Chemical-Mechanical Planarization of Semiconductor Materials

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Publisher : Springer Science & Business Media
ISBN 13 : 9783540431817
Total Pages : 444 pages
Book Rating : 4.4/5 (318 download)

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Book Synopsis Chemical-Mechanical Planarization of Semiconductor Materials by : M.R. Oliver

Download or read book Chemical-Mechanical Planarization of Semiconductor Materials written by M.R. Oliver and published by Springer Science & Business Media. This book was released on 2004-01-26 with total page 444 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.

Laser Induced Damage in Optical Materials

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Publisher :
ISBN 13 :
Total Pages : 568 pages
Book Rating : 4.3/5 (243 download)

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Book Synopsis Laser Induced Damage in Optical Materials by :

Download or read book Laser Induced Damage in Optical Materials written by and published by . This book was released on 1977 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Laser Induced Damage in Optical Materials

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Author :
Publisher :
ISBN 13 :
Total Pages : 222 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Laser Induced Damage in Optical Materials by :

Download or read book Laser Induced Damage in Optical Materials written by and published by . This book was released on 1972 with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Silicon Carbide Microsystems for Harsh Environments

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Publisher : Springer Science & Business Media
ISBN 13 : 1441971211
Total Pages : 247 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Silicon Carbide Microsystems for Harsh Environments by : Muthu Wijesundara

Download or read book Silicon Carbide Microsystems for Harsh Environments written by Muthu Wijesundara and published by Springer Science & Business Media. This book was released on 2011-05-17 with total page 247 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments, technological readiness of the system components, key issues when integrating these components into systems, and other hurdles in harsh environment operation. The authors use the SiC technology platform suite the model platform for developing harsh environment microsystems and then detail the current status of the specific individual technologies (electronics, MEMS, packaging). Additionally, methods towards system level integration of components and key challenges are evaluated and discussed based on the current state of SiC materials processing and device technology. Issues such as temperature mismatch, process compatibility and temperature stability of individual components and how these issues manifest when building the system receive thorough investigation. The material covered not only reviews the state-of-the-art MEMS devices, provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.

Advances in Chemical Mechanical Planarization (CMP)

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Author :
Publisher : Woodhead Publishing
ISBN 13 : 0128218193
Total Pages : 650 pages
Book Rating : 4.1/5 (282 download)

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Book Synopsis Advances in Chemical Mechanical Planarization (CMP) by : Babu Suryadevara

Download or read book Advances in Chemical Mechanical Planarization (CMP) written by Babu Suryadevara and published by Woodhead Publishing. This book was released on 2021-09-10 with total page 650 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in Chemical Mechanical Planarization (CMP), Second Edition provides the latest information on a mainstream process that is critical for high-volume, high-yield semiconductor manufacturing, and even more so as device dimensions continue to shrink. The second edition includes the recent advances of CMP and its emerging materials, methods, and applications, including coverage of post-CMP cleaning challenges and tribology of CMP. This important book offers a systematic review of fundamentals and advances in the area. Part one covers CMP of dielectric and metal films, with chapters focusing on the use of current and emerging techniques and processes and on CMP of various materials, including ultra low-k materials and high-mobility channel materials, and ending with a chapter reviewing the environmental impacts of CMP processes. New content addressed includes CMP challenges with tungsten, cobalt, and ruthenium as interconnect and barrier films, consumables for ultralow topography and CMP for memory devices. Part two addresses consumables and process control for improved CMP and includes chapters on CMP pads, diamond disc pad conditioning, the use of FTIR spectroscopy for characterization of surface processes and approaches for defection characterization, mitigation, and reduction. Advances in Chemical Mechanical Planarization (CMP), Second Edition is an invaluable resource and key reference for materials scientists and engineers in academia and R&D. - Reviews the most relevant techniques and processes for CMP of dielectric and metal films - Includes chapters devoted to CMP for current and emerging materials - Addresses consumables and process control for improved CMP, including post-CMP

Tribology In Chemical-Mechanical Planarization

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Publisher : CRC Press
ISBN 13 : 1420028391
Total Pages : 199 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Tribology In Chemical-Mechanical Planarization by : Hong Liang

Download or read book Tribology In Chemical-Mechanical Planarization written by Hong Liang and published by CRC Press. This book was released on 2005-03-01 with total page 199 pages. Available in PDF, EPUB and Kindle. Book excerpt: Illustrating their intersecting role in manufacturing and technological development, this book examines tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects as well as friction, lubrication fundamentals, and the basics of wear. The book concludes its focus with mechanical aspects of CMP, pad materials, elastic modulus, and cell buckling. As the first source to integrate CMP and tribology, Tribology in Chemical-Mechanical Planarization provides applied scientists and engineers in the fields of semiconductors and microelectronics with clear foresight to the future of this technology.

Materials Science and Technology of Optical Fabrication

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Publisher : John Wiley & Sons
ISBN 13 : 1119423686
Total Pages : 422 pages
Book Rating : 4.1/5 (194 download)

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Book Synopsis Materials Science and Technology of Optical Fabrication by : Tayyab I. Suratwala

Download or read book Materials Science and Technology of Optical Fabrication written by Tayyab I. Suratwala and published by John Wiley & Sons. This book was released on 2018-10-16 with total page 422 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covers the fundamental science of grinding and polishing by examining the chemical and mechanical interactions over many scale lengths Manufacturing next generation optics has been, and will continue to be, enablers for enhancing the performance of advanced laser, imaging, and spectroscopy systems. This book reexamines the age-old field of optical fabrication from a materials-science perspective, specifically the multiple, complex interactions between the workpiece (optic), slurry, and lap. It also describes novel characterization and fabrication techniques to improve and better understand the optical fabrication process, ultimately leading to higher quality optics with higher yield. Materials Science and Technology of Optical Fabrication is divided into two major parts. The first part describes the phenomena and corresponding process parameters affecting both the grinding and polishing processes during optical fabrication. It then relates them to the critical resulting properties of the optic (surface quality, surface figure, surface roughness, and material removal rate). The second part of the book covers a number of related topics including: developed forensic tools used to increase yield of optics with respect to surface quality (scratch/dig) and fracture loss; novel characterization and fabrication techniques used to understand/quantify the fundamental phenomena described in the first part of the book; novel and recent optical fabrication processes and their connection with the fundamental interactions; and finally, special techniques utilized to fabricate optics with high damage resistance. Focuses on the fundamentals of grinding and polishing, from a materials science viewpoint, by studying the chemical and mechanical interactions/phenomena over many scale lengths between the workpiece, slurry, and lap Explains how these phenomena affect the major characteristics of the optic workpiece—namely surface figure, surface quality, surface roughness, and material removal rate Describes methods to improve the major characteristics of the workpiece as well as improve process yield, such as through fractography and scratch forensics Covers novel characterization and fabrication techniques used to understand and quantify the fundamental phenomena of various aspects of the workpiece or fabrication process Details novel and recent optical fabrication processes and their connection with the fundamental interactions Materials Science and Technology of Optical Fabrication is an excellent guidebook for process engineers, fabrication engineers, manufacturing engineers, optical scientists, and opticians in the optical fabrication industry. It will also be helpful for students studying material science and applied optics/photonics.

Freezing Colloids: Observations, Principles, Control, and Use

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Author :
Publisher : Springer
ISBN 13 : 3319505157
Total Pages : 618 pages
Book Rating : 4.3/5 (195 download)

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Book Synopsis Freezing Colloids: Observations, Principles, Control, and Use by : Sylvain Deville

Download or read book Freezing Colloids: Observations, Principles, Control, and Use written by Sylvain Deville and published by Springer. This book was released on 2017-01-19 with total page 618 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents a comprehensive overview of the freezing of colloidal suspensions and explores cutting-edge research in the field. It is the first book to deal with this phenomenon from a multidisciplinary perspective, and examines the various occurrences, their technological uses, the fundamental phenomena, and the different modeling approaches. Its chapters integrate input from fields as diverse as materials science, physics, biology, mathematics, geophysics, and food science, and therefore provide an excellent point of departure for anyone interested in the topic. The main content is supplemented by a wealth of figures and illustrations to elucidate the concepts presented, and includes a final chapter providing advice for those starting out in the field. As such, the book provides an invaluable resource for materials scientists, physicists, biologists, and mathematicians, and will also benefit food engineers, civil engineers, and materials processing professionals.

Chemical Evolution

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Publisher : Springer
ISBN 13 : 3319143557
Total Pages : 295 pages
Book Rating : 4.3/5 (191 download)

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Book Synopsis Chemical Evolution by : Bernd Markert

Download or read book Chemical Evolution written by Bernd Markert and published by Springer. This book was released on 2015-02-19 with total page 295 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is written for researchers and students interested in the function and role of chemical elements in biological or environmental systems. Experts have long known that the Periodic System of Elements (PSE) provides only an inadequate chemical description of elements of biological, environmental or medicinal importance. This book explores the notion of a Biological System of the Elements (BSE) established on accurate and precise multi-element data, including evolutionary aspects, representative sampling procedures, inter-element relationships, the physiological function of elements and uptake mechanisms. The book further explores the concept Stoichiometric Network Analysis (SNA) to analyze the biological roles of chemical species. Also discussed is the idea of ecotoxicological identity cards which give a first-hand description of properties relevant for biological and toxicological features of a certain chemical element and its geo biochemically plausible speciation form. The focus of this book goes beyond both classical bioinorganic chemistry and toxicology.

The Properties of Optical Glass

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Publisher : Springer Science & Business Media
ISBN 13 : 3642577695
Total Pages : 430 pages
Book Rating : 4.6/5 (425 download)

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Book Synopsis The Properties of Optical Glass by : Hans Bach

Download or read book The Properties of Optical Glass written by Hans Bach and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 430 pages. Available in PDF, EPUB and Kindle. Book excerpt: From the reviews: "The book should be acquired by all libraries with an interest in glass science and applications...the title will endure for many years as the standard work on the properties of optical glass." Optical Systems Engineering

Damage in Laser Materials

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Publisher :
ISBN 13 :
Total Pages : 136 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Damage in Laser Materials by : Alexander J. Glass

Download or read book Damage in Laser Materials written by Alexander J. Glass and published by . This book was released on 1970 with total page 136 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Chemical Mechanical Planarization of Microelectronic Materials

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Publisher : John Wiley & Sons
ISBN 13 : 3527617752
Total Pages : 337 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Chemical Mechanical Planarization of Microelectronic Materials by : Joseph M. Steigerwald

Download or read book Chemical Mechanical Planarization of Microelectronic Materials written by Joseph M. Steigerwald and published by John Wiley & Sons. This book was released on 2008-09-26 with total page 337 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical Mechanical Planarization (CMP) plays an important role in today's microelectronics industry. With its ability to achieve global planarization, its universality (material insensitivity), its applicability to multimaterial surfaces, and its relative cost-effectiveness, CMP is the ideal planarizing medium for the interlayered dielectrics and metal films used in silicon integrated circuit fabrication. But although the past decade has seen unprecedented research and development into CMP, there has been no single-source reference to this rapidly emerging technology-until now. Chemical Mechanical Planarization of Microelectronic Materials provides engineers and scientists working in the microelectronics industry with unified coverage of both the fundamental mechanisms and engineering applications of CMP. Authors Steigerwald, Murarka, and Gutmann-all leading CMP pioneers-provide a historical overview of CMP, explain the various chemical and mechanical concepts involved, describe CMP materials and processes, review the latest scientific data on CMP worldwide, and offer examples of its uses in the microelectronics industry. They provide detailed coverage of the CMP of various materials used in the making of microcircuitry: tungsten, aluminum, copper, polysilicon, and various dielectric materials, including polymers. The concluding chapter describes post-CMP cleaning techniques, and most chapters feature problem sets to assist readers in developing a more practical understanding of CMP. The only comprehensive reference to one of the fastest growing integrated circuit manufacturing technologies, Chemical Mechanical Planarization of Microelectronic Materials is an important resource for research scientists and engineers working in the microelectronics industry. An indispensable resource for scientists and engineers working in the microelectronics industry Chemical Mechanical Planarization of Microelectronic Materials is the only comprehensive single-source reference to one of the fastest growing integrated circuit manufacturing technologies. It provides engineers and scientists who work in the microelectronics industry with unified coverage of both the fundamental mechanisms and engineering applications of CMP, including: * The history of CMP * Chemical and mechanical underpinnings of CMP * CMP materials and processes * Applications of CMP in the microelectronics industry * The CMP of tungsten, aluminum, copper, polysilicon, and various dielectrics, including polymers used in integrated circuit fabrication * Post-CMP cleaning techniques * Chapter-end problem sets are also included to assist readers in developing a practical understanding of CMP.

Metallurgical and Ceramic Protective Coatings

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Publisher : Springer Science & Business Media
ISBN 13 : 9400915012
Total Pages : 353 pages
Book Rating : 4.4/5 (9 download)

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Book Synopsis Metallurgical and Ceramic Protective Coatings by : K.H. Stern

Download or read book Metallurgical and Ceramic Protective Coatings written by K.H. Stern and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 353 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface engineering is an increasingly important field and consequently those involved need to be aware of the vast range of technologies available to modify surfaces. This text provides an up-to-date, authoritative exposition of the major condensed phase methods used for producing metallurgical and ceramic coatings. Each method is discussed thoroughly by an expert in that field. In each chapter the principle of the method, its range of applications and technical aspects involved are described. The book not only informs the reader about established technologies familiar only to specialists, but also details activity on the frontier of coating technology providing an insight into those potential technologies not yet fully developed but which should emerge in the near future.

Triboluminescence

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Publisher : Springer
ISBN 13 : 3319388428
Total Pages : 454 pages
Book Rating : 4.3/5 (193 download)

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Book Synopsis Triboluminescence by : David O. Olawale

Download or read book Triboluminescence written by David O. Olawale and published by Springer. This book was released on 2016-07-19 with total page 454 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book expounds on progress made over the last 35 years in the theory, synthesis, and application of triboluminescence for creating smart structures. It presents in detail the research into utilization of the triboluminescent properties of certain crystals as new sensor systems for smart engineering structures, as well as triboluminescence-based sensor systems that have the potential to enable wireless, in-situ, real time and distributed (WIRD) structural health monitoring of composite structures. The sensor component of any structural health monitoring (SHM) technology — measures the effects of the external load/event and provides the necessary inputs for appropriate preventive/corrective action to be taken in a smart structure — sits at the heart of such a system. This volume explores advances in materials properties and structural behavior underlying creation of smart composite structures and sensor systems for structural health monitoring of critical engineering structures, such as bridges, aircrafts, and wind blades.

Laser-Induced Damage of Optical Materials

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Author :
Publisher : CRC Press
ISBN 13 : 1420034057
Total Pages : 252 pages
Book Rating : 4.4/5 (2 download)

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Book Synopsis Laser-Induced Damage of Optical Materials by : Roger M. Wood

Download or read book Laser-Induced Damage of Optical Materials written by Roger M. Wood and published by CRC Press. This book was released on 2003-08-01 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: The laser power handling capacities of optical systems are determined by the physical properties of their component materials. At low intensity levels these factors are not important, but an understanding of damage mechanisms is fundamental to good design of laser products operating at high power. Laser Induced Damage of Optical Materials presents

Self-healing Materials

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Publisher : John Wiley & Sons
ISBN 13 : 3527625380
Total Pages : 306 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis Self-healing Materials by : Swapan Kumar Ghosh

Download or read book Self-healing Materials written by Swapan Kumar Ghosh and published by John Wiley & Sons. This book was released on 2009-08-04 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book covers self-healing concepts for all important material classes and their applications: polymers, ceramics, non-metallic and metallic coatings, alloys, nanocomposites, concretes and cements, as well as ionomers. Beginning with the inspiration from biological self-healing, its mimickry and conceptual transfer into approaches for the self-repair of artificially created materials, this book explains the strategies and mechanisms for the readers' basic understanding, then covers the different material classes and suitable self-healing concepts, giving examples for their application in practical situations. As the first book in this swiftly growing research field, it is of great interest to readers from many scientific and engineering disciplines, such as physics and chemistry, civil, architectural, mechanical, electronics and aerospace engineering.

Degradation of Implant Materials

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Publisher : Springer Science & Business Media
ISBN 13 : 1461439426
Total Pages : 521 pages
Book Rating : 4.4/5 (614 download)

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Book Synopsis Degradation of Implant Materials by : Noam Eliaz

Download or read book Degradation of Implant Materials written by Noam Eliaz and published by Springer Science & Business Media. This book was released on 2012-08-21 with total page 521 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book reviews the current understanding of the mechanical, chemical and biological processes that are responsible for the degradation of a variety of implant materials. All 18 chapters will be written by internationally renowned experts to address both fundamental and practical aspects of research into the field. Different failure mechanisms such as corrosion, fatigue, and wear will be reviewed, together with experimental techniques for monitoring them, either in vitro or in vivo. Procedures for implant retrieval and analysis will be presented. A variety of biomaterials (stainless steels, titanium and its alloys, nitinol, magnesium alloys, polyethylene, biodegradable polymers, silicone gel, hydrogels, calcium phosphates) and medical devices (orthopedic and dental implants, stents, heart valves, breast implants) will be analyzed in detail. The book will serve as a broad reference source for graduate students and researchers studying biomedicine, corrosion, surface science, and electrochemistry.