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Analysis And Design Principles Of Mems Devices
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Book Synopsis Analysis and Design Principles of MEMS Devices by : Minhang Bao
Download or read book Analysis and Design Principles of MEMS Devices written by Minhang Bao and published by Elsevier. This book was released on 2005-04-12 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.
Book Synopsis MEMS: A Practical Guide of Design, Analysis, and Applications by : Jan Korvink
Download or read book MEMS: A Practical Guide of Design, Analysis, and Applications written by Jan Korvink and published by Springer Science & Business Media. This book was released on 2010-05-28 with total page 981 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.
Book Synopsis Principles of Microelectromechanical Systems by : Ki Bang Lee
Download or read book Principles of Microelectromechanical Systems written by Ki Bang Lee and published by John Wiley & Sons. This book was released on 2011-03-21 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt: The building blocks of MEMS design through closed-form solutions Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts. The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and their design applications. Beginning with an overview of MEMS, the opening chapter also presents dimensional analysis that provides basic dimensionless parameters existing in large- and small-scale worlds. The book then explains microfabrication, which presents knowledge on the common fabrication process to design realistic MEMS. From there, coverage includes: Statics/force and moment acting on mechanical structures in static equilibrium Static behaviors of structures consisting of mechanical elements Dynamic responses of the mechanical structures by the solving of linear as well as nonlinear governing equations Fluid flow in MEMS and the evaluation of damping force acting on the moving structures Basic equations of electromagnetics that govern the electrical behavior of MEMS Combining the MEMS building blocks to form actuators and sensors for a specific purpose All chapters from first to last use a unified approach in which equations in previous chapters are used in the derivations of closed-form solutions in later chapters. This helps readers to easily understand the problems to be solved and the derived solutions. In addition, theoretical models for the elements and systems in the later chapters are provided, and solutions for the static and dynamic responses are obtained in closed-forms. This book is designed for senior or graduate students in electrical and mechanical engineering, researchers in MEMS, and engineers from industry. It is ideal for radio frequency/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The closed-form solution approach will also appeal to device designers interested in performing large-scale parametric analysis.
Book Synopsis Advanced Mechatronics and MEMS Devices II by : Dan Zhang
Download or read book Advanced Mechatronics and MEMS Devices II written by Dan Zhang and published by Springer. This book was released on 2016-10-18 with total page 718 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces the state-of-the-art technologies in mechatronics, robotics, and MEMS devices in order to improve their methodologies. It provides a follow-up to "Advanced Mechatronics and MEMS Devices" (2013) with an exploration of the most up-to-date technologies and their applications, shown through examples that give readers insights and lessons learned from actual projects. Researchers on mechatronics, robotics, and MEMS as well as graduate students in mechanical engineering will find chapters on: Fundamental design and working principles on MEMS accelerometers Innovative mobile technologies Force/tactile sensors development Control schemes for reconfigurable robotic systems Inertial microfluidics Piezoelectric force sensors and dynamic calibration techniques ...And more. Authors explore applications in the areas of agriculture, biomedicine, advanced manufacturing, and space. Micro-assembly for current and future industries is also considered, as well as the design and development of micro and intelligent manufacturing.
Download or read book Practical MEMS written by Ville Kaajakari and published by . This book was released on 2009 with total page 478 pages. Available in PDF, EPUB and Kindle. Book excerpt: Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features of the book include: Tutorial approach. The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design. Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered. Second, the design equations are derived and exemplified. Practical MEMS is a perfect companion to MEMS fabrication textbooks. Quantitative performance analysis. The critical performance parameters for the given application are identified and analyzed. For example, the noise and power performance of piezoresistive and capacitive accelerometers is analyzed in detail. Mechanical, resistive (thermal and 1/f-noise), and circuit noise analysis is covered. Application specifications. Different MEMS applications are compared to commercial design requirements. For example, the optical MEMS is analyzed in the context of bar code scanner, projection displays, and optical cross connect specifications. MEMS economics and market analysis. A full chapter is devoted to yield and cost analysis of microfabricated devices. In addition, the market economics for emerging applications such as RF MEMS is discussed.
Book Synopsis Design and Development of MEMS based Guided Beam Type Piezoelectric Energy Harvester by : Shanky Saxena
Download or read book Design and Development of MEMS based Guided Beam Type Piezoelectric Energy Harvester written by Shanky Saxena and published by Springer Nature. This book was released on 2021-04-06 with total page 190 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents device design, layout design, FEM analysis, device fabrication, and packaging and testing of MEMS-based piezoelectric vibration energy harvesters. It serves as a complete guide from design, FEM, and fabrication to characterization. Each chapter of this volume illustrates key insight technologies through images. The book showcases different technologies for energy harvesting and the importance of energy harvesting in wireless sensor networks. The design, simulation, and comparison of three types of structures – single beam cantilever structure, cantilever array structure, and guided beam structure have also been reported in one of the chapters. In this volume, an elaborate characterization of two-beam and four-beam fabricated devices has been carried out. This characterization includes structural, material, morphological, topological, dynamic, and electrical characterization of the device. The volume is very concise, easy to understand, and contains colored images to understand the details of each process.
Book Synopsis The Physics of Semiconductor Devices by : R. K. Sharma
Download or read book The Physics of Semiconductor Devices written by R. K. Sharma and published by Springer. This book was released on 2019-01-31 with total page 1299 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book disseminates the current knowledge of semiconductor physics and its applications across the scientific community. It is based on a biennial workshop that provides the participating research groups with a stimulating platform for interaction and collaboration with colleagues from the same scientific community. The book discusses the latest developments in the field of III-nitrides; materials & devices, compound semiconductors, VLSI technology, optoelectronics, sensors, photovoltaics, crystal growth, epitaxy and characterization, graphene and other 2D materials and organic semiconductors.
Book Synopsis MEMS Linear and Nonlinear Statics and Dynamics by : Mohammad I. Younis
Download or read book MEMS Linear and Nonlinear Statics and Dynamics written by Mohammad I. Younis and published by Springer Science & Business Media. This book was released on 2011-06-27 with total page 463 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.
Book Synopsis Springer Handbook of Semiconductor Devices by : Massimo Rudan
Download or read book Springer Handbook of Semiconductor Devices written by Massimo Rudan and published by Springer Nature. This book was released on 2022-11-10 with total page 1680 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Springer Handbook comprehensively covers the topic of semiconductor devices, embracing all aspects from theoretical background to fabrication, modeling, and applications. Nearly 100 leading scientists from industry and academia were selected to write the handbook's chapters, which were conceived for professionals and practitioners, material scientists, physicists and electrical engineers working at universities, industrial R&D, and manufacturers. Starting from the description of the relevant technological aspects and fabrication steps, the handbook proceeds with a section fully devoted to the main conventional semiconductor devices like, e.g., bipolar transistors and MOS capacitors and transistors, used in the production of the standard integrated circuits, and the corresponding physical models. In the subsequent chapters, the scaling issues of the semiconductor-device technology are addressed, followed by the description of novel concept-based semiconductor devices. The last section illustrates the numerical simulation methods ranging from the fabrication processes to the device performances. Each chapter is self-contained, and refers to related topics treated in other chapters when necessary, so that the reader interested in a specific subject can easily identify a personal reading path through the vast contents of the handbook.
Download or read book MEMS/NEMS Sensors written by Goutam Koley and published by MDPI. This book was released on 2019-11-20 with total page 242 pages. Available in PDF, EPUB and Kindle. Book excerpt: Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.
Book Synopsis Principles and Applications of Ubiquitous Sensing by : Waltenegus Dargie
Download or read book Principles and Applications of Ubiquitous Sensing written by Waltenegus Dargie and published by John Wiley & Sons. This book was released on 2017-01-17 with total page 369 pages. Available in PDF, EPUB and Kindle. Book excerpt: Applications which use wireless sensors are increasing in number. The emergence of wireless sensor networks has also motivated the integration of a large number of small and lightweight nodes which integrate sensors, processors, and wireless transceivers. Existing books on wireless sensor networks mainly focus on protocols and networks and pay little attention to the sensors themselves which the author believes is the main focus. Without adequate knowledge of sensors as well as how they can be designed, realized and used, books on wireless sensor networks become too theoretical and irrelevant. The purpose of this book is to intimately acquaint readers with the technique of sensing (resistive, capacitive, inductive, magnetic, inertial, etc.) and existing sensor technologies. It also discusses how the sensors are used in a wide application domain and how new sensors can be designed and used in a novel way.
Book Synopsis Smart Material Systems and MEMS by : Vijay K. Varadan
Download or read book Smart Material Systems and MEMS written by Vijay K. Varadan and published by John Wiley & Sons. This book was released on 2006-11-02 with total page 418 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.
Book Synopsis Sensors, Circuits & Instrumentation Systems by : Olfa Kanoun
Download or read book Sensors, Circuits & Instrumentation Systems written by Olfa Kanoun and published by Walter de Gruyter GmbH & Co KG. This book was released on 2018-07-23 with total page 239 pages. Available in PDF, EPUB and Kindle. Book excerpt: Signal Processing is one of the large specializations in electrical engineering, mechanical engineering and computer sciences. It derives input from physics, mathematics and is an indispensable feature of all natural- and life sciences in research and in application. The snew series "Advanced Issues on Signals, Systems and Devices" presents original publications mainly from speakers on the International Conferences on Signal Systems and Devices but also from other international authors. The Conference is a forum for researchers and specialists in different fields covering all types of sensors and measurement systems as for example: Biomedical and Environmental Measurements & Instrumentation; Optical, Chemical and Biomedical Sensors; Mechanical and Thermal Sensors; Micro-Sensors and MEMS-Technology; Nano Sensors, Nano Systems and Nano Technology; Spectroscopy Methods; Signal Processing and Modelling; Multi Sensor Data Fusion; Data Acquisition & Distributed Measurements; Medical and Environmental Applications; Circuit Test, Device Characterization and Modelling; Custom and Semi-Custom Circuits; Analog Circuit Design; Low-Voltage, Low-Power VLSI Design; Hardware Implementation; Materials, Devices and Interconnects; Packaging and Reliability; Battery Monitoring: Impedance Spectroscopy for Measurement and Sensor Solutions; Energy Harvesting and Wireless power Transfer Systems; Wireless Sensor Networks in Industrial Plants This first volume of the new series mainly devotes to the most recent research and implementation of sensors-, circuit systems in signal processing, energy harvesting, nano- and molecular electronics.
Book Synopsis Major Applications of Carbon Nanotube Field-Effect Transistors (CNTFET) by : Raj, Balwinder
Download or read book Major Applications of Carbon Nanotube Field-Effect Transistors (CNTFET) written by Raj, Balwinder and published by IGI Global. This book was released on 2019-12-06 with total page 255 pages. Available in PDF, EPUB and Kindle. Book excerpt: With recent advancements in electronics, specifically nanoscale devices, new technologies are being implemented to improve the properties of automated systems. However, conventional materials are failing due to limited mobility, high leakage currents, and power dissipation. To mitigate these challenges, alternative resources are required to advance electronics further into the nanoscale domain. Carbon nanotube field-effect transistors are a potential solution yet lack the information and research to be properly utilized. Major Applications of Carbon Nanotube Field-Effect Transistors (CNTFET) is a collection of innovative research on the methods and applications of converting semiconductor devices from micron technology to nanotechnology. The book provides readers with an updated status on existing CNTs, CNTFETs, and their applications and examines practical applications to minimize short channel effects and power dissipation in nanoscale devices and circuits. While highlighting topics including interconnects, digital circuits, and single-wall CNTs, this book is ideally designed for electrical engineers, electronics engineers, students, researchers, academicians, industry professionals, and practitioners working in nanoscience, nanotechnology, applied physics, and electrical and electronics engineering.
Book Synopsis Comprehensive Semiconductor Science and Technology by :
Download or read book Comprehensive Semiconductor Science and Technology written by and published by Newnes. This book was released on 2011-01-28 with total page 3572 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductors are at the heart of modern living. Almost everything we do, be it work, travel, communication, or entertainment, all depend on some feature of semiconductor technology. Comprehensive Semiconductor Science and Technology, Six Volume Set captures the breadth of this important field, and presents it in a single source to the large audience who study, make, and exploit semiconductors. Previous attempts at this achievement have been abbreviated, and have omitted important topics. Written and Edited by a truly international team of experts, this work delivers an objective yet cohesive global review of the semiconductor world. The work is divided into three sections. The first section is concerned with the fundamental physics of semiconductors, showing how the electronic features and the lattice dynamics change drastically when systems vary from bulk to a low-dimensional structure and further to a nanometer size. Throughout this section there is an emphasis on the full understanding of the underlying physics. The second section deals largely with the transformation of the conceptual framework of solid state physics into devices and systems which require the growth of extremely high purity, nearly defect-free bulk and epitaxial materials. The last section is devoted to exploitation of the knowledge described in the previous sections to highlight the spectrum of devices we see all around us. Provides a comprehensive global picture of the semiconductor world Each of the work's three sections presents a complete description of one aspect of the whole Written and Edited by a truly international team of experts
Book Synopsis Force and Position Control of Mechatronic Systems by : Tong Heng Lee
Download or read book Force and Position Control of Mechatronic Systems written by Tong Heng Lee and published by Springer Nature. This book was released on 2020-12-11 with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt: Force and Position Control of Mechatronic Systems provides an overview of the general concepts and technologies in the area of force and position control. Novel ideas and innovations related to this area are presented and reported in detail, and examples of applications in medical technology are given. The book begins by introducing force sensing, and modelling of contacting objects. In then moves steadily through a variety of topics, including: • disturbance observer-based force estimation; • force-based supervisory control; • stabilization systems; • controller design; and • control of tube insertion procedures. This book will be of interest to researchers, engineers and students interested in force control, particularly those with a focus on medical applications of these ideas. Advances in Industrial Control reports and encourages the transfer of technology in control engineering. The rapid development of control technology has an impact on all areas of the control discipline. The series offers an opportunity for researchers to present an extended exposition of new work in all aspects of industrial control.
Book Synopsis Wearable Sensors and Systems 1 -and- Microfabricated and Nanofabricated Systems for MEMS/NEMS 14 by : A. Kholsa
Download or read book Wearable Sensors and Systems 1 -and- Microfabricated and Nanofabricated Systems for MEMS/NEMS 14 written by A. Kholsa and published by The Electrochemical Society. This book was released on 2018-09-21 with total page 109 pages. Available in PDF, EPUB and Kindle. Book excerpt:
