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X Ray Optics Made By X Ray Lithography
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Book Synopsis X-ray optics made by X-ray lithography: Process optimization and quality control by : Koch, Frieder Johannes
Download or read book X-ray optics made by X-ray lithography: Process optimization and quality control written by Koch, Frieder Johannes and published by KIT Scientific Publishing. This book was released on 2017-10-16 with total page 170 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis X-ray Optics Made by X-ray Lithography by : Frieder Johannes Koch
Download or read book X-ray Optics Made by X-ray Lithography written by Frieder Johannes Koch and published by . This book was released on 2020-10-09 with total page 158 pages. Available in PDF, EPUB and Kindle. Book excerpt: Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample's microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio - their fabrication by X-ray lithography with optimal structure quality is the topic of this work. This work was published by Saint Philip Street Press pursuant to a Creative Commons license permitting commercial use. All rights not granted by the work's license are retained by the author or authors.
Book Synopsis X-ray Optics and Surface Science by : A. V. Vinogradov
Download or read book X-ray Optics and Surface Science written by A. V. Vinogradov and published by . This book was released on 1995 with total page 228 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :Anatoly A. Snigirev Publisher :SPIE-International Society for Optical Engineering ISBN 13 : Total Pages :278 pages Book Rating :4.F/5 ( download)
Book Synopsis Design and Microfabrication of Novel X-ray Optics II by : Anatoly A. Snigirev
Download or read book Design and Microfabrication of Novel X-ray Optics II written by Anatoly A. Snigirev and published by SPIE-International Society for Optical Engineering. This book was released on 2004 with total page 278 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Book Synopsis Soft X-ray Optics by : Eberhard Spiller
Download or read book Soft X-ray Optics written by Eberhard Spiller and published by SPIE Press. This book was released on 1994 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text describes optics mainly in the 10 to 500 angstrom wavelength region. These wavelengths are 50 to 100 times shorter than those for visible light and 50 to 100 times longer than the wavelengths of medical x rays or x-ray diffraction from natural crystals. There have been substantial advances during the last 20 years, which one can see as an extension of optical technology to shorter wavelengths or as an extension of x-ray diffraction to longer wavelengths. Artificial diffracting structures like zone plates and multilayer mirrors are replacing the natural crystals of x-ray diffraction. Some of these structures can now be fabricated to have diffraction-limited resolution. The new possibilities are described in a simple, tutorial way.
Download or read book X-ray Optics written by A. Authier and published by Springer. This book was released on 1977 with total page 250 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Principles of Lithography by : Harry J. Levinson
Download or read book Principles of Lithography written by Harry J. Levinson and published by SPIE Press. This book was released on 2005 with total page 446 pages. Available in PDF, EPUB and Kindle. Book excerpt: Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.
Book Synopsis X-Ray Science and Technology, by : Alan G. Michette
Download or read book X-Ray Science and Technology, written by Alan G. Michette and published by CRC Press. This book was released on 1993-06 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: Suitable for graduate courses in x-ray physics and x-ray optics. Written by experienced lecturers, this book covers conventional and advanced x-ray sources. Includes sychrotron radiation, plasma sources and x-ray lasers, x-ray detectors, x-ray optics and the interaction of x-rays with matter and their applications in a variety of medical and technological contexts.
Book Synopsis Microfabrication of X-ray Optics by : Kaushal D. Vora
Download or read book Microfabrication of X-ray Optics written by Kaushal D. Vora and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Deep x-ray lithography (DXL) has emerged as an excellent lithographic technique for patterning up to several millimeter thick microstructures. In this thesis we have chosen a class of x-ray optic known as the Lobster-eye lens as a target device to demonstrate the feasibility of using DXL for fabricating densely packed high aspect ratio microstructures (DPHARMS). A major application of the lobster-eye lens is as the optical element of a proposed x-ray all-sky monitor (ASM) known as Lobster-ISS (ISS stands for International Space Station), which is currently under construction.
Download or read book X-Ray Microscopy written by G. Schmahl and published by Springer. This book was released on 2013-04-17 with total page 354 pages. Available in PDF, EPUB and Kindle. Book excerpt: X-ray microscopy fills a gap between optical and electron microscopy. Using soft x-rays, a resolution higher than with visible light can be obtained. In comparison to electron microscopy, thick, wet, unstained specimens can be examined. This is especially advantageous for biological applications. The intense synchrotron radiation of electron storage rings and the de velopment of optical elements for soft x-rays render x-ray microscopy feasi ble for basic research. Wider applications will be possible in the future with the development of laboratory x-ray sources and microscopes. In 1979 a conference on x-ray microscopy was organized by the New York Academy of Sciences and in 1981 a symposium on high resolution soft x-ray optics was held at Brookhaven. The present volume contains the contributions to the sympos i um "X-Ray Microscopy", organ i zed by the Akademie der Wi ssen schaften in Gottingen in September 1983. In their capacity as conference chairmen, the editors would like to thank the Akademie der Wissenschaften, especially Prof. H.G. Wagner, Secretary of the Academy, and Mr. J. Pfahlert for organizing the symposium. We are in debted to the Stiftung Volkswagenwerk for financial support. The symposium was held at the Max-Planck-Institut fUr Stromungsforschung. We are grateful for their hospitality and assistance during the symposium. Thanks are due to all authors and to the Springer Verlag for their combined efforts. We thank Dipl.-Phys. P. Guttmann, Dr. B. Niemann and Mrs. A. Marienhagen for their assistance during the final preparation of the manuscripts.
Download or read book X-rays written by Alan G. Michette and published by . This book was released on 1996 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt: The discovery of x–rays has revolutionized many areas of 20th century science. This book commemorates the 100th anniversary of the discovery of x–rays by Wilhelm Rontgen in 1895. Eminent scientists review historical aspects and discuss modern techniques and applications.
Book Synopsis Soft X-Rays and Extreme Ultraviolet Radiation by : David Attwood
Download or read book Soft X-Rays and Extreme Ultraviolet Radiation written by David Attwood and published by Cambridge University Press. This book was released on 2007-02-22 with total page 611 pages. Available in PDF, EPUB and Kindle. Book excerpt: This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.
Book Synopsis Design and Microfabrication of Novel X-ray Optics by :
Download or read book Design and Microfabrication of Novel X-ray Optics written by and published by . This book was released on 2002 with total page 204 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis X-ray Lenses Fabricated by Deep X-ray Lithography by :
Download or read book X-ray Lenses Fabricated by Deep X-ray Lithography written by and published by . This book was released on 2002 with total page 9 pages. Available in PDF, EPUB and Kindle. Book excerpt: Refractive x-ray lenses have been fabricated using deep x-ray lithography. Lenses were produced directly in 1- to 6-mm-thick sheets of polymethylmethacrylate (PMMA) with as many as 100 cylindrical lenses along the optical axis. The fabrication process consists of exposing the PMMA sheets to high-energy synchrotron radiation through a mask of 50-micron-thick gold on silicon and subsequent development in ketone. The lenses are suitable for use in synchrotron radiation from a bending magnet at the Advanced Photon Source in the energy range of 8-16 keV. Results of measurements of focus quality, flux density gain, and scatter are presented and discussed with regard to the quality of lens material and fabrication method. Means for improving the performance of the lenses is discussed.
Download or read book X-Ray Optics written by Yuri Shvyd'ko and published by Springer. This book was released on 2013-11-11 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: The use of x rays has moved in the forefront of science and technology in the second half of the 20th century. This progress has been greatly stimulated by the advent of synchrotron x-ray sources in the 1960s. The undulator-based synchrotron radiation sources which have appeared in the last decade of the 20th century gave a new impetus to such development. The brilliance of the x-ray sources has increased by 12 orders of magnitude in 40 years and this trend does not show any signs of stagnation. The future x-ray sources of the 21th century based on free-electron lasers driven by linear accelerators will provide sub-picosecond radiation pulses with by many orders of magnitude higher brilliance and full transverse coherence. The x-ray sources of the newest generation offer a possibility to realize more than ever before the great potential of x-ray optics and, as a consequence, to elaborate new sophisticated instrumentation with unprecedented resolution and eventually to move in new directions of research in x-ray technology, materials science, fundamental physics, life sciences, etc.
Book Synopsis Nanoscale Photonic Imaging by : Tim Salditt
Download or read book Nanoscale Photonic Imaging written by Tim Salditt and published by Springer Nature. This book was released on 2020-06-09 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: This open access book, edited and authored by a team of world-leading researchers, provides a broad overview of advanced photonic methods for nanoscale visualization, as well as describing a range of fascinating in-depth studies. Introductory chapters cover the most relevant physics and basic methods that young researchers need to master in order to work effectively in the field of nanoscale photonic imaging, from physical first principles, to instrumentation, to mathematical foundations of imaging and data analysis. Subsequent chapters demonstrate how these cutting edge methods are applied to a variety of systems, including complex fluids and biomolecular systems, for visualizing their structure and dynamics, in space and on timescales extending over many orders of magnitude down to the femtosecond range. Progress in nanoscale photonic imaging in Göttingen has been the sum total of more than a decade of work by a wide range of scientists and mathematicians across disciplines, working together in a vibrant collaboration of a kind rarely matched. This volume presents the highlights of their research achievements and serves as a record of the unique and remarkable constellation of contributors, as well as looking ahead at the future prospects in this field. It will serve not only as a useful reference for experienced researchers but also as a valuable point of entry for newcomers.
Book Synopsis Materials and Processes for Next Generation Lithography by :
Download or read book Materials and Processes for Next Generation Lithography written by and published by Elsevier. This book was released on 2016-11-08 with total page 636 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. Assembles up-to-date information from the world’s premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation Includes information on processing and metrology techniques Brings together multiple approaches to litho pattern recording from academia and industry in one place
