Sputtering by Particle Bombardment

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Author :
Publisher : Springer Science & Business Media
ISBN 13 : 3540445021
Total Pages : 527 pages
Book Rating : 4.5/5 (44 download)

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Book Synopsis Sputtering by Particle Bombardment by : Rainer Behrisch

Download or read book Sputtering by Particle Bombardment written by Rainer Behrisch and published by Springer Science & Business Media. This book was released on 2007-07-26 with total page 527 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.

Sputtering by Particle Bombardment I

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Author :
Publisher : Springer
ISBN 13 : 9783662308882
Total Pages : 284 pages
Book Rating : 4.3/5 (88 download)

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Book Synopsis Sputtering by Particle Bombardment I by : R. Behrisch

Download or read book Sputtering by Particle Bombardment I written by R. Behrisch and published by Springer. This book was released on 2014-08-23 with total page 284 pages. Available in PDF, EPUB and Kindle. Book excerpt: With contributions by numerous experts

Sputtering by Particle Bombardment III

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Publisher : Springer
ISBN 13 : 9783540534280
Total Pages : 440 pages
Book Rating : 4.5/5 (342 download)

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Book Synopsis Sputtering by Particle Bombardment III by : Rainer Behrisch

Download or read book Sputtering by Particle Bombardment III written by Rainer Behrisch and published by Springer. This book was released on 1991-09-10 with total page 440 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described in- clude surface and depth analysis, micromachining, and the production of surface coatings and thin films. As in the previous two volumes, the various chapters have been written by the main authorities in the field. The book addresses a broad audience: scientists active in the field will find the overview and background information they have long been seeking, while students and new comers to surface science and materials science will find a readable introduction to sputtering.

Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography

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Author :
Publisher :
ISBN 13 : 9780387125930
Total Pages : pages
Book Rating : 4.1/5 (259 download)

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Book Synopsis Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography by :

Download or read book Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography written by and published by . This book was released on 1983 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Sputtering by Particle Bombardment I

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Author :
Publisher : Springer
ISBN 13 : 9783540105213
Total Pages : 304 pages
Book Rating : 4.1/5 (52 download)

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Book Synopsis Sputtering by Particle Bombardment I by : R. Behrisch

Download or read book Sputtering by Particle Bombardment I written by R. Behrisch and published by Springer. This book was released on 1981-08-01 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt: With contributions by numerous experts

Sputtering by Particle Bombardment III

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Author :
Publisher : Springer
ISBN 13 : 9783662311042
Total Pages : 415 pages
Book Rating : 4.3/5 (11 download)

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Book Synopsis Sputtering by Particle Bombardment III by : Rainer Behrisch

Download or read book Sputtering by Particle Bombardment III written by Rainer Behrisch and published by Springer. This book was released on 2014-08-23 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described in- clude surface and depth analysis, micromachining, and the production of surface coatings and thin films. As in the previous two volumes, the various chapters have been written by the main authorities in the field. The book addresses a broad audience: scientists active in the field will find the overview and background information they have long been seeking, while students and new comers to surface science and materials science will find a readable introduction to sputtering.

Sputtering by Particle Bombardment III

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Author :
Publisher :
ISBN 13 :
Total Pages : 410 pages
Book Rating : 4.:/5 (76 download)

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Book Synopsis Sputtering by Particle Bombardment III by : Rainer Behrisch

Download or read book Sputtering by Particle Bombardment III written by Rainer Behrisch and published by . This book was released on 1991 with total page 410 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Sputtering by Particle Bombardment II

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Publisher :
ISBN 13 : 9783662311684
Total Pages : 412 pages
Book Rating : 4.3/5 (116 download)

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Book Synopsis Sputtering by Particle Bombardment II by : R. Behrisch

Download or read book Sputtering by Particle Bombardment II written by R. Behrisch and published by . This book was released on 2014-01-15 with total page 412 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Sputtering by Particle Bombardment: Characteristics of sputtered particles, technical applications

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Author :
Publisher :
ISBN 13 :
Total Pages : pages
Book Rating : 4.:/5 (81 download)

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Book Synopsis Sputtering by Particle Bombardment: Characteristics of sputtered particles, technical applications by : Rainer Behrisch

Download or read book Sputtering by Particle Bombardment: Characteristics of sputtered particles, technical applications written by Rainer Behrisch and published by . This book was released on 1981 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Reactive Sputter Deposition

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Publisher : Springer Science & Business Media
ISBN 13 : 3540766642
Total Pages : 584 pages
Book Rating : 4.5/5 (47 download)

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Book Synopsis Reactive Sputter Deposition by : Diederik Depla

Download or read book Reactive Sputter Deposition written by Diederik Depla and published by Springer Science & Business Media. This book was released on 2008-06-24 with total page 584 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.

Ion-Solid Interactions

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Author :
Publisher : Cambridge University Press
ISBN 13 : 052137376X
Total Pages : 572 pages
Book Rating : 4.5/5 (213 download)

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Book Synopsis Ion-Solid Interactions by : Michael Nastasi

Download or read book Ion-Solid Interactions written by Michael Nastasi and published by Cambridge University Press. This book was released on 1996-03-29 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprehensive guide to an important materials science technique for students and researchers.

Frontiers in Surface Science and Interface Science

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Author :
Publisher : Gulf Professional Publishing
ISBN 13 : 9780444510419
Total Pages : 1076 pages
Book Rating : 4.5/5 (14 download)

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Book Synopsis Frontiers in Surface Science and Interface Science by : C.B. Duke

Download or read book Frontiers in Surface Science and Interface Science written by C.B. Duke and published by Gulf Professional Publishing. This book was released on 2002-05-21 with total page 1076 pages. Available in PDF, EPUB and Kindle. Book excerpt: Any notion that surface science is all about semiconductors and coatings is laid to rest by this encyclopedic publication: Bioengineered interfaces in medicine, interstellar dust, DNA computation, conducting polymers, the surfaces of atomic nuclei - all are brought up to date. Frontiers in Surface and Interface Science - a milestone publication deserving a wide readership. It combines a sweeping expert survey of research today with an educated look into the future. It is a future that embraces surface phenomena on scales from the subatomic to the galactic, as well as traditional topics like semiconductor design, catalysis, and surface processing, modeling and characterization. And, great efforts have been made to express sophisticated ideas in an attractive and accessible way. Nanotechnology, surfaces for DNA computation, polymer-based electronics, soft surfaces, interstellar surface chemistry - all feature in this comprehensive collection.

Handbook of Ion Beam Processing Technology

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Author :
Publisher : William Andrew
ISBN 13 :
Total Pages : 464 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Handbook of Ion Beam Processing Technology by : Jerome J. Cuomo

Download or read book Handbook of Ion Beam Processing Technology written by Jerome J. Cuomo and published by William Andrew. This book was released on 1989 with total page 464 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book, by 36 authorities on the subject, deals with ion beam processing for basic sputter etching of samples, for sputter deposition of thin films, for synthesis of material in thin film form, and of the modification of thin film properties.

The Foundations of Vacuum Coating Technology

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Author :
Publisher : William Andrew
ISBN 13 : 0128130857
Total Pages : 378 pages
Book Rating : 4.1/5 (281 download)

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Book Synopsis The Foundations of Vacuum Coating Technology by : Donald M. Mattox

Download or read book The Foundations of Vacuum Coating Technology written by Donald M. Mattox and published by William Andrew. This book was released on 2018-08-21 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries. History and detailed descriptions of Vacuum Deposition Technologies Review of Enabling Technologies and their importance to current applications Extensively referenced text Patents are referenced as part of the history Historical Timelines for Vacuum Coating Technology and Vacuum/Plasma Technology Glossary of Terms for vacuum coating

Advanced Techniques for Surface Engineering

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Publisher : Springer Science & Business Media
ISBN 13 : 940170631X
Total Pages : 402 pages
Book Rating : 4.4/5 (17 download)

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Book Synopsis Advanced Techniques for Surface Engineering by : W. Gissler

Download or read book Advanced Techniques for Surface Engineering written by W. Gissler and published by Springer Science & Business Media. This book was released on 2013-04-17 with total page 402 pages. Available in PDF, EPUB and Kindle. Book excerpt: Today's shortages of resources make the search for wear and corrosion resistant materials one of the most important tasks of the next century. Since the surface of a material is the location where any interaction occurs, it is that there the hardest requirements on the material are imposed: to be wear resistant for tools and bearings; to be corrosion resistant for turbine blades and tubes in the petrochemical industry; to be antireflecting for solar cells; to be decorative for architectural panels and to combine several of these properties in other applications. Surface engineering is the general term that incorporates all the techniques by which a surface modification can be accomplished. These techniques include both coating and modification of the surface by ion implantation and laser beam melting. In recent years a continuously growing number of these techniques were developed to the extent that it became more and more difficult to maintain an overlook and to understand which of these highly differentiated techniques might be applied to resolve a given surface engineering problem. A similar development is also occuring for surface characterization techniques. This volume contains contributions from renowned scientists and engineers to the Eurocourse the aim of which was to inform about the various techniques and to give a comprehensive survey of the latest development on this subject.

Flat Panel Display Manufacturing

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Publisher : John Wiley & Sons
ISBN 13 : 1119161355
Total Pages : 496 pages
Book Rating : 4.1/5 (191 download)

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Book Synopsis Flat Panel Display Manufacturing by : Jun Souk

Download or read book Flat Panel Display Manufacturing written by Jun Souk and published by John Wiley & Sons. This book was released on 2018-07-23 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: An extensive introduction to the engineering and manufacture of current and next-generation flat panel displays This book provides a broad overview of the manufacturing of flat panel displays, with a particular emphasis on the display systems at the forefront of the current mobile device revolution. It is structured to cover a broad spectrum of topics within the unifying theme of display systems manufacturing. An important theme of this book is treating displays as systems, which expands the scope beyond the technologies and manufacturing of traditional display panels (LCD and OLED) to also include key components for mobile device applications, such as flexible OLED, thin LCD backlights, as well as the manufacturing of display module assemblies. Flat Panel Display Manufacturing fills an important gap in the current book literature describing the state of the art in display manufacturing for today's displays, and looks to create a reference the development of next generation displays. The editorial team brings a broad and deep perspective on flat panel display manufacturing, with a global view spanning decades of experience at leading institutions in Japan, Korea, Taiwan, and the USA, and including direct pioneering contributions to the development of displays. The book includes a total of 24 chapters contributed by experts at leading manufacturing institutions from the global FPD industry in Korea, Japan, Taiwan, Germany, Israel, and USA. Provides an overview of the evolution of display technologies and manufacturing Treats display products as systems with manifold applications, expanding the scope beyond traditional display panel manufacturing to key components for mobile devices and TV applications Provides a detailed overview of LCD manufacturing, including panel architectures, process flows, and module manufacturing Provides a detailed overview of OLED manufacturing for both mobile and TV applications, including a chapter dedicated to the young field of flexible OLED manufacturing Provides a detailed overview of the key unit processes and corresponding manufacturing equipment, including manufacturing test & repair of TFT array panels as well as display module inspection & repair Introduces key topics in display manufacturing science and engineering, including productivity & quality, factory architectures, and green manufacturing Flat Panel Display Manufacturing will appeal to professionals and engineers in R&D departments for display-related technology development, as well as to graduates and Ph.D. students specializing in LCD/OLED/other flat panel displays.

Microelectronic Materials and Processes

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Publisher : Springer Science & Business Media
ISBN 13 : 9780792301547
Total Pages : 1006 pages
Book Rating : 4.3/5 (15 download)

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Book Synopsis Microelectronic Materials and Processes by : Roland Levy

Download or read book Microelectronic Materials and Processes written by Roland Levy and published by Springer Science & Business Media. This book was released on 1989-01-31 with total page 1006 pages. Available in PDF, EPUB and Kindle. Book excerpt: The primary thrust of very large scale integration (VLS!) is the miniaturization of devices to increase packing density, achieve higher speed, and consume lower power. The fabrication of integrated circuits containing in excess of four million components per chip with design rules in the submicron range has now been made possible by the introduction of innovative circuit designs and the development of new microelectronic materials and processes. This book addresses the latter challenge by assessing the current status of the science and technology associated with the production of VLSI silicon circuits. It represents the cumulative effort of experts from academia and industry who have come together to blend their expertise into a tutorial overview and cohesive update of this rapidly expanding field. A balance of fundamental and applied contributions cover the basics of microelectronics materials and process engineering. Subjects in materials science include silicon, silicides, resists, dielectrics, and interconnect metallization. Subjects in process engineering include crystal growth, epitaxy, oxidation, thin film deposition, fine-line lithography, dry etching, ion implantation, and diffusion. Other related topics such as process simulation, defects phenomena, and diagnostic techniques are also included. This book is the result of a NATO-sponsored Advanced Study Institute (AS!) held in Castelvecchio Pascoli, Italy. Invited speakers at this institute provided manuscripts which were edited, updated, and integrated with other contributions solicited from non-participants to this AS!.