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Using Grazing Incidence Small Angle X Ray Scattering Gisaxs For Semiconductor Nanometrology And Defect Quantification
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Book Synopsis Using Grazing Incidence Small-angle X-ray Scattering (GISAXS) for Semiconductor Nanometrology and Defect Quantification by : Mika Pflüger
Download or read book Using Grazing Incidence Small-angle X-ray Scattering (GISAXS) for Semiconductor Nanometrology and Defect Quantification written by Mika Pflüger and published by . This book was released on 2020* with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Grazing Incidence Small Angle X-Ray Scattering as a Tool for In- Situ Time-Resolved Studies by : Gonzalo Santoro
Download or read book Grazing Incidence Small Angle X-Ray Scattering as a Tool for In- Situ Time-Resolved Studies written by Gonzalo Santoro and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: With the advent of third-generation synchrotron sources and the development of fast two-dimensional X-ray detectors, X-ray scattering has become an invaluable tool for in-situ time-resolved experiments. In the case of thin films, grazing incidence small angle X-ray scattering (GISAXS) constitutes a powerful technique to extract morphological information not only of the thin film surface but also of buried structures with statistical relevance. Thus, recently in-situ GISAXS experiments with subsecond time resolution have enabled investigating the self-assembly processes during vacuum deposition of metallic and organic thin films as well as the structural changes of polymer and colloidal thin films in the course of wet deposition. Moreover, processing of thin films has also been investigated in-situ employing GISAXS. In this chapter, we review the current trends of time-resolved GISAXS studies. After an introduction to the GISAXS technique, we present exemplary results of metallic and organic thin film preparation, wet deposition of polymer thin films and self-assembly of colloidal thin films, as well as examples of thin film modification in, e.g., microfluidic channels and within working devices. Finally, an overview of the future perspectives in the field is provided.
Book Synopsis Scanning Small Angle X-ray Scattering Tomography by : Jan Moritz Feldkamp
Download or read book Scanning Small Angle X-ray Scattering Tomography written by Jan Moritz Feldkamp and published by . This book was released on 2009 with total page 129 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Grazing-Incidence Small Angle X-Ray Scattering in Polymer Thin Films Utilizing Low-Energy X-Rays by : Katsuhiro Yamamoto
Download or read book Grazing-Incidence Small Angle X-Ray Scattering in Polymer Thin Films Utilizing Low-Energy X-Rays written by Katsuhiro Yamamoto and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The intricate nanoscopic morphology of soft materials such as block copolymer and polymer blend system successfully analyzed by small angle X-ray scatterings (SAXS). In thin films, those soft material systems have attracted great attention because of a potential for practical use of functional materials. The morphology has been revealed by grazing-incidence (GI) methods. Recently, advanced grazing-incidence technique for analysis for surface-, volume-, and material-sensitive method (high time, spatial, and/or material resolution) has been reported. Using low X-ray photon energy, tender X-ray (1-4 eV) and soft X-ray near K-edge carbon, allows probing a complex nanomorphology with those sensitivity. In this chapter, recent GI-SAXS with tender X-ray and resonant soft X-ray (GI-RSoX) will be picked up to open for discussion on new possibility of structural analyses.
Book Synopsis Grazing Incidence Small Angle X-ray Scattering by : Joanne Rachel Levine
Download or read book Grazing Incidence Small Angle X-ray Scattering written by Joanne Rachel Levine and published by . This book was released on 1991 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Ellipsometry of Functional Organic Surfaces and Films by : Karsten Hinrichs
Download or read book Ellipsometry of Functional Organic Surfaces and Films written by Karsten Hinrichs and published by Springer Science & Business Media. This book was released on 2013-10-24 with total page 369 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is the method of choice to determine the properties of surfaces and thin films. It provides comprehensive and sensitive characterization in contactless and non-invasive measurements. This book gives a state-of-the-art survey of ellipsometric investigations of organic films and surfaces, from laboratory to synchrotron applications, with a special focus on in-situ use in processing environments and at solid-liquid interfaces. In conjunction with the development of functional organic, meta- and hybrid materials for new optical, electronic, sensing and biotechnological devices and fabrication advances, the ellipsometric analysis of their optical and material properties has progressed rapidly in the recent years.
Book Synopsis X-Ray Metrology in Semiconductor Manufacturing by : D. Keith Bowen
Download or read book X-Ray Metrology in Semiconductor Manufacturing written by D. Keith Bowen and published by CRC Press. This book was released on 2018-10-03 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt: The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.
Book Synopsis Semiconductor Fabrication by : Dinesh C. Gupta
Download or read book Semiconductor Fabrication written by Dinesh C. Gupta and published by ASTM International. This book was released on 1989 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Introduction to Particle Physics by : Dezső Horváth
Download or read book Introduction to Particle Physics written by Dezső Horváth and published by Cambridge Scholars Publishing. This book was released on 2019-05-03 with total page 370 pages. Available in PDF, EPUB and Kindle. Book excerpt: This textbook is a unique treatise on the present status of particle physics summarised for physics students at an introductory level: it provides insights into the essential experimental and theoretical techniques needed to start research at modern high energy accelerators such as the Large Hadron Collider at CERN. The first three parts of the book discuss the experimental and phenomenological aspects at a level suitable for MSc students, but BSc students interested in particle physics will also find useful information there. The fourth part is oriented to advanced MSc or PhD students to make them acquainted with the precise formulation of the standard model of particle interactions, as well as with the mathematical background needed for the correct interpretation of the experimental results. In this two-step approach, the book offers a gradually deepening understanding of particle physics, building up the standard model and providing an overview of its verification, together with the necessary theoretical and experimental techniques. Using the example of the simplest present-day experiments, it is explained how one can obtain experimental results and theoretical estimations for measurable quantities from clear basic principles. The sources of uncertainties and the methods of improving precision are also discussed.
Book Synopsis Small Angle X-ray Scattering by : O. Glatter
Download or read book Small Angle X-ray Scattering written by O. Glatter and published by . This book was released on 1982 with total page 540 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Sample Preparation Handbook for Transmission Electron Microscopy by : Jeanne Ayache
Download or read book Sample Preparation Handbook for Transmission Electron Microscopy written by Jeanne Ayache and published by Springer Science & Business Media. This book was released on 2010-07-03 with total page 267 pages. Available in PDF, EPUB and Kindle. Book excerpt: Successful transmission electron microscopy in all of its manifestations depends on the quality of the specimens examined. Biological specimen preparation protocols have usually been more rigorous and time consuming than those in the physical sciences. For this reason, there has been a wealth of scienti?c literature detailing speci?c preparation steps and numerous excellent books on the preparation of b- logical thin specimens. This does not mean to imply that physical science specimen preparation is trivial. For the most part, most physical science thin specimen pre- ration protocols can be executed in a matter of a few hours using straightforward steps. Over the years, there has been a steady stream of papers written on various aspects of preparing thin specimens from bulk materials. However, aside from s- eral seminal textbooks and a series of book compilations produced by the Material Research Society in the 1990s, no recent comprehensive books on thin spe- men preparation have appeared until this present work, ?rst in French and now in English. Everyone knows that the data needed to solve a problem quickly are more imp- tant than ever. A modern TEM laboratory with supporting SEMs, light microscopes, analytical spectrometers, computers, and specimen preparation equipment is an investment of several million US dollars. Fifty years ago, electropolishing, chemical polishing, and replication methods were the principal specimen preparation me- ods.
Book Synopsis Electron Microscopy by : S. Amelinckx
Download or read book Electron Microscopy written by S. Amelinckx and published by John Wiley & Sons. This book was released on 2008-09-26 with total page 527 pages. Available in PDF, EPUB and Kindle. Book excerpt: Derived from the successful three-volume Handbook of Microscopy, this book provides a broad survey of the physical fundamentals and principles of all modern techniques of electron microscopy. This reference work on the method most often used for the characterization of surfaces offers a competent comparison of the feasibilities of the latest developments in this field of research. Topics include: * Stationary Beam Methods: Transmission Electron Microscopy/ Electron Energy Loss Spectroscopy/ Convergent Electron Beam Diffraction/ Low Energy Electron Microscopy/ Electron Holographic Methods * Scanning Beam Methods: Scanning Transmission Electron Microscopy/ Scanning Auger and XPS Microscopy/ Scanning Microanalysis/ Imaging Secondary Ion Mass Spectrometry * Magnetic Microscopy: Scanning Electron Microscopy with Polarization Analysis/ Spin Polarized Low Energy Electron Microscopy Materials scientists as well as any surface scientist will find this book an invaluable source of information for the principles of electron microscopy.
Download or read book X-Ray Diffraction written by A. Guinier and published by Courier Corporation. This book was released on 2013-01-17 with total page 404 pages. Available in PDF, EPUB and Kindle. Book excerpt: Exploration of fundamentals of x-ray diffraction theory using Fourier transforms applies general results to various atomic structures, amorphous bodies, crystals, and imperfect crystals. 154 illustrations. 1963 edition.
Book Synopsis Synchrotron Radiation in Materials Science by : Chunhai Fan
Download or read book Synchrotron Radiation in Materials Science written by Chunhai Fan and published by John Wiley & Sons. This book was released on 2018-05-29 with total page 846 pages. Available in PDF, EPUB and Kindle. Book excerpt: Meeting the long-felt need for in-depth information on one of the most advanced material characterization methods, a top team of editors and authors from highly prestigious facilities and institutions covers a range of synchrotron techniques that have proven useful for materials research. Following an introduction to synchrotron radiation and its sources, the second part goes on to describe the various techniques that benefit from this especially bright light, including X-ray absorption, diffraction, scattering, imaging, and lithography. The thrid and final part provides an overview of the applications of synchrotron radiation in materials science. bridging the gap between specialists in synchrotron research and material scientists, this is a unique and indispensable resource for academic and industrial researchers alike.
Book Synopsis Fundamental Principles of Optical Lithography by : Chris Mack
Download or read book Fundamental Principles of Optical Lithography written by Chris Mack and published by John Wiley & Sons. This book was released on 2011-08-10 with total page 503 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
Book Synopsis The Optical Principles of the Diffraction of X-rays by : R. W. James
Download or read book The Optical Principles of the Diffraction of X-rays written by R. W. James and published by . This book was released on 1967 with total page 664 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Glow Discharge Optical Emission Spectrometry by : Richard Payling
Download or read book Glow Discharge Optical Emission Spectrometry written by Richard Payling and published by John Wiley & Sons. This book was released on 1997-12-08 with total page 904 pages. Available in PDF, EPUB and Kindle. Book excerpt: Glow Discharge Optical Emission Spectrometry (GD-OES) is rapidly becoming one of the most important techniques for the direct analysis of solids. This, the first book entirely devoted to the subject, represents the combined contributions of over 30 specialists from around the world. All contributors are active in the field and recognised internationally for their expertise and knowledge in GD-OES. The book begins with an introductory overview of the subjects, deals with the design of the instrument, its operation and analytical methods and describes in detail the complex plasma processes which occur inside the glow discharge source. The second part of the book is more practically orientated, showing the full range of uses for GD-OES from the bulk analysis of virtually any solid material to depth profiling within the first tens of micrometres of a variety of surfaces and coatings. Glow Discharge Optical Emission Spectrometry is intended for a wide audience of scientists, engineers and postgraduate students and will be a valuable and challenging reference work for both experienced users of the technique and newcomers alike.
