Rapid Isothermal Processing

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Rapid Thermal Processing

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Author : Richard B. Fair
Publisher : Academic Press
ISBN 13 : 0323139809
Total Pages : 441 pages
Book Rating : 4.3/5 (231 download)

Book Synopsis Rapid Thermal Processing by : Richard B. Fair

Download or read book Rapid Thermal Processing written by Richard B. Fair and published by Academic Press. This book was released on 2012-12-02 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

Rapid Thermal Processing of Semiconductors

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Author : Victor E. Borisenko
Publisher : Springer Science & Business Media
ISBN 13 : 1489918043
Total Pages : 374 pages
Book Rating : 4.4/5 (899 download)

Book Synopsis Rapid Thermal Processing of Semiconductors by : Victor E. Borisenko

Download or read book Rapid Thermal Processing of Semiconductors written by Victor E. Borisenko and published by Springer Science & Business Media. This book was released on 2013-11-22 with total page 374 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Advances in Rapid Thermal Processing

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Author : Fred Roozeboom
Publisher : The Electrochemical Society
ISBN 13 : 9781566772327
Total Pages : 470 pages
Book Rating : 4.7/5 (723 download)

Book Synopsis Advances in Rapid Thermal Processing by : Fred Roozeboom

Download or read book Advances in Rapid Thermal Processing written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 1999 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Rapid Thermal and Integrated Processing

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Author :
Publisher :
ISBN 13 :
Total Pages : 416 pages
Book Rating : 4.3/5 (91 download)

Book Synopsis Rapid Thermal and Integrated Processing by :

Download or read book Rapid Thermal and Integrated Processing written by and published by . This book was released on 1996 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Rapid Thermal and Integrated Processing V: Volume 429

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Author : J. C. Gelpey
Publisher :
ISBN 13 :
Total Pages : 416 pages
Book Rating : 4.:/5 (318 download)

Book Synopsis Rapid Thermal and Integrated Processing V: Volume 429 by : J. C. Gelpey

Download or read book Rapid Thermal and Integrated Processing V: Volume 429 written by J. C. Gelpey and published by . This book was released on 1996-10-14 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is the latest in a continuing series on rapid thermal processing and related topics. It embraces a diversity of research, development and manufacturing activities that require rapid thermal and integrated processing techniques which are recognized by their acronyms, such as rapid thermal annealing (RTA), rapid thermal processing (RTP), rapid thermal chemical vapor deposition (RTCVP), rapid thermal oxidation (RTO), and others. This fifth anniversary volume reports notable advances in the use of rapid thermal techniques in processing science and technology, and for process control in industrial fabrication facilities. It is organized around progress obtained through: evaluation methodology; equipment and process modelling; temperature control; defects and diffusion associated with annealing; metallizations such as silicidation; novel processing of sol-gel and magnetic films; dielectric growth and deposition; and silicon or silicon-germanium film deposition.

Handbook of Compound Semiconductors

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Author : Paul H. Holloway
Publisher : Cambridge University Press
ISBN 13 : 0080946143
Total Pages : 937 pages
Book Rating : 4.0/5 (89 download)

Book Synopsis Handbook of Compound Semiconductors by : Paul H. Holloway

Download or read book Handbook of Compound Semiconductors written by Paul H. Holloway and published by Cambridge University Press. This book was released on 2008-10-19 with total page 937 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book reviews the recent advances and current technologies used to produce microelectronic and optoelectronic devices from compound semiconductors. It provides a complete overview of the technologies necessary to grow bulk single-crystal substrates, grow hetero-or homoepitaxial films, and process advanced devices such as HBT's, QW diode lasers, etc.

Fundamentals of Semiconductor Processing Technology

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Author : Badih El-Kareh
Publisher : Springer Science & Business Media
ISBN 13 : 1461522099
Total Pages : 605 pages
Book Rating : 4.4/5 (615 download)

Book Synopsis Fundamentals of Semiconductor Processing Technology by : Badih El-Kareh

Download or read book Fundamentals of Semiconductor Processing Technology written by Badih El-Kareh and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 605 pages. Available in PDF, EPUB and Kindle. Book excerpt: The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal can, however, only be achieved by a concerted effort between scientists, engineers, technicians, and operators in research, development, and manufac turing. It is therefore important that experts in specific disciplines, such as device and circuit design, understand the principle, capabil ities, and limitations of tools and processing technologies. It is also important that those working on specific unit processes, such as lithography or hot processes, be familiar with other unit processes used to manufacture the product. Several excellent books have been published on the subject of process technologies. These texts, however, cover subjects in too much detail, or do not cover topics important to modem tech nologies. This book is written with the need for a "bridge" between different disciplines in mind. It is intended to present to engineers and scientists those parts of modem processing technologies that are of greatest importance to the design and manufacture of semi conductor circuits. The material is presented with sufficient detail to understand and analyze interactions between processing and other semiconductor disciplines, such as design of devices and cir cuits, their electrical parameters, reliability, and yield.

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

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Author : Vikram J. Kapoor
Publisher :
ISBN 13 :
Total Pages : 570 pages
Book Rating : 4.0/5 ( download)

Book Synopsis Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films by : Vikram J. Kapoor

Download or read book Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films written by Vikram J. Kapoor and published by . This book was released on 1987 with total page 570 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Advanced Processing of Semiconductor Devices II

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Author : Harold G. Craighead
Publisher :
ISBN 13 :
Total Pages : 180 pages
Book Rating : 4.3/5 (91 download)

Book Synopsis Advanced Processing of Semiconductor Devices II by : Harold G. Craighead

Download or read book Advanced Processing of Semiconductor Devices II written by Harold G. Craighead and published by . This book was released on 1988 with total page 180 pages. Available in PDF, EPUB and Kindle. Book excerpt: "One of the reviewed proceedings resulting from 1988 Symposium on Advances in Semiconductors and Superconductors Physics and Device Applications"--Preface.

Photovoltaics for the 21st Century

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Author : Electrochemical Society. Energy Technology Division
Publisher : The Electrochemical Society
ISBN 13 : 9781566772334
Total Pages : 318 pages
Book Rating : 4.7/5 (723 download)

Book Synopsis Photovoltaics for the 21st Century by : Electrochemical Society. Energy Technology Division

Download or read book Photovoltaics for the 21st Century written by Electrochemical Society. Energy Technology Division and published by The Electrochemical Society. This book was released on 1999 with total page 318 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Practical Handbook of Photovoltaics

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Author : Augustin McEvoy
Publisher : Academic Press
ISBN 13 : 0123859344
Total Pages : 1269 pages
Book Rating : 4.1/5 (238 download)

Book Synopsis Practical Handbook of Photovoltaics by : Augustin McEvoy

Download or read book Practical Handbook of Photovoltaics written by Augustin McEvoy and published by Academic Press. This book was released on 2012 with total page 1269 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook opens with an overview of solar radiation and how its energy can be tapped using photovoltaic cells. Other chapters cover the technology, manufacture and application of PV cells in real situations. The book ends by exploring the economic and business aspects of PV systems.

Energy Research Abstracts

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Author :
Publisher :
ISBN 13 :
Total Pages : 1684 pages
Book Rating : 4.U/5 (183 download)

Book Synopsis Energy Research Abstracts by :

Download or read book Energy Research Abstracts written by and published by . This book was released on 1988 with total page 1684 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Chemical Vapor Deposition

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Author : Electrochemical Society. High Temperature Materials Division
Publisher : The Electrochemical Society
ISBN 13 : 9781566771788
Total Pages : 1686 pages
Book Rating : 4.7/5 (717 download)

Book Synopsis Chemical Vapor Deposition by : Electrochemical Society. High Temperature Materials Division

Download or read book Chemical Vapor Deposition written by Electrochemical Society. High Temperature Materials Division and published by The Electrochemical Society. This book was released on 1997 with total page 1686 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Proceedings of the Thirteenth International Conference on Chemical Vapor Deposition

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Author : Theodore M. Besmann
Publisher : The Electrochemical Society
ISBN 13 : 9781566771559
Total Pages : 922 pages
Book Rating : 4.7/5 (715 download)

Book Synopsis Proceedings of the Thirteenth International Conference on Chemical Vapor Deposition by : Theodore M. Besmann

Download or read book Proceedings of the Thirteenth International Conference on Chemical Vapor Deposition written by Theodore M. Besmann and published by The Electrochemical Society. This book was released on 1996 with total page 922 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Practical Handbook of Photovoltaics

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Author : T. Markvart
Publisher : Elsevier
ISBN 13 : 9781856173902
Total Pages : 1014 pages
Book Rating : 4.1/5 (739 download)

Book Synopsis Practical Handbook of Photovoltaics by : T. Markvart

Download or read book Practical Handbook of Photovoltaics written by T. Markvart and published by Elsevier. This book was released on 2003-10-30 with total page 1014 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook opens with an overview of solar radiation and how its energy can be tapped using photovoltaic cells. Other chapters cover the technology, manufacture and application of PV cells in real situations. The book ends by exploring the economic and business aspects of photovoltaics.

Scientific and Technical Aerospace Reports

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Author :
Publisher :
ISBN 13 :
Total Pages : 308 pages
Book Rating : 4.:/5 (3 download)

Book Synopsis Scientific and Technical Aerospace Reports by :

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1991 with total page 308 pages. Available in PDF, EPUB and Kindle. Book excerpt:

ULSI Science and Technology/1987

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Author : S. Broydo
Publisher :
ISBN 13 :
Total Pages : 874 pages
Book Rating : 4.E/5 ( download)

Book Synopsis ULSI Science and Technology/1987 by : S. Broydo

Download or read book ULSI Science and Technology/1987 written by S. Broydo and published by . This book was released on 1987 with total page 874 pages. Available in PDF, EPUB and Kindle. Book excerpt: