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Spectral Characterization Of Solid State Laser Driven Plasma Sources Of Euv Light
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Book Synopsis Spectral Characterization of Solid-state Laser-driven Plasma Sources of EUV Light by :
Download or read book Spectral Characterization of Solid-state Laser-driven Plasma Sources of EUV Light written by and published by . This book was released on 2021 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this thesis, the fundamental limits of converting laser radiation via tin plasmas into EUV light in a 2% bandwidth around 13.5nm, relevant to nanolithographic applications, are experimentally investigated. In particular, plasma generation using near- to mid-infrared lasers is studied. This laser wavelength region, in combination with available energy-efficient solid-state laser technology, shows promising opportunities to achieve high plasma-brightness in combination with high overall efficiencies of converting electrical power to useful EUV radiation. In terms of light source optimization, we investigate the effects of varying target morphologies and laser irradiation parameters, e.g., laser wavelength, laser intensity, and beam spot size on key experimental observables such as EUV spectra, the conversion efficiency of laser energy into industrially useful 13.5nm light (CE), the purity of the spectral emission (SP) and the plasma's optical depth. In Chapter 1, the radiative properties of plasmas formed by irradiating spherical tin droplets with high-energy, 1-um-wavelength laser pulses are investigated. Using pulses of constant intensity in space and time the plasma is homogeneously heated. A significant growth of CE and of the overall efficiency in radiating EUV light is found with increasing laser intensity, droplet size and laser pulse duration. Through optimization of these parameters, CE’s of up to 3.2% are obtained. In Chapter 2, the EUV spectra from Chapter 1 are analyzed in the context of the plasma’s optical depth using a one-dimensional, analytic radiation transport model. Using this model, we find an increase in optical depth with increasing droplet diameter and laser pulse duration. This increase in optical depth is explained in terms of a larger plasma scale length.
Book Synopsis EUV Sources for Lithography by : Vivek Bakshi
Download or read book EUV Sources for Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2006 with total page 1104 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.
Book Synopsis Developments for Broadband Spectral and Spatial Characterization of Tin Plasma Light Sources for EUV Lithography by :
Download or read book Developments for Broadband Spectral and Spatial Characterization of Tin Plasma Light Sources for EUV Lithography written by and published by . This book was released on 2023 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Spectroscopic Studies of Laser Plasmas for EUV Sources by : Simi A. George
Download or read book Spectroscopic Studies of Laser Plasmas for EUV Sources written by Simi A. George and published by . This book was released on 2007 with total page 200 pages. Available in PDF, EPUB and Kindle. Book excerpt: With the availability of high re ectivity multilayer mirrors and zone plate lenses, the EUV region (5nm-40nm) of the electromagnetic spectrum is currently being explored for applications of nanoscale printing and imaging. Advances made in this area have consequences for many areas of science. Research for producing a compact, bright EUV source for laboratory use has gained momentum in recent years. For this study, EUV radiation is produced by irradiating target materials using a focused laser beam. Focused laser beam ionizes the target to create a hot, dense, pulsed plasma source, where emission is a result of the relaxation of excited levels. Spectroscopy is used as the main diagnostic to obtain the spectral signature of the plasma. Spectral characteristics are used to deduce the physical state of plasma, thus enabling the tuning of laser irradiance conditions to maximize the needed emission bandwidth. Various target materials are studied, as well as di erent target geometries, with spectroscopy below 200 nm on pulsed micro-plasmas being a particularly daunting task. Total range spectroscopy from 1 nm to greater than 1 micron is completed for tin-doped spherical droplet plasma source. Reliable plasma diagnostics require both accurate measurements and solid theoretical support in order to interpret the experimental results. Using existing 1D-hydrocode, temperature and density characteristics of the expanding plasma is simulated for any set of experimental conditions. Existing atomic codes written for calculating one-electron radial wavefunctions with LS-coupling scheme via Hartree-Fock method is used in order to gain details of the ion stages, populations, transitions, etc, contributing to the spectral data.
Book Synopsis High Energy and Short Pulse Lasers by : Richard Viskup
Download or read book High Energy and Short Pulse Lasers written by Richard Viskup and published by BoD – Books on Demand. This book was released on 2016-09-07 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gives the readers an introduction to experimental and theoretical knowledge acquired by large-scale laser laboratories that are dealing with extra-high peak power and ultrashort laser pulses for research of terawatt (TW), petawatt (PW), or near-future exawatt (EW) laser interactions, for soft X-ray sources, for acceleration of particles, or for generation of hot dense thermal plasma for the laser fusion. The other part of this book is dealing with the small-scale laser laboratories that are using for its research on commercial sources of laser radiation, nanosecond (ns), picosecond (ps), or femtosecond (fs) laser pulses, either for basic research or for more advanced applications. This book is divided into six main sections dealing with short and ultrashort laser pulses, laser-produced soft X-ray sources, large-scale high-power laser systems, free-electron lasers, fiber-based sources of short optical pulse, and applications of short pulse lasers. In each chapter readers can find fascinating topics related to the high energy and/or short pulse laser technique. Individual chapters should serve the broad spectrum of readers of different expertise, layman, undergraduate and postgraduate students, scientists, and engineers, who may in this book find easily explained fundamentals as well as advanced principles of particular subjects related to these phenomena.
Book Synopsis Modern Methods in Collisional-Radiative Modeling of Plasmas by : Yuri Ralchenko
Download or read book Modern Methods in Collisional-Radiative Modeling of Plasmas written by Yuri Ralchenko and published by Springer. This book was released on 2016-02-25 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a compact yet comprehensive overview of recent developments in collisional-radiative (CR) modeling of laboratory and astrophysical plasmas. It describes advances across the entire field, from basic considerations of model completeness to validation and verification of CR models to calculation of plasma kinetic characteristics and spectra in diverse plasmas. Various approaches to CR modeling are presented, together with numerous examples of applications. A number of important topics, such as atomic models for CR modeling, atomic data and its availability and quality, radiation transport, non-Maxwellian effects on plasma emission, ionization potential lowering, and verification and validation of CR models, are thoroughly addressed. Strong emphasis is placed on the most recent developments in the field, such as XFEL spectroscopy. Written by leading international research scientists from a number of key laboratories, the book offers a timely summary of the most recent progress in this area. It will be a useful and practical guide for students and experienced researchers working in plasma spectroscopy, spectra simulations, and related fields.
Book Synopsis Harnessing Light by : National Research Council
Download or read book Harnessing Light written by National Research Council and published by National Academies Press. This book was released on 1998-09-25 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical science and engineering affect almost every aspect of our lives. Millions of miles of optical fiber carry voice and data signals around the world. Lasers are used in surgery of the retina, kidneys, and heart. New high-efficiency light sources promise dramatic reductions in electricity consumption. Night-vision equipment and satellite surveillance are changing how wars are fought. Industry uses optical methods in everything from the production of computer chips to the construction of tunnels. Harnessing Light surveys this multitude of applications, as well as the status of the optics industry and of research and education in optics, and identifies actions that could enhance the field's contributions to society and facilitate its continued technical development.
Book Synopsis The Physics of Inertial Fusion by : Stefano Atzeni
Download or read book The Physics of Inertial Fusion written by Stefano Atzeni and published by OUP Oxford. This book was released on 2004-06-03 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is on inertial confinement fusion, an alternative way to produce electrical power from hydrogen fuel by using powerful lasers or particle beams. It involves the compression of tiny amounts (micrograms) of fuel to thousand times solid density and pressures otherwise existing only in the centre of stars. Thanks to advances in laser technology, it is now possible to produce such extreme states of matter in the laboratory. Recent developments have boosted laser intensities again with new possibilities for laser particle accelerators, laser nuclear physics, and fast ignition of fusion targets. This is a reference book for those working on beam plasma physics, be it in the context of fundamental research or applications to fusion energy or novel ultra-bright laser sources. The book combines quite different areas of physics: beam target interaction, dense plasmas, hydrodynamic implosion and instabilities, radiative energy transfer as well as fusion reactions. Particular attention is given to simple and useful modelling, including dimensional analysis and similarity solutions. Both authors have worked in this field for more than 20 years. They want to address in particular those teaching this topic to students and all those interested in understanding the technical basis.
Book Synopsis Soft X-Rays and Extreme Ultraviolet Radiation by : David Attwood
Download or read book Soft X-Rays and Extreme Ultraviolet Radiation written by David Attwood and published by Cambridge University Press. This book was released on 2007-02-22 with total page 611 pages. Available in PDF, EPUB and Kindle. Book excerpt: This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.
Book Synopsis The Theory of Atomic Structure and Spectra by : Robert D. Cowan
Download or read book The Theory of Atomic Structure and Spectra written by Robert D. Cowan and published by Univ of California Press. This book was released on 2023-11-15 with total page 752 pages. Available in PDF, EPUB and Kindle. Book excerpt: Both the interpretation of atomic spectra and the application of atomic spectroscopy to current problems in astrophysics, laser physics, and thermonuclear plasmas require a thorough knowledge of the Slater-Condon theory of atomic structure and spectra. This book gathers together aspects of the theory that are widely scattered in the literature and augments them to produce a coherent set of closed-form equations suitable both for computer calculations on cases of arbitrary complexity and for hand calculations for very simple cases.
Book Synopsis Atomic Properties in Hot Plasmas by : Jacques Bauche
Download or read book Atomic Properties in Hot Plasmas written by Jacques Bauche and published by Springer. This book was released on 2015-08-03 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is devoted to the calculation of hot-plasma properties which generally requires a huge number of atomic data. It is the first book that combines information on the details of the basic atomic physics and its application to atomic spectroscopy with the use of the relevant statistical approaches. Information like energy levels, radiative rates, collisional and radiative cross-sections, etc., must be included in equilibrium or non-equilibrium models in order to describe both the atomic-population kinetics and the radiative properties. From the very large number of levels and transitions involved in complex ions, some statistical (global) properties emerge. The book presents a coherent set of concepts and compact formulas suitable for tractable and accurate calculations. The topics addressed are: radiative emission and absorption, and a dozen of other collisional and radiative processes; transition arrays between level ensembles (configurations, superconfigurations); effective temperatures of configurations, superconfigurations, and ions; charge-state distributions; radiative power losses and opacity. There are many numerical examples and comparisons with experiment presented throughout the book. The plasma properties described in this book are especially relevant to large nuclear fusion facilities such as the NIF (California) and the ITER (France), and to astrophysics. Methods relevant to the central-field configurational model are described in detail in the appendices: tensor-operator techniques, second-quantization formalism, statistical distribution moments, and the algebra of partition functions. Some extra tools are propensity laws, correlations, and fractals. These methods are applied to the analytical derivation of many properties, specially the global ones, through which the complexity is much reduced. The book is intended for graduate-level students, and for physicists working in the field.
Book Synopsis Handbook of X-Ray Data by : Günter H. Zschornack
Download or read book Handbook of X-Ray Data written by Günter H. Zschornack and published by Springer Science & Business Media. This book was released on 2007-01-24 with total page 969 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the only handbook available on X-ray data. In a concise and informative manner, the most important data connected with the emission of characteristic X-ray lines are tabulated for all elements up to Z = 95 (Americium). The tabulated data are characterized and, in most cases, evaluated. Furthermore, all important processes and phenomena connected with the production, emission and detection of characteristic X-rays are discussed.
Book Synopsis Controlling the Quantum World by : National Research Council
Download or read book Controlling the Quantum World written by National Research Council and published by National Academies Press. This book was released on 2007-06-21 with total page 245 pages. Available in PDF, EPUB and Kindle. Book excerpt: As part of the Physics 2010 decadal survey project, the Department of Energy and the National Science Foundation requested that the National Research Council assess the opportunities, over roughly the next decade, in atomic, molecular, and optical (AMO) science and technology. In particular, the National Research Council was asked to cover the state of AMO science, emphasizing recent accomplishments and identifying new and compelling scientific questions. Controlling the Quantum World, discusses both the roles and challenges for AMO science in instrumentation; scientific research near absolute zero; development of extremely intense x-ray and laser sources; exploration and control of molecular processes; photonics at the nanoscale level; and development of quantum information technology. This book also offers an assessment of and recommendations about critical issues concerning maintaining U.S. leadership in AMO science and technology.
Book Synopsis NEXAFS Spectroscopy by : Joachim Stöhr
Download or read book NEXAFS Spectroscopy written by Joachim Stöhr and published by Springer Science & Business Media. This book was released on 2013-04-17 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first ever comprehensive treatment of NEXAFS spectroscopy. It is suitable for novice researchers as an introduction to the field, while experts will welcome the detailed description of state-of-the-art instrumentation and analysis techniques, along with the latest experimental and theoretical results.
Book Synopsis Scientific and Technical Aerospace Reports by :
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1977 with total page 1068 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book STAR written by and published by . This book was released on 1973 with total page 888 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Surface and Thin Film Analysis by : Gernot Friedbacher
Download or read book Surface and Thin Film Analysis written by Gernot Friedbacher and published by Wiley-VCH. This book was released on 2011-06-07 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surveying and comparing all techniques relevant for practical applications in surface and thin film analysis, this second edition of a bestseller is a vital guide to this hot topic in nano- and surface technology. This new book has been revised and updated and is divided into four parts - electron, ion, and photon detection, as well as scanning probe microscopy. New chapters have been added to cover such techniques as SNOM, FIM, atom probe (AP),and sum frequency generation (SFG). Appendices with a summary and comparison of techniques and a list of equipment suppliers make this book a rapid reference for materials scientists, analytical chemists, and those working in the biotechnological industry. From a Review of the First Edition (edited by Bubert and Jenett) "... a useful resource..." (Journal of the American Chemical Society)
