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Soluble Polysilanes A New Class Of Radiation Sensitive O2 Rie Resistant Polymers For Use In Microlithography
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Book Synopsis Soluble Polysilanes: A New Class of Radiation Sensitive O2-Rie Resistant Polymers for Use in Microlithography by : R. D. Miller
Download or read book Soluble Polysilanes: A New Class of Radiation Sensitive O2-Rie Resistant Polymers for Use in Microlithography written by R. D. Miller and published by . This book was released on 1990 with total page 28 pages. Available in PDF, EPUB and Kindle. Book excerpt: This report describes the progress in the synthesis, characterization and spectroscopy of soluble polysilanes and germanes. It includes polymer structural studies, theoretical investigations of electronic structure and mechanistic studies of the photodecomposition. It also describes the potential of these materials as polymeric photoconductors, and as new materials for microlithography. The initial work on the nonlinear optical characteristics of these materials is also included. Keywords: Polysilane; Synthesis; Spectroscopy; Photochemistry applications. (sdw).
Book Synopsis Soluble Polysilanes in Photolithography by : R. D. Miller
Download or read book Soluble Polysilanes in Photolithography written by R. D. Miller and published by . This book was released on 1987 with total page 17 pages. Available in PDF, EPUB and Kindle. Book excerpt: The drive toward improved resolution in lithographic processes has focused attention on dry processing techniques for the transfer of patterns created in thin imaging layers into thick planarizing layers. In this regard, silicon containing polymers have received considerable attention due to their ready accessibility and excellent O2-RIE resistance. High molecular weight polysilane derivatives which contain only silicon in the polymer backbone have attracted interest recently because of their curious electronic properties. These materials are also radiation sensitive and polymer scissioning is the predominate process. As expected, the polysilanes are extremely resistant to O2-RIE etching. In this paper we also discuss two multilayer applications for the production of high resolution patterns.
Book Synopsis Scientific and Technical Aerospace Reports by :
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1990 with total page 256 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Soluble Polysilane Derivatives: Chemistry and Spectroscopy by : R. D. Miller
Download or read book Soluble Polysilane Derivatives: Chemistry and Spectroscopy written by R. D. Miller and published by . This book was released on 1987 with total page 39 pages. Available in PDF, EPUB and Kindle. Book excerpt: Polysilanes represent an interesting class of radiation sensitive polymers for which new applications have been discovered. Even though the polymer backbone is composed only of silicon silicon single bonds, all high molecular weight polysilanes absorb strongly in the UV. The position of this absorption depends not only on the nature of the substituents, but also on the conformation of the backbone. In this regard, materials where the polymer backbone is locked into a planar zigzag conformation absorb at much longer wavelengths than comparable materials where the backbone is either disordered or nonplaner (e.g., helical). A planar zigzag backbone is often observed for symmetrically substituted derivatives in the solid state when there are also significant intermolecular interactions such as side chain crystallization. These materials are strongly thermochromic. Keywords: Soluble polysilanes, Structure, Thermochromism, Polymer morphology.
Book Synopsis Radiation Sensitivity of Soluble Polysilane Derivatives: Science and Applications by : R. D. Miller
Download or read book Radiation Sensitivity of Soluble Polysilane Derivatives: Science and Applications written by R. D. Miller and published by . This book was released on 1988 with total page 54 pages. Available in PDF, EPUB and Kindle. Book excerpt: Polysilane derivatives have very unusual electronic properties associated with extensive sigma delocalization along the polymer backbone. Strong electronic transitions which depend on the nature of the substituents, the polymer molecular weight and the conformation of the backbone appear in the UV. These materials are radiation sensitive and are degraded to lower molecular weight fragments upon exposure to light and ionizing radiation. This review attempts to overview the nature of these radiation induced processes and describes some potential applications primarily in the field of microlithography. Keywords: High molecular weight polysilanes; Radiation sensitivity. (jes).
Book Synopsis Synthesis and Characterization of Radiation-sensitive Polymers and Their Application in Lithography by : Hengpeng Wu
Download or read book Synthesis and Characterization of Radiation-sensitive Polymers and Their Application in Lithography written by Hengpeng Wu and published by . This book was released on 2001 with total page 298 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Materials for Microlithography by : L. F. Thompson
Download or read book Materials for Microlithography written by L. F. Thompson and published by American Society of Civil Engineers. This book was released on 1984 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Radiation Chemistry of Polymers by : Vi︠a︡cheslav Sergeevich Ivanov
Download or read book Radiation Chemistry of Polymers written by Vi︠a︡cheslav Sergeevich Ivanov and published by . This book was released on 2021 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the series "New Concepts in Polymer Science", this volume contains information on the main theoretical and practical problems involved in radiation chemistry of polymers. The processes of polymerization and modification of polymers by grafting, crosslinking and degradation, induced by ionizing radiation, are all described, as well as the radiation resistance of polymers and their protection from radiation. The book also contains applications of radiation chemistry of polymers, such as: principles of selection of radiation-chemical processes for industrial use; choice of radiation sources for specific processes; modification of textile and film materials by grafting; manufacturing of heat-shrinkable, thermostable and mechanically strong polymer products; composites; rubber vulcanizates and self-adhesive products; paints and coatings; man-made fibres; materials for microelectronics; and polymer materials for medical purposes.
Book Synopsis Polymers in Microlithography by : Elsa Reichmanis
Download or read book Polymers in Microlithography written by Elsa Reichmanis and published by . This book was released on 1989 with total page 476 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume examines the role polymeric materials play in the electronics industry, with special emphasis on recent advances in the science and technology of resist materials and processing for microlithography. It provides the reader with an appreciation for the diversity of chemical research efforts that are required for the development of new resist materials and processes. Its 26 chapters are divided into three sections covering chemically applied resist chemistry, multilevel resist chemistry and processing, and novel chemistry and processes for microlithography. Each section contains an introduction written by a recognized expert in the field.
Book Synopsis Photophysics and Photochemistry of Poly(Di-n-Hexylsilane) in Room Temperature Solution by : J. Michl
Download or read book Photophysics and Photochemistry of Poly(Di-n-Hexylsilane) in Room Temperature Solution written by J. Michl and published by . This book was released on 1987 with total page 21 pages. Available in PDF, EPUB and Kindle. Book excerpt: Polysilane high polymers represent a new class of radiation sensitive polymers which are receiving considerable attention because of their curious spectroscopic properties and the development of a number of new applications. The lowest singlet excitation is sigma type, is localized in all-trans segments, and travels rapidly along the polymer backbone from shorter to longer segments. This energy transfer is competitive with fluorescence and polymer chain scission. The lengths of the low energy emitting segments of poly(di-n-hexylsilane) in solution have been estimated at 10-20 Si units. The reactions subsequent to chain scission are complex and poorly understood, but it is certain that complex silicon based radicals are formed. Keywords: Polysilanes, Solution spectroscopy, Theoretical studies, Polymer structure.
Book Synopsis Government Reports Announcements & Index by :
Download or read book Government Reports Announcements & Index written by and published by . This book was released on 1990-07 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Government Reports Annual Index by :
Download or read book Government Reports Annual Index written by and published by . This book was released on 1990 with total page 1312 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Scientific Information Bulletin by :
Download or read book Scientific Information Bulletin written by and published by . This book was released on 1991 with total page 536 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Advances in Resist Technology and Processing by :
Download or read book Advances in Resist Technology and Processing written by and published by . This book was released on 1991 with total page 708 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Advances in Chemistry Series written by and published by . This book was released on 1990 with total page 836 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Silicon-based Polymer Science by : John Martin Zeigler
Download or read book Silicon-based Polymer Science written by John Martin Zeigler and published by . This book was released on 1990 with total page 836 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides the first unified reference work for silicon-based polymers. It brings together in one volume research on the synthesis, properties, chemistry, electronic structure, applications, and technology of these materials. The volume is built around a series of critical overviews of these rapidly advancing fields and is supplemented by a substantial number of shorter papers that focus on current findings. It also provides insight into possible directions for future scientific and technological advances in the field.
Book Synopsis Electrical & Electronics Abstracts by :
Download or read book Electrical & Electronics Abstracts written by and published by . This book was released on 1988 with total page 1532 pages. Available in PDF, EPUB and Kindle. Book excerpt:
