2003 Ieee Semi Advanced Semiconductor Manufacturing Conference And Workshop

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Semiconductor Manufacturing Handbook

Author : Hwaiyu Geng
Publisher : McGraw Hill Professional
ISBN 13 : 0071445595
Total Pages : 915 pages
Book Rating : 4.0/5 (714 download)

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Book Synopsis Semiconductor Manufacturing Handbook by : Hwaiyu Geng

Download or read book Semiconductor Manufacturing Handbook written by Hwaiyu Geng and published by McGraw Hill Professional. This book was released on 2005-05-18 with total page 915 pages. Available in PDF, EPUB and Kindle. Book excerpt: WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including: Yield Management Automated Material Handling System Fab and Cleanroom Design and Operation Gas Abatement and Waste Treatment Management And much more Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field. STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES: SEMICONDUCTOR FUNDAMENTALS How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask WAFER PROCESSING TECHNOLOGIES Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning FINAL MANUFACTURING Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water FAB YIELD, OPERATIONS, AND FACILITIES Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems

Proceedings of the 7th International Conference on Axiomatic Design

Author : Mary Kathryn Thompson
Publisher : ICAD 2013
ISBN 13 : 0989465802
Total Pages : 231 pages
Book Rating : 4.9/5 (894 download)

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Book Synopsis Proceedings of the 7th International Conference on Axiomatic Design by : Mary Kathryn Thompson

Download or read book Proceedings of the 7th International Conference on Axiomatic Design written by Mary Kathryn Thompson and published by ICAD 2013. This book was released on 2013-06-26 with total page 231 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Handbook of Semiconductor Manufacturing Technology

Author : Yoshio Nishi
Publisher : CRC Press
ISBN 13 : 1420017667
Total Pages : 1720 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Handbook of Semiconductor Manufacturing Technology by : Yoshio Nishi

Download or read book Handbook of Semiconductor Manufacturing Technology written by Yoshio Nishi and published by CRC Press. This book was released on 2017-12-19 with total page 1720 pages. Available in PDF, EPUB and Kindle. Book excerpt: Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication

Author : Jianfeng Luo
Publisher : Springer Science & Business Media
ISBN 13 : 3662079283
Total Pages : 327 pages
Book Rating : 4.6/5 (62 download)

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Book Synopsis Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication by : Jianfeng Luo

Download or read book Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication written by Jianfeng Luo and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 327 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical mechanical planarization, or chemical mechanical polishing as it is simultaneously referred to, has emerged as one of the critical processes in semiconductor manufacturing and in the production of other related products and devices, MEMS for example. Since its introduction some 15+ years ago CMP, as it is commonly called, has moved steadily into new and challenging areas of semiconductor fabrication. Demands on it for consistent, efficient and cost-effective processing have been steady. This has continued in the face of steadily decreasing feature sizes, impressive increases in wafer size and a continuing array of new materials used in devices today. There are a number of excellent existing references and monographs on CMP in circulation and we defer to them for detailed background information. They are cited in the text. Our focus here is on the important area of process mod els which have not kept pace with the tremendous expansion of applications of CMP. Preston's equation is a valuable start but represents none of the subtleties of the process. Specifically, we refer to the development of models with sufficient detail to allow the evaluation and tradeoff of process inputs and parameters to assess impact on quality or quantity of production. We call that an "integrated model" and, more specifically, we include the important role of the mechanical elements of the process.

Handbook of Silicon Wafer Cleaning Technology

Author : Karen Reinhardt
Publisher : William Andrew
ISBN 13 : 032351085X
Total Pages : 794 pages
Book Rating : 4.3/5 (235 download)

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Book Synopsis Handbook of Silicon Wafer Cleaning Technology by : Karen Reinhardt

Download or read book Handbook of Silicon Wafer Cleaning Technology written by Karen Reinhardt and published by William Andrew. This book was released on 2018-03-16 with total page 794 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Wafer Cleaning Technology, Third Edition, provides an in-depth discussion of cleaning, etching and surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet and plasma processing are reviewed, including surface and colloidal aspects. This revised edition includes the developments of the last ten years to accommodate a continually involving industry, addressing new technologies and materials, such as germanium and III-V compound semiconductors, and reviewing the various techniques and methods for cleaning and surface conditioning. Chapters include numerous examples of cleaning technique and their results. The book helps the reader understand the process they are using for their cleaning application and why the selected process works. For example, discussion of the mechanism and physics of contamination, metal, particle and organic includes information on particle removal, metal passivation, hydrogen-terminated silicon and other processes that engineers experience in their working environment. In addition, the handbook assists the reader in understanding analytical methods for evaluating contamination. The book is arranged in an order that segments the various cleaning techniques, aqueous and dry processing. Sections include theory, chemistry and physics first, then go into detail for the various methods of cleaning, specifically particle removal and metal removal, amongst others. - Focuses on cleaning techniques including wet, plasma and other surface conditioning techniques used to manufacture integrated circuits - Reliable reference for anyone that manufactures integrated circuits or supplies the semiconductor and microelectronics industries - Covers processes and equipment, as well as new materials and changes required for the surface conditioning process

Advanced Interconnects for ULSI Technology

Author : Mikhail Baklanov
Publisher : John Wiley & Sons
ISBN 13 : 1119966868
Total Pages : 616 pages
Book Rating : 4.1/5 (199 download)

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Book Synopsis Advanced Interconnects for ULSI Technology by : Mikhail Baklanov

Download or read book Advanced Interconnects for ULSI Technology written by Mikhail Baklanov and published by John Wiley & Sons. This book was released on 2012-02-17 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: Finding new materials for copper/low-k interconnects is critical to the continuing development of computer chips. While copper/low-k interconnects have served well, allowing for the creation of Ultra Large Scale Integration (ULSI) devices which combine over a billion transistors onto a single chip, the increased resistance and RC-delay at the smaller scale has become a significant factor affecting chip performance. Advanced Interconnects for ULSI Technology is dedicated to the materials and methods which might be suitable replacements. It covers a broad range of topics, from physical principles to design, fabrication, characterization, and application of new materials for nano-interconnects, and discusses: Interconnect functions, characterisations, electrical properties and wiring requirements Low-k materials: fundamentals, advances and mechanical properties Conductive layers and barriers Integration and reliability including mechanical reliability, electromigration and electrical breakdown New approaches including 3D, optical, wireless interchip, and carbon-based interconnects Intended for postgraduate students and researchers, in academia and industry, this book provides a critical overview of the enabling technology at the heart of the future development of computer chips.

Handbook of Production Scheduling

Author : Jeffrey W. Herrmann
Publisher : Springer Science & Business Media
ISBN 13 : 0387331174
Total Pages : 331 pages
Book Rating : 4.3/5 (873 download)

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Book Synopsis Handbook of Production Scheduling by : Jeffrey W. Herrmann

Download or read book Handbook of Production Scheduling written by Jeffrey W. Herrmann and published by Springer Science & Business Media. This book was released on 2006-08-18 with total page 331 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book concentrates on real-world production scheduling in factories and industrial settings. It includes industry case studies that use innovative techniques as well as academic research results that can be used to improve production scheduling. Its purpose is to present scheduling principles, advanced tools, and examples of innovative scheduling systems to persons who could use this information to improve their own production scheduling.

Industrial Communication Technology Handbook

Author : Richard Zurawski
Publisher : CRC Press
ISBN 13 : 1482207338
Total Pages : 1756 pages
Book Rating : 4.4/5 (822 download)

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Book Synopsis Industrial Communication Technology Handbook by : Richard Zurawski

Download or read book Industrial Communication Technology Handbook written by Richard Zurawski and published by CRC Press. This book was released on 2017-12-19 with total page 1756 pages. Available in PDF, EPUB and Kindle. Book excerpt: Featuring contributions from major technology vendors, industry consortia, and government and private research establishments, the Industrial Communication Technology Handbook, Second Edition provides comprehensive and authoritative coverage of wire- and wireless-based specialized communication networks used in plant and factory automation, automotive applications, avionics, building automation, energy and power systems, train applications, and more. New to the Second Edition: 46 brand-new chapters and 21 substantially revised chapters Inclusion of the latest, most significant developments in specialized communication technologies and systems Addition of new application domains for specialized networks The Industrial Communication Technology Handbook, Second Edition supplies readers with a thorough understanding of the application-specific requirements for communication services and their supporting technologies. It is useful to a broad spectrum of professionals involved in the conception, design, development, standardization, and use of specialized communication networks as well as academic institutions engaged in engineering education and vocational training.

Production Planning in Production Networks

Author : Pierluigi Argoneto
Publisher : Springer Science & Business Media
ISBN 13 : 1848000588
Total Pages : 262 pages
Book Rating : 4.8/5 (48 download)

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Book Synopsis Production Planning in Production Networks by : Pierluigi Argoneto

Download or read book Production Planning in Production Networks written by Pierluigi Argoneto and published by Springer Science & Business Media. This book was released on 2008-02-17 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt: No other book has been published giving a single-volume introduction and survey to production planning in distributed manufacturing networks. The published literature so far includes conference proceedings only.

Multi-Agent-Based Production Planning and Control

Author : Jie Zhang
Publisher : John Wiley & Sons
ISBN 13 : 1118890086
Total Pages : 424 pages
Book Rating : 4.1/5 (188 download)

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Book Synopsis Multi-Agent-Based Production Planning and Control by : Jie Zhang

Download or read book Multi-Agent-Based Production Planning and Control written by Jie Zhang and published by John Wiley & Sons. This book was released on 2017-05-15 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: At the crossroads of artificial intelligence, manufacturing engineering, operational research and industrial engineering and management, multi-agent based production planning and control is an intelligent and industrially crucial technology with increasing importance. This book provides a complete overview of multi-agent based methods for today’s competitive manufacturing environment, including the Job Shop Manufacturing and Re-entrant Manufacturing processes. In addition to the basic control and scheduling systems, the author also highlights advance research in numerical optimization methods and wireless sensor networks and their impact on intelligent production planning and control system operation. Enables students, researchers and engineers to understand the fundamentals and theories of multi-agent based production planning and control Written by an author with more than 20 years’ experience in studying and formulating a complete theoretical system in production planning technologies Fully illustrated throughout, the methods for production planning, scheduling and controlling are presented using experiments, numerical simulations and theoretical analysis Comprehensive and concise, Multi-Agent Based Production Planning and Control is aimed at the practicing engineer and graduate student in industrial engineering, operational research, and mechanical engineering. It is also a handy guide for advanced students in artificial intelligence and computer engineering.

China Semiconductor Technology International Conference 2010 (CSTIC 2010)

Author : Han-Ming Wu
Publisher : The Electrochemical Society
ISBN 13 : 1566778069
Total Pages : 1203 pages
Book Rating : 4.5/5 (667 download)

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Book Synopsis China Semiconductor Technology International Conference 2010 (CSTIC 2010) by : Han-Ming Wu

Download or read book China Semiconductor Technology International Conference 2010 (CSTIC 2010) written by Han-Ming Wu and published by The Electrochemical Society. This book was released on 2010-03 with total page 1203 pages. Available in PDF, EPUB and Kindle. Book excerpt: Our mission is to provide a forum for world experts to discuss technologies, address the growing needs associated with silicon technology, and exchange their discoveries and solutions for current issues of high interest. We encourage collaboration, open discussion, and critical reviews at this conference. Furthermore, we hope that this conference will also provide collaborative opportunities for those who are interested in the semiconductor industry in Asia, particularly in China.

Networks of Interacting Machines

Author : Dieter Armbruster
Publisher : World Scientific
ISBN 13 : 9812564985
Total Pages : 282 pages
Book Rating : 4.8/5 (125 download)

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Book Synopsis Networks of Interacting Machines by : Dieter Armbruster

Download or read book Networks of Interacting Machines written by Dieter Armbruster and published by World Scientific. This book was released on 2005 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt: This review volume is devoted to a discussion of analogies and differences of complex production systems ? natural, as in biological cells, or man-made, as in economic systems or industrial production. Taking this unified look at production is based on two observations: Cells and many biological networks are complex production units that have evolved to solve production problems in a reliable and optimal way in a highly stochastic environment. On the other hand, industrial production is becoming increasingly complex and often hard to predict. As a result, modeling and control of such production networks involve many different spatial and temporal scales and decision policies for many different structures. The common themes of industrial and biological production include evolution and optimization, synchronization and self-organization, robust operation despite high stochasticity, and hierarchical dynamics. The mathematical techniques used come from dynamical systems theory, transport equations, control theory, pattern formation, graph theory, discrete event simulations, stochastic processes, and others. The application areas range from semiconductor production to supply chains, protein networks, slime molds, social networks, and whole economies.

Index of Conference Proceedings

Author : British Library. Document Supply Centre
Publisher :
ISBN 13 :
Total Pages : 870 pages
Book Rating : 4.F/5 ( download)

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Book Synopsis Index of Conference Proceedings by : British Library. Document Supply Centre

Download or read book Index of Conference Proceedings written by British Library. Document Supply Centre and published by . This book was released on 2003 with total page 870 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Semiconductors

Author : Artur Balasinski
Publisher : CRC Press
ISBN 13 : 1351833995
Total Pages : 250 pages
Book Rating : 4.3/5 (518 download)

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Book Synopsis Semiconductors by : Artur Balasinski

Download or read book Semiconductors written by Artur Balasinski and published by CRC Press. This book was released on 2018-09-03 with total page 250 pages. Available in PDF, EPUB and Kindle. Book excerpt: Because of the continuous evolution of integrated circuit manufacturing (ICM) and design for manufacturability (DfM), most books on the subject are obsolete before they even go to press. That’s why the field requires a reference that takes the focus off of numbers and concentrates more on larger economic concepts than on technical details. Semiconductors: Integrated Circuit Design for Manufacturability covers the gradual evolution of integrated circuit design (ICD) as a basis to propose strategies for improving return-on-investment (ROI) for ICD in manufacturing. Where most books put the spotlight on detailed engineering enhancements and their implications for device functionality, in contrast, this one offers, among other things, crucial, valuable historical background and roadmapping, all illustrated with examples. Presents actual test cases that illustrate product challenges, examine possible solution strategies, and demonstrate how to select and implement the right one This book shows that DfM is a powerful generic engineering concept with potential extending beyond its usual application in automated layout enhancements centered on proximity correction and pattern density. This material explores the concept of ICD for production by breaking down its major steps: product definition, design, layout, and manufacturing. Averting extended discussion of technology, techniques, or specific device dimensions, the author also avoids the clumsy chapter architecture that can hinder other books on this subject. The result is an extremely functional, systematic presentation that simplifies existing approaches to DfM, outlining a clear set of criteria to help readers assess reliability, functionality, and yield. With careful consideration of the economic and technical trade-offs involved in ICD for manufacturing, this reference addresses techniques for physical, electrical, and logical design, keeping coverage fresh and concise for the designers, manufacturers, and researchers defining product architecture and research programs.

Characterization and Metrology for ULSI Technology 2005

Author : David G. Seiler
Publisher : American Institute of Physics
ISBN 13 :
Total Pages : 714 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Characterization and Metrology for ULSI Technology 2005 by : David G. Seiler

Download or read book Characterization and Metrology for ULSI Technology 2005 written by David G. Seiler and published by American Institute of Physics. This book was released on 2005-09-29 with total page 714 pages. Available in PDF, EPUB and Kindle. Book excerpt: The worldwide semiconductor community faces increasingly difficult challenges in the era of silicon nanotechnology and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed. Characterization and metrology are key enablers for developing new semiconductor technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continuing the advances in semiconductor technology. It covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. The book also covers emerging nano-devices and the corresponding metrology challenges that arise.

Embedded Cooling Of Electronic Devices: Conduction, Evaporation, And Single- And Two-phase Convection

Author : Madhusudan Iyengar
Publisher : World Scientific
ISBN 13 : 9811279381
Total Pages : 479 pages
Book Rating : 4.8/5 (112 download)

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Book Synopsis Embedded Cooling Of Electronic Devices: Conduction, Evaporation, And Single- And Two-phase Convection by : Madhusudan Iyengar

Download or read book Embedded Cooling Of Electronic Devices: Conduction, Evaporation, And Single- And Two-phase Convection written by Madhusudan Iyengar and published by World Scientific. This book was released on 2024-01-10 with total page 479 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a comprehensive guide on emerging cooling technologies for processors in microelectronics. It covers various topics such as chip-embedded two-phase cooling, monolithic microfluidic cooling, numerical modeling, and advances in materials engineering for conduction-limited direct contact cooling, with a goal to remedy high heat flux issues.The book also discusses the co-design of thermal and electromagnetic properties for the development of light and ultra-high efficiency electric motors. It provides an in-depth analysis of the scaling limits, challenges, and opportunities in embedded cooling, including high power RF amplifiers and self-emissive and liquid crystal displays. Its analysis of emerging cooling technologies provides a roadmap for the future of cooling technology in microelectronics.This book is a good starting point for the electrical and thermal engineers, as well as MS and PhD students, interested in understanding and collaboratively tackling the complex and multidisciplinary field of microelectronics device (embedded) cooling. A basic knowledge of heat conduction and convection is required.

Decision Policies for Production Networks

Author : Dieter Armbruster
Publisher : Springer Science & Business Media
ISBN 13 : 0857296442
Total Pages : 308 pages
Book Rating : 4.8/5 (572 download)

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Book Synopsis Decision Policies for Production Networks by : Dieter Armbruster

Download or read book Decision Policies for Production Networks written by Dieter Armbruster and published by Springer Science & Business Media. This book was released on 2012-03-05 with total page 308 pages. Available in PDF, EPUB and Kindle. Book excerpt: The financial results of any manufacturing company can be dramatically impacted by the repetitive decisions required to control a complex production network be it a network of machines in a factory; a network of factories in a company; or a network of companies in a supply chain. Decision Policies for Production Networks presents recent convergent research on developing policies for operating production networks including details of practical control and decision techniques which can be applied to improve the effectiveness and economic efficiency of production networks worldwide. Researchers and practitioners come together to explore a wide variety of approaches to a range of topics including: WIP and equipment management policies, Material release policies, Machine, factory, and supply chain network policies for delivery in the face of supply and demand variability, and Conflicts between complex production network models and their controlling policies. Case studies and relevant mathematical techniques are included to support and explain techniques such as heuristics, global and hierarchical optimization, control theory and filtering approaches related to complex systems or traffic flows. Decision Policies for Production Networks acts as handbook for researchers and practitioners alike, providing findings and information which can be applied to develop methods and advance further research across production networks.