe Lithography and Nanostructure Fabrication written by Hyongsok T. Soh and published by . This book was released on 1999 with total page 242 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Hyongsok T. Soh
Publisher : Springer Science & Business Media
ISBN 13 : 1475733313
Total Pages : 212 pages
Book Rating : 4.4/5 (757 download)
Download or read book Scanning Probe Lithography written by Hyongsok T. Soh and published by Springer Science & Business Media. This book was released on 2013-03-14 with total page 212 pages. Available in PDF, EPUB and Kindle. Book excerpt: Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning. The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s and leads the research time that is regarded as the foremost group in this field. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group who, in the last few years, have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from mum/second to mm/second. Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface. The engineering of a custom-designed MOSFET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters. In this book the authors concisely and authoritatively describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology.
Author : Nikodem Tomczak
Publisher : World Scientific
ISBN 13 : 9814324760
Total Pages : 277 pages
Book Rating : 4.8/5 (143 download)
Download or read book Scanning Probe Microscopy written by Nikodem Tomczak and published by World Scientific. This book was released on 2011 with total page 277 pages. Available in PDF, EPUB and Kindle. Book excerpt: Scanning Probe Microscopy (SPM) is the enabling tool for nano(bio)technology, which has opened new vistas in many interdisciplinary research areas. Concomitant with the developments in SPM instrumentation and techniques are new and previously unthought-of opportunities in materials nanofabrication and characterisation. In particular, the developments in addressing and manipulating matter at the level of single atoms or molecules, and studies of biological materials (e.g. live cells, or cell membranes) result in new and exciting discoveries. The rising importance of SPM demands a concise treatment in the form of a book which is accessible to interdisciplinary practitioners. This book highlights recent advances in the field of SPM with sufficient depth and breadth to provide an intellectually stimulating overview of the current state of the art. The book is based on a set of carefully selected original works from renowned contributors on topics that range from atom technology, scanning tunneling spectroscopy of self-assembled nanostructures, SPM probe fabrication, scanning force microscopy applications in biology and materials science down to the single molecule level, novel scanning probe techniques, and nanolithography. The variety of topics underlines the strong interdisciplinary character of SPM related research and the combined expertise of the contributors gives us a unique opportunity to discuss possible future trends in SPM related research. This makes the book not merely a collection of already published material but an enlightening insight into cutting edge research and global SPM research trends.
Author : Bo Cui
Publisher : BoD – Books on Demand
ISBN 13 : 953307602X
Total Pages : 630 pages
Book Rating : 4.5/5 (33 download)
Download or read book Recent Advances in Nanofabrication Techniques and Applications written by Bo Cui and published by BoD – Books on Demand. This book was released on 2011-12-02 with total page 630 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography.
Author : Nikodem Tomczak
Publisher : World Scientific
ISBN 13 : 9814462802
Total Pages : 277 pages
Book Rating : 4.8/5 (144 download)
Download or read book Scanning Probe Microscopy written by Nikodem Tomczak and published by World Scientific. This book was released on 2010-12-13 with total page 277 pages. Available in PDF, EPUB and Kindle. Book excerpt: Scanning Probe Microscopy (SPM) is the enabling tool for nano(bio)technology, which has opened new vistas in many interdisciplinary research areas. Concomitant with the developments in SPM instrumentation and techniques are new and previously unthought-of opportunities in materials nanofabrication and characterisation. In particular, the developments in addressing and manipulating matter at the level of single atoms or molecules, and studies of biological materials (e.g. live cells, or cell membranes) result in new and exciting discoveries.The rising importance of SPM demands a concise treatment in the form of a book which is accessible to interdisciplinary practitioners. This book highlights recent advances in the field of SPM with sufficient depth and breadth to provide an intellectually stimulating overview of the current state of the art. The book is based on a set of carefully selected original works from renowned contributors on topics that range from atom technology, scanning tunneling spectroscopy of self-assembled nanostructures, SPM probe fabrication, scanning force microscopy applications in biology and materials science down to the single molecule level, novel scanning probe techniques, and nanolithography.The variety of topics underlines the strong interdisciplinary character of SPM related research and the combined expertise of the contributors gives us a unique opportunity to discuss possible future trends in SPM related research. This makes the book not merely a collection of already published material but an enlightening insight into cutting edge research and global SPM research trends.
Author : Yu Kyoung Ryu
Publisher : CRC Press
ISBN 13 : 1000804860
Total Pages : 145 pages
Book Rating : 4.0/5 (8 download)
Download or read book Scanning Probe Lithography written by Yu Kyoung Ryu and published by CRC Press. This book was released on 2022-12-22 with total page 145 pages. Available in PDF, EPUB and Kindle. Book excerpt: The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-resolution and high-quality patterns on a wide range of materials: biological, semiconducting, polymers, and 2D materials. • Introduces historical background of SPL, including evolution of the technique and tools • Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied • Shows the different types of devices and structures fabricated by SPL, together with the processing steps • Contains a complete and state-of-the art package of examples and different approaches, performed by different international research groups • Summarizes strengths, limitations, and potential of SPL This book is aimed at advanced students, technicians, and researchers in materials science, microelectronics, and others working with lithographic techniques and fabrication processes.
Author : Zheng Cui (author)
Publisher : Springer Nature
ISBN 13 : 3031625463
Total Pages : 418 pages
Book Rating : 4.0/5 (316 download)
Download or read book Nanofabrication written by Zheng Cui (author) and published by Springer Nature. This book was released on with total page 418 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Woo Kyung Lee
Publisher :
ISBN 13 : 9780549068303
Total Pages : 220 pages
Book Rating : 4.0/5 (683 download)
Download or read book Fabrication of Surface Confined Biomolecular, Polymeric, and Metallic Nanostructures Using Scanning Probe and Electron Beam Lithography written by Woo Kyung Lee and published by . This book was released on 2006 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis presents the fabrication and characterization of surface-confined nanostructures of biomolecules, polymer brushes, and gold nanowires on gold and silicon substrates.
Author : Stefan Landis
Publisher : John Wiley & Sons
ISBN 13 : 1118621700
Total Pages : 424 pages
Book Rating : 4.1/5 (186 download)
Download or read book Nano Lithography written by Stefan Landis and published by John Wiley & Sons. This book was released on 2013-03-04 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lithography is an extremely complex tool – based on the concept of “imprinting” an original template version onto mass output – originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and electron beams – in processes developed to manufacture everyday products including those in the realms of consumer electronics, telecommunications, entertainment, and transportation, to name but a few. In the last few years, researchers and engineers have pushed the envelope of fields including optics, physics, chemistry, mechanics and fluidics, and are now developing the nanoworld with new tools and technologies. Beyond the scientific challenges that are endemic in this miniaturization race, next generation lithography techniques are essential for creating new devices, new functionalities and exploring new application fields. Nanolithography is the branch of nanotechnology concerned with the study and application of fabricating nanometer-scale structures − meaning the creation of patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm. It is used in the fabrication of leading-edge semiconductor integrated circuits (nanocircuitry) or nanoelectromechanical systems (NEMS). This book addresses physical principles as well as the scientific and technical challenges of nanolithography, covering X-ray and NanoImprint lithography, as well as techniques using scanning probe microscopy and the optical properties of metal nanostructures, patterning with block copolymers, and metrology for lithography. It is written for engineers or researchers new to the field, and will help readers to expand their knowledge of technologies that are constantly evolving.
Author : Lin Lee Cheong
Publisher :
ISBN 13 :
Total Pages : 174 pages
Book Rating : 4.:/5 (868 download)
Download or read book Novel Advancements in Nanofabrication for Photonic Crystal Applications written by Lin Lee Cheong and published by . This book was released on 2013 with total page 174 pages. Available in PDF, EPUB and Kindle. Book excerpt: The progress of large-area 2D- and 3D-photonic crystals (PCs) at optical and near infra-red frequencies has been limited by fabrication challenges. Periodic nanostructures must be patterned in high-index and crystalline material such as silicon over large areas (mm2 to cm2) with reasonable throughput. These patterns also must be placed coherently over the entire area, and contain controlled defects. No single conventional nanoscale patterning technique is able to fulfil all of these requirements simultaneously. Pattern placement and throughput challenges for planar lithography can be addressed by combining spatial-phase-locked electron-beam lithography (SPLEBL) with lowenergy (sub-2keV) electrons. SPLEBL obtains feedback on the electron-beam position using a reference grid placed on top of the resist. Combining low-energy lithography with SPLEBL places strict requirements on the SPLEBL reference grid. A systematic investigation on a suitable grid material is carried out, and a self-assembled monolayers (SAMs) based grid is fabricated and characterized. Another method of fabricating large area planar PCs is through interference lithography (IL). The key challenge is the inability of IL to pattern defects or non-periodic structures and thermal scanning probe lithography (TSPL) is proposed as a complementary technique to IL. Integrating TSPL with IL requires capability to transfer TSPL-fabricated patterns into underlying material and is challenging due to the thermal-mechanical nature of TSPL. A robust pattern transfer process is designed and the effects of the lithography and etch processes on resolution and line-edge roughness is studied. The membrane-stacking approach, where large-area membranes are fabricated in parallel and then stacked to form a 3D-PC, was proposed as a more efficient method of fabricating 3D-photonic crystals (3D-PCs) compared to conventional fabrication methods. There exists a need to develop techniques capable of fabricating, transferring and assembling these membranes. In this thesis, a membrane-on-carrier (MOC) strategy based on the membrane-stacking approach is proposed. Membranes are fabricated and floated on liquid, and then transferred onto a temporary rigid carrier. The key challenge is in separating the membrane from the rigid carrier onto a receiving substrate. A dissolvable separation layer is introduced between the membrane and carrier, and two membranes are stacked on top of another as proof-of-concept. Finally, azimuthal alignment is incorporated into the process.
Author : Bharat Bhushan
Publisher : Springer Science & Business Media
ISBN 13 : 3540269142
Total Pages : 318 pages
Book Rating : 4.5/5 (42 download)
Download or read book Applied Scanning Probe Methods IV written by Bharat Bhushan and published by Springer Science & Business Media. This book was released on 2006-04-28 with total page 318 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Bo Cui
Publisher : IntechOpen
ISBN 13 : 9789533076027
Total Pages : 628 pages
Book Rating : 4.0/5 (76 download)
Download or read book Recent Advances in Nanofabrication Techniques and Applications written by Bo Cui and published by IntechOpen. This book was released on 2011-12-02 with total page 628 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography.
Download or read book Scanning Probe-Based Processes for Nanometer-Scale Device Fabrication written by and published by . This book was released on 1999 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the final report of an LDRD program entitled 'Scanning Probe-Based Processes for Nanometer-Scale Device Fabrication'. This program intends to expand Sandia's expertise in scanning-probe based fabrication and characterization of nanostructures. Our object is to achieve an order of magnitude decrease in feature size compared to conventional fabrication technology. We are exploring approaches to nanostructure fabrication and characterization using scanning probe-based (STM, AFM). We also are developing numerical simulations of localized electric field and emission current to explore mechanisms and characterize limits to processing techniques. We emphasize novel fabrication processes and characterization of physical, chemical and electronic effects in nanostructures.
Author : Bin Hu
Publisher :
ISBN 13 :
Total Pages : 182 pages
Book Rating : 4.:/5 (968 download)
Download or read book Nanostructure Fabrication Using Lasers in Combination with a Scanning Probe Microscope written by Bin Hu and published by . This book was released on 2002 with total page 182 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Glenn Charles Abeln
Publisher :
ISBN 13 :
Total Pages : 162 pages
Book Rating : 4.:/5 (412 download)
Download or read book Fabrication of Metal and Organic Nanostructures on Si(100) with Scanning Tunneling Microscope Based Lithography written by Glenn Charles Abeln and published by . This book was released on 1998 with total page 162 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Qian Liu
Publisher : Springer Science & Business Media
ISBN 13 : 3642403875
Total Pages : 274 pages
Book Rating : 4.6/5 (424 download)
Download or read book Novel Optical Technologies for Nanofabrication written by Qian Liu and published by Springer Science & Business Media. This book was released on 2013-10-29 with total page 274 pages. Available in PDF, EPUB and Kindle. Book excerpt: Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors’ groups. It focuses on new techniques and methods as well as applications and development trends in laser nanofabrication, including super-resolution laser direct writing, surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons. This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques. Qian Liu is a Professor at Laboratory for Nanodevice, National Center for Nanoscience and Technology, China. Xuanming Duan is a Professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, China Changsi Peng is a Professor at the Institute of Information Optical Engineering, Soochow University, China.
Author : Hans H. Gatzen
Publisher : Springer
ISBN 13 : 3662443953
Total Pages : 537 pages
Book Rating : 4.6/5 (624 download)
Download or read book Micro and Nano Fabrication written by Hans H. Gatzen and published by Springer. This book was released on 2015-01-02 with total page 537 pages. Available in PDF, EPUB and Kindle. Book excerpt: For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
