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Author : 翁睿佟
Publisher :
ISBN 13 :
Total Pages : 102 pages
Book Rating : 4.:/5 (123 download)
Download or read book Readout Circuit and Chip Design for a Piezoelectric MEMS Accelerometer written by 翁睿佟 and published by . This book was released on 2020 with total page 102 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Xu, Yong Ping
Publisher : River Publishers
ISBN 13 : 877022045X
Total Pages : 312 pages
Book Rating : 4.7/5 (72 download)
Download or read book MEMS Silicon Oscillating Accelerometers and Readout Circuits written by Xu, Yong Ping and published by River Publishers. This book was released on 2019-02-12 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.
Author :
Publisher :
ISBN 13 :
Total Pages : 0 pages
Book Rating : 4.:/5 (141 download)
Download or read book A Low Power Readout Circuit for a Tri-axial Piezoelectric MEMS Accelerometer written by and published by . This book was released on 2022 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Felix Levinzon
Publisher : Springer
ISBN 13 : 3319080784
Total Pages : 180 pages
Book Rating : 4.3/5 (19 download)
Download or read book Piezoelectric Accelerometers with Integral Electronics written by Felix Levinzon and published by Springer. This book was released on 2014-08-06 with total page 180 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides an invaluable reference to Piezoelectric Accelerometers with Integral Electronics (IEPE). It describes the design and performance parameters of IEPE accelerometers and their key elements, PE transducers and FET-input amplifiers. Coverage includes recently designed, low-noise and high temperature IEPE accelerometers. Readers will benefit from the detailed noise analysis of the IEPE accelerometer, which enables estimation of its noise floor and noise limits. Other topics useful for designers of low-noise, high temperature silicon-based electronics include noise analysis of FET amplifiers, experimental investigation and comparison of low-frequency noise in different JFETs and MOSFETs, and ultra-low-noise JFETs (at level of 0.6 nV/√Hz). The discussion also includes ultra-low-noise (at level of 3 ng/√Hz) seismic IEPE accelerometers and high temperature (up to 175 ̊C) triaxial and single axis miniature IEPE accelerometers, along with key factors for their design. • Provides a comprehensive reference to the design and performance of IEPE accelerometers, including low-noise and high temperature IEPE sensors; • Includes noise analysis of the IEPE accelerometer, which enables estimation of the its noise floor and noise limits; • Describes recently design of ultra-low-noise (at level of 3 ng/√Hz) IEPE seismic accelerometers and high temperature (up to 175 ̊C) triaxial and single axis miniature IEPE accelerometers; • Compares low-frequency noise in different JFETs and MOSFETs including measurement results of ultra-low-noise (at level of 0.6 nV/√Hz) JFET; • Presents key factors for design of low-noise and high temperature IEPE accelerometer and their electronics.
Author : Hao Yu
Publisher : John Wiley & Sons
ISBN 13 : 1119218357
Total Pages : 290 pages
Book Rating : 4.1/5 (192 download)
Download or read book CMOS Integrated Lab-on-a-chip System for Personalized Biomedical Diagnosis written by Hao Yu and published by John Wiley & Sons. This book was released on 2018-04-04 with total page 290 pages. Available in PDF, EPUB and Kindle. Book excerpt: A thorough examination of lab-on-a-chip circuit-level operations to improve system performance A rapidly aging population demands rapid, cost-effective, flexible, personalized diagnostics. Existing systems tend to fall short in one or more capacities, making the development of alternatives a priority. CMOS Integrated Lab-on-a-Chip System for Personalized Biomedical Diagnosis provides insight toward the solution, with a comprehensive, multidisciplinary reference to the next wave of personalized medicine technology. A standard complementary metal oxide semiconductor (CMOS) fabrication technology allows mass-production of large-array, miniaturized CMOS-integrated sensors from multi-modal domains with smart on-chip processing capability. This book provides an in-depth examination of the design and mechanics considerations that make this technology a promising platform for microfluidics, micro-electro-mechanical systems, electronics, and electromagnetics. From CMOS fundamentals to end-user applications, all aspects of CMOS sensors are covered, with frequent diagrams and illustrations that clarify complex structures and processes. Detailed yet concise, and designed to help students and engineers develop smaller, cheaper, smarter lab-on-a-chip systems, this invaluable reference: Provides clarity and insight on the design of lab-on-a-chip personalized biomedical sensors and systems Features concise analyses of the integration of microfluidics and micro-electro-mechanical systems Highlights the use of compressive sensing, super-resolution, and machine learning through the use of smart SoC processing Discusses recent advances in complementary metal oxide semiconductor-integrated lab-on-a-chip systems Includes guidance on DNA sequencing and cell counting applications using dual-mode chemical/optical and energy harvesting sensors The conventional reliance on the microscope, flow cytometry, and DNA sequencing leaves diagnosticians tied to bulky, expensive equipment with a central problem of scale. Lab-on-a-chip technology eliminates these constraints while improving accuracy and flexibility, ushering in a new era of medicine. This book is an essential reference for students, researchers, and engineers working in diagnostic circuitry and microsystems.
Author : Joseph C. Doll
Publisher : Springer Science & Business Media
ISBN 13 : 1461485177
Total Pages : 252 pages
Book Rating : 4.4/5 (614 download)
Download or read book Piezoresistor Design and Applications written by Joseph C. Doll and published by Springer Science & Business Media. This book was released on 2013-10-30 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications. Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The text concludes with an up-to-date discussion of the need for integrated MEMS design and opportunities to leverage new materials, processes and MEMS technology. Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.
Author : Mahmoud Rasras
Publisher : MDPI
ISBN 13 : 3038974145
Total Pages : 252 pages
Book Rating : 4.0/5 (389 download)
Download or read book MEMS Accelerometers written by Mahmoud Rasras and published by MDPI. This book was released on 2019-05-27 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.
Author : Alvin Lai Lin
Publisher :
ISBN 13 :
Total Pages : 101 pages
Book Rating : 4.:/5 (72 download)
Download or read book Design and Implementation of a Preload Electronics Architecture for a MEMS Accelerometer written by Alvin Lai Lin and published by . This book was released on 2006 with total page 101 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis describes the design and implementation of an electronics system to provide rebalancing and readout for a force-rebalanced microelectromechanical accelerometer. A feedback control loop is devised using a novel preload architecture, compensating the proof mass of the sensor and providing an accurate acceleration measurement. This architecture is compared to alternative methods of linearizing the control loop. The electronics system is divided into analog and digital subsystems. The design is analyzed at several abstraction levels. The system is implemented for prototype testing with discrete components on a printed circuit board with a MEMS sensor attached. A computer program is implemented to receive and process the readout data using the serial port. The design methodology consists of a top-down design flow based on simulation. At each iteration in the design process, the lower level abstraction is verified with the previous model. Eventually, the design reaches the level of synthesizable digital logic and discrete analog components. This thesis describes the design process and implementation details for creating an accelerometer system prototype ready for lab testing. Detailed simulations indicate that the implemented design is likely to meet the design goals for a personal navigation system suitable for a human or land vehicle. Conclusions on design methodology and verification techniques are also presented.
Download or read book Accelerometer Design with A Low-Power Capacitor to Frequency Readout Circuit written by and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Masayoshi Esashi
Publisher : John Wiley & Sons
ISBN 13 : 3527823255
Total Pages : 528 pages
Book Rating : 4.5/5 (278 download)
Download or read book 3D and Circuit Integration of MEMS written by Masayoshi Esashi and published by John Wiley & Sons. This book was released on 2021-03-16 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
Author : Alice Lanniel
Publisher :
ISBN 13 : 9783844092752
Total Pages : 0 pages
Book Rating : 4.0/5 (927 download)
Download or read book Low-Noise Readout Circuit for Automotive MEMS Accelerometers written by Alice Lanniel and published by . This book was released on 2023 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Miko Elwenspoek
Publisher : Springer Science & Business Media
ISBN 13 : 9783540675822
Total Pages : 328 pages
Book Rating : 4.6/5 (758 download)
Download or read book Mechanical Microsensors written by Miko Elwenspoek and published by Springer Science & Business Media. This book was released on 2001-01-12 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a comprehensive description of microsensors for mechanical quantities (flow, pressure, force, inertia) fabricated by silicon micromachining. Since the design of such sensors requires interdisciplinary teamwork, the presentation is made accessible to engineers trained in electrical and mechanical engineering, physics and chemistry. The reader is guided through the micromachining fabrication process. A chapter on microsensor packaging completes the discussion of technological problems. The description of the basic physics required for sensor design includes the mechanics of deformation and the piezoresistive transduction to electrical signals. There is also a comprehensive discussion of resonant sensors, the hydrodynamics and heat transfer relevant for flow sensors, and, finally, electronic interfacing and readout circuitry. Numerous up-to-date case studies are presented, together with the working, fabrication and design of the sensors.
Author : Kai Zhang
Publisher :
ISBN 13 :
Total Pages : 77 pages
Book Rating : 4.:/5 (698 download)
Download or read book Sensing and Control of MEMS Accelerometers Using Kalman Filter written by Kai Zhang and published by . This book was released on 2010 with total page 77 pages. Available in PDF, EPUB and Kindle. Book excerpt: Surface micromachined low-capacitance MEMS capacitive accelerometers which integrated CMOS readout circuit generally have a noise above 0.02g. Force-to-rebalance feedback control that is commonly used in MEMS accelerometers can improve the performances of accelerometers such as increasing their stability, bandwidth and dynamic range. However, the controller also increases the noise floor. There are two major sources of the noise in MEMS accelerometer. They are electronic noise from the CMOS readout circuit and thermal-mechanical Brownian noise caused by damping. Kalman filter is an effective solution to the problem of reducing the effects of the noises through estimating and canceling the states contaminated by noise. The design and implementation of a Kalman filter for a MEMS capacitive accelerometer is presented in the thesis in order to filter out the noise mentioned above while keeping its good performance under feedback control. The dynamic modeling of the MEMS accelerometer system and the controller design based on the model are elaborated in the thesis. Simulation results show the Kalman filter gives an excellent noise reduction, increases the dynamic range of the accelerometer, and reduces the displacement of the mass under a closed-loop structure.
Author : Minhang Bao
Publisher : Elsevier
ISBN 13 : 008045562X
Total Pages : 327 pages
Book Rating : 4.0/5 (84 download)
Download or read book Analysis and Design Principles of MEMS Devices written by Minhang Bao and published by Elsevier. This book was released on 2005-04-12 with total page 327 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.
Download or read book Design of a Monolithic Micro-accelerometer with a Readout Circuit of Tunable Sensitivity written by and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Nick Craig Homer
Publisher :
ISBN 13 :
Total Pages : 71 pages
Book Rating : 4.:/5 (513 download)
Download or read book Readout and Control Optimization for a High Performance MEMS Accelerometer written by Nick Craig Homer and published by . This book was released on 2002 with total page 71 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Author : Gregory Lee Halac
Publisher :
ISBN 13 :
Total Pages : 172 pages
Book Rating : 4.:/5 (221 download)
Download or read book Fabrication of a Piezoelectric Accelerometer with Integrated-circuit Technology written by Gregory Lee Halac and published by . This book was released on 1982 with total page 172 pages. Available in PDF, EPUB and Kindle. Book excerpt:
