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Scanning Capacitance Microscopy
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Book Synopsis Scanning Capacitance Microscopy by : Wolfgang Brezna
Download or read book Scanning Capacitance Microscopy written by Wolfgang Brezna and published by Sudwestdeutscher Verlag Fur Hochschulschriften AG. This book was released on 2009-01 with total page 156 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this PhD-thesis, Scanning Capacitance Microscopy (SCM) and Scanning Capacitance Spectroscopy (SCS) was applied to investigate various silicon samples. SCM is used to investigate the electrical behaviour of samples with a lateral resolution below 100 nm. The work is divided into 3 major experimental parts: (1) the properties of metal organic chemical vapour deposited zirconium dioxide as dielectric material for SCM was explored. Usage of zirconium dioxide leads to reduced leakage currents and improved signal quality. (2) focussed ion beam induced damage in silicon was investigated with SCM. The beam shape and the range of ion damage inside the sample was investigated. The SCM data were compared with transmission electron microscopy data. (3) a setup for quantitative Scanning Capacitance Spectroscopy with an external capacitance bridge connected to an atomic force microscope was designed. This setup is sensitive enough to resolve the energetic distribution of interface trapped charges and to quantitatively measure the local oxide charge density distribution of zirconium dioxide layers.
Book Synopsis Scanning Probe Microscopy by : Sergei V. Kalinin
Download or read book Scanning Probe Microscopy written by Sergei V. Kalinin and published by Springer Science & Business Media. This book was released on 2007-04-03 with total page 1002 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume will be devoted to the technical aspects of electrical and electromechanical SPM probes and SPM imaging on the limits of resolution, thus providing technical introduction into the field. This volume will also address the fundamental physical phenomena underpinning the imaging mechanism of SPMs.
Book Synopsis Scanning Probe Microscopy by : Ernst Meyer
Download or read book Scanning Probe Microscopy written by Ernst Meyer and published by Springer Science & Business Media. This book was released on 2013-03-14 with total page 215 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by three leading experts in the field, this textbook describes and explains all aspects of the scanning probe microscopy. Emphasis is placed on the experimental design and procedures required to optimize the performance of the various methods. Scanning Probe Microscopy covers not only the physical principles behind scanning probe microscopy but also questions of instrumental designs, basic features of the different imaging modes, and recurring artifacts. The intention is to provide a general textbook for all types of classes that address scanning probe microscopy. Third year undergraduates and beyond should be able to use it for self-study or as textbook to accompany a course on probe microscopy. Furthermore, it will be valuable as reference book in any scanning probe microscopy laboratory. Novel applications and the latest important results are also presented, and the book closes with a look at the future prospects of scanning probe microscopy, also discussing related techniques in nanoscience. Ideally suited as an introduction for graduate students, the book will also serve as a valuable reference for practising researchers developing and using scanning probe techniques.
Book Synopsis Scanning Capacitance Microscopy for Semiconductor Characterisation by :
Download or read book Scanning Capacitance Microscopy for Semiconductor Characterisation written by and published by . This book was released on 2001 with total page 31 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Scanning Capacitance Microscopy by : Christopher David Bugg
Download or read book Scanning Capacitance Microscopy written by Christopher David Bugg and published by . This book was released on 1988 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Compendium of Surface and Interface Analysis by : The Surface Science Society of Japan
Download or read book Compendium of Surface and Interface Analysis written by The Surface Science Society of Japan and published by Springer. This book was released on 2018-02-19 with total page 807 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book concisely illustrates the techniques of major surface analysis and their applications to a few key examples. Surfaces play crucial roles in various interfacial processes, and their electronic/geometric structures rule the physical/chemical properties. In the last several decades, various techniques for surface analysis have been developed in conjunction with advances in optics, electronics, and quantum beams. This book provides a useful resource for a wide range of scientists and engineers from students to professionals in understanding the main points of each technique, such as principles, capabilities and requirements, at a glance. It is a contemporary encyclopedia for selecting the appropriate method depending on the reader's purpose.
Book Synopsis Split-tip Scanning Capacitance Microscopy (SSCM): Special Techniques in Surface Characterization and Measurements by :
Download or read book Split-tip Scanning Capacitance Microscopy (SSCM): Special Techniques in Surface Characterization and Measurements written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: There has been a flurry of activity in growth of nanostructures, but our ability to measure and characterize them has not kept pace. This work invents and develops a new technique for electrical, electro-optical, and topographical characterization at the nanoscale. Split-tip scanning capacitance microscopy (SSCM) offers some advantages over other scanning probe methods. The dependence of the measurements on sample characteristics is reduced, and the analysis is simplified by having both electrodes secured to the probe. SSCM differs from the related, single tip AFM based capacitance microscopy versions that use the sample as one electrode so the properties of the sample contribute to the signal and complicate analysis. SSCM allows the imaging of simultaneous topographic, optical, and electronic structures. This feature allows non-conducting, as well as conducting surfaces to be imaged without loss of optical or capacitance (conductivity) resolution. The newly developed split-tip is a dual electrode probe that allows measurements in a non-contact manner. SSCM allows surface measurements without destroying the sample of interest. It does not require special surface preparation. To develop this new technique, the project focused on the following: -shear-force feedback as an accurate tip-sample distance controller -imaging techniques for irregular sample surfaces -development of computational model for simulating split-tip measurements -split-tip integration into a conventional near-field scanning optical microscope -contrast modeling for simple surface structures -tip-sample approach capacitance measurements as a stringent test of SSCM. We show that a non-linear tip sample interaction dominates the shear force feedback signal evidenced by a change in the resonance frequency as the tip approaches the sample. Shear force feedback relies on a decrease in the amplitude of the signal at the operating frequency. The relatively new tuning fork based oscillations have large qua.
Book Synopsis Electrical Atomic Force Microscopy for Nanoelectronics by : Umberto Celano
Download or read book Electrical Atomic Force Microscopy for Nanoelectronics written by Umberto Celano and published by Springer. This book was released on 2019-08-01 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt: The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.
Book Synopsis Roadmap of Scanning Probe Microscopy by : Seizo Morita
Download or read book Roadmap of Scanning Probe Microscopy written by Seizo Morita and published by Springer Science & Business Media. This book was released on 2006-12-30 with total page 207 pages. Available in PDF, EPUB and Kindle. Book excerpt: Scanning tunneling microscopy has achieved remarkable progress and become the key technology for surface science. This book predicts the future development for all of scanning probe microscopy (SPM). Such forecasts may help to determine the course ultimately taken and may accelerate research and development on nanotechnology and nanoscience, as well as all in SPM-related fields in the future.
Book Synopsis Scanning Capacitance Microscopy in the Quantum Hall Regime by : Matthew Edmund Suddards
Download or read book Scanning Capacitance Microscopy in the Quantum Hall Regime written by Matthew Edmund Suddards and published by . This book was released on 2007 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis discusses the development of a novel scanning capacitance microscope (SCM) that enables the investigation of the local capacitance and conductivity of surfaces and near-surface nanostructures at cryogenic temperatures and high magnetic fields. Simultaneous atomic force microscopy (AFM) and SCM measurements can be made at a temperature of 1.5K and a magnetic field of 12T. The AFM/SCM sensor is based on a quartz-tuning fork with an etched metal tip. SCM measurements are made using an RF tuned filter design which allows changes in capacitance to be measured with sub-attofarad resolution and a bandwidth of 200Hz. Test measurements were made over an evaporated gold film. The capacitance distance curve was recovered from the measured quantities using a deconvolution scheme normally used for force-distance curves. Measurements have been made of a two-dimensional electron gas in the quantum Hall effect (QHE) regime. Highly conductive stripes form near the edge of the sample at integer Landau level filling factors in agreement with theoretical predictions. These measurements are the first direct imaging of the compressible stripes at the physical edge of a Hall bar device. Measurements were also made by point spectroscopy in a region that was locally depleted. Around this region a ring-shaped stripe of considerably larger width than at the sample edge is observed. The increased width was explained in terms of a shallower potential gradient compared to the physical edge of the sample. Preliminary measurements have demonstrated that the microscope is capable of imaging edge states whilst passing current through the device.
Book Synopsis Scanning Probe Microscopy by : Ernst Meyer
Download or read book Scanning Probe Microscopy written by Ernst Meyer and published by Springer Nature. This book was released on 2021-05-31 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by three leading experts in the field, this textbook describes and explains all aspects of the scanning probe microscopy. Emphasis is placed on the experimental design and procedures required to optimize the performance of the various methods. Scanning Probe Microscopy covers not only the physical principles behind scanning probe microscopy but also questions of instrumental designs, basic features of the different imaging modes, and recurring artifacts. The intention is to provide a general textbook for all types of classes that address scanning probe microscopy. Third year undergraduates and beyond should be able to use it for self-study or as textbook to accompany a course on probe microscopy. Furthermore, it will be valuable as reference book in any scanning probe microscopy laboratory. Novel applications and the latest important results are also presented, and the book closes with a look at the future prospects of scanning probe microscopy, also discussing related techniques in nanoscience. Ideally suited as an introduction for graduate students, the book will also serve as a valuable reference for practising researchers developing and using scanning probe techniques.
Book Synopsis Reliability of the Scanning Capacitance Microscopy and Spectroscopy for the Nanoscale Characterization of Semiconductors and Dielectrics by : Octavian Ligor
Download or read book Reliability of the Scanning Capacitance Microscopy and Spectroscopy for the Nanoscale Characterization of Semiconductors and Dielectrics written by Octavian Ligor and published by . This book was released on 2010 with total page 190 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work was devoted to the experimental study of the scanning capacitance microscopy (SCM) and spectroscopy (SCS) for the mapping of the dopants in the semiconductor structures and for the characterization of thin oxides. SCM has appeared to be a very powerful technique for doping mapping as long as qualitative images are needed, for example in order to check whether fabrication steps like implantations have been correctly operated during the fabrication of devices (presence or absence of doping of a given type in a region where it should be present). When quantitativity is needed, the only way of performing a calibration of SCM images for dopant mapping seems to grow exactly the same oxide on two different samples, one being a calibration sample from which a semi-calibration curve associating doping levels and SCM signal levels will be measured and applied to the unknown sample (semi-calibration). We have shown the capabilities of SCM for dopant mapping using a series of experimental situations and test samples covering almost all frequently encountered structures in the industry of silicon microelectronics : doping staircases of p-type and n-type structures, quantum wells and p-n junctions. Qualitative images have been obtained for a wide range of doping levels between 2.e+15 at.cm-3 to 5.e+19 at.cm-3. SCM is able to detect quantum wells of ~ 7 nm width. SCM is also able to differentiate between dopants of different type (p-type or n-type). All these results confirm the usefulness of SCM as a qualitative imaging technique. We have studied the experimental parameters playing a role in the interpretation and reproducibility of SCM signal: stray light, stray capacitance, the tip-sample contact, the influence of strong electrical fields, the sample's topography, the quality and the properties of the top oxide. We have proposed solutions for eliminating all these parasitic factors and for rendering the SCM measurements reproducible and quantitative.
Book Synopsis Scanning Capacitance Microscopy Measurements of Ultra Shallow Junction Dopant Distributions by : Ilona L. Sitnitsky
Download or read book Scanning Capacitance Microscopy Measurements of Ultra Shallow Junction Dopant Distributions written by Ilona L. Sitnitsky and published by . This book was released on 2009 with total page 110 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Scanning Capacitance Microscopy and Related Technologies for Semiconductor Device Characterizations by : Yaoyao Jiang
Download or read book Scanning Capacitance Microscopy and Related Technologies for Semiconductor Device Characterizations written by Yaoyao Jiang and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Scanning Capacitance Microscopy of Atomic Precision Donor Devices in Si by :
Download or read book Scanning Capacitance Microscopy of Atomic Precision Donor Devices in Si written by and published by . This book was released on 2014 with total page 10 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Book Synopsis Scanning Probe Microscopy and Spectroscopy by : Roland Wiesendanger
Download or read book Scanning Probe Microscopy and Spectroscopy written by Roland Wiesendanger and published by Cambridge University Press. This book was released on 1994-09-29 with total page 664 pages. Available in PDF, EPUB and Kindle. Book excerpt: The investigation and manipulation of matter on the atomic scale have been revolutionised by scanning tunnelling microscopy and related scanning probe techniques. This book is the first to provide a clear and comprehensive introduction to this subject. Beginning with the theoretical background of scanning tunnelling microscopy, the design and instrumentation of practical STM and associated systems are described in detail, as are the applications of these techniques in fields such as condensed matter physics, chemistry, biology, and nanotechnology. Containing 350 illustrations, and over 1200 references, this unique book represents an ideal introduction to the subject for final-year undergraduates in physics or materials science. It will also be invaluable to graduate students and researchers in any branch of science where scanning probe techniques are used.
Book Synopsis Scanning Capacitance Microscopy Imaging and Registration of 2-D Donor Devices Fabricated Via Scanning Tunneling Microscopy by :
Download or read book Scanning Capacitance Microscopy Imaging and Registration of 2-D Donor Devices Fabricated Via Scanning Tunneling Microscopy written by and published by . This book was released on 2014 with total page 10 pages. Available in PDF, EPUB and Kindle. Book excerpt:
