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Synthesis And Characterization Of Diamond Thin Films By Microwave Plasma Enhanced Chemical Vapor Deposition Mpecvd
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Book Synopsis Synthesis and Characterization of Diamond Thin Films by Microwave Plasma-enhanced Chemical Vapor Deposition (MPECVD) by : Shih-Feng Chou
Download or read book Synthesis and Characterization of Diamond Thin Films by Microwave Plasma-enhanced Chemical Vapor Deposition (MPECVD) written by Shih-Feng Chou and published by . This book was released on 2005 with total page 174 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diamond thin films are deposited on silicon wafers by MPECVD process with the presence of methane, argon, and hydrogen gases. The reaction chamber is designed with an internal microwave reaction cavity and a high-pressure pocket for improving deposition conditions. Scanning electron microscopy reveals tetrahedral and cauliflower-shaped crystals for polycrystalline diamond and nanocrystalline diamond films, respectively. Spectroscopy ellipsometer studies indicate that diamond-like carbon (DLC) films are deposited with a thickness of 700 nm. Fourier transform infrared spectroscopy shows C-H stretching in the range from 2800 cm -1 to 3000 cm -1 . Nanoindentation is performed on DLC films with an average hardness of 10.98 GPa and an average elastic modulus of 90.32 GPa. The effects of chamber pressure, microwave forward power, and gas mixture on the plasma chemistry are discussed. Substrate temperature has a significant influence on film growth rate, and substrate pretreatment can enhance the quality of diamond films.
Book Synopsis Microwave Plasma-enhanced Chemical Vapor Deposition and Characterization of Diamond and Silicon Nitride Thin Films by : Kevin John Grannen
Download or read book Microwave Plasma-enhanced Chemical Vapor Deposition and Characterization of Diamond and Silicon Nitride Thin Films written by Kevin John Grannen and published by . This book was released on 1994 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Microwave Plasma Enhanced Chemical Vapor Deposition and Structural Characterization of Diamond Films by : Wei Zhu
Download or read book Microwave Plasma Enhanced Chemical Vapor Deposition and Structural Characterization of Diamond Films written by Wei Zhu and published by . This book was released on 1990 with total page 530 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Diamond Films written by Koji Kobashi and published by Elsevier. This book was released on 2010-07-07 with total page 350 pages. Available in PDF, EPUB and Kindle. Book excerpt: Discusses the most advanced techniques for diamond growth Assists diamond researchers in deciding on the most suitable process conditions Inspires readers to devise new CVD (chemical vapor deposition Ever since the early 1980s, and the discovery of the vapour growth methods of diamond film, heteroexpitaxial growth has become one of the most important and heavily discussed topics amongst the diamond research community. Kobashi has documented such discussions with a strong focus on how diamond films can be best utilised as an industrial material, working from the premise that crystal diamond films can be made by chemical vapour disposition. Kobashi provides information on the process and characterization technologies of oriented and heteroepitaxial growth of diamond films.
Book Synopsis Diamond Films Handbook by : Jes Asmussen
Download or read book Diamond Films Handbook written by Jes Asmussen and published by CRC Press. This book was released on 2002-01-23 with total page 692 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Diamond Films Handbook is an important source of information for readers involved in the new diamond film technology, emphasizing synthesis technologies and diamond film applications. Containing over 1600 references, drawings, photographs, micrographs, equations, and tables, and contributions by experts from both industry and academia, it inclu
Book Synopsis Synthesis of Thin and Thick Ultra-nanocrystalline Diamond Films by Microwave Plasma CVD Systems by : Dzung Tri Tran
Download or read book Synthesis of Thin and Thick Ultra-nanocrystalline Diamond Films by Microwave Plasma CVD Systems written by Dzung Tri Tran and published by . This book was released on 2005 with total page 314 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Thin Film Diamond by : A.H. Lettington
Download or read book Thin Film Diamond written by A.H. Lettington and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work, written by leading international authorities, deals with nucleation growth and processing, characterization and electrical, thermal, optical and mechanical properties of thin film diamond. The final chapters are devoted to the broad range of applications of this material.
Book Synopsis Growth and Characterization of Nanocrystalline Diamond Films for Microelectronics and Microelectromechanical Systems by : Sathyaharish Jeedigunta
Download or read book Growth and Characterization of Nanocrystalline Diamond Films for Microelectronics and Microelectromechanical Systems written by Sathyaharish Jeedigunta and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: ABSTRACT: Diamond is widely known for its extraordinary properties, such as high thermal conductivity, energy bandgap and high material hardness and durability making it a very attractive material for microelectronic and mechanical applications. Synthetic diamonds produced by chemical vapor deposition (CVD) methods retain most of the properties of natural diamond. Within this class of material, nanocrystalline diamond (NCD) is being developed for microelectronic and microelectromechanical systems (MEMS) applications. During this research, intrinsic and doped NCD films were grown by the microwave plasma enhanced chemical vapor deposition (MPECVD) method using CH4/Ar/H2 gas mixture and CH4/Ar/N2 gas chemistries respectively. The first part of research focused on the growth and characterization of NCD films while the second part on the application of NCD as a structural material in MEMS device fabrication.
Book Synopsis Synthesis of Thin Films in Boron-carbon-nitrogen Ternary System by Microwave Plasma Enhanced Chemical Vapor Deposition by : Ratandeep Kukreja
Download or read book Synthesis of Thin Films in Boron-carbon-nitrogen Ternary System by Microwave Plasma Enhanced Chemical Vapor Deposition written by Ratandeep Kukreja and published by . This book was released on 2010 with total page 186 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Synthesis and Characterization of Silicon Dioxide Thin Films by Plasma Enhances Chemical Vapor Deposition from Diethylsilane and Nitrous Oxide by : Lan Chen
Download or read book Synthesis and Characterization of Silicon Dioxide Thin Films by Plasma Enhances Chemical Vapor Deposition from Diethylsilane and Nitrous Oxide written by Lan Chen and published by . This book was released on 1995 with total page 120 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Proceedings of the ... International Symposium on Diamond and Diamond-like Films by :
Download or read book Proceedings of the ... International Symposium on Diamond and Diamond-like Films written by and published by . This book was released on 1989 with total page 700 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Synthesis of Diamond Thin Films by Atmospheric-pressure Thermal Chemical Vapor Deposition and Their Characterization by : Y. Hirose
Download or read book Synthesis of Diamond Thin Films by Atmospheric-pressure Thermal Chemical Vapor Deposition and Their Characterization written by Y. Hirose and published by . This book was released on 1987 with total page 20 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Chemical Vapor Deposition of Diamond Thin Films on Titanium Silicon Carbide by :
Download or read book Chemical Vapor Deposition of Diamond Thin Films on Titanium Silicon Carbide written by and published by . This book was released on 2009 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical vapor deposition (CVD) has been the main method for synthesizing diamond thin films on hetero substrate materials since 1980s. It has been well acknowledged that both nucleation and growth of diamond on non-diamond surfaces without pre-treatment are very difficult and slow. Furthermore, the weak adhesion between the diamond thin films and substrates has been a major problem for widespread application of diamond thin films. Up to now, Si has been the most frequently used substrate for the study of diamond thin films and various methods, including bias and diamond powder scratching, have been applied to enhance diamond nucleation density. In the present study, nucleation and growth of diamond thin films on Ti3SiC2, a newly developed ceramic-metallic material, using Microwave Plasma Enhanced (MPE) and Hot-Filament (HF) CVD reactors were carried out. In addition, synchrotron-based Near Edge Extended X-Ray Absorption Fine Structure Spectroscopy (NEXAFS) was used to identify the electronic and chemical structures of various NCD films. The results from MPECVD showed that a much higher diamond nucleation density and a much higher film growth rate can be obtained on Ti3SiC2 compared with on Si. Consequently, nanocrystalline diamond (NCD) thin films were feasibly synthesized on Ti3SiC2 under the typical conditions for microcrystalline diamond film synthesis. Furthermore, the diamond films on Ti3SiC2 exhibited better adhesion than on Si. The early stage growth of diamond thin films on Ti3SiC2 by HFCVD indicated that a nanowhisker-like diamond-graphite composite layer, different from diamond nucleation on Si, initially formed on the surface of Ti3SiC2, which resulted in high diamond nucleation density. These results indicate that Ti3SiC2 has great potentials to be used both as substrates and interlayers on metals for diamond thin film deposition and application. This research may greatly expand the tribological application of both Ti3SiC2 and diamond thin films. The re.
Book Synopsis Controlled Synthesis of Diamond Films Using a Microwave Discharge (non-equilibrium Plasma) by : Saeid Khatami
Download or read book Controlled Synthesis of Diamond Films Using a Microwave Discharge (non-equilibrium Plasma) written by Saeid Khatami and published by . This book was released on 1997 with total page 430 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Diamond Thin Films - An Emerging Technology: Past, Present and Future by : Ashok Kumar Dua
Download or read book Diamond Thin Films - An Emerging Technology: Past, Present and Future written by Ashok Kumar Dua and published by Trans Tech Publications Ltd. This book was released on 2004-08-08 with total page 110 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diamond, as well as being a precious gem, is a versatile material par excellence. No other material comes anywhere near to matching its properties, which are both extreme, and also expressed in rare combinations. However, natural diamonds, and those synthesised under high sandpressure temperatures, are too expensive or small for many technological applications. These limitations can be overcome by using large-area diamond coatings; chemically bonded to inexpensive non-diamond surfaces. The consequent economic advantages provide the driving force for much diamond-related research and technology.
Book Synopsis Morphology and Electron Emission Properties of Nanocrystalline CVD Diamond Thin Films by :
Download or read book Morphology and Electron Emission Properties of Nanocrystalline CVD Diamond Thin Films written by and published by . This book was released on 1998 with total page 13 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanocrystalline diamond thin films have been produced by microwave plasma-enhanced chemical vapor deposition (MPECVD) using C60/Ar/H2 or CH4/Ar/H2 plasmas. Films grown with H2 concentration (less-than or equal to) 20% are nanocrystalline, with atomically abrupt grain boundaries and without observable graphitic or amorphous carbon phases. The growth and morphology of these films are controlled via a high nucleation rate resulting from low hydrogen concentration in the plasma. Initial growth is in the form of diamond, which is the thermodynamic equilibrium phase for grains (less-than or equal to)5 nm in diameter. Once formed, the diamond phase persists for grains up to at least 15-20 nm in diameter. The renucleation rate in the near-absence of atomic hydrogen is very high ((approximately) 101° cm−2 sec−1), limiting the average grain size to a nearly constant value as the film thickness increases, although the average grain size increases as hydrogen is added to the plasma. For hydrogen concentrations less than (approximately)20%, the growth species is believed to be the carbon dimer, C2, rather than the CH3* growth species associated with diamond film growth at higher hydrogen concentrations. For very thin films grown from the C60 precursor, the threshold field (2 to (approximately)60 volts/micron) for cold cathode electron emission depends on the electrical conductivity and on the surface topography, which in turn depends on the hydrogen concentration in the plasma. A model of electron emission, based on quantum well effects at the grain boundaries is presented. This model predicts promotion of the electrons at the grain boundary to the conduction band of diamond for a grain boundary width (approximately) 3--4 Å, a value within the range observed by TEM.
Book Synopsis Microwave Enhanced Chemical Vapor Deposition of Silicon Compound Thin Films and Their Characterization by : Madan Gopal
Download or read book Microwave Enhanced Chemical Vapor Deposition of Silicon Compound Thin Films and Their Characterization written by Madan Gopal and published by . This book was released on 1991 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
