Author : Shengwen Luan
Publisher :
ISBN 13 :
Total Pages : 169 pages
Book Rating : 4.:/5 (252 download)
Book Synopsis Silicon Nitride Deposition, Chromium Corrosion Mechanisms and Source/drain Parasitic Resistance in Amorphous Silicon Thin Film Transistors by : Shengwen Luan
Download or read book Silicon Nitride Deposition, Chromium Corrosion Mechanisms and Source/drain Parasitic Resistance in Amorphous Silicon Thin Film Transistors written by Shengwen Luan and published by . This book was released on 1991 with total page 169 pages. Available in PDF, EPUB and Kindle. Book excerpt: Abstract: "Hydrogenated amorphous silicon (a-Si:H) based thin film transistors (TFTs) are finding increased application as switching elements in active-matrix liquid crystal displays (AMLCDs). Extensive research has been focussed on optimizing fabrication conditions to improve materials quality and on reducing channel length to increase device speed. However, the basic physics and chemistry have not yet been fully understood. In addition, little attention has been paid to the significant effect of source/drain parasitics. The work described in this thesis is closely related to the speed and stability issues on the discrete device level.