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Author :
Publisher :
ISBN 13 : 9780892524839
Total Pages : pages
Book Rating : 4.5/5 (248 download)
Download or read book X-Ray Lithography and Applications of Soft X-Rays to Technology written by and published by . This book was released on with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Alan D. Wilson
Publisher :
ISBN 13 :
Total Pages : 156 pages
Book Rating : 4.:/5 (318 download)
Download or read book X-ray Lithography and Applications of Soft X-rays to Technology written by Alan D. Wilson and published by . This book was released on 1983 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author :
Publisher :
ISBN 13 :
Total Pages : 140 pages
Book Rating : 4.:/5 (32 download)
Download or read book X - Ray Lithography and Applications of Soft X - Rays to Technology written by and published by . This book was released on 1984 with total page 140 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Alan D. Wilson
Publisher :
ISBN 13 :
Total Pages : 140 pages
Book Rating : 4.:/5 (114 download)
Download or read book X-ray Lithography and Applications of Soft X-rays to Technology written by Alan D. Wilson and published by . This book was released on 1983 with total page 140 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : David Attwood
Publisher : Cambridge University Press
ISBN 13 : 1139643428
Total Pages : 611 pages
Book Rating : 4.1/5 (396 download)
Download or read book Soft X-Rays and Extreme Ultraviolet Radiation written by David Attwood and published by Cambridge University Press. This book was released on 2007-02-22 with total page 611 pages. Available in PDF, EPUB and Kindle. Book excerpt: This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.
Author : I. C. E. Turcu
Publisher : John Wiley & Sons
ISBN 13 :
Total Pages : 348 pages
Book Rating : 4.3/5 (91 download)
Download or read book X-Rays From Laser Plasmas written by I. C. E. Turcu and published by John Wiley & Sons. This book was released on 1999 with total page 348 pages. Available in PDF, EPUB and Kindle. Book excerpt: Soft X-rays have great potential for use in a wide variety of applications, including the semiconductor industry and the life sciences. X-Rays from Laser Plasmas: Generation and Applications focuses exclusively and in detail on the science and technology of soft X-rays produced with non-synchrotron sources. Using a minimum of mathematical formulae, it discusses how such X-rays can be efficiently and economically generated from plasmas produced by lasers, and how they interact with matter. Authored by Dr Edmond Turcu, one of the pioneers in this field, X-Rays from Laser Plasmas: Generation and Applications will be of great interest to a wide variety of readers, including all those working in X-ray lithography, microscopy, and radiobiology.
Author : Eberhard Spiller
Publisher : SPIE Press
ISBN 13 : 9780819416544
Total Pages : 296 pages
Book Rating : 4.4/5 (165 download)
Download or read book Soft X-ray Optics written by Eberhard Spiller and published by SPIE Press. This book was released on 1994 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text describes optics mainly in the 10 to 500 angstrom wavelength region. These wavelengths are 50 to 100 times shorter than those for visible light and 50 to 100 times longer than the wavelengths of medical x rays or x-ray diffraction from natural crystals. There have been substantial advances during the last 20 years, which one can see as an extension of optical technology to shorter wavelengths or as an extension of x-ray diffraction to longer wavelengths. Artificial diffracting structures like zone plates and multilayer mirrors are replacing the natural crystals of x-ray diffraction. Some of these structures can now be fabricated to have diffraction-limited resolution. The new possibilities are described in a simple, tutorial way.
Author : Alan G. Michette
Publisher :
ISBN 13 :
Total Pages : 288 pages
Book Rating : 4.3/5 (91 download)
Download or read book X-rays written by Alan G. Michette and published by . This book was released on 1996 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt: The discovery of x–rays has revolutionized many areas of 20th century science. This book commemorates the 100th anniversary of the discovery of x–rays by Wilhelm Rontgen in 1895. Eminent scientists review historical aspects and discuss modern techniques and applications.
Author :
Publisher :
ISBN 13 :
Total Pages : 21 pages
Book Rating : 4.:/5 (227 download)
Download or read book X-Ray Optics for Science and Technology written by and published by . This book was released on 1993 with total page 21 pages. Available in PDF, EPUB and Kindle. Book excerpt: Funded by an AFOSR Center of Excellence grant, the University of California has conducted research on soft x-ray physics, optics and applications thereof to the physical and life sciences. The work was led by faculty with joint appointments at the University of California at Berkeley (UCB) and the Lawrence Berkeley Laboratory (LBL). The program involved seven Ph. D. students and 45 undergraduate students from several UCB departments (Physics, Electrical Engineering, Materials Science, Nuclear Engineering, Biophysics) as well as the new Ph. D. program in Applied Science and Technology. As part of the training program to bring students into this new research area, several new courses have been initiated on the UCB campus: (1) Introduction to X-ray physics and technology (3 units); (2) Soft X-rays, nanostructures and applications (1 unit); (3) X-ray microscopy and EUV lithography (1 unit); and (4) Applied science and technology seminar (1 unit).
Author : André Authier
Publisher : Springer
ISBN 13 :
Total Pages : 252 pages
Book Rating : 4.3/5 (121 download)
Download or read book X-Ray Optics written by André Authier and published by Springer. This book was released on 1977-12 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: With contributions by numerous experts
Author : A.G. Michette
Publisher : Springer Science & Business Media
ISBN 13 : 1461322235
Total Pages : 338 pages
Book Rating : 4.4/5 (613 download)
Download or read book Optical Systems for Soft X Rays written by A.G. Michette and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 338 pages. Available in PDF, EPUB and Kindle. Book excerpt: A fundamental problem in cell biology is the cause of aging. The solution to this problem has not yet been obtained because,(l) until recently, it was not possible to image living cells directly. The use of low-energy (soft) X rays has made such imaging possible, perhaps thereby allowing the aging process to be understood and possibly overcome (a result that may well generate further social, moral, and ethical problems). Fortun ately this is not the only aspect of cell biology amenable to soft X-ray imaging, and it is envisaged that many less controversial studies--such as investigations of the detailed differences between healthy and diseased or malignant cells (in their natural states) and processes of cell division and growth-will be made possible. The use of soft X rays is not limited to biological studies-many applications are possible in, for example, fusion research, materials science, and astronomy. Such studies have only recently begun in earnest because several difficulties had to be overcome, major among these being the lack (for some purposes) of sufficiently intense sources, and the technological difficulties associated with making efficient optical systems. As is well known, the advent of dedicated synchrotron radiation sources, in particular, has alleviated the first of these difficulties, not just for the soft X-ray region. It is the purpose of this book to consider progress in the second.
Author : David Attwood (University of California, Berkeley.)
Publisher :
ISBN 13 : 9781139636421
Total Pages : pages
Book Rating : 4.6/5 (364 download)
Download or read book Soft X-rays and Extreme Ultraviolet Radiation written by David Attwood (University of California, Berkeley.) and published by . This book was released on 2006 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Tetsuya Kawachi
Publisher : Springer
ISBN 13 : 3319730258
Total Pages : 421 pages
Book Rating : 4.3/5 (197 download)
Download or read book X-Ray Lasers 2016 written by Tetsuya Kawachi and published by Springer. This book was released on 2018-02-23 with total page 421 pages. Available in PDF, EPUB and Kindle. Book excerpt: These proceedings comprise a selection of invited and contributed papers presented at the 15th International Conference on X-Ray Lasers (ICXRL 2016), held at the Nara Kasugano International Forum, Japan, from May 22 to 27, 2016. This conference was part of an ongoing series dedicated to recent developments in the science and technology of x-ray lasers and other coherent x-ray sources with additional focus on supporting technologies, instrumentation and applications. The book showcases recent advances in the generation of intense, coherent x-rays, the development of practical devices and their applications across a wide variety of fields. It also discusses emerging topics such as plasma-based x-ray lasers, 4th generation accelerator-based sources and higher harmonic generations, as well as other x-ray generation schemes.
Author : David T. Attwood
Publisher :
ISBN 13 : 9781139648936
Total Pages : 488 pages
Book Rating : 4.6/5 (489 download)
Download or read book Soft X-Rays and Extreme Ultraviolet Radiation written by David T. Attwood and published by . This book was released on 2014-05-14 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include EUV lithography, biomicroscopy, spectromicroscopy, EUV astronomy, synchrotron radiation, and soft x-ray lasers. He also provides a great deal of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science.
Author : J. G. Brown
Publisher : Springer Science & Business Media
ISBN 13 : 1461343984
Total Pages : 260 pages
Book Rating : 4.4/5 (613 download)
Download or read book X-Rays and Their Applications written by J. G. Brown and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 260 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is intended to provide a treatment of the production, properties and applications of X-rays suitable for undergraduate courses in physics. It is hoped that parts of it, at least, will be useful to students on other courses in physics, materials science, metallurgy, chemistry, engineering, etc. at various levels. It is also hoped that parts of it will serve as an introduction to the subject of X-ray crystallography, and to this end the treatment of X-ray diffraction has been designed to show the relation between the simple approach and the more sophisticated treatments. During many years of teaching this subject to Degree, Diploma in Technology and Higher National Certificate students, I have been unable to find a single book which attempts to cover the whole of this field. This lack of a treatment of X-rays and their applications in one volume has prompted me to attempt to fill the gap and this present volume is the result. Obviously in writing such a book I have referred to many existing books and I acknowledge my indebtedness to the authors of all the books which I have used. I believe that all these books are included in the re ferences at the ends of the chapters but if I have omitted any, then my apologies are offered to the authors concerned.
Author : David Attwood
Publisher : Cambridge University Press
ISBN 13 : 1316810666
Total Pages : pages
Book Rating : 4.3/5 (168 download)
Download or read book X-Rays and Extreme Ultraviolet Radiation written by David Attwood and published by Cambridge University Press. This book was released on 2017-02-16 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: With this fully updated second edition, readers will gain a detailed understanding of the physics and applications of modern X-ray and EUV radiation sources. Taking into account the most recent improvements in capabilities, coverage is expanded to include new chapters on free electron lasers (FELs), laser high harmonic generation (HHG), X-ray and EUV optics, and nanoscale imaging; a completely revised chapter on spatial and temporal coherence; and extensive discussion of the generation and applications of femtosecond and attosecond techniques. Readers will be guided step by step through the mathematics of each topic, with over 300 figures, 50 reference tables and 600 equations enabling easy understanding of key concepts. Homework problems, a solutions manual for instructors, and links to YouTube lectures accompany the book online. This is the 'go-to' guide for graduate students, researchers and industry practitioners interested in X-ray and EUV interaction with matter.
Author :
Publisher : Elsevier
ISBN 13 : 0081003587
Total Pages : 636 pages
Book Rating : 4.0/5 (81 download)
Download or read book Materials and Processes for Next Generation Lithography written by and published by Elsevier. This book was released on 2016-11-08 with total page 636 pages. Available in PDF, EPUB and Kindle. Book excerpt: As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. Assembles up-to-date information from the world’s premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation Includes information on processing and metrology techniques Brings together multiple approaches to litho pattern recording from academia and industry in one place
