Sputter Deposition Of Aluminum Nitride For Applications In Thin Film Resonators

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Piezoelectric MEMS Resonators

Author : Harmeet Bhugra
Publisher : Springer
ISBN 13 : 3319286889
Total Pages : 423 pages
Book Rating : 4.3/5 (192 download)

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Book Synopsis Piezoelectric MEMS Resonators by : Harmeet Bhugra

Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Acoustic Wave and Electromechanical Resonators

Author : Humberto Campanella
Publisher : Artech House
ISBN 13 : 1607839784
Total Pages : 364 pages
Book Rating : 4.6/5 (78 download)

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Book Synopsis Acoustic Wave and Electromechanical Resonators by : Humberto Campanella

Download or read book Acoustic Wave and Electromechanical Resonators written by Humberto Campanella and published by Artech House. This book was released on 2010 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.

MEMS Materials and Processes Handbook

Author : Reza Ghodssi
Publisher : Springer Science & Business Media
ISBN 13 : 0387473181
Total Pages : 1211 pages
Book Rating : 4.3/5 (874 download)

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Book Synopsis MEMS Materials and Processes Handbook by : Reza Ghodssi

Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Piezoelectricity, Acoustic Waves and Device Applications

Author : Weiqiu Chen
Publisher : World Scientific
ISBN 13 : 981277016X
Total Pages : 400 pages
Book Rating : 4.8/5 (127 download)

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Book Synopsis Piezoelectricity, Acoustic Waves and Device Applications by : Weiqiu Chen

Download or read book Piezoelectricity, Acoustic Waves and Device Applications written by Weiqiu Chen and published by World Scientific. This book was released on 2007 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume covers important subjects in the field of piezoelectric devices and applications with the latest research on piezoelectricity, acoustic waves, manufacturing technology, and design techniques. It includes up-to-date research and information on materials, new products, technological trends, and design methods of benefit to academics and researchers in the piezoelectric device industry. Contributors to this volume include prominent experts such as Clemens Ruppel of Epcos, Daining Fang of Tsinghua University, Tong-Yi Zhang of University of Science and Technology, Hong Kong, and CS Lam of TXC Corporation. A number of papers have been dedicated to Professor Harry F Tiersten of Resselear Polytechnic Institute, who passed away in 2006, for his contributions to the fundamental theory of piezoelectricity and methods for acoustic wave device analysis.

Energy Research Abstracts

Author :
Publisher :
ISBN 13 :
Total Pages : 1744 pages
Book Rating : 4.U/5 (183 download)

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Book Synopsis Energy Research Abstracts by :

Download or read book Energy Research Abstracts written by and published by . This book was released on 1982 with total page 1744 pages. Available in PDF, EPUB and Kindle. Book excerpt:

The Nano-Micro Interface

Author : Marcel Van de Voorde
Publisher : John Wiley & Sons
ISBN 13 : 3527679219
Total Pages : 771 pages
Book Rating : 4.5/5 (276 download)

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Book Synopsis The Nano-Micro Interface by : Marcel Van de Voorde

Download or read book The Nano-Micro Interface written by Marcel Van de Voorde and published by John Wiley & Sons. This book was released on 2015-01-12 with total page 771 pages. Available in PDF, EPUB and Kindle. Book excerpt: Controlling the properties of materials by modifying their composition and by manipulating the arrangement of atoms and molecules is a dream that can be achieved by nanotechnology. As one of the fastest developing and innovative -- as well as well-funded -- fields in science, nanotechnology has already significantly changed the research landscape in chemistry, materials science, and physics, with numerous applications in consumer products, such as sunscreens and water-repellent clothes. It is also thanks to this multidisciplinary field that flat panel displays, highly efficient solar cells, and new biological imaging techniques have become reality. This second, enlarged edition has been fully updated to address the rapid progress made within this field in recent years. Internationally recognized experts provide comprehensive, first-hand information, resulting in an overview of the entire nano-micro world. In so doing, they cover aspects of funding and commercialization, the manufacture and future applications of nanomaterials, the fundamentals of nanostructures leading to macroscale objects as well as the ongoing miniaturization toward the nanoscale domain. Along the way, the authors explain the effects occurring at the nanoscale and the nanotechnological characterization techniques. An additional topic on the role of nanotechnology in energy and mobility covers the challenge of developing materials and devices, such as electrodes and membrane materials for fuel cells and catalysts for sustainable transportation. Also new to this edition are the latest figures for funding, investments, and commercialization prospects, as well as recent research programs and organizations.

The Nano-Micro Interface, 2 Volumes

Author : Marcel Van de Voorde
Publisher : John Wiley & Sons
ISBN 13 : 3527336338
Total Pages : 771 pages
Book Rating : 4.5/5 (273 download)

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Book Synopsis The Nano-Micro Interface, 2 Volumes by : Marcel Van de Voorde

Download or read book The Nano-Micro Interface, 2 Volumes written by Marcel Van de Voorde and published by John Wiley & Sons. This book was released on 2015-03-09 with total page 771 pages. Available in PDF, EPUB and Kindle. Book excerpt: Controlling the properties of materials by modifying their composition and by manipulating the arrangement of atoms and molecules is a dream that can be achieved by nanotechnology. As one of the fastest developing and innovative -- as well as well-funded -- fields in science, nanotechnology has already significantly changed the research landscape in chemistry, materials science, and physics, with numerous applications in consumer products, such as sunscreens and water-repellent clothes. It is also thanks to this multidisciplinary field that flat panel displays, highly efficient solar cells, and new biological imaging techniques have become reality. This second, enlarged edition has been fully updated to address the rapid progress made within this field in recent years. Internationally recognized experts provide comprehensive, first-hand information, resulting in an overview of the entire nano-micro world. In so doing, they cover aspects of funding and commercialization, the manufacture and future applications of nanomaterials, the fundamentals of nanostructures leading to macroscale objects as well as the ongoing miniaturization toward the nanoscale domain. Along the way, the authors explain the effects occurring at the nanoscale and the nanotechnological characterization techniques. An additional topic on the role of nanotechnology in energy and mobility covers the challenge of developing materials and devices, such as electrodes and membrane materials for fuel cells and catalysts for sustainable transportation. Also new to this edition are the latest figures for funding, investments, and commercialization prospects, as well as recent research programs and organizations.

Piezoelectricity, Acoustic Waves, And Device Applications - Proceedings Of The 2006 Symposium

Author : Ji Wang
Publisher : World Scientific
ISBN 13 : 9814474851
Total Pages : 400 pages
Book Rating : 4.8/5 (144 download)

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Book Synopsis Piezoelectricity, Acoustic Waves, And Device Applications - Proceedings Of The 2006 Symposium by : Ji Wang

Download or read book Piezoelectricity, Acoustic Waves, And Device Applications - Proceedings Of The 2006 Symposium written by Ji Wang and published by World Scientific. This book was released on 2007-09-27 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume covers important subjects in the field of piezoelectric devices and applications with the latest research on piezoelectricity, acoustic waves, manufacturing technology, and design techniques. It includes up-to-date research and information on materials, new products, technological trends, and design methods of benefit to academics and researchers in the piezoelectric device industry. Contributors to this volume include prominent experts such as Clemens Ruppel of Epcos, Daining Fang of Tsinghua University, Tong-Yi Zhang of University of Science and Technology, Hong Kong, and CS Lam of TXC Corporation. A number of papers have been dedicated to Professor Harry F Tiersten of Resselear Polytechnic Institute, who passed away in 2006, for his contributions to the fundamental theory of piezoelectricity and methods for acoustic wave device analysis.

Chemical Abstracts

Author :
Publisher :
ISBN 13 :
Total Pages : 2710 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Chemical Abstracts by :

Download or read book Chemical Abstracts written by and published by . This book was released on 2002 with total page 2710 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Springer Handbook of Nanotechnology

Author : Bharat Bhushan
Publisher : Springer
ISBN 13 : 3662543575
Total Pages : 1704 pages
Book Rating : 4.6/5 (625 download)

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Book Synopsis Springer Handbook of Nanotechnology by : Bharat Bhushan

Download or read book Springer Handbook of Nanotechnology written by Bharat Bhushan and published by Springer. This book was released on 2017-11-05 with total page 1704 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive handbook has become the definitive reference work in the field of nanoscience and nanotechnology, and this 4th edition incorporates a number of recent new developments. It integrates nanofabrication, nanomaterials, nanodevices, nanomechanics, nanotribology, materials science, and reliability engineering knowledge in just one volume. Furthermore, it discusses various nanostructures; micro/nanofabrication; micro/nanodevices and biomicro/nanodevices, as well as scanning probe microscopy; nanotribology and nanomechanics; molecularly thick films; industrial applications and nanodevice reliability; societal, environmental, health and safety issues; and nanotechnology education. In this new edition, written by an international team of over 140 distinguished experts and put together by an experienced editor with a comprehensive understanding of the field, almost all the chapters are either new or substantially revised and expanded, with new topics of interest added. It is an essential resource for anyone working in the rapidly evolving field of key technology, including mechanical and electrical engineers, materials scientists, physicists, and chemists.

Silicon Photonics for High-Performance Computing and Beyond

Author : Mahdi Nikdast
Publisher : CRC Press
ISBN 13 : 1000480143
Total Pages : 391 pages
Book Rating : 4.0/5 (4 download)

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Book Synopsis Silicon Photonics for High-Performance Computing and Beyond by : Mahdi Nikdast

Download or read book Silicon Photonics for High-Performance Computing and Beyond written by Mahdi Nikdast and published by CRC Press. This book was released on 2021-11-16 with total page 391 pages. Available in PDF, EPUB and Kindle. Book excerpt: Silicon photonics is beginning to play an important role in driving innovations in communication and computation for an increasing number of applications, from health care and biomedical sensors to autonomous driving, datacenter networking, and security. In recent years, there has been a significant amount of effort in industry and academia to innovate, design, develop, analyze, optimize, and fabricate systems employing silicon photonics, shaping the future of not only Datacom and telecom technology but also high-performance computing and emerging computing paradigms, such as optical computing and artificial intelligence. Different from existing books in this area, Silicon Photonics for High-Performance Computing and Beyond presents a comprehensive overview of the current state-of-the-art technology and research achievements in applying silicon photonics for communication and computation. It focuses on various design, development, and integration challenges, reviews the latest advances spanning materials, devices, circuits, systems, and applications. Technical topics discussed in the book include: • Requirements and the latest advances in high-performance computing systems • Device- and system-level challenges and latest improvements to deploy silicon photonics in computing systems • Novel design solutions and design automation techniques for silicon photonic integrated circuits • Novel materials, devices, and photonic integrated circuits on silicon • Emerging computing technologies and applications based on silicon photonics Silicon Photonics for High-Performance Computing and Beyond presents a compilation of 19 outstanding contributions from academic and industry pioneers in the field. The selected contributions present insightful discussions and innovative approaches to understand current and future bottlenecks in high-performance computing systems and traditional computing platforms, and the promise of silicon photonics to address those challenges. It is ideal for researchers and engineers working in the photonics, electrical, and computer engineering industries as well as academic researchers and graduate students (M.S. and Ph.D.) in computer science and engineering, electronic and electrical engineering, applied physics, photonics, and optics.

Acoustical Imaging

Author : Roman Gr. Maev
Publisher : Springer Science & Business Media
ISBN 13 : 1441986065
Total Pages : 510 pages
Book Rating : 4.4/5 (419 download)

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Book Synopsis Acoustical Imaging by : Roman Gr. Maev

Download or read book Acoustical Imaging written by Roman Gr. Maev and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 510 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book constitutes the Proceedings of the 26th Symposium on Acoustical Imaging held inWindsor, Ontario, Canada during September 9-12, 2001. This traditional scientific event is recognized as a premier forum for the presentation of advanced research results in both theoretical and experimental development. The lAIS was conceived at a 1967Acoustical Holography meeting in the USA. Since then, these traditional symposia provide an opportunity for specialists who are working in this area to make new acquaintances, renew old friendships and present recent results of their research. Our Symposium has grown significantly in size due to a broad interest in various topics and to the quality of the presentations. For the firsttime in 40 years, the IAIS was held in the province of Ontario in Windsor, Canada's Automotive Capital and City of Roses. The 26th IAIS attracted over 100specialists from 13countries representing this interdisciplinary field in physical acoustics, image processing, applied mathematics, solid-state physics, biology and medicine, industrial applications and quality control technologies. The 26th lAIS was organized in the traditional way with only one addition-a Special Session "History of Acoustical Imaging" with the involvement of such well known scientists as Andrew Briggs, Noriyoshi Chubachi, Robert Green Jr., Joie Jones, Kenneth Erikson, and Bernhard Tittmann. Many of these speakers are well known scientists in their fields and we would like to thank them for making this session extremely successful.

Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure

Download Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure PDF Online Free

Author : Simon Fichtner
Publisher : BoD – Books on Demand
ISBN 13 : 3750431426
Total Pages : 180 pages
Book Rating : 4.7/5 (54 download)

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Book Synopsis Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure by : Simon Fichtner

Download or read book Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure written by Simon Fichtner and published by BoD – Books on Demand. This book was released on 2020-02-18 with total page 180 pages. Available in PDF, EPUB and Kindle. Book excerpt: The usage of piezoelectric and ferroelectric thin films is a promising approach to significantly increase the functionality of microelectromechanical systems (MEMS) as well as of microelectronics in general. Since the device performance thus becomes directly connected to the properties of the functional film, new as well as improved piezoelectric and ferroelectric materials can allow substantial technological innovation. This dissertation focused on enhancing the piezoelectric properties of AlN by forming solid solutions with ScN and includes the first experimental observation of ferroelectricity in AlScN, and thus the first discovery of ferroelectricity in a III-V semiconductor based material in general. Compared to AlN, piezoelectric coefficients that are up to 450% higher were realized in AlScN, with d33f reaching a maximum of 17.2 pm/V and e31f reaching 3.2 C/m2. In this context, the identification and subsequent rectification of a major morphological instability in AlScN that becomes more pronounced with increasing Sc content was reported. Thus, films free of morphological inhomogeneities with close to ideal piezoelectric properties could be deposited up to 0.43% ScN. Control of the intrinsic film stress was demonstrated over a wide range from strongly tensile to strongly compressive for all the investigated Sc contents. The improved piezoelectric coefficients together with the possibility of stress control allowed the fabrication of suspended MEMS structures with electromechanical coupling coefficients improved by more than 320% relative to AlN. Ferroelectrictiy in AlScN was observed starting at ScN contents of 27%. Its emergence was connected to the same gradual evolution from the initial wurtzite structure to the layered hexagonal structure that also causes the enhanced piezoelectric coefficients while increasing the Sc content. Ferroelectric AlScN allowed the first experimental observation of the spontaneous polarization of the wurtzite structure and confirms that this polarization is more than one order of magnitude above most previous theoretical predictions. The large, tunable coercive fields and polarization constants together with the broad linear strain intervals, a paraelectric transition temperature above 600°C as well as the technological compatibility of the III-nitrides lead to a combination of exceptional properties that was previously inaccessible in ferroelectric thin films.

Masters Theses in the Pure and Applied Sciences Accepted by Colleges and Universities of the United States and Canada

Author :
Publisher :
ISBN 13 :
Total Pages : 442 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Masters Theses in the Pure and Applied Sciences Accepted by Colleges and Universities of the United States and Canada by :

Download or read book Masters Theses in the Pure and Applied Sciences Accepted by Colleges and Universities of the United States and Canada written by and published by . This book was released on 1996 with total page 442 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Scientific and Technical Aerospace Reports

Author :
Publisher :
ISBN 13 :
Total Pages : 892 pages
Book Rating : 4.:/5 (31 download)

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Book Synopsis Scientific and Technical Aerospace Reports by :

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1994 with total page 892 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Polycrystalline Thin Films : Structure, Texture, Properties, and Applications

Author :
Publisher :
ISBN 13 :
Total Pages : 818 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Polycrystalline Thin Films : Structure, Texture, Properties, and Applications by :

Download or read book Polycrystalline Thin Films : Structure, Texture, Properties, and Applications written by and published by . This book was released on 1994 with total page 818 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Evolution of Thin-Film and Surface Structure and Morphology: Volume 355

Author : B. G. Demczyk
Publisher :
ISBN 13 :
Total Pages : 696 pages
Book Rating : 4.3/5 (91 download)

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Book Synopsis Evolution of Thin-Film and Surface Structure and Morphology: Volume 355 by : B. G. Demczyk

Download or read book Evolution of Thin-Film and Surface Structure and Morphology: Volume 355 written by B. G. Demczyk and published by . This book was released on 1995-07-18 with total page 696 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.